JPH03113304A - Method and device for noncontact shape measurement - Google Patents

Abstract

PURPOSE:To measure the shape of a body to be measured according to respective position data on a noncontact displacement gauge and data on distances from the respective position to an irradiation point by irradiating respective positions of a required surface of the body to be measured with light from the noncontact displacement gauge. CONSTITUTION:The body W to be measured is mounted on a holder 11 at the intersection 0 of the axis OA of a theta1 rotary shaft 2 and the axis OB of a theta2 rotary shaft 4. Then the sphere diameter of the laser displacement gauge 10 is set centering on the intersection 0 by the rotary shaft 2 and rotary shaft 4 while covering the body W to be measured. Then a spherical surface is divided at optional angles in the latitude and longitude directions according to the set sphere diameter, a 1st arm 3 and a 2nd arm 5 are moved according to the divided angles, and the shape of the body W to be measured is measured by the displacement gauge 10 without contacting. At this time, the laser light irradiation direction of the displacement gauge 10 is directed to the intersection 0 at all times. At this time, the read shape is more and more precise as the measurement angles of the latitude and longitude are set finely.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method and apparatus for non-contactly measuring a desired surface of an object to be measured.

(Prior art) As shown in FIG. 6, a touch probe is attached to the tip of the tool shaft of a Cartesian coordinate robot, and the shape of the object is measured while moving the tip of the touch probe into contact with the surface of the object. Three-dimensional coordinate measuring devices for measuring are well known.

(Issues to be Solved by the Invention) However, in the above-mentioned conventional technology, although it is possible to measure the surface above the installation stand of the object to be measured, it is impossible to measure the surface on the side where the object is installed using the above-mentioned device. In order to measure the surface on which the device is installed, the object to be measured must be turned over and the shape measured again, which is troublesome.
After the same object to be measured is moved (reversed), its shape is measured again, so it is difficult to achieve positioning accuracy, and it is difficult to accurately measure the entire shape of the object to be measured.

Furthermore, when measuring a flexible object to be measured, the touch probe comes into contact with and buries inside the surface of the object, making it impossible to measure the shape accurately.

(Means for Solving the Problems) The present invention has been made in view of the above-mentioned prior art, and has the following features:
A non-contact displacement meter irradiates light onto the required response position of the object to be measured, and measures the shape of the object based on each position data of the non-contact displacement meter and the distance data from each position to the irradiation point. Contact type shape measurement method: ■ Light is irradiated from a non-contact displacement meter to the required response position of the object to be measured, and a table of the object to be measured is created based on each position data of the non-contact displacement meter and the distance data from each position to the irradiation point. The normal vector of the response position is determined, and in the second step, light is irradiated from the non-contact displacement meter to the desired response position of the measured object from the normal direction again, and each position data of the non-contact displacement meter is irradiated from each position. A non-contact shape measurement method that measures the shape of an object based on distance data to a point.

■ Attach the first arm to the rotatable θ and rotating shaft installed on the base, and attach the 02 rotating shaft to the first arm so that it is rotatable and its axis is orthogonal to the axis of the θ□ rotating shaft. 02 At the tip of the second arm attached to the rotating shaft,
Attach a first bracket that can be raised and lowered, and also attach a θ□ rotation axis parallel to the lifting axis, and attach a 09 rotation axis to the first bracket that is rotatable and whose axis is orthogonal to the axis of the θ4 rotation axis. The gist of this device is a shape measuring device which is attached via a second bracket and has a non-contact displacement measuring device attached to the tip of the 04th rotating shaft. .

(Embodiment) FIGS. 1 and 2 show an embodiment of the present invention, which is a spherical work robot device for measuring the shape of an object to be measured. A first arm 3 is fixed to the base 1 and rotatable θ, and to the rotating shaft 2. The tip 3a of the first arm 3 has an axis OB that is perpendicular to the axis OA of the 08 rotating shaft 2.
A rotating shaft 4 is arranged, and a second arm 5 is fixed to the 62 rotating shaft 4. The second arm 5 is L-shaped, and an L-shaped first bracket 6 that can be raised and lowered is attached to the tip 5a of the second arm 5.

A θ4 rotation shaft 7 is attached to the first bracket 6,
An 81 rotation shaft 9 is attached via a second bracket 8 so as to be orthogonal to the axis of the θ4 rotation shaft 7. 04 A laser displacement meter 10 is detachably attached to the tip of the rotating shaft 9 and is capable of non-contact measurement of the shape of the workpiece W placed on the workpiece holder 11 provided coaxially with the axis OB. There is.

Next, the operation will be explained. The object to be measured W is set at θ4 rotation axis 2
The laser displacement meter 10 is placed on the holder 11 so as to be located at the intersection O between the axis OA of the 08 rotating shaft 4 and the axis OB of the rotating shaft 4.
The orbit range (sphere diameter) γ is set by θ4 rotation axis 2.02 rotation axis 4. Divide the spherical surface into arbitrary angles in the latitude and longitude directions according to the set spherical diameter γ, move the first arm 3 and the second arm 5 based on the divided angles,
The shape of the object W to be measured is measured by the laser displacement meter 10 in a non-contact manner. At this time, the laser irradiation direction of the laser displacement meter 10 is always directed toward the intersection point 0. In this case, latitude.

It goes without saying that the finer the longitude measurement angle, the more accurate the shape can be read.

In addition, if the object to be measured W has a step or the like and the laser beam is blocked, the shape is measured by rotating the rotating shaft 9 and rotating the laser displacement meter 10 (Figures 5a and 5b). reference).

Measure the shape more accurately (the reflected laser may reflect diffusely depending on the angle of the surface the laser hits).
In this case, the shape is further recognized using the measurement method described above,
Based on the data, as shown in Fig. 4, θ, ~04
The shape of the object W is measured by irradiating the object W with a laser perpendicularly (in the normal direction) to each measurement point using the rotating shaft.

In this case, since the shape of the object to be measured W is recognized in advance, the distance between the object to be measured W and the laser displacement meter 10 is reduced, and there is no need to operate the laser displacement meter 10 to the spherical diameter. As described above, accurate measurements can be made by operating the laser along the object to be measured W and irradiating the laser perpendicularly to the object to be measured.

(Effects) According to the present invention, ■ Light is irradiated from a non-contact displacement meter to the required damage position of the object to be measured, and the object to be measured is measured based on each position data of the non-contact displacement meter and the distance data from each position to the irradiation point. A non-contact shape measurement method that measures the shape of an object.■ Light is irradiated from a non-contact displacement meter to the required damage position of the object to be measured, and the data on each position of the non-contact displacement meter and from each position to the irradiation point are The normal vector of the surface response position of the object to be measured is determined based on the distance data of A non-contact shape measuring method that measures the shape of an object based on data on each position of the meter and distance data from each position to the irradiation point. ■ Rotatable θ installed on the base, first on the rotation axis
Attach an arm, attach a 02 rotating shaft to the first arm so that it is rotatable and whose axis is perpendicular to the axis of the rotating shaft at θ, and a second arm that is attached to the tip of the 02 rotating shaft that can be raised and lowered. Attach the first bracket and attach the θ4 rotation axis parallel to the lifting axis, and attach the 04 rotation axis to the second bracket so that it is rotatable to the first bracket and its axis is orthogonal to the axis of the 03 rotation axis. This shape measuring device has a non-contact displacement measuring device attached to the tip of the 04th rotation shaft, so it is possible to measure the shape without contacting the object to be measured. It is possible to accurately measure the entire shape of the object to be measured without inverting the object.

[Brief explanation of drawings]

Fig. 1 is a perspective view of an apparatus according to an embodiment of the present invention, Fig. 2 is a perspective view of the non-contact displacement meter mounting wrist part of Fig. FIG. 5 is an explanatory diagram of the second stage of the invention method, FIG. 5 is an explanatory diagram of the laser displacement meter of FIG. 2 when rotating irradiation, and FIG. 6 is a perspective view of the conventional device. 1... Base 2... θ□ Rotation axis 3... First arm 3a... First arm tip 4... 02 Rotation axis 5... Second arm 5a... Second arm tip 6...First bracket 7...θ4 axis of rotation 8...Second bracket 9...04 axis of rotation 10...Laser displacement meter W...Object to be measured

Claims (3)

[Claims] (1) Irradiate light from a non-contact displacement meter to each desired position on the surface of the object to be measured, and measure the shape of the object based on the position data of the non-contact displacement meter and the distance data from each position to the irradiation point. A non-contact shape measurement method. (2) Irradiate light from a non-contact displacement meter to each desired position on the surface of the object to be measured, and measure each position on the surface of the object based on the position data of the non-contact displacement meter and the distance data from each position to the irradiation point. The normal vector is determined, and in the second step, the non-contact displacement meter irradiates light from the normal direction to each desired position on the object to be measured, and the data on each position of the non-contact displacement meter and from each position to the irradiation point are calculated. A non-contact shape measuring method that measures the shape of an object based on distance data. (3) The first
Attach an arm to the first arm so that it is rotatable and whose axis is perpendicular to the axis of the θ_1 rotation axis.
A rotating shaft is attached, and a first bracket that can be raised and lowered is attached to the tip of the second arm attached to the θ_2 rotating shaft, and a θ_3 rotating shaft is attached parallel to the raising and lowering axis, and the θ_3 rotating shaft is rotatable and Its axis is the θ_
A shape measuring device in which a θ_4 rotation axis is attached via a second bracket so as to be orthogonal to the axis of the 3 rotation axis, and a non-contact displacement measuring device is attached to the tip of the θ_4 rotation axis.