JPH03117883A - 熱間静水圧加圧装置 - Google Patents

熱間静水圧加圧装置

Info

Publication number
JPH03117883A
JPH03117883A JP1253766A JP25376689A JPH03117883A JP H03117883 A JPH03117883 A JP H03117883A JP 1253766 A JP1253766 A JP 1253766A JP 25376689 A JP25376689 A JP 25376689A JP H03117883 A JPH03117883 A JP H03117883A
Authority
JP
Japan
Prior art keywords
pressure
airtight chamber
gas
outside
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1253766A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549917B2 (fr
Inventor
Takanobu Ryu
龍 孝信
Mikihiro Hayashi
幹洋 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1253766A priority Critical patent/JPH03117883A/ja
Publication of JPH03117883A publication Critical patent/JPH03117883A/ja
Publication of JPH0549917B2 publication Critical patent/JPH0549917B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B30B11/002Isostatic press chambers; Press stands therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Powder Metallurgy (AREA)
JP1253766A 1989-09-30 1989-09-30 熱間静水圧加圧装置 Granted JPH03117883A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1253766A JPH03117883A (ja) 1989-09-30 1989-09-30 熱間静水圧加圧装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1253766A JPH03117883A (ja) 1989-09-30 1989-09-30 熱間静水圧加圧装置

Publications (2)

Publication Number Publication Date
JPH03117883A true JPH03117883A (ja) 1991-05-20
JPH0549917B2 JPH0549917B2 (fr) 1993-07-27

Family

ID=17255844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1253766A Granted JPH03117883A (ja) 1989-09-30 1989-09-30 熱間静水圧加圧装置

Country Status (1)

Country Link
JP (1) JPH03117883A (fr)

Also Published As

Publication number Publication date
JPH0549917B2 (fr) 1993-07-27

Similar Documents

Publication Publication Date Title
CN101809349B (zh) 用于控制或者调节真空阀的方法
KR940006184A (ko) 감압처리장치 및 감압처리방법
GB9419888D0 (en) Apparatus and techiques for separation
KR20090118088A (ko) 슬릿 도어 밀봉 압력의 제어 장치 및 방법
JP2006052846A (ja) 二つの真空室間に配置される真空バルブの制御方法
US20070057214A1 (en) Valve for essentially gastight closing a flow path
AU779608B2 (en) Isostat for the treatment of materials in liquid
JP2009250389A (ja) 封止機構及びこれを用いた熱処理炉
CA2179047A1 (fr) Procede et systeme de regulation d'un fluide sous pression et ensemble soupape utilise selon ce procede
KR20080037018A (ko) 작동 방법 및 작동 장치
US5762314A (en) Diaphragm valve for cryogenic applications
JPH03117883A (ja) 熱間静水圧加圧装置
RU2354500C2 (ru) Газостат
KR101664192B1 (ko) 기판 처리 장치 및 기판 처리 방법
JPH10252943A (ja) 真空バルブ
US3869241A (en) Device for rapid closure and pressurization of a compression chamber
JPH0826394B2 (ja) 仕切弁装置
KR101319768B1 (ko) 진공 배기 헤드
JPS6224239Y2 (fr)
JPS6073336A (ja) サンプリングガス導入装置
GB9800050D0 (en) Means for testing a fluid valve and method therefor
JP3981723B2 (ja) ガス密封装置及びセルの密封構造
KR100507596B1 (ko) 가스차단장치
JP3661950B2 (ja) 半導体製造装置
JP2696920B2 (ja) 雰囲気処理装置