JPH03106357U - - Google Patents
Info
- Publication number
- JPH03106357U JPH03106357U JP1581690U JP1581690U JPH03106357U JP H03106357 U JPH03106357 U JP H03106357U JP 1581690 U JP1581690 U JP 1581690U JP 1581690 U JP1581690 U JP 1581690U JP H03106357 U JPH03106357 U JP H03106357U
- Authority
- JP
- Japan
- Prior art keywords
- base
- substrate
- holder
- sputtering
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
第１図は本考案に係るスパツタリング用基板の
保持具の正面図、第２図はその側断面図、第３図
はスパツタリング装置の模式図、第４図は本考案
に係る保持具を用いた場合の基板の温度変化を示
すグラフ、第５図は従来の保持具の正面図、第６
図はその側断面図、第７図は従来の保持具を用い
た場合の基板の温度変化を示すグラフである。
１……保持具、３……基板、４……スパツタ室
、５……加熱室、１０……基部、１１……保持体
、１２……支持枠、１３……支持杆、１４……保
持環。
Fig. 1 is a front view of a sputtering substrate holder according to the present invention, Fig. 2 is a side sectional view thereof, Fig. 3 is a schematic diagram of a sputtering device, and Fig. 4 is a sputtering substrate holder according to the present invention. Figure 5 is a front view of the conventional holder, Figure 6 is a graph showing the temperature change of the substrate when
The figure is a side sectional view thereof, and FIG. 7 is a graph showing the temperature change of the substrate when a conventional holder is used. DESCRIPTION OF SYMBOLS 1... Holder, 3... Substrate, 4... Sputtering chamber, 5... Heating chamber, 10... Base, 11... Holder, 12... Support frame, 13... Support rod, 14... Holding ring.
Claims (1)
基部と、該基部に立設された保持体とを備え、該
保持体に保持されたスパツタリング用の基板を、
搬送系の動作に伴う前記基部の移動により搬送す
る保持具において、 前記基部の一部又は全部が断熱材製であること
を特徴とするスパツタリン用基板の保持具。 ２ 前記保持体が、 前記基部上に立設された支持枠と、 該支持枠の内側に突設された支持杆と、 該支持杆の先端に固設され、前記基板をその内
側に保持する保持環と を具備する請求項１記載のスパツタリング用基板
の保持具。[Claims for Utility Model Registration] 1. A system comprising a base mounted on a conveyance system in a sputtering device, a holder erected on the base, and a substrate for sputtering held by the holder,
A holder for a sputtering substrate that is conveyed by movement of the base in accordance with the operation of a conveyance system, wherein a part or all of the base is made of a heat insulating material. 2. The holding body includes: a support frame erected on the base; a support rod protruding inside the support frame; and fixed to the tip of the support rod, and holds the substrate inside the support rod. The sputtering substrate holder according to claim 1, further comprising a holding ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581690U JPH03106357U (en) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581690U JPH03106357U (en) | 1990-02-19 | 1990-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106357U true JPH03106357U (en) | 1991-11-01 |
Family
ID=31519106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1581690U Pending JPH03106357U (en) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106357U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007140809A (en) * | 2005-11-17 | 2007-06-07 | Matsushita Electric Ind Co Ltd | Portable security buzzer |
| JP2016541117A (en) * | 2013-11-25 | 2016-12-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Substrate carrier for thermal energy transfer reduction |
-
1990
- 1990-02-19 JP JP1581690U patent/JPH03106357U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007140809A (en) * | 2005-11-17 | 2007-06-07 | Matsushita Electric Ind Co Ltd | Portable security buzzer |
| JP2016541117A (en) * | 2013-11-25 | 2016-12-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Substrate carrier for thermal energy transfer reduction |
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