JPH03103249U - - Google Patents
Info
- Publication number
- JPH03103249U JPH03103249U JP1037190U JP1037190U JPH03103249U JP H03103249 U JPH03103249 U JP H03103249U JP 1037190 U JP1037190 U JP 1037190U JP 1037190 U JP1037190 U JP 1037190U JP H03103249 U JPH03103249 U JP H03103249U
- Authority
- JP
- Japan
- Prior art keywords
- bonding surface
- sputtering
- periphery
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案のバツキングプレートの一例の
概略図、図中１……バツキングプレート、２……
ボンデイング面、３……周囲部分、４……ターゲ
ツトをそれぞれ示す。
Figure 1 is a schematic diagram of an example of the bucking plate of the present invention, in which 1... the bucking plate, 2...
Bonding surface, 3... Surrounding portion, 4... Target are shown, respectively.
Claims (1)
面の周囲より薄くしたことを特徴とするスパツタ
リング用バツキングプレート。 A backing plate for sputtering, characterized in that a target bonding surface is made thinner than the periphery of the bonding surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1037190U JPH03103249U (en) | 1990-02-05 | 1990-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1037190U JPH03103249U (en) | 1990-02-05 | 1990-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03103249U true JPH03103249U (en) | 1991-10-28 |
Family
ID=31513943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1037190U Pending JPH03103249U (en) | 1990-02-05 | 1990-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03103249U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623387U (en) * | 1985-06-24 | 1987-01-10 | ||
| JPS6277461A (en) * | 1985-09-30 | 1987-04-09 | Shinku Kikai Kogyo Kk | Backing plate for high frequency sputtering electrode |
-
1990
- 1990-02-05 JP JP1037190U patent/JPH03103249U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623387U (en) * | 1985-06-24 | 1987-01-10 | ||
| JPS6277461A (en) * | 1985-09-30 | 1987-04-09 | Shinku Kikai Kogyo Kk | Backing plate for high frequency sputtering electrode |