JPH0311061U - - Google Patents
Info
- Publication number
- JPH0311061U JPH0311061U JP7205589U JP7205589U JPH0311061U JP H0311061 U JPH0311061 U JP H0311061U JP 7205589 U JP7205589 U JP 7205589U JP 7205589 U JP7205589 U JP 7205589U JP H0311061 U JPH0311061 U JP H0311061U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- substrate
- tube
- shower
- submerged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
第１図は本考案の構成を示す断面図、第２図は
第１図ａの側面透視図、第３図は従来の細孔内気
泡除去方法を説明するための図を示す。 第１図において、２……メツキ液、３……基板
、５……揺動機構、８……シヤワー管、１０……
メツキ液圧送装置をそれぞれ示す。
第１図ａの側面透視図、第３図は従来の細孔内気
泡除去方法を説明するための図を示す。 第１図において、２……メツキ液、３……基板
、５……揺動機構、８……シヤワー管、１０……
メツキ液圧送装置をそれぞれ示す。
Claims (1)
- 【実用新案登録請求の範囲】 液２に沈めた複数の細孔３１を有する基板３の
片面に対して垂直方向に前記液のジエツト流が噴
射されるように設けたシヤワー管８と、 該シヤワー管と前記基板の相対位置を前記液内
で平行する方向に揺動させる揺動機構５と、 前記シヤワー管に前記液を圧送する手段１０と
を具備してなることを特徴とする細孔内気泡除去
装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7205589U JPH0311061U (ja) | 1989-06-19 | 1989-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7205589U JPH0311061U (ja) | 1989-06-19 | 1989-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0311061U true JPH0311061U (ja) | 1991-02-01 |
Family
ID=31609646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7205589U Pending JPH0311061U (ja) | 1989-06-19 | 1989-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311061U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010070779A (ja) * | 2008-09-16 | 2010-04-02 | National Institute Of Advanced Industrial Science & Technology | 脱泡装置、気泡除去方法、めっき方法、および微少金属構造体 |
| KR101137776B1 (ko) * | 2009-11-11 | 2012-04-25 | 주식회사 케이피엠테크 | 도금액 이동분사 구조를 갖는 기판도금장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154798A (ja) * | 1985-12-27 | 1987-07-09 | 株式会社 プランテツクス | プリント基板製造装置 |
-
1989
- 1989-06-19 JP JP7205589U patent/JPH0311061U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154798A (ja) * | 1985-12-27 | 1987-07-09 | 株式会社 プランテツクス | プリント基板製造装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010070779A (ja) * | 2008-09-16 | 2010-04-02 | National Institute Of Advanced Industrial Science & Technology | 脱泡装置、気泡除去方法、めっき方法、および微少金属構造体 |
| KR101137776B1 (ko) * | 2009-11-11 | 2012-04-25 | 주식회사 케이피엠테크 | 도금액 이동분사 구조를 갖는 기판도금장치 |