JPH03106737U - - Google Patents
Info
- Publication number
- JPH03106737U JPH03106737U JP1990016530U JP1653090U JPH03106737U JP H03106737 U JPH03106737 U JP H03106737U JP 1990016530 U JP1990016530 U JP 1990016530U JP 1653090 U JP1653090 U JP 1653090U JP H03106737 U JPH03106737 U JP H03106737U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- aqueous solution
- wafer
- hno
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990016530U JP2548357Y2 (ja) | 1990-02-20 | 1990-02-20 | ウエーハの熱処理用載置治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990016530U JP2548357Y2 (ja) | 1990-02-20 | 1990-02-20 | ウエーハの熱処理用載置治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03106737U true JPH03106737U (mo) | 1991-11-05 |
| JP2548357Y2 JP2548357Y2 (ja) | 1997-09-17 |
Family
ID=31519792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990016530U Expired - Lifetime JP2548357Y2 (ja) | 1990-02-20 | 1990-02-20 | ウエーハの熱処理用載置治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2548357Y2 (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015199619A (ja) * | 2014-04-07 | 2015-11-12 | 株式会社トクヤマ | 多結晶シリコンの洗浄方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162200A (ja) * | 1983-03-03 | 1984-09-13 | Agency Of Ind Science & Technol | シリコン基板表面の清浄化法 |
-
1990
- 1990-02-20 JP JP1990016530U patent/JP2548357Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162200A (ja) * | 1983-03-03 | 1984-09-13 | Agency Of Ind Science & Technol | シリコン基板表面の清浄化法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015199619A (ja) * | 2014-04-07 | 2015-11-12 | 株式会社トクヤマ | 多結晶シリコンの洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2548357Y2 (ja) | 1997-09-17 |