JPH031130U - - Google Patents
Info
- Publication number
- JPH031130U JPH031130U JP6217689U JP6217689U JPH031130U JP H031130 U JPH031130 U JP H031130U JP 6217689 U JP6217689 U JP 6217689U JP 6217689 U JP6217689 U JP 6217689U JP H031130 U JPH031130 U JP H031130U
- Authority
- JP
- Japan
- Prior art keywords
- conveying device
- conveying
- objects
- factory
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Description
第１図ａは本考案に係るクリーンルーム対応搬
送装置の一実施例の使用例を示す概略正面図、同
図ｂは搬送装置自体の斜視図、第２図は同使用例
の概略斜視図である。
１……物、１０……クリーンルーム対応搬送装
置、２０……保管場所をなすストツカ。
FIG. 1a is a schematic front view showing an example of use of an embodiment of the clean room compatible transport device according to the present invention, FIG. 1b is a perspective view of the transport device itself, and FIG. 2 is a schematic perspective view of the example of use. . 1... Things, 10... Clean room compatible transport device, 20... Stocker serving as a storage area.
Claims (1)
記物を搬送する搬送装置であつて、この搬送装置
自体にエアの清浄装置が設けられていることを特
徴とするクリーンルーム対応搬送装置。 1. A conveying device for clean rooms, which is a conveying device for conveying objects in a factory that produces objects that are sensitive to dust generation, and is characterized in that the conveying device itself is provided with an air purifying device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6217689U JPH031130U (en) | 1989-05-29 | 1989-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6217689U JPH031130U (en) | 1989-05-29 | 1989-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031130U true JPH031130U (en) | 1991-01-08 |
Family
ID=31591086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6217689U Pending JPH031130U (en) | 1989-05-29 | 1989-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031130U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |
-
1989
- 1989-05-29 JP JP6217689U patent/JPH031130U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |