JPH03112376A - Torsional piezoelectric element and its polarization method - Google Patents
Torsional piezoelectric element and its polarization methodInfo
- Publication number
- JPH03112376A JPH03112376A JP1249878A JP24987889A JPH03112376A JP H03112376 A JPH03112376 A JP H03112376A JP 1249878 A JP1249878 A JP 1249878A JP 24987889 A JP24987889 A JP 24987889A JP H03112376 A JPH03112376 A JP H03112376A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- electrodes
- regions
- element material
- polarity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧電素子を用いた超音波モータ、圧電アクチュ
エータ等に用いるねじり圧電素子およびその分極方法に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a torsional piezoelectric element used in an ultrasonic motor, piezoelectric actuator, etc. using a piezoelectric element, and a method for polarizing the same.
ある種の結晶に電界を加えると歪が発生する現象は、逆
圧電効果と呼ばれており、この現象を利用した圧電素子
が広く使われている。このような圧電素子は電界を加え
ることにより直接に歪が得られるため、構造的に簡単で
精密な制御が行われる特徴がある。The phenomenon in which strain occurs when an electric field is applied to a certain type of crystal is called the inverse piezoelectric effect, and piezoelectric elements that take advantage of this phenomenon are widely used. Since such a piezoelectric element can directly obtain strain by applying an electric field, it is characterized by a simple structure and precise control.
しかし、逆圧電効果によって発生する歪は小さく、この
ような圧電素子の変位を大きく取るためには薄板状の圧
電材料を多数枚積層した構造とすることが普通である。However, the strain caused by the inverse piezoelectric effect is small, and in order to obtain a large displacement of such a piezoelectric element, it is common to use a structure in which a large number of thin plate-shaped piezoelectric materials are laminated.
積層する圧電材料の各素子としては、水晶、ロッシェル
塩、チタン酸バリウム、チタン酸ジルコン酸鉛磁器、Ｐ
ＣＭ圧電磁器等のセラミックスや、ある種の強誘電ポリ
マーが用いられている。The piezoelectric material elements to be laminated include crystal, Rochelle salt, barium titanate, lead zirconate titanate porcelain, and P.
Ceramics such as CM piezoelectric ceramics and certain ferroelectric polymers are used.
強誘電体の等方性で圧電性のない多結晶焼結体（セラミ
ックス）や薄膜に高電界を印加し、それらの自発分極の
方向をある程度そろえる（分極する）ことにより、圧電
体とすることができる（ポーリング）。By applying a high electric field to a polycrystalline sintered body (ceramics) or thin film that is isotropic and has no piezoelectric properties of a ferroelectric substance, and aligning the direction of their spontaneous polarization to some extent (polarization), it becomes a piezoelectric substance. (polling).
従来、このようなねじり振動用圧電素子を分極する方法
として、セラミックスを、例えば４等分して扇形とし、
各扇形の端面に電極を形成して扇形について分極を行い
、分極した後、電極を削除し、４つの扇形を再度接着を
して再度円板状またはドーナツ状の圧電素子を形成して
いる。Conventionally, as a method of polarizing such a piezoelectric element for torsional vibration, ceramics is divided into four equal parts to form a fan shape,
Electrodes are formed on the end faces of each sector to polarize the sector. After polarization, the electrodes are removed and the four sectors are reattached to form a disk-shaped or donut-shaped piezoelectric element.
しかしながら、このような方法による場合には、圧電素
子自体を接着し結合しているために圧電素子の強度が弱
いという問題があり、また切断、接着等複雑な工程を経
るため、コスト高となっている。However, when using this method, there is a problem that the strength of the piezoelectric element is weak because the piezoelectric element itself is bonded and bonded, and the cost is high because it requires complicated processes such as cutting and bonding. ing.
本発明は上述するような従来の技術に付随する問題点を
解決して、ねじり圧電素子の分極に要するコストを低減
でき、強度の大きいねじり圧電素子を、しかも、その品
質を向上して製作できる方法を提供することを目的とす
る。The present invention solves the problems associated with the conventional techniques as described above, reduces the cost required for polarization of a torsion piezoelectric element, and makes it possible to produce a torsion piezoelectric element with high strength and improved quality. The purpose is to provide a method.
本発明の分極方法においてはほぼ円柱状の圧電素子材料
の外周面を周方向に４領域に分割し、該分割した各領域
に圧電素子の長手方向に延在する短冊状電極を形成し、
隣接する一組の電極を第一の極性に接続するとともに該
一組の電極と対向する他の一組の電極を第一の極性と反
対の第二の極性に接続して分極することを特徴とするね
じり圧電素子の分極方法により上記の目的を達成する。In the polarization method of the present invention, the outer circumferential surface of a substantially cylindrical piezoelectric element material is circumferentially divided into four regions, and a strip-shaped electrode extending in the longitudinal direction of the piezoelectric element is formed in each of the divided regions.
Polarization is achieved by connecting a set of adjacent electrodes to a first polarity and connecting another set of electrodes facing the set of electrodes to a second polarity opposite to the first polarity. The above object is achieved by a method of polarizing a torsion piezoelectric element.
これにより、一体物からなるほぼ円柱状の圧電素子材料
の外周面が周方向に４領域に分割され、該各領域は圧電
素子材料の長手方向に延在しており、該圧電素子材料は
隣接する６対の領域間で分極されており、側対の分極方
向が平行している本発明に係るねじり圧電素子が得られ
る。As a result, the outer peripheral surface of the substantially cylindrical piezoelectric element material made of one piece is divided into four regions in the circumferential direction, each region extending in the longitudinal direction of the piezoelectric element material, and the piezoelectric element material adjacent to each other. A torsional piezoelectric element according to the present invention is obtained, which is polarized between six pairs of regions, and the polarization directions of the side pairs are parallel.
また、このようにして分極したねじり振動用圧電素子を
使用するに際しては、前記第一の極性に接続して分極し
た領域の一方の領域および前記他の一組の電極中の該一
方の領域に対向する領域を同一の駆動電極の第一の極性
に接続し、残りの領域を該駆動電極の第一の極性と反対
の第二の極性に接続してねじりを生じさせることにより
、このねじり圧電素子はねじり振動をすることになる。In addition, when using the piezoelectric element for torsional vibration polarized in this way, one region of the polarized region connected to the first polarity and one region of the other set of electrodes may be used. This torsional piezoelectricity is created by connecting opposing regions to a first polarity of the same drive electrode and connecting the remaining regions to a second polarity opposite the first polarity of the drive electrode to create a torsion. The element will undergo torsional vibration.
本発明においては、従来の方法のような薄板状の圧電素
子を用いずに．ほぼ円柱状の圧電材料を用いて分極する
ことができ、このため製造コストが低減でき、しかも．
ほぼ円柱状のまま圧電材料を処理するために、圧電材料
の強度が非常に向上し、また、品質も向上する。In the present invention, unlike the conventional method, a thin plate-shaped piezoelectric element is not used. Polarization can be achieved using a piezoelectric material having a substantially cylindrical shape, which reduces manufacturing costs.
Since the piezoelectric material is processed while remaining in a substantially cylindrical shape, the strength and quality of the piezoelectric material are greatly improved.
以下、実施例を参照して本発明の詳細な説明する。 Hereinafter, the present invention will be described in detail with reference to Examples.
本発明の分極方法を実施するには、第１図および第２図
に示すように、円柱状の圧電素子材料１を準備する。圧
電素子としては前述のような材料、すなわち、焼結した
セラミックスその他の材料を用いることができる。To carry out the polarization method of the present invention, a cylindrical piezoelectric element material 1 is prepared as shown in FIGS. 1 and 2. The piezoelectric element may be made of the materials mentioned above, ie, sintered ceramics or other materials.
円柱状の圧電素子」イ料１の外周面、すなわち、円周面
を周方向に第１図に示すように４等分する。The outer peripheral surface of the cylindrical piezoelectric element 1, that is, the circumferential surface, is divided into four equal parts in the circumferential direction as shown in FIG.
すなわち、円周角が９０°の４つの円弧部分に外周面を
分ける。この４つの分けられた円弧部分を円柱状の圧電
素子材料１の長手方向に延在させ、各領域の上に電極２
ａ、２ｂ、２Ｃ１２ｄを蒸着または薄膜により形成する
。各電極２ ａ ％ ２ ｂ ％２ｃ１２ｄの間には、
細幅の空隙部Ｓがそれぞれ形成されている。That is, the outer circumferential surface is divided into four circular arc parts each having a circumferential angle of 90 degrees. These four divided circular arc parts are extended in the longitudinal direction of the cylindrical piezoelectric element material 1, and an electrode 2 is placed on each region.
a, 2b, and 2C12d are formed by vapor deposition or thin film. Between each electrode 2a%2b%2c12d,
A narrow gap S is formed respectively.
このようにして、短冊状に延びる４つの電極２ａ、 ２
ｂ、２ｃ、２ｄが円柱状の圧電素子材料１の周面に形成
される。そして、電極２ａと電極２ｂは隣合っており、
同様に電極２ｃと電極２ｄも隣合っている。電極２ａと
電極２Ｃは向い合っており、電極２ｂと電極２ｄも向い
合っている。In this way, four electrodes 2a, 2 extending in a strip shape are formed.
b, 2c, and 2d are formed on the circumferential surface of the cylindrical piezoelectric element material 1. The electrode 2a and the electrode 2b are adjacent to each other,
Similarly, the electrode 2c and the electrode 2d are also adjacent to each other. Electrode 2a and electrode 2C face each other, and electrode 2b and electrode 2d also face each other.
この状態で電極２ａ、２ｂを第一の電極、例えば十の電
極に接続し、それに向い合った電極２Ｃ１２ｄを−の電
極に接続し、これにより４つの電極に電圧を加えて円柱
状をした圧電素子材料１を分極する。In this state, the electrodes 2a and 2b are connected to the first electrode, for example, the 10th electrode, and the opposite electrode 2C12d is connected to the 10th electrode, thereby applying voltage to the 4 electrodes to create a cylindrical piezoelectric The element material 1 is polarized.
この結果、第１図中に実線で示す矢印の方向に、すなわ
ち、図においては水平方向に分極が行われる。As a result, polarization occurs in the direction of the arrow shown by the solid line in FIG. 1, that is, in the horizontal direction in the figure.
次に、このようにして分極した圧電素子材料１をねじり
振動に用いる場合には、第３図に示すように、上述の分
極方向（実線の矢印で示す方向）と直交する方向（破線
の矢印で示す方向）に電圧を印加するように、駆動電極
３に接続する。Next, when the piezoelectric element material 1 polarized in this way is used for torsional vibration, as shown in FIG. It is connected to the drive electrode 3 so as to apply a voltage in the direction shown by .
すなわち、電極２ａとそれに対向していた電極２ｃとを
同一の一方の電極に接続し、電極２ａと隣合っており分
極時には電極２ａと同極性に接続された電極２ｂと、そ
れに向い合っている電極２ｄとを反対側の駆動電極に接
続する。That is, the electrode 2a and the electrode 2c that was facing it are connected to the same one electrode, and the electrode 2b, which is adjacent to the electrode 2a and is connected to have the same polarity as the electrode 2a during polarization, and the electrode 2b facing it are connected. The electrode 2d is connected to the drive electrode on the opposite side.
そして電極２ａ、２ｂ、２ｃ、２ｄに交番電源３から交
番電圧を加えることにより、この円柱状の圧電素子材料
１には、第３図に破線を示すように、前述した分極方向
、すなわち、第１図の実線方向１と直交する方向に交番
電界が形成され、駆動電界により分極方向と直交する方
向に交番に力が作用し、これにより円柱状をした圧電素
子材料１にねじり振動が牛じる。By applying an alternating voltage from an alternating power supply 3 to the electrodes 2a, 2b, 2c, and 2d, the cylindrical piezoelectric element material 1 is polarized in the aforementioned polarization direction, as shown by the broken line in FIG. An alternating electric field is formed in a direction perpendicular to the solid line direction 1 in Fig. 1, and the driving electric field causes an alternating force to act in a direction perpendicular to the polarization direction, causing torsional vibration to occur in the cylindrical piezoelectric element material 1. Ru.
本発明によれば．ほぼ円柱状をした圧電素子材料を用い
て、そのまま分極を行い、また、使用することができる
。従って、薄板状の圧電素子を用いないでねじり圧電素
子を分極し、使用することができるために、分極のため
のコストが大幅に低減され、また、接着することなく、
一体物のほぼ円柱状の圧電素子材料を用いることができ
るために、圧電素子材料の強度が非常に増加し、また、
その得られた圧電素子材料の信頼性は非常に高いもので
ある。According to the invention. Using a piezoelectric element material having a substantially cylindrical shape, polarization can be performed and used as is. Therefore, the torsional piezoelectric element can be polarized and used without using a thin plate-like piezoelectric element, and the cost for polarization is greatly reduced.
Since it is possible to use a one-piece, substantially cylindrical piezoelectric element material, the strength of the piezoelectric element material is greatly increased, and
The reliability of the obtained piezoelectric element material is extremely high.
また、本発明においては、圧電素子材料の長さを長くす
ることにより、ねじり圧電素子のねじり角を容易に大き
くできるという利点もある。Furthermore, the present invention has the advantage that by increasing the length of the piezoelectric element material, the torsion angle of the torsion piezoelectric element can be easily increased.
第１図は本発明に係るねじり圧電素子の分極方法を説明
する正面図、第２図は第１図の側面図、第３図は本発明
方法により分極されたねじり圧電素子の使用状態を示す
配線図である。
１・・・円柱状をした圧電素子材料、
２ａｓ ２ｂｓ ２ｃ、２ｄ・＝電極、３・・・交番電
源。FIG. 1 is a front view illustrating the polarization method of a torsion piezoelectric element according to the present invention, FIG. 2 is a side view of FIG. This is a wiring diagram. 1... Piezoelectric element material having a cylindrical shape, 2as 2bs 2c, 2d=electrode, 3... Alternate power supply.
Claims (3)
域に分割し、該分割した各領域に圧電素子材料の長手方
向に延在する短冊状電極を形成し、隣接する一組の電極
を第一の極性に接続するとともに該一組の電極と対向す
る他の一組の電極を第一の極性と反対の第二の極性に接
続して分極することを特徴とするねじり圧電素子の分極
方法。1. The outer peripheral surface of the approximately cylindrical piezoelectric element material is divided into four regions in the circumferential direction, and a strip-shaped electrode extending in the longitudinal direction of the piezoelectric element material is formed in each of the divided regions. Polarization of a torsional piezoelectric element characterized in that the torsional piezoelectric element is polarized by connecting it to a first polarity and connecting another set of electrodes facing the set of electrodes to a second polarity opposite to the first polarity. Method.
続して分極した領域の一方の領域および前記他の一組の
電極中の該一方の領域に対向する領域を同一の駆動電極
の第一の極性に接続し、残りの領域を該駆動電極の第一
の極性と反対の第二の極性に接続してねじりを生じさせ
ることを特徴とするねじり圧電素子の分極方法。2. 2. The polarization method according to claim 1, wherein one region of the regions connected to the first polarity and polarized and a region opposite to the one region of the other set of electrodes are connected to the first polarity of the same drive electrode. A method for polarizing a torsional piezoelectric element, characterized in that the remaining region is connected to a second polarity opposite to the first polarity of the drive electrode to cause twisting.
が周方向に４領域に分割され、該各領域は圧電素子材料
の長手方向に延在しており、該圧電素子材料は隣接する
各対の領域間で分極されており、両対の分極方向が平行
していることを特徴とするねじり圧電素子。3. The outer peripheral surface of the substantially cylindrical piezoelectric element material made of one piece is divided into four regions in the circumferential direction, each region extending in the longitudinal direction of the piezoelectric element material, and the piezoelectric element material is divided into four regions in the circumferential direction. A torsional piezoelectric element characterized in that it is polarized between two regions, and the polarization directions of both pairs are parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1249878A JPH03112376A (en) | 1989-09-26 | 1989-09-26 | Torsional piezoelectric element and its polarization method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1249878A JPH03112376A (en) | 1989-09-26 | 1989-09-26 | Torsional piezoelectric element and its polarization method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03112376A true JPH03112376A (en) | 1991-05-13 |
Family
ID=17199543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1249878A Pending JPH03112376A (en) | 1989-09-26 | 1989-09-26 | Torsional piezoelectric element and its polarization method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03112376A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5302878A (en) * | 1991-10-30 | 1994-04-12 | Imaje S.A. | High-frequency acoustic rheometer and device to measure the viscosity of a fluid using this rheometer |
| US7339308B2 (en) * | 2003-05-02 | 2008-03-04 | Robert Bosch Gmbh | Actuating unit for a piezo-electrically controlled fuel injection valve |
-
1989
- 1989-09-26 JP JP1249878A patent/JPH03112376A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5302878A (en) * | 1991-10-30 | 1994-04-12 | Imaje S.A. | High-frequency acoustic rheometer and device to measure the viscosity of a fluid using this rheometer |
| US7339308B2 (en) * | 2003-05-02 | 2008-03-04 | Robert Bosch Gmbh | Actuating unit for a piezo-electrically controlled fuel injection valve |
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