JPH03110834U - - Google Patents
Info
- Publication number
- JPH03110834U JPH03110834U JP1990020636U JP2063690U JPH03110834U JP H03110834 U JPH03110834 U JP H03110834U JP 1990020636 U JP1990020636 U JP 1990020636U JP 2063690 U JP2063690 U JP 2063690U JP H03110834 U JPH03110834 U JP H03110834U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- temperature
- cooling water
- silicon
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の平面図、第２図はその断面図
である。
１……真空チヤツク台座、２……ヒータカバ、
３……連結パイプ、４……ヒータ、５……絶縁物
、６……吸着エア冷却パイプ、７……冷却水タン
ク、８……回転機構、９……ヒータカバー溝、１
０……チヤツク台座穴、１１……真空源。
FIG. 1 is a plan view of the present invention, and FIG. 2 is a sectional view thereof. 1... Vacuum chuck pedestal, 2... Heater cover,
3... Connection pipe, 4... Heater, 5... Insulator, 6... Adsorption air cooling pipe, 7... Cooling water tank, 8... Rotating mechanism, 9... Heater cover groove, 1
0...Chuck pedestal hole, 11...Vacuum source.
Claims (1)
いて、真空チヤツクによりシリコンウエハを固定
するときに高温部分を通過する吸着エアを冷却す
るため冷却水の中を通す構造とし、シリコンウエ
ハを固定する台座の材質をシリコンＳｉで構成し
、シリコンウエハを回転するための回転機構と、
それらを高温部より遮へいする冷却水タンクを有
していることを特徴とする高温載物台。 The stage for heating and fixing the silicon wafer has a structure in which the suction air that passes through the high-temperature part when the silicon wafer is fixed by a vacuum chuck is passed through cooling water to cool it. a rotation mechanism made of silicon Si and configured to rotate a silicon wafer;
A high-temperature stage characterized by having a cooling water tank that shields them from high-temperature parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020636U JPH03110834U (en) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020636U JPH03110834U (en) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110834U true JPH03110834U (en) | 1991-11-13 |
Family
ID=31523723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990020636U Pending JPH03110834U (en) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (en) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | Compression bag exhaust valve |
-
1990
- 1990-02-28 JP JP1990020636U patent/JPH03110834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (en) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | Compression bag exhaust valve |