JPH0310573U - - Google Patents
Info
- Publication number
- JPH0310573U JPH0310573U JP7110389U JP7110389U JPH0310573U JP H0310573 U JPH0310573 U JP H0310573U JP 7110389 U JP7110389 U JP 7110389U JP 7110389 U JP7110389 U JP 7110389U JP H0310573 U JPH0310573 U JP H0310573U
- Authority
- JP
- Japan
- Prior art keywords
- hybrid
- tray
- conveyor
- mesh belt
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 238000010304 firing Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Specific Conveyance Elements (AREA)
- Tunnel Furnaces (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
図面はこの考案のＩＣ基板乾燥焼成装置の一実
施例を示したもので、第１図は装置全体の略示平
面図、第２図はトレイと基板の斜視図、第３図は
移送用コンベヤおよびアンローダの斜視図、第４
図はその平面図、第５図は移送用コンベヤ部の縦
断面図、第６図はアンローダの部分拡大斜視図、
第７図は第６図の平面図、第８図は第７図のＡ−
Ａ線断面図、第９図は第７図の側面図、第１０図
は第９図の作動状態図、第１１図はトレイハンド
ラの縦断面図である。
１……メツシユベルトコンベヤ、２……乾燥炉
、３……メツシユベルトコンベヤ、４……焼成炉
、５……間隙部、６……移送用コンベヤ、７……
アンローダ、２８……リフタ、３０……トレイ、
４０……ＩＣ基板、５０……移載装置、６０……
ベルトコンベヤ、６１……搬送ベルト、７０……
受台、８０ａ〜８０ｇ……基板マガジン、８４…
…基板プツシヤ、９０ａ，９０ｂ……トレイマガ
ジン、１００……トレイハンドラ。
The drawings show an embodiment of the IC substrate drying and baking apparatus of this invention. Fig. 1 is a schematic plan view of the entire apparatus, Fig. 2 is a perspective view of the tray and substrate, and Fig. 3 is a conveyor for transfer. and a perspective view of the unloader, 4th
The figure is a plan view, FIG. 5 is a vertical sectional view of the transfer conveyor section, and FIG. 6 is a partially enlarged perspective view of the unloader.
Figure 7 is a plan view of Figure 6, and Figure 8 is A- of Figure 7.
9 is a side view of FIG. 7, FIG. 10 is an operating state diagram of FIG. 9, and FIG. 11 is a longitudinal sectional view of the tray handler. 1... Mesh belt conveyor, 2... Drying oven, 3... Mesh belt conveyor, 4... Baking furnace, 5... Gap section, 6... Transfer conveyor, 7...
Unloader, 28...lifter, 30...tray,
40...IC board, 50...transfer device, 60...
Belt conveyor, 61... Conveyor belt, 70...
cradle, 80a-80g... board magazine, 84...
...Substrate pusher, 90a, 90b...Tray magazine, 100...Tray handler.
Claims (1)
で炉内搬送するメツシユベルトコンベヤをそれぞ
れそなえた乾燥炉と焼成炉とを、直列にかつ両メ
ツシユベルトコンベヤの端部間に間隙をあけて配
置し、前記間隙部に、ハイブリツドＩＣ用基板を
載せたトレイを前記乾燥炉のメツシユベルトコン
ベヤ上から前記焼成炉のメツシユベルトコンベヤ
上に移送する移送用コンベヤを設けるとともに、
この移送用コンベヤ上のハイブリツドＩＣ用基板
を載せたトレイを上昇させるリフタと、このリフ
タ上に支承されたトレイとハイブリツドＩＣ用基
板をコンベヤラインの側方へ取出すアンローダを
設けたことを特徴とするハイブリツドＩＣ用基板
乾燥焼成装置。 A drying furnace and a firing furnace, each equipped with a mesh belt conveyor for conveying hybrid IC substrates on a tray inside the furnace, are arranged in series with a gap between the ends of both mesh belt conveyors. , a transfer conveyor is provided in the gap to transfer the tray carrying the hybrid IC substrate from the mesh belt conveyor of the drying furnace to the mesh belt conveyor of the firing furnace;
The present invention is characterized in that it is provided with a lifter that raises the tray on which the hybrid IC board is placed on the transfer conveyor, and an unloader that takes out the tray and the hybrid IC board supported on the lifter to the side of the conveyor line. Hybrid IC substrate drying and baking equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7110389U JPH0310573U (en) | 1989-06-18 | 1989-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7110389U JPH0310573U (en) | 1989-06-18 | 1989-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310573U true JPH0310573U (en) | 1991-01-31 |
Family
ID=31607836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7110389U Pending JPH0310573U (en) | 1989-06-18 | 1989-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310573U (en) |
-
1989
- 1989-06-18 JP JP7110389U patent/JPH0310573U/ja active Pending
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