JPH03109258U - - Google Patents
Info
- Publication number
- JPH03109258U JPH03109258U JP1722790U JP1722790U JPH03109258U JP H03109258 U JPH03109258 U JP H03109258U JP 1722790 U JP1722790 U JP 1722790U JP 1722790 U JP1722790 U JP 1722790U JP H03109258 U JPH03109258 U JP H03109258U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- filament
- cathode filament
- ion source
- mounting bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の実施例に係るイオン源の概略
縦断面図。第２図は本考案者が以前に製作したイ
オン源の概略縦断面図。
１……アークチンヤンバ、２……蓋板、３……
プラズマ電極、４……側面内張り、５……電極内
張り、６……蓋内張り、７……電流導入端子、８
……フイラメント取付金具、９……フイラメント
、１０……円筒部、１２，１３……フランジ。
FIG. 1 is a schematic longitudinal sectional view of an ion source according to an embodiment of the present invention. FIG. 2 is a schematic vertical cross-sectional view of an ion source previously manufactured by the present inventor. 1...Arcchinyamba, 2...Lid plate, 3...
Plasma electrode, 4... Side lining, 5... Electrode lining, 6... Lid lining, 7... Current introduction terminal, 8
...Filament mounting bracket, 9...Filament, 10...Cylindrical portion, 12, 13...Flange.
Claims (1)
アノードとなるアークチヤンバと、アークチヤン
バの開口側に設けられイオンを引き出すためのブ
ラズマ電極と、アークチヤンバの蓋板からアーク
チヤンバの内部に挿入され熱電子を発生するため
のカソードフイラメントと、アークチヤンバの内
壁に沿つて設けられる板状の内張りと、蓋板を貫
いて設けられカソードフイラメントに電流を供給
するための電流導入端子と、アークチヤンバ内に
あつて電流導入端子にカソードフイラメントを取
り付けるフイラメント取付金具とよりなり、蓋板
を覆う内張りがフイラメント取付金具よりもカソ
ードフイラメントの側にあるようにした事を特徴
とするイオン源。 An arc chamber with an opening on one side that can be evacuated and serves as an anode, a plasma electrode provided on the open side of the arc chamber to extract ions, and a plasma electrode inserted into the arc chamber from the lid plate of the arc chamber to generate thermoelectrons. A cathode filament for supplying current to the cathode filament, a plate-shaped lining provided along the inner wall of the arc chamber, a current introduction terminal provided through the cover plate for supplying current to the cathode filament, and a current introduction terminal located inside the arc chamber. An ion source comprising a filament mounting bracket for attaching a cathode filament to the ion source, and a lining covering the lid plate is located closer to the cathode filament than the filament mounting bracket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1722790U JPH03109258U (en) | 1990-02-22 | 1990-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1722790U JPH03109258U (en) | 1990-02-22 | 1990-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109258U true JPH03109258U (en) | 1991-11-11 |
Family
ID=31520456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1722790U Pending JPH03109258U (en) | 1990-02-22 | 1990-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109258U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267944A (en) * | 1988-04-19 | 1989-10-25 | Agency Of Ind Science & Technol | Ion source |
-
1990
- 1990-02-22 JP JP1722790U patent/JPH03109258U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267944A (en) * | 1988-04-19 | 1989-10-25 | Agency Of Ind Science & Technol | Ion source |