JPH03106185U - - Google Patents
Info
- Publication number
- JPH03106185U JPH03106185U JP1431490U JP1431490U JPH03106185U JP H03106185 U JPH03106185 U JP H03106185U JP 1431490 U JP1431490 U JP 1431490U JP 1431490 U JP1431490 U JP 1431490U JP H03106185 U JPH03106185 U JP H03106185U
- Authority
- JP
- Japan
- Prior art keywords
- stage cryopanel
- fins
- refrigerator
- compressor
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000003463 adsorbent Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案のクライオポンプの構造説明図
、第２図は第二段クライオパネルの部分斜視図、
第３図イはハニカム構造の活性炭を接着した状態
の第二段クライオパネルの部分斜視図、ロはイ図
のＡ−Ａ断面図、第４図は従来の第二段クライオ
パネルの部分構成図で、イは吸着材接着面の部分
斜視図、ロはイのＢ−Ｂ断面図、第５図は従来の
改良された第二段クライオパネルの一例の斜視図
で、イは円筒形のもの、ロは円錐台形のもの、第
６図は他の例で、イは全体の部分断面図、ロは第
二段クライオパネルの部分断面図、第７図は更に
他の例で、イは第二段クライオパネルの部分斜視
図、ロはイのＣ−Ｃ断面図である。
４２……第二段クライオパネル、４２ａ……吸
着材接着面、４３……フイン、４４……ハニカム
状活性炭、４７……冷凍機、４８……接着剤。
Figure 1 is a structural explanatory diagram of the cryopump of the present invention, Figure 2 is a partial perspective view of the second stage cryopanel,
Figure 3A is a partial perspective view of the second stage cryopanel with honeycomb-structured activated carbon bonded to it; A is a partial perspective view of the adhesive surface of the adsorbent, B is a sectional view taken along B-B of A, and Figure 5 is a perspective view of an example of a conventional improved second-stage cryopanel, and A is a cylindrical one. , B is a truncated cone-shaped one, FIG. 6 is another example, A is a partial sectional view of the whole, B is a partial sectional view of the second stage cryopanel, FIG. 7 is still another example, and A is a partial sectional view of the second stage cryopanel. FIG. 2 is a partial perspective view of a two-stage cryopanel, and FIG. 42... Second stage cryopanel, 42a... Adsorbent adhesion surface, 43... Fin, 44... Honeycomb-shaped activated carbon, 47... Freezer, 48... Adhesive.
Claims (1)
吐出された常温高圧の作動ガスの断熱膨張により
低温を発生させる冷凍機と、この冷凍機により冷
却される２段のクライオパネルを設けたクライオ
ポンプにおいて、第二段クライオパネルの吸着材
接着面に一定間隔で設けられたフインと、このフ
インの側面及び第二段クライオパネルの吸着材接
着面の２面で接着されるハニカム状に成形された
活性炭とを設けたことを特徴とするクライオポン
プ。 A cryopump is equipped with a compressor that compresses working gas, a refrigerator that generates a low temperature by adiabatic expansion of the working gas at room temperature and high pressure discharged from the compressor, and a two-stage cryopanel that is cooled by this refrigerator. In this method, fins are provided at regular intervals on the adsorbent adhesion surface of the second stage cryopanel, and a honeycomb-like structure is formed which is adhered to two sides: the side surface of the fins and the adsorbent adhesion surface of the second stage cryopanel. A cryopump characterized by being equipped with activated carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431490U JPH03106185U (en) | 1990-02-16 | 1990-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431490U JPH03106185U (en) | 1990-02-16 | 1990-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106185U true JPH03106185U (en) | 1991-11-01 |
Family
ID=31517683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1431490U Pending JPH03106185U (en) | 1990-02-16 | 1990-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106185U (en) |
-
1990
- 1990-02-16 JP JP1431490U patent/JPH03106185U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03106185U (en) | ||
| JPS6225768U (en) | ||
| JPH03106186U (en) | ||
| JPH03104189U (en) | ||
| JPH0158046U (en) | ||
| JPS63125759U (en) | ||
| JPS6425689U (en) | ||
| JPH0178270U (en) | ||
| JPH0243475U (en) | ||
| JPS63155975U (en) | ||
| JPH0464061U (en) | ||
| JPS6314878U (en) | ||
| JPH0383775U (en) | ||
| JPS6059876U (en) | Four-way valve for refrigeration cycle | |
| JPH0478482U (en) | ||
| JPS6375758U (en) | ||
| JPH0367864U (en) | ||
| JPS6186660U (en) | ||
| JPH0178271U (en) | ||
| JPS63155957U (en) | ||
| JPS63139454U (en) | ||
| JPS58191392U (en) | Compressors for refrigeration cycles, etc. | |
| JPS6254285U (en) | ||
| JPH02128066U (en) | ||
| JPS6247783U (en) |