JPH03113830U - - Google Patents
Info
- Publication number
- JPH03113830U JPH03113830U JP2287790U JP2287790U JPH03113830U JP H03113830 U JPH03113830 U JP H03113830U JP 2287790 U JP2287790 U JP 2287790U JP 2287790 U JP2287790 U JP 2287790U JP H03113830 U JPH03113830 U JP H03113830U
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- needles
- ion beam
- film
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electrodes Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2287790U JPH03113830U (cs) | 1990-03-06 | 1990-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2287790U JPH03113830U (cs) | 1990-03-06 | 1990-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03113830U true JPH03113830U (cs) | 1991-11-21 |
Family
ID=31525882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2287790U Pending JPH03113830U (cs) | 1990-03-06 | 1990-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03113830U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006352165A (ja) * | 2006-09-21 | 2006-12-28 | Hitachi Ltd | 不良検査方法および装置 |
-
1990
- 1990-03-06 JP JP2287790U patent/JPH03113830U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006352165A (ja) * | 2006-09-21 | 2006-12-28 | Hitachi Ltd | 不良検査方法および装置 |
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