JPH03113155U - - Google Patents
Info
- Publication number
- JPH03113155U JPH03113155U JP2047190U JP2047190U JPH03113155U JP H03113155 U JPH03113155 U JP H03113155U JP 2047190 U JP2047190 U JP 2047190U JP 2047190 U JP2047190 U JP 2047190U JP H03113155 U JPH03113155 U JP H03113155U
- Authority
- JP
- Japan
- Prior art keywords
- data processing
- containment vessel
- solenoid valve
- processing device
- controls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047190U JPH03113155U (2) | 1990-03-02 | 1990-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047190U JPH03113155U (2) | 1990-03-02 | 1990-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03113155U true JPH03113155U (2) | 1991-11-19 |
Family
ID=31523562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2047190U Pending JPH03113155U (2) | 1990-03-02 | 1990-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03113155U (2) |
-
1990
- 1990-03-02 JP JP2047190U patent/JPH03113155U/ja active Pending
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