JPH03111188A - 3D micro positioning device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application 1] The present invention relates to a three-dimensional micro-positioning device that is preferably used for micro-movement of micro-needles during, for example, micromanipulation. relates to a three-dimensional micro-positioning device that can perform feedback control of displacement in each direction with high precision.

[Prior Art] Conventionally, various micro-positioning devices have been proposed in which a parallel plate spring mechanism is used as a micro-movement mechanism. Hereinafter, a conventional micro-movement mechanism using a parallel leaf spring mechanism will be described with reference to the accompanying drawings.

FIG. 5 is an explanatory plan view of a one-dimensional micro-movement mechanism consisting of a symmetrical parallel plate spring mechanism. In the same figure, the symmetrical parallel leaf spring mechanism consists of a pair of parallel leaf springs (2), (2), one end of which is fixed to the base (1), and one end of which is fixed to the base (1). Two parallel plate springs (1') fixed at
2″) and (2′), and a rigid body (
3). Actuator (4)
is brought into contact with the rigid body (3), and a force (f
), a one-dimensional machine/'') moving mechanism in the X-axis direction, for example, is realized. Although only one actuator is shown in the figure, it may be similarly arranged at symmetrical positions as needed.

FIG. 6 is a perspective view of a two-dimensional micro-movement mechanism in the X-axis and Y-axis directions, which is constructed by combining the one-dimensional micro-movement mechanisms shown in FIG. 5.

That is, the base (1), the parallel leaf spring (2), the base (1'
).

Parallel leaf springs (2'), (2') and rigid body (3) create the same original micro-movement mechanisms (X) and (Y) as shown in Figure 3.
), and the micro movement mechanism (Y) is micro/Jz
It is arranged on the upper part of the movement mechanism (X), and the bases (1) and (1') of the minute movement mechanism are fixed to the rigid body of the minute movement mechanism (X). Note that the actuator is omitted in this figure.

[Problems to be Solved by the Invention] However, in the multidimensional micro-positioning device using the conventional micro-movement mechanisms, when attempting to perform feedbank control of the displacement detection values of the micro-movement mechanisms, the center of gravity of each micro-movement mechanism (G) and the movable center (0) is large, so there is a problem that highly accurate feedback control is difficult. Here, the center of gravity (G) of the minute movement mechanism is the center of mass of each movement mechanism determined by a normal method. In addition, in the symmetrical parallel plate spring mechanism shown in Fig. 5, the movable center (0) is the center of motion that exists in a plane that has a plane symmetrical relationship with the 2Ni parallel plate springs, and that is the center of movement between two sets of parallel plate springs. It refers to the intersection of a straight line (k) that is orthogonal and passes through the center of the width direction of the leaf springs and a plane (L) that is parallel to the parallel leaf springs and is equidistant from the two parallel leaf springs.

In other words, the dynamic characteristics of the controlled object are important in feedback control, and when a rotational moment is added when performing feedback control of the deflection direction displacement of a parallel plate spring mechanism, a vibration mode mainly based on the rotational moment is excited. control accuracy decreases. Since the one-dimensional fine/J) movement mechanism shown in Fig. 5 has a relatively simple structure,
The center of gravity (G) and the movable center (○) of the minute movement mechanism almost coincide, but in the two-dimensional minute movement mechanism shown in Fig. 6, the movement mechanisms in each direction are spatially separated. As a result, the center of gravity (G) of the movable part in the Y-axis direction and the center of gravity (0) of the movable part in the X-axis direction are misaligned, and as a result, the
Accompanied by the accelerated movement of the axially movable section, a rotational moment is generated on each axis of the temporary spring constituting the X-axis movable section, making it impossible to perform accurate feedback control.

[Means for Solving the Problems] In the three-dimensional micro-positioning device according to the present invention, the X-axis direction, the Y-axis direction, and the
The Y-axis movable part is fixed to the Y-axis movable part with its center of gravity coinciding with the movable center of the Y-axis movable part, and the Y-axis movable part is fixed to the Y-axis movable part. , the entire center of gravity of the Y-axis direction movable section and the Y-axis direction movable section is X
A minute movement mechanism is provided that is fixed to the X-axis movable section so as to coincide with the movable center of the axial movable section.

[Operation] In the present invention, each symmetrical parallel plate spring mechanism constituting the three-dimensional micro-movement mechanism has a center of gravity (G) and a center of movement (0).
Since they match, no rotational moment is generated in each axis of the leaf spring due to one displacement of the minute movement mechanism.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a block diagram illustrating each mechanism of the device of the present invention, and FIG. 2 is an assembly diagram of the minute movement mechanism in the device of the present invention.

As shown in FIG.
), a sensor mechanism (B) that detects the movement displacement amount (X) of the minute movement mechanism, and a target setting value (r
) and the movement displacement amount (X) fed back from the sensor mechanism, and output (u
) and a control mechanism (C) that controls this.

As shown in FIG. 2, the minute movement mechanism (A) is composed of an X-axis movable section (1a), a Y-axis movable section (1b), and a Y-axis movable section (Ic). As shown in FIG. 3 above, each movable part includes a base (1), a parallel plate spring (2), (2) a base (1'), a parallel plate spring (2'),
(2') and a rigid body (3). In addition, each movable part is usually
They are made of the same material, and phosphor bronze is preferably used for the leaf spring, and aluminum is preferably used for the base and rigid body.

In each symmetrical parallel plate spring mechanism, an actuator (4) is arranged in contact with all the rigid bodies (3), and the symmetrical parallel plate spring mechanism can thereby be driven and controlled. The actuator (4), of which only one is illustrated for convenience in FIG. It has a structure in which a movable coil (43) is arranged at. When a current is applied to the moving coil (43), the moving coil (43) moves and presses the rigid body (3), and the symmetrical parallel plate spring machine (76) is displaced in the X-axis direction.

Each of the rigid bodies (3) of the X-axis movable part (1a) and the Y-axis movable part (1b) has a U-shaped cross section so that the other movable part can be inserted between the leaf springs. ing.

- The Y-axis movable part (1b) is inserted between the leaf springs of the X-axis movable part (1a), as shown by the dotted line, and its base (
1), (1') are rigid bodies (
3) is fixed to the inner surface of both U-shaped sides. Also,
The two-axis movable part (1c) is inserted between the temporary springs of the Y-axis movable part (1b), as shown by the dotted line, and its base (1)
, (1') is a rigid body (3) that constitutes a movable part in the Y-axis direction.
It is fixed to the inner surface of both sides of the U-shape.

As a result of configuring the micro-movement mechanism (A) as described above, the center of gravity of the Z-axis movable part almost coincides with the movable center of the Y-axis movable part (lb), and , the entire center of gravity of the Y-axis movable section and the Z-axis movable section substantially coincides with the movable center of the X-axis movable section (1a).

As shown in FIG. 3, the amount of movement displacement of the minute movement mechanism (A) is determined by fixing the targeter 1-(5) on the upper part of the rigid body (3) of the Z-axis direction movable part (1c), and moving the target (5). )'s X.

Non-contact type sensors (6a) in each direction of Y and Z axis.

(6b) and (6c) and detecting the amount of displacement of the target plate (5). In addition,
Targetera 1-(5) is used with an end effector such as a hypodermic needle (not shown) fixed to its upper part. Of course, when fixing a target (5) etc. on the rigid body (3) of the Z-axis movable part (1c), these should be taken into account when determining the center of gravity of the Z-axis movable part (1c). It is.

FIG. 4 is a completed diagram of the micro-movement mechanism (A) of the present invention assembled as described above. In the same figure, the actuator is omitted for convenience, and the symbols of each element are attached only to the X-axis direction movable part and are omitted for other parts. As is clear from this figure, the micro-movement mechanism (A) of the present invention is integrally configured so that the movable parts in each axial direction are not separated spatially, and therefore, as the micro-movement mechanism is displaced, Therefore, no rotational moment is generated on each axis of the leaf spring.

[Effects of the Invention] As described in detail above, the three-dimensional micro-positioning device according to the present invention uses a symmetrical parallel plate spring mechanism as a micro-movement mechanism, and the symmetrical parallel plate spring mechanism in each axial direction Since the center of gravity of the 4° leaf spring mechanism and the center of movement are aligned,
No rotational moment is generated on each axis of the leaf spring due to the displacement of the micromechanism, and therefore a high degree of feedback control can be achieved.

[Brief explanation of drawings]

FIG. 1 is a block diagram illustrating each mechanism of the apparatus of the present invention, in which (A) represents a minute movement mechanism, (B) represents a sensor mechanism, and (C) represents a control mechanism. FIG. 2 is an assembly diagram showing an example of the micro-movement mechanism in the device of the present invention, in which (1) and (1') are the base, (
2) and (2') represent parallel plate springs, and (3) represents a rigid body. FIG. 3 is a perspective view showing an example of the sensor mechanism according to the present invention, in which (5) is a target, (6a), (6
b), (6c) represent non-contact sensors. FIG. 4 is a completed view of the fine/JX movement mechanism shown in the assembly diagram of FIG. 2, and each symbol in the figure represents the same meaning as in FIG. 2. 5 and 6 are plan views of the conventional micro-movement mechanism, in which (X) represents the X-axis movable part, (Y) represents the Y10-axis movable part, and other symbols are It has the same meaning as in Figure 2.

Claims (1)

[Claims] (1) A minute movement mechanism, a sensor mechanism that detects the movement displacement of the minute movement mechanism, and a control mechanism that controls the minute movement mechanism by inputting a target setting value and the amount of movement displacement output from the sensor mechanism. The fine movement mechanism is composed of movable parts in the X-axis direction, Y-axis direction, and Z-axis direction, each of which is constituted by a symmetrical parallel plate spring mechanism that can be driven and controlled, and the Z-axis movable part has its center of gravity. is fixed to the Y-axis movable part so as to coincide with the movable center of the Y-axis movable part, and the entire center of gravity of the Z-axis movable part and the Y-axis movable part is aligned with the X-axis. A three-dimensional micro-positioning device, characterized in that it is fixed to the X-axis direction movable part so as to coincide with the movable center of the direction movable part.