JPH03101515U - - Google Patents
Info
- Publication number
- JPH03101515U JPH03101515U JP933090U JP933090U JPH03101515U JP H03101515 U JPH03101515 U JP H03101515U JP 933090 U JP933090 U JP 933090U JP 933090 U JP933090 U JP 933090U JP H03101515 U JPH03101515 U JP H03101515U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- suction pipe
- pumping
- air vent
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Description
図面は本考案の実施例を示す図である。
１……エツチング処理槽、２……第１の薬液容
器、３……第２の薬液容器、４……汲み上げ用ポ
ンプ、５，６……吸い上げ管、７……吸み上げ管
路、８，９……開閉弁、１０，１１……センサー
、１２……薬液供給管路、１３……フイルター、
１４……空気抜き管路、１５……空気抜弁、１６
……制御回路。
The drawings are diagrams showing embodiments of the present invention. DESCRIPTION OF SYMBOLS 1... Etching treatment tank, 2... First chemical liquid container, 3... Second chemical liquid container, 4... Pump for pumping, 5, 6... Suction pipe, 7... Suction pipe line, 8 , 9... Opening/closing valve, 10, 11... Sensor, 12... Chemical solution supply pipe, 13... Filter,
14... Air vent pipe, 15... Air vent valve, 16
...control circuit.
Claims (1)
げ管を各々に挿入して、この両薬液容器における
吸い上げ管を、汲み上げ用ポンプへの吸い込み管
路に各々開閉弁を介して接続し、且つ、前記各吸
い上げ管には、当該吸い上げ管内の薬液の流れを
検出するためのセンサーを各々設ける一方、前記
汲み上げ用ポンプにおける吐出側から処理槽への
薬液供給管中にフイルターを設けて、このフイル
ターに空気抜弁を備えた空気抜き管路を接続し、
更に、前記両二つの薬液容器のうち第１の薬液容
器における吸い上げ管に対するセンサーが薬液の
流れがなくなつたことを検出すると、当該第１の
薬液容器における吸い上げ管に対する開閉弁を閉
じて、第２の薬液容器における吸い上げ管に対す
る開閉弁を開くと共に、前記空気抜弁を適宜時間
の間だけ開くようにした制御回路を設けたことを
特徴とする半導体における処理薬液の汲み上げ装
置。 A transparent suction tube is inserted into each of at least two chemical liquid containers, and the suction tubes in both chemical liquid containers are connected to a suction pipe to a pump for pumping through respective on-off valves, and Each suction pipe is provided with a sensor for detecting the flow of the chemical liquid in the suction pipe, and a filter is provided in the chemical liquid supply pipe from the discharge side of the pump for pumping to the processing tank, and an air vent valve is installed in this filter. Connect the air vent line with
Furthermore, when the sensor for the suction pipe in the first of the two chemical liquid containers detects that the flow of the chemical liquid has stopped, the on-off valve for the suction pipe in the first chemical liquid container is closed, and the 1. A device for pumping up a processing chemical solution for semiconductors, characterized in that a control circuit is provided for opening an on-off valve for the suction pipe in the chemical solution container of item 2, and for opening the air vent valve only for an appropriate period of time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP933090U JPH083003Y2 (en) | 1990-01-31 | 1990-01-31 | Pumping equipment for processing chemicals in semiconductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP933090U JPH083003Y2 (en) | 1990-01-31 | 1990-01-31 | Pumping equipment for processing chemicals in semiconductors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03101515U true JPH03101515U (en) | 1991-10-23 |
| JPH083003Y2 JPH083003Y2 (en) | 1996-01-29 |
Family
ID=31512937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP933090U Expired - Fee Related JPH083003Y2 (en) | 1990-01-31 | 1990-01-31 | Pumping equipment for processing chemicals in semiconductors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083003Y2 (en) |
-
1990
- 1990-01-31 JP JP933090U patent/JPH083003Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH083003Y2 (en) | 1996-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |