JPH03106419A - Treatment process for gas containing fluorocarbon and catalyst for decomposing fluorocarbon - Google Patents
Treatment process for gas containing fluorocarbon and catalyst for decomposing fluorocarbonInfo
- Publication number
- JPH03106419A JPH03106419A JP1242078A JP24207889A JPH03106419A JP H03106419 A JPH03106419 A JP H03106419A JP 1242078 A JP1242078 A JP 1242078A JP 24207889 A JP24207889 A JP 24207889A JP H03106419 A JPH03106419 A JP H03106419A
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- Prior art keywords
- fluorocarbon
- fluorocarbons
- gas
- catalyst
- decomposing
- Prior art date
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Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はフロンを含有するガスを処理し無害化処理する
方法に関する.
〔従来の技術〕
近年,大気のオゾン層のフロンによる破壊が地球環境の
保護の観点から重大な問題となっており,フロンを排出
する場合には、そのままで排出せずに何らかの無害化処
理が必要とされている.従来はフロンを含むガスを活性
炭等で吸着し回収する方法が知られており、最近では高
圧下でフロンを燃焼する方法,高周波プラズマで分解す
る方法、触媒の存在下で分解,燃焼を行う方法なども発
表されている.
〔発明が解決しようとする課題〕
上記従来技術では,吸着剤を利用したフロンの回収方法
に関しては,回収したフロンの無害化処理方法について
は考慮がなされておらず,一方、高圧下で燃焼する方法
、高周波プラズマで分解する方法などは,装置が大がか
りであったり、処理コストが高いなどの問題があった.
これに対し触媒による分解法は,これらの方法に比べて
簡便な方法であるが、フロン濃度が低いガス処理では,
ガス全体を一定温度以七に昇温する必要があり,多量の
熱エネルギがむだになる恐れがあった.また,この触媒
分解法では、ゼオライトやアルミナの例が報告されてい
るが、これらは触媒の性能として必ずしも充分とは云え
なかった.
本発明の目的は、簡便で効率の良いフロン含有ガスの処
理方法,及び,フロン分解用触媒を提供することにある
.
〔課題を解決するための手段〕
上記目的を達成するために、本発明では吸着によりフロ
ンを濃縮する工程,濃縮されたフロンを吸着剤から脱離
する工程,脱離ガスを酸素,オゾン,水蒸気の中の少な
くとも一種類以上を含むガスの存在下で触媒と接触させ
、フロンを分解,燃焼する工程,フロンの分解,燃焼生
成物を還元剤を含有する液、および/またはアルカリを
含有する液で処理する工程を備えたことを特徴としてい
る.本発明の方法では,まず,ガス中のフロンを吸着剤
に吸着させ、その後、吸着剤を加熱、あるいは、加熱さ
れたガスを吸着剤に通すことにより濃縮されたフロンガ
スを脱離させ、この脱離ガスに酸素,オゾン,水蒸気の
中の少なくとも一種類以上のガスを加える。ただし,脱
離ガス中に、予め、酸素,オゾン,水蒸気が含まれてい
る場合には、必ずしも添加する必要はない。次に,濃縮
されたフロンを触媒と接触させ,酸素,オゾン,水蒸気
の中の少なくとも一種類以上とフロンを反応させる.こ
の時,フロンは接触分解,水蒸気リフオーミング,触媒
燃焼,オゾン酸化などの反応が単独、あるいは併発して
進行することにより、一酸化炭素,二酸化炭素,塩素,
塩化水素,フツ化水素などに変換される.この生成物は
還元剤を含有する液、および/または、アルカリを含有
する液で処理する.たとえば、塩素については、還元剤
の一例として亜硫酸ソーダ,チオ硫酸ソーダ,第一鉄塩
などの溶液中で処理し、その後,リーダ灰,または、希
塩酸を加えて中和して無害化する.一方,フッ化水素に
ついてはソーダ灰や消石灰の溶液で吸収し,中和して!
#.害化する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for treating and rendering harmless gas containing fluorocarbons. [Prior art] In recent years, the destruction of the atmospheric ozone layer by fluorocarbons has become a serious problem from the perspective of protecting the global environment.When discharging fluorocarbons, it is necessary to carry out some kind of detoxification treatment instead of emitting them as is. is necessary. Conventionally, methods have been known to adsorb and recover gases containing fluorocarbons using activated carbon, etc., but recently methods have been developed to combust fluorocarbons under high pressure, decompose them using high-frequency plasma, and decompose and burn them in the presence of a catalyst. etc. have also been announced. [Problem to be solved by the invention] In the above-mentioned conventional technology, regarding the recovery method of fluorocarbons using an adsorbent, no consideration has been given to the method of detoxifying the recovered fluorocarbons. Methods such as decomposition using high-frequency plasma have problems such as large-scale equipment and high processing costs.
On the other hand, catalytic decomposition methods are simpler than these methods, but in gas treatment with low CFC concentrations,
It was necessary to raise the temperature of the entire gas above a certain temperature, and there was a risk that a large amount of thermal energy would be wasted. In addition, examples of using zeolite and alumina have been reported in this catalytic decomposition method, but these cannot necessarily be said to have sufficient catalyst performance. An object of the present invention is to provide a simple and efficient method for treating fluorocarbon-containing gas and a catalyst for decomposing fluorocarbons. [Means for Solving the Problems] In order to achieve the above object, the present invention includes a step of concentrating fluorocarbons by adsorption, a step of desorbing the concentrated fluorocarbons from an adsorbent, and a step of desorbing the desorbed gas by oxygen, ozone, or water vapor. A process of decomposing and burning fluorocarbons by bringing them into contact with a catalyst in the presence of a gas containing at least one of the following. It is characterized by having a processing process. In the method of the present invention, first, the fluorocarbons in the gas are adsorbed onto an adsorbent, and then the concentrated fluorocarbon gas is desorbed by heating the adsorbent or passing the heated gas through the adsorbent. At least one type of gas among oxygen, ozone, and water vapor is added to the released gas. However, if the desorption gas already contains oxygen, ozone, and water vapor, it is not necessary to add them. Next, the concentrated fluorocarbons are brought into contact with a catalyst, causing the fluorocarbons to react with at least one of oxygen, ozone, and water vapor. At this time, fluorocarbons are converted into carbon monoxide, carbon dioxide, chlorine,
It is converted to hydrogen chloride, hydrogen fluoride, etc. This product is treated with a solution containing a reducing agent and/or a solution containing an alkali. For example, chlorine is treated in a solution of sodium sulfite, sodium thiosulfate, ferrous salt, etc. as reducing agents, and then leader ash or dilute hydrochloric acid is added to neutralize it and render it harmless. On the other hand, hydrogen fluoride can be absorbed and neutralized with a solution of soda ash or slaked lime!
#. become harmful.
本発明の方法のもう一つの特徴は、フロンを分解する触
媒として、ゼオライト,アルミナ,シリカ,チタニア,
ジルコニアの中の少なくとも一種以上を含有し、かつ,
第二或分としてCu,Ag,V,Cr.Mop W,M
n.Fe,Co,Ni,Pt,Pd,Rh,La,Ce
,Nbの中から選ばれた少なくとも一種以上を含有する
触媒を用いるところにある。ゼオライトや′アルミナの
みでもフロンの分解活性は示すが、本発明では,これら
の酸化物に,更に、上記の第二成分の酸化物、あるいは
、金属を担持することにより,大巾に性能が向上するこ
とを見出した。これら第二成分の担持量は、Pt,Pd
,Rhでは0.1〜5重量%、それ以外の成分では0.
5〜50重量%が好ましい.
さらに、本発明の方法におけるフロンの好ましい吸着剤
は活性炭であるが、本発明は必ずしもこれに限定されな
い。Another feature of the method of the present invention is that zeolite, alumina, silica, titania,
Contains at least one kind of zirconia, and
The second part is Cu, Ag, V, Cr. Mop W,M
n. Fe, Co, Ni, Pt, Pd, Rh, La, Ce
, Nb. Although zeolite and alumina alone exhibit CFC decomposition activity, in the present invention, by supporting these oxides with the above-mentioned second component oxide or metal, performance is greatly improved. I found out what to do. The supported amounts of these second components are Pt, Pd
, 0.1 to 5% by weight for Rh, and 0.1 to 5% by weight for other components.
5 to 50% by weight is preferred. Furthermore, although the preferred adsorbent for fluorocarbons in the method of the present invention is activated carbon, the present invention is not necessarily limited thereto.
また,触媒上でフロンを分解する温度は200〜1,2
00℃が好ましい。プロセス的には低温で分解できる方
がより好ましく、本発明における触媒ももちろん低温活
性をもつが,高濃度のフロンを触媒燃焼する場合には、
反応熱により温度が1,200℃付近まで上昇すること
もある.このような場合には触媒には耐熱性も必要であ
り、たとえば、本発明者らによる、ランタン・ベータ・
アルミナ(特開昭61− 35851号公報)を用いる
と好結果が得られることも見出した。In addition, the temperature at which CFCs are decomposed on the catalyst is 200 to 1,2
00°C is preferred. From a process standpoint, it is more preferable to decompose at a low temperature, and the catalyst of the present invention also has low-temperature activity, but when catalytically burning a high concentration of CFCs,
The temperature may rise to around 1,200℃ due to the heat of reaction. In such cases, the catalyst must also have heat resistance; for example, the lanthanum beta catalyst developed by the present inventors
It has also been found that good results can be obtained by using alumina (Japanese Unexamined Patent Publication No. 61-35851).
また、本発明の方法ではフロン含有ガスがかなりの高濃
度である場合や、洗浄用などに使われるフロンそのもの
を処理する場合には、吸着工程は必ずしも必要なく、本
発明の触媒によるそのまま処理することももちろん可能
である.
〔作用〕
本発明の方法では,まず,吸着工程によりフロンが濃縮
され、次いで脱離された濃縮ガスを触媒上で分解,燃焼
するため、ガスの加熱が容易で,必要な熱エネルギも少
なくて済む.本発明の方法では酸素,オゾン,水蒸気の
中の少なくとも一種とフロンを反応させるが、これらの
ガスが共存していると反応効率が増したり、触媒上への
炭素の析出を抑制したりできるという長所もある.また
、本発明の触媒は、上記の反応を進める上で非常に有効
なものである.従って,高濃度のフロンを含有するガス
を処理する場合には,フロンの吸着による濃縮工程を経
ないでそのまま触媒上で分解.燃焼することも可能であ
る.
〔実施例〕
〈実施例1〉
以下、本発明の一実施例を第1図により説明する。フロ
ン含有ガス1は吸着塔3に導入され,フロンを除去した
後のフロン除去ガス4はそのままパージされる.一方,
もう一つの吸着塔3には再生用ガス2を流し、フロン濃
縮ガス5を得,これに分解用ガス6を加えた後、触媒反
応器7に流通させる。フロン分解ガス8は吸収塔9を通
し、塩素ガスやフツ化水素ガスを吸収し、脱フロンガス
10を得る.本実施例では吸着塔を二台設け、片方で希
薄なフロン含有ガスを処理し,フロンを吸着除去すると
共に、他方では吸着剤に再生用ガスを流し、高濃度のフ
ロン含有ガスを得ると共に,吸着剤の再生を行う。この
切り換えを行うことにより連続的にフロン含有ガスの処
理が可能となる.〈実施例2〉
本実施例では本発明の方法に従ってフロン含有ガスを処
理した例を示す.
まず,処理ガスとしてフロン113を500ppm含む
空気を活性炭4gを充填した吸着塔に室温下で通した。In addition, in the method of the present invention, when the concentration of fluorocarbon-containing gas is quite high, or when treating fluorocarbon itself used for cleaning, the adsorption step is not necessarily necessary, and the catalyst of the present invention can directly treat the gas. Of course it is possible. [Function] In the method of the present invention, CFCs are first concentrated through an adsorption step, and then the desorbed concentrated gas is decomposed and burned on a catalyst, making it easy to heat the gas and requiring less thermal energy. Finished. In the method of the present invention, fluorocarbons are reacted with at least one of oxygen, ozone, and water vapor, and it is said that the coexistence of these gases can increase the reaction efficiency and suppress the deposition of carbon on the catalyst. There are also advantages. Furthermore, the catalyst of the present invention is very effective in advancing the above reaction. Therefore, when processing gas containing a high concentration of fluorocarbons, the gas is decomposed directly on the catalyst without going through the concentration process by adsorption of fluorocarbons. It is also possible to burn it. [Example] <Example 1> An example of the present invention will be described below with reference to FIG. The fluorocarbon-containing gas 1 is introduced into the adsorption tower 3, and the fluorocarbon-removed gas 4 after removing the fluorocarbons is directly purged. on the other hand,
The regeneration gas 2 is passed through the other adsorption tower 3 to obtain a freon concentrated gas 5, to which a decomposition gas 6 is added and then passed through the catalytic reactor 7. The fluorocarbon decomposed gas 8 passes through an absorption tower 9, absorbs chlorine gas and hydrogen fluoride gas, and obtains a fluorocarbon-free gas 10. In this example, two adsorption towers are provided, one of which processes dilute fluorocarbon-containing gas and adsorbs and removes fluorocarbons, while the other passes regeneration gas through the adsorbent to obtain highly concentrated fluorocarbon-containing gas. Perform adsorbent regeneration. By making this switch, it is possible to continuously process fluorocarbon-containing gas. <Example 2> This example shows an example in which fluorocarbon-containing gas was treated according to the method of the present invention. First, air containing 500 ppm of Freon 113 as a processing gas was passed through an adsorption tower filled with 4 g of activated carbon at room temperature.
この時の吸着塔出口のフロン濃度をFID検出器付のガ
スクロマトグラフで測定したところ,約60pp−であ
り88%のフロンが吸着除去されていた.約40分後か
ら出口ガス中のフロン濃度が急激に増加し始めたので吸
着剤の吸着容量が限界に近づいたものと考え、処理ガス
の通過を止めた.次いで,吸着塔に再生用ガスとしてフ
ロンを含有しない温度50℃の空気を流したところ、初
期には3000ppmのフロン濃度のガスが脱離ガスと
して得られ、フロンが濃縮されていることがわかった.
このガスを400℃に加熱して、更に、水蒸気を1%加
え、Ptを0.5 重量%、酸化コバルトを10重景%
担持したチタニア触媒2gを充填した反応器に通した。At this time, the concentration of fluorocarbons at the outlet of the adsorption tower was measured using a gas chromatograph equipped with an FID detector, and it was approximately 60 pp-, indicating that 88% of fluorocarbons had been adsorbed and removed. After about 40 minutes, the concentration of fluorocarbons in the outlet gas began to increase rapidly, so we thought that the adsorption capacity of the adsorbent was approaching its limit, so we stopped the passage of the process gas. Next, when air at a temperature of 50°C that did not contain fluorocarbons was flowed through the adsorption tower as a regeneration gas, gas with an initial concentration of 3000 ppm of fluorocarbons was obtained as desorption gas, indicating that fluorocarbons were concentrated. ..
This gas was heated to 400°C, 1% of water vapor was added, Pt was added to 0.5% by weight, and cobalt oxide was added to 10% by weight.
It was passed through a reactor filled with 2 g of supported titania catalyst.
出口ガス中のフロン濃度は約40ppmであり、およそ
、99%の分解率が得られた.フロンの分解生戒物は、
COz , H F , HC I2などがあったので
、カ性ソーダと消石灰の混合水溶液に通し、吸収中和し
た.
〈実施例3〉
本実施例では3%のフロンを含む空気を触媒上で分解処
理した例を示す.
まず,処理ガスとしてフロン113を3%含む空気を4
00℃に加熱して、更に、水蒸気を3%加えPdを0.
5重量%,酸化ニッケルを10重量%担持したランタン
・ベータ・アルミナ触媒を充填した反応器に通した.出
口ガス中のフロン濃度は約150pP−であり.99.
5%の分解率が得られた.
〈実施例4〉
本実施例では実施例3においてランタン・べ−タ・アル
ミナにCu,Ag,V,Cr,Mo,WeMn,Fe,
La,Ce,Nbの酸化物をそれぞれ10重量%担持し
た触媒を調製し,実施例3と同様の試験をしたところ、
いずれの触媒でも90%以上のフロン分解率が得られた
.
〈比較例1〉
本比較例では実施例3と同様の試験をゼオライト,アル
ミナ,シリカ,チタニア,ジルコニアをそれぞれ用いて
行った.その結果,いずれの場合にもフロン分解率は5
0%以上であることがわかった.
〔発明の効果〕
本発明によれば,簡単な方法でありながら、フロン含有
ガスを処理し無害化できる,さらに本発明の触媒はフロ
ンの分解,燃焼用として優れたものであり,フロン排出
による大気のオゾン層の破壊を防ぐのに役立つ.The CFC concentration in the outlet gas was approximately 40 ppm, and a decomposition rate of approximately 99% was obtained. The biodegradable substances of fluorocarbons are
Since COz, HF, HC I2, etc. were present, they were absorbed and neutralized by passing them through a mixed aqueous solution of caustic soda and slaked lime. <Example 3> This example shows an example in which air containing 3% CFC was decomposed on a catalyst. First, 4% air containing 3% Freon 113 was used as the processing gas.
Heated to 00°C, further added 3% water vapor and added 0.0% Pd.
The mixture was passed through a reactor filled with a lanthanum beta alumina catalyst loaded with 5% by weight and 10% by weight of nickel oxide. The CFC concentration in the outlet gas is approximately 150 pP-. 99.
A decomposition rate of 5% was obtained. <Example 4> In this example, Cu, Ag, V, Cr, Mo, WeMn, Fe,
A catalyst supporting 10% by weight of each of La, Ce, and Nb oxides was prepared and tested in the same manner as in Example 3.
A fluorocarbon decomposition rate of 90% or more was obtained with each catalyst. <Comparative Example 1> In this comparative example, the same test as in Example 3 was conducted using zeolite, alumina, silica, titania, and zirconia, respectively. As a result, in both cases, the fluorocarbon decomposition rate was 5
It was found that it was more than 0%. [Effects of the Invention] According to the present invention, fluorocarbon-containing gas can be treated and rendered harmless using a simple method.Furthermore, the catalyst of the present invention is excellent for decomposing and combusting fluorocarbons, and is effective in reducing fluorocarbon emissions. Helps prevent depletion of the atmospheric ozone layer.
第1図は本発明の一実施例のフロン含有ガスの処理シス
テムのブロック図である。FIG. 1 is a block diagram of a fluorocarbon-containing gas processing system according to an embodiment of the present invention.
Claims (1)
て、 吸着により前記フロンを濃縮する工程、濃縮された前記
フロンを吸着剤から脱離する工程、脱離ガスを空気、酸
素、オゾン、水蒸気の中の少なくとも一種類以上を含む
ガスの存在下で触媒と接触させフロンを分解、燃焼する
工程、前記フロンの分解、燃焼生成物を還元剤を含有す
る液および/またはアルカリを含有する液で処理する工
程を備えたことを特徴とするフロン含有ガスの処理方法
。 2、ゼオライト、アルミナ、シリカ、チタニア、ジルコ
ニアの中の少なくとも一種以上を含有し、かつ、Cu、
Ag、V、Cr、Mo、W、Mn、Fe、Co、Ni、
Pt、Pd、Rh、La、Ce、Nbの中から選ばれた
少なくとも一種以上を含有することを特徴とするフロン
分解用触媒。 3、請求項1において、前記フロンの吸着剤が活性炭で
あることを特徴とするフロン含有ガスの処理方法。 4、請求項1において、前記フロンを分解する触媒が、
ゼオライト、アルミナ、シリカ、チタニア、ジルコニア
の中の少なくとも一種以上を含有し、かつ、Cu、Ag
、V、Cr、Mo、W、Mn、Fe、Co、Ni、Pt
、Pd、Rh、La、Ce、Nbの中から選ばれた少な
くとも一種以上を含有することを特徴とするフロン含有
ガスの処理方法。 5、請求項4において、触媒上でフロンを分解する温度
が200〜1,200℃であることを特徴とするフロン
含有ガスの処理方法。 6、請求項1において、フロンを分解する触媒が、少な
くともランタン・ベータ・アルミナを含有することを特
徴とするフロン含有ガスの処理方法。 7、フロンを含有するガスを空気、酸素、オゾン、水蒸
気の中の少なくとも一種類以上を含むガスの存在下で、
ゼオライト、アルミナ、シリカ、チタニア、ジルコニア
の中の少なくとも一種以上を含有し、かつ、Cu、Ag
、V、Cr、Mo、W、Mn、Fe、Co、Ni、Pt
、Pd、Rh、La、Ce、Nbをの中から選ばれた少
なくとも一種以上を含有する触媒と接触させフロンを分
解または燃焼させることを特徴とするフロン含有ガスの
処理方法。[Claims] 1. A method for detoxifying gas containing fluorocarbons, comprising: a step of concentrating the fluorocarbons by adsorption, a step of desorbing the concentrated fluorocarbons from an adsorbent, and a step of converting the desorbed gas into air, A process of decomposing and burning fluorocarbons by bringing them into contact with a catalyst in the presence of a gas containing at least one of oxygen, ozone, and water vapor, decomposing the fluorocarbons, and converting the combustion products to a liquid containing a reducing agent and/or an alkali. 1. A method for treating a fluorocarbon-containing gas, comprising a step of treating it with a liquid containing fluorocarbons. 2. Contains at least one of zeolite, alumina, silica, titania, and zirconia, and Cu,
Ag, V, Cr, Mo, W, Mn, Fe, Co, Ni,
A fluorocarbon decomposition catalyst characterized by containing at least one selected from Pt, Pd, Rh, La, Ce, and Nb. 3. A method for treating a fluorocarbon-containing gas according to claim 1, wherein the fluorocarbon adsorbent is activated carbon. 4. In claim 1, the catalyst for decomposing the fluorocarbons is
Contains at least one of zeolite, alumina, silica, titania, and zirconia, and contains Cu, Ag
, V, Cr, Mo, W, Mn, Fe, Co, Ni, Pt
, Pd, Rh, La, Ce, and Nb. 5. The method for treating a fluorocarbon-containing gas according to claim 4, wherein the temperature at which the fluorocarbon is decomposed on the catalyst is 200 to 1,200°C. 6. A method for treating a fluorocarbon-containing gas according to claim 1, wherein the catalyst for decomposing fluorocarbons contains at least lanthanum beta alumina. 7. Gas containing fluorocarbons in the presence of a gas containing at least one of air, oxygen, ozone, and water vapor,
Contains at least one of zeolite, alumina, silica, titania, and zirconia, and contains Cu, Ag
, V, Cr, Mo, W, Mn, Fe, Co, Ni, Pt
, Pd, Rh, La, Ce, and Nb, and decomposes or burns the fluorocarbon by bringing it into contact with a catalyst containing at least one selected from among , Pd, Rh, La, Ce, and Nb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242078A JPH03106419A (en) | 1989-09-20 | 1989-09-20 | Treatment process for gas containing fluorocarbon and catalyst for decomposing fluorocarbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242078A JPH03106419A (en) | 1989-09-20 | 1989-09-20 | Treatment process for gas containing fluorocarbon and catalyst for decomposing fluorocarbon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106419A true JPH03106419A (en) | 1991-05-07 |
Family
ID=17083959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1242078A Pending JPH03106419A (en) | 1989-09-20 | 1989-09-20 | Treatment process for gas containing fluorocarbon and catalyst for decomposing fluorocarbon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106419A (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992019366A1 (en) * | 1991-04-30 | 1992-11-12 | Nippon Shokubai Co., Ltd. | Method of oxidative decomposition of organic halogen compound |
| US5238656A (en) * | 1990-10-26 | 1993-08-24 | Tosoh Corporation | Treatment equipment of exhaust gas containing organic halogen compounds |
| US5245112A (en) * | 1990-09-13 | 1993-09-14 | Koji Hashimoto | Method for decomposition of chlorofluorocarbons |
| JPH0780303A (en) * | 1993-09-10 | 1995-03-28 | Kyushu Univ | Catalyst for decomposition treatment of gaseous fluorine compound |
| WO1996020786A1 (en) * | 1995-01-05 | 1996-07-11 | Nippon Shokubai Co., Ltd. | Catalyst for purifying fumigation exhaust gas and purification method of fumigation exhaust gas |
| US5578283A (en) * | 1994-12-30 | 1996-11-26 | Engelhard Corporation | Catalytic oxidation catalyst and method for controlling VOC, CO and halogenated organic emissions |
| JPH0929066A (en) * | 1995-05-18 | 1997-02-04 | Mitsubishi Chem Corp | Decomposition method of chlorinated organic compounds |
| US5710359A (en) * | 1993-09-09 | 1998-01-20 | Dsm Chemie Linz Gmbh | Environmentally appropriate degradation and disposal of heteroatom-containing compounds |
| JP2001062290A (en) * | 1999-08-27 | 2001-03-13 | Nippon Chem Ind Co Ltd | Organic halogen compound removal treatment material and treatment method |
| EP1273336A3 (en) * | 1998-12-25 | 2003-05-07 | Tosoh Corporation | Combustion catalysts and processes for removing organic compounds |
| JP2007301467A (en) * | 2006-05-11 | 2007-11-22 | Hitachi Ltd | Method and apparatus for treating fluorine compound-containing gas |
| JP2008207139A (en) * | 2007-02-28 | 2008-09-11 | Hitachi Ltd | Exhaust gas treatment method and apparatus |
| DE102014212907A1 (en) * | 2014-07-03 | 2016-01-07 | Siemens Aktiengesellschaft | A method of purifying an exhaust gas from a metal reduction process |
| CN108686648A (en) * | 2018-04-13 | 2018-10-23 | 浙江清华长三角研究院 | A kind of preparation method and application of carried active carbon ozone catalyst |
| CN114761106A (en) * | 2019-12-13 | 2022-07-15 | 通用电器技术有限公司 | Use of transition metal oxides for removing fluorinated by-products from gases, apparatus and method for removing such by-products |
-
1989
- 1989-09-20 JP JP1242078A patent/JPH03106419A/en active Pending
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5245112A (en) * | 1990-09-13 | 1993-09-14 | Koji Hashimoto | Method for decomposition of chlorofluorocarbons |
| US5238656A (en) * | 1990-10-26 | 1993-08-24 | Tosoh Corporation | Treatment equipment of exhaust gas containing organic halogen compounds |
| WO1992019366A1 (en) * | 1991-04-30 | 1992-11-12 | Nippon Shokubai Co., Ltd. | Method of oxidative decomposition of organic halogen compound |
| US5430230A (en) * | 1991-04-30 | 1995-07-04 | Nippon Shokubai Co., Ltd. | Method for disposing of organohalogen compounds by oxidative decomposition |
| US5710359A (en) * | 1993-09-09 | 1998-01-20 | Dsm Chemie Linz Gmbh | Environmentally appropriate degradation and disposal of heteroatom-containing compounds |
| JPH0780303A (en) * | 1993-09-10 | 1995-03-28 | Kyushu Univ | Catalyst for decomposition treatment of gaseous fluorine compound |
| US5578283A (en) * | 1994-12-30 | 1996-11-26 | Engelhard Corporation | Catalytic oxidation catalyst and method for controlling VOC, CO and halogenated organic emissions |
| US5653949A (en) * | 1994-12-30 | 1997-08-05 | Engelhard Corporation | Catalytic oxidation catalyst and method for controlling voc, CO and halogenated organic emissions |
| WO1996020786A1 (en) * | 1995-01-05 | 1996-07-11 | Nippon Shokubai Co., Ltd. | Catalyst for purifying fumigation exhaust gas and purification method of fumigation exhaust gas |
| JPH0929066A (en) * | 1995-05-18 | 1997-02-04 | Mitsubishi Chem Corp | Decomposition method of chlorinated organic compounds |
| US7052663B2 (en) | 1998-12-25 | 2006-05-30 | Tosoh Corporation | Combustion catalysts and processes for removing organic compounds |
| EP1273336A3 (en) * | 1998-12-25 | 2003-05-07 | Tosoh Corporation | Combustion catalysts and processes for removing organic compounds |
| US6953762B2 (en) | 1998-12-25 | 2005-10-11 | Tosoh Corporation | Combustion catalysts and processes for removing organic compounds |
| JP2001062290A (en) * | 1999-08-27 | 2001-03-13 | Nippon Chem Ind Co Ltd | Organic halogen compound removal treatment material and treatment method |
| JP2007301467A (en) * | 2006-05-11 | 2007-11-22 | Hitachi Ltd | Method and apparatus for treating fluorine compound-containing gas |
| JP2008207139A (en) * | 2007-02-28 | 2008-09-11 | Hitachi Ltd | Exhaust gas treatment method and apparatus |
| DE102014212907A1 (en) * | 2014-07-03 | 2016-01-07 | Siemens Aktiengesellschaft | A method of purifying an exhaust gas from a metal reduction process |
| CN108686648A (en) * | 2018-04-13 | 2018-10-23 | 浙江清华长三角研究院 | A kind of preparation method and application of carried active carbon ozone catalyst |
| CN108686648B (en) * | 2018-04-13 | 2021-01-08 | 浙江清华长三角研究院 | Preparation method and application of supported activated carbon ozone catalyst |
| CN114761106A (en) * | 2019-12-13 | 2022-07-15 | 通用电器技术有限公司 | Use of transition metal oxides for removing fluorinated by-products from gases, apparatus and method for removing such by-products |
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