JPH0310460U - - Google Patents

Info

Publication number
JPH0310460U
JPH0310460U JP7061689U JP7061689U JPH0310460U JP H0310460 U JPH0310460 U JP H0310460U JP 7061689 U JP7061689 U JP 7061689U JP 7061689 U JP7061689 U JP 7061689U JP H0310460 U JPH0310460 U JP H0310460U
Authority
JP
Japan
Prior art keywords
electrodes
electrode structure
charged particle
particle beam
beam device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7061689U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7061689U priority Critical patent/JPH0310460U/ja
Publication of JPH0310460U publication Critical patent/JPH0310460U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図と第２図は本考案を実施した静電レンズ
の電極構造体の要部を示す斜視図、第３図は従来
例の電極構造体の要部を示す斜視図である。 １……接地電位の電極、２……中間電極、３…
…絶縁碍子、４……電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 複数のリング状電極が筒状絶縁碍子を間に挟ん
    で積層され、電極間に高電圧を印加する荷電粒子
    線装置における電極構造体において、電極間に挟
    まれる筒状絶縁碍子の両端部から交互に切り欠き
    を設けるように構成したことを特徴とする荷電粒
    子線装置における電極構造体。
JP7061689U 1989-06-16 1989-06-16 Pending JPH0310460U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7061689U JPH0310460U (ja) 1989-06-16 1989-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7061689U JPH0310460U (ja) 1989-06-16 1989-06-16

Publications (1)

Publication Number Publication Date
JPH0310460U true JPH0310460U (ja) 1991-01-31

Family

ID=31606919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7061689U Pending JPH0310460U (ja) 1989-06-16 1989-06-16

Country Status (1)

Country Link
JP (1) JPH0310460U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223054A (ja) * 1999-02-02 2000-08-11 Advantest Corp 電子ビーム照射装置の静電偏向器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223054A (ja) * 1999-02-02 2000-08-11 Advantest Corp 電子ビーム照射装置の静電偏向器

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