JPH0311873B2 - - Google Patents

Info

Publication number
JPH0311873B2
JPH0311873B2 JP59059610A JP5961084A JPH0311873B2 JP H0311873 B2 JPH0311873 B2 JP H0311873B2 JP 59059610 A JP59059610 A JP 59059610A JP 5961084 A JP5961084 A JP 5961084A JP H0311873 B2 JPH0311873 B2 JP H0311873B2
Authority
JP
Japan
Prior art keywords
electron beam
welding line
deflection
distance
circular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59059610A
Other languages
Japanese (ja)
Other versions
JPS60203374A (en
Inventor
Taizo Iwami
Masashi Yasunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5961084A priority Critical patent/JPS60203374A/en
Publication of JPS60203374A publication Critical patent/JPS60203374A/en
Publication of JPH0311873B2 publication Critical patent/JPH0311873B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/02Control circuits therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、電子ビームを偏向走査して被溶接物
から発生するX線を検出することにより、電子ビ
ームと被溶接物を相対的に移動させて円形溶接線
の中心座標等の位置を自動的に決定する電子ビー
ム溶接機の自動位置決め方法に関するものであ
る。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention detects X-rays generated from the workpiece by deflecting and scanning the electron beam, thereby relatively moving the electron beam and the workpiece. The present invention relates to an automatic positioning method for an electron beam welding machine that automatically determines the position such as the center coordinates of a circular welding line.

〔従来技術〕[Prior art]

第1図は従来の電子ビームの偏向走査による電
子ビーム溶接機の自動位置決め装置を示す構成図
である。図において1は電子ビーム、2は偏向コ
イル、3は偏向コイル2を駆動する電流増幅器、
4は電子ビーム1の偏向量を制御するための信号
発生器、5は被溶接物、6は溶接線、7は被溶接
物6の表面の電子ビーム照射位置から発生するX
線、8はX線7を検出して電気信号に変換するX
線検出子、9はX線検出子8の検出信号を処理す
るX線検出装置、10は信号発生器4の信号とX
線検出装置9の出力信号を処理して溶接線位置を
表示する信号処理表示装置、11はX線検出子
8、X線検出装置9及び信号処理表示装置10か
ら構成される溶接線検出装置である。
FIG. 1 is a block diagram showing a conventional automatic positioning device for an electron beam welding machine using deflection scanning of an electron beam. In the figure, 1 is an electron beam, 2 is a deflection coil, 3 is a current amplifier that drives the deflection coil 2,
4 is a signal generator for controlling the amount of deflection of the electron beam 1; 5 is the object to be welded; 6 is the welding line; and 7 is an X generated from the electron beam irradiation position on the surface of the object to be welded 6.
ray, 8 is an X that detects the X-ray 7 and converts it into an electrical signal.
ray detector; 9 is an X-ray detection device that processes the detection signal of the X-ray detector 8; 10 is a signal generator 4 signal and X-ray detector;
A signal processing and display device that processes the output signal of the line detection device 9 and displays the weld line position; 11 is a weld line detection device that is composed of an X-ray detector 8, an X-ray detection device 9, and a signal processing and display device 10; be.

従来の自動位置決め装置は上記のように構成さ
れ、被溶接物を次の動作により位置決めした後電
子ビーム溶接する。先ず信号発生器4と電流増幅
器3を介して偏向電流が偏向コイル2に流され、
被溶接物5上に集束された電子ビーム1は偏向電
流に追従して被溶接物5上を走査する。走査の際
電子ビーム1の被溶接物5上の照射位置から発生
するX線7は、X線検出子8で検出されたX線検
出装置9で電気信号に変換される。この変換され
た電気信号と偏向コイル2の電流信号が信号処理
表示装置10へ入力され、電子ビーム1の偏向角
度とX線の強弱がブラウン管上に同期して表示さ
れる。第2図はその表示されたパターンを示した
ものである。
The conventional automatic positioning device is configured as described above, and performs electron beam welding after positioning the workpiece by the following operations. First, a deflection current is applied to the deflection coil 2 via the signal generator 4 and the current amplifier 3,
The electron beam 1 focused on the object to be welded 5 scans the object to be welded 5 following the deflection current. During scanning, X-rays 7 generated from the irradiation position of the electron beam 1 on the workpiece 5 are detected by the X-ray detector 8 and converted into electrical signals by the X-ray detection device 9 . The converted electric signal and the current signal of the deflection coil 2 are input to the signal processing display device 10, and the deflection angle of the electron beam 1 and the intensity of the X-rays are displayed on the cathode ray tube in synchronization. FIG. 2 shows the displayed pattern.

第2図において、21は電子ビーム1の表示信
号であり、22は電子ビーム1が偏向走査しない
静止状態での被溶接物5上の照射位置に相当する
電子ビーム軸信号である。なお図の横軸は偏向コ
イル電流を、縦軸はX線の強度を表示す。この図
で表示信号21が途中で減衰しているのは、電子
ビーム1の走査において溶接線6の位置で継目の
隙間に電子ビーム1が入り込み、そのため発生す
るX線の強度が減少してX線検出子8ひいてはX
線検出装置9の電気信号も小さくなるからであ
る。そして位置決めをするには、ブラウン管のパ
ターンを見ながら被溶接物を移動して溶接線6と
電子ビーム軸を一致させる。
In FIG. 2, 21 is a display signal of the electron beam 1, and 22 is an electron beam axis signal corresponding to the irradiation position on the workpiece 5 when the electron beam 1 is in a stationary state without deflection scanning. Note that the horizontal axis of the figure represents the deflection coil current, and the vertical axis represents the intensity of X-rays. The reason why the display signal 21 is attenuated in the middle in this figure is because the electron beam 1 enters the gap between the seams at the welding line 6 during scanning, and as a result, the intensity of the generated X-rays decreases. Line detector 8 and therefore X
This is because the electric signal of the line detection device 9 also becomes smaller. For positioning, the object to be welded is moved while watching the pattern on the cathode ray tube so that the welding line 6 and the electron beam axis are aligned.

従来の自動位置決め装置でこのような動作によ
り位置決めしているため、第3図に示すような円
形の溶接線31においては、溶接線31の中心座
標で被溶接物5を回転し、ブラウン管に表示され
るパターンを見ながら被溶接物5を回転させて電
子ビーム1軸と円形溶接線31とを一致させなけ
ればならなかつた。
Since the conventional automatic positioning device performs positioning by such an operation, in the case of a circular welding line 31 as shown in FIG. The object to be welded 5 had to be rotated while observing the pattern to align one axis of the electron beam with the circular welding line 31.

特に複数の円形溶接線31においては、各々の
円形溶接線31ごとに被溶接物5の回転中心を移
動させ、その都度ブラウン管に表示されるパター
ンを見ながら被溶接物5を回転して位置決めをす
る動作が必要とする等の欠点があつた。
In particular, for a plurality of circular welding lines 31, the center of rotation of the workpiece 5 is moved for each circular welding line 31, and the workpiece 5 is rotated and positioned each time while looking at the pattern displayed on the cathode ray tube. There were some disadvantages, such as the need for multiple operations.

〔発明の概要〕[Summary of the invention]

本発明は、円形溶接線の一箇所の溶接線に電子
ビームを偏向走査して該溶接線を検出し、溶接線
を検出したときの電子ビームの偏向電流量I10
を求める工程と、検出した溶接線を予め設定した
距離Dまで電子ビームの偏向方向と反対に移動さ
せる工程と、距離Dまで移動させた前記溶接線に
電子ビームを偏向走査して該溶接線を検出し、溶
接線を検出したときの電子ビームの偏向電流量I
11を求める工程と、前記偏向電流量I10と該
偏向電流量I11とから電子ビームの偏向角の変
化量として角度βを求め、前記距離Dと該角度β
とに基づいて電子ビーム偏向手段と前記被溶接物
との間の距離lを求める工程と、前記円形溶接線
のX軸方向に電子ビームを偏向走査して溶接線間
を横切つたとき、それぞれの溶接線を検出して電
子ビーム軸から各溶接線までの偏向電流量I1,
I2をそれぞれ求めると共に、該前記偏向電流量
I1,I2に基づいてX軸方向の偏向角度α1,
α2を求める工程と、前記円形溶接線のY軸方向
に電子ビームを偏向走査して溶接線間を横切つた
とき、それぞれの溶接線を検出して電子ビーム軸
から各溶接線までの偏向電流量I3,I4をそれ
ぞれ求めると共に、該前記偏向電流量I3,I4
に基づいてY軸方向の偏向角度α3,α4を求め
る工程と、前記距離lと前記偏向角度α1,α2
とに基づいて電子ビーム軸から各溶接線までの距
離X1,X2を求めると共に、前記距離lと前記
偏向角度α3,α4とに基づいて電子ビーム軸か
ら各溶接線までの距離Y1,Y2を求め、更に距
離X1,X2と距離Y1,Y2とから前記円形溶
接線の中心座標を求める工程と、該円形溶接線の
中心座標の位置に電子ビームの電子ビーム軸を、
又は電子ビームの電子ビーム軸に円形溶接線の中
心位置を一致させる工程とを有しているため、複
数の円形溶接線においても容易に位置決めするこ
とを可能にした電子ビーム溶接機の自動位置決め
方法を提供することにある。
The present invention detects the welding line by deflecting an electron beam to scan a welding line at one location of a circular welding line, and detects the welding line by deflection current amount I10 of the electron beam when the welding line is detected.
a step of moving the detected welding line to a preset distance D in the opposite direction to the deflection direction of the electron beam; and a step of deflecting and scanning the electron beam on the welding line that has been moved to the distance D to detect the welding line. Deflection current amount I of the electron beam when the welding line is detected
11, and obtaining the angle β as the amount of change in the deflection angle of the electron beam from the deflection current amount I10 and the deflection current amount I11, and calculating the distance D and the angle β.
a step of determining the distance l between the electron beam deflection means and the workpiece based on the above, and a step of deflecting and scanning the electron beam in the X-axis direction of the circular welding line to cross between the welding lines, respectively. The amount of deflection current I1 from the electron beam axis to each welding line is detected by detecting the welding line of
I2 is determined, and the deflection angles α1, α1, in the X-axis direction are determined based on the deflection current amounts I1, I2.
The step of determining α2 is the step of scanning the electron beam deflection in the Y-axis direction of the circular weld line, and when crossing between the weld lines, detecting each weld line, and detecting the deflection current from the electron beam axis to each weld line. Determine the amounts I3 and I4, respectively, and calculate the deflection current amounts I3 and I4.
a step of determining the deflection angles α3 and α4 in the Y-axis direction based on the distance l and the deflection angles α1 and α2;
Find the distances X1 and X2 from the electron beam axis to each welding line based on the above, and find the distances Y1 and Y2 from the electron beam axis to each welding line based on the distance l and the deflection angles α3 and α4. , further calculating the center coordinates of the circular welding line from distances X1, X2 and distances Y1, Y2;
or a step of aligning the center position of the circular welding line with the electron beam axis of the electron beam, thereby making it possible to easily position even a plurality of circular welding lines. Our goal is to provide the following.

〔発明の実施例〕[Embodiments of the invention]

第4図は本発明の一実施例を示したものであ
る。図において、1〜9は上記従来装置と同一の
ものである。ただし偏向コイル2は従来装置の場
合と異なり、電子ビーム1を前後左右に走査する
ため、前後左右の4ケ所に設けらている。この偏
向コイル2を4ケ所設けたのに対応して、従来装
置と異なり電流増幅器3と偏向コイル2の間に
は、偏向方向を切換える偏向方向切換器47が設
けられている。投射した電子ビーム1により被溶
接物5から発生するX線は、従来装置と同様にX
線検出子8で検出しX線検出装置9で電気信号に
変換される。その電気信号は偏向量検出装置41
内のピーク検出器46によりピーク値が検出さ
れ、そのピーク時の偏向電流が検出される。次い
でそれらのデータ、即ち被溶接物5と偏向コイル
2の間に距離lと、偏向量検出装置41及びピー
ク検出器46から得られた偏向電流量とをビーム
軸から溶接線及び円形溶接線31の中心座標まで
の距離を計算する演算装置42に入力し、演算す
る。そしてその算出された距離に基いて電子ビー
ム軸と円形溶接線の中心座標が一致するように被
溶接物5を載置したX−Y軸テーブル43をモー
ター44でNC制御装置45を介して移動させ
る。
FIG. 4 shows an embodiment of the present invention. In the figure, numerals 1 to 9 are the same as the conventional device described above. However, unlike the conventional device, the deflection coils 2 are provided at four locations, front, back, left and right, in order to scan the electron beam 1 in the front, back, left and right. Corresponding to the provision of the four deflection coils 2, a deflection direction switch 47 for switching the deflection direction is provided between the current amplifier 3 and the deflection coil 2, unlike the conventional device. The X-rays generated from the workpiece 5 by the projected electron beam 1 are
The radiation is detected by the ray detector 8 and converted into an electrical signal by the X-ray detection device 9. The electric signal is transmitted to the deflection amount detection device 41
A peak value is detected by a peak detector 46 in the inner part, and a deflection current at the peak time is detected. Next, those data, that is, the distance l between the workpiece 5 and the deflection coil 2, and the amount of deflection current obtained from the deflection amount detection device 41 and the peak detector 46 are measured from the beam axis to the welding line and the circular welding line 31. The distance to the center coordinates of is input to the arithmetic unit 42 for calculation. Then, based on the calculated distance, the X-Y axis table 43 on which the workpiece 5 is placed is moved by the motor 44 via the NC control device 45 so that the center coordinates of the electron beam axis and the circular welding line coincide. let

なお偏向量検出装置41、ピーク検出器46及
び演算装置42は、X−Y軸テーブルのそれぞれ
の軸に設けた場合を示したが一系統のものを共有
して使用してもよい。
Note that although the deflection amount detection device 41, the peak detector 46, and the calculation device 42 are shown as being provided on each axis of the X-Y axis table, they may be used in common.

上記のように構成された自動位置決め装置は次
の動作により自動位置決めされる。先ずX−Y軸
テーブル43の上に円形溶接線31を設けた被溶
接物5を載置し、偏向をかけない時の電子ビーム
1の照射位置と円形溶接線31の中心座標がほぼ
一致するように被溶接物5をセツトする。次いで
電子ビーム1の偏向方向がX軸方向となるように
偏向方向切換器47に偏向方向を設定し、第5図
に示すように偏向コイル2に流れる偏向電流によ
り円形溶接線31のX軸方向を円形溶接線31の
2ケ所で横切るように電子ビーム1を走査する。
その際被溶接物5から発生するX線7は円形溶接
線31の個所で減少する。そこで被溶接物5から
発生するX線7をX線検出子8、X線検出装置9
により検出し、電気信号に変換してピーク検出器
46でX線信号の減少を検出し、偏向量検出装置
41でそのときの偏向電流量を求める。
The automatic positioning device configured as described above performs automatic positioning by the following operation. First, the workpiece 5 with the circular welding line 31 is placed on the X-Y axis table 43, and the irradiation position of the electron beam 1 when no deflection is applied and the center coordinates of the circular welding line 31 almost match. The workpiece 5 to be welded is set as follows. Next, the deflection direction is set in the deflection direction switch 47 so that the deflection direction of the electron beam 1 is in the X-axis direction, and as shown in FIG. The electron beam 1 is scanned so as to cross the circular welding line 31 at two locations.
At this time, the X-rays 7 generated from the workpiece 5 are reduced at the circular weld line 31. Therefore, the X-rays 7 generated from the workpiece 5 are detected by an X-ray detector 8 and an X-ray detector 9.
is detected, converted into an electrical signal, a peak detector 46 detects a decrease in the X-ray signal, and a deflection amount detection device 41 determines the amount of deflection current at that time.

ついで同様の動作をY軸方向についても行うた
め、偏向方向切換器47で電子ビーム1の偏向方
向をY軸方向にして同様の動作を行う。その結果
第5図に示すように、X軸、Y軸について合計4
ケ所でのX線信号の減少及びその時の偏向電流が
求められる。
Next, in order to perform the same operation in the Y-axis direction, the deflection direction switch 47 changes the deflection direction of the electron beam 1 to the Y-axis direction, and the same operation is performed. As a result, as shown in Figure 5, a total of 4
The decrease in the X-ray signal at these locations and the deflection current at that time are determined.

ところで、円形溶接線31のほぼ中心座標とし
た位置から円形溶接線31の1つの点までの電子
ビーム1の偏向電流をI1その時の偏向角度をα1
すると、偏向電流I1を偏向角度α1とは比例するか
ら、その関係は、次式で示される。
By the way, if the deflection current of the electron beam 1 from the approximate center coordinates of the circular welding line 31 to one point on the circular welding line 31 is I1 and the deflection angle at that time is α1 , then the deflection current I1 is the deflection angle Since it is proportional to α 1 , the relationship is shown by the following equation.

α1=AI1 ……(1) なおここでAは装置の特性で決まる定数であ
る。また偏向をかけない時の電子ビーム1の照射
位置と円形溶接線31上の1つの点まで距離、つ
まり第5図に示す距離X1は、被溶接物5と偏向
コイル2の中心との距離を既知のlとすると、次
式で示す関係で求められる。
α 1 =AI 1 ...(1) Here, A is a constant determined by the characteristics of the device. The distance between the irradiation position of the electron beam 1 and one point on the circular welding line 31 when no deflection is applied, that is, the distance X 1 shown in FIG. 5, is the distance between the workpiece 5 and the center of the deflection coil 2. Assuming that l is a known value, it is determined by the relationship shown in the following equation.

X1=ltaoα1 ……(2) 同様にして第5図に示すように円形溶接線31
の4点までの距離X1,X2,Y1,Y2が求められ
る。X1,X2,Y1,Y2の距離から円形溶接線31
の中心座標(X,Y)は次式から求められる。
X 1 = l tao α 1 ...(2) Similarly, as shown in Fig. 5, the circular weld line 31
The distances X 1 , X 2 , Y 1 , and Y 2 to the four points are calculated. Circular welding line 31 from distances X 1 , X 2 , Y 1 , Y 2
The center coordinates (X, Y) of can be obtained from the following equation.

X=X1+X2/2 ……(3) Y=Y1+Y2/2 ……(4) そこでX線信号の減少及びそのときの偏向電流
のデータは、演算装置42に入力され、上記の演
算操作により円形溶接線31の中心座標(X・
Y)が決められ、NC制御装置45によりモータ
ー44を介してX−Y軸テーブルを移動させるか
又は電子銃を移動させて電子ビーム1の軸と円形
溶接線31の中心座標を一致させる。
X = X 1 + The center coordinates of the circular welding line 31 (X
Y) is determined, and the NC controller 45 moves the X-Y axis table via the motor 44 or moves the electron gun to match the axis of the electron beam 1 with the center coordinates of the circular welding line 31.

一般に円形溶接線31の場合半径rは既知であ
るから、自動位置決めにより中心さえ一致させれ
ばX−Y軸を半径rだけ移動させ精度よく自動的
に溶接される。
Generally, in the case of a circular welding line 31, the radius r is known, so if the centers are matched by automatic positioning, the X-Y axes can be moved by the radius r and welding can be performed automatically and accurately.

上記の説明では偏向コイル2の中心又は偏向レ
ンズと被溶接物5との間の距離lは既に演算され
て求められている状態から説明を開始している
が、ここで、その距離lの演算方法を第6図に基
いて説明する。先ず電子ビーム1をX軸方向に走
査し、X線7の減少から溶接線を検出して溶接線
までの電子ビーム1の偏向電流量I10を求める。
次いでX−Y軸テーブル43又は電子銃をX軸方
向に溶接線の位置をあらかじめ既知の設定距離D
だけ移動させる。次に同じX軸方向に電子ビーム
1を走査させ、同様の手段で溶接線を検出して溶
接線までの電子ビーム1の偏向電流量I11を求め
る。ところで偏向電流量I10及びI11をあらかじめ
既知の設定距離Dだけ移動させたことに伴う電子
ビーム1の偏向角の変化量としての角度βは、次
式により求められる。
In the above explanation, the explanation starts from the state where the distance l between the center of the deflection coil 2 or the deflection lens and the workpiece 5 has already been calculated and determined. The method will be explained based on FIG. First, the electron beam 1 is scanned in the X-axis direction, the welding line is detected from the decrease in the X-rays 7, and the amount of deflection current I10 of the electron beam 1 up to the welding line is determined.
Next, move the X-Y axis table 43 or the electron gun to move the welding line position in the X-axis direction by a previously known set distance D.
move only. Next, the electron beam 1 is scanned in the same X-axis direction, the welding line is detected by the same means, and the amount of deflection current I 11 of the electron beam 1 up to the welding line is determined. Incidentally, the angle β, which is the amount of change in the deflection angle of the electron beam 1 caused by moving the deflection currents I 10 and I 11 by a previously known set distance D, can be found by the following equation.

β=A|I10−I11| ……(5) ここにAは定数である。 β=A|I 10 −I 11 | ...(5) Here, A is a constant.

他方この角度βと設定距離Dと偏向コイル中心
と被溶接物5との距離lは、次式の関係はある。
On the other hand, the angle β, the set distance D, and the distance l between the center of the deflection coil and the workpiece 5 have the following relationship.

l=D/β ……(6) 従つてこの式(6)によりβ、Dが既知であるとl
が求められる。したがつて、偏向電流量I10及び
I11のデータを演算装置42に入力し、(5)式、(6)
式に基いて計算すれば距離lを求めることができ
る。
l=D/β...(6) Therefore, by this equation (6), if β and D are known, l
is required. Therefore, the amount of deflection current I 10 and
Input the data of I 11 to the arithmetic unit 42, and use equation (5) and (6)
The distance l can be found by calculating based on the formula.

このようにして求められた距離lに基いて、上
述した円形溶接線31の中心座標の位置が決めら
れる。
Based on the distance l obtained in this way, the position of the center coordinates of the circular welding line 31 described above is determined.

上記実施例では溶接線検出にX線を用いたが、
電子ビーム1の照射により二次電子が被溶接物5
から反射するため、二次電子を溶接線の検出に用
いても本発明の目的を同様に達成することができ
る。さらに上記実施例では、演算装置42で演算
して求められた円形溶接線31の中心と電子ビー
ム1の軸とを一致させる方法として、X−Y軸テ
ーブル5の移動をNC制御装置44により制御し
ているが、電子ビーム1の電子銃のX−Y移動装
置の駆動をNC制御装置を用いて電子ビーム1を
移動させてもよい。勿論演算装置42から得られ
た円形溶接線の中心等をブラウン管等の表示器に
表示し、手動でX−Y軸テーブル又は電子ビーム
1の電子銃を移動させてもよい。さらには円形溶
接線31の中心座標の補正をビーム偏向で行うこ
ともできる。
In the above embodiment, X-rays were used to detect welding lines, but
Irradiation of the electron beam 1 causes secondary electrons to be applied to the workpiece 5.
Since the secondary electrons are reflected from the welding line, the object of the present invention can be similarly achieved even if the secondary electrons are used for detecting the welding line. Furthermore, in the above embodiment, the movement of the X-Y axis table 5 is controlled by the NC control device 44 as a method for aligning the center of the circular welding line 31 calculated by the calculation device 42 with the axis of the electron beam 1. However, the electron beam 1 may be moved by using an NC control device to drive the X-Y moving device of the electron gun for the electron beam 1. Of course, the center of the circular welding line obtained from the arithmetic unit 42 may be displayed on a display such as a cathode ray tube, and the X-Y axis table or the electron gun of the electron beam 1 may be moved manually. Furthermore, the center coordinates of the circular welding line 31 can also be corrected by beam deflection.

〔発明の効果〕〔Effect of the invention〕

この発明は以上説明したとおり、円形溶接線の
中心座標が従来装置と異なり自動的に正確に決め
られるため、溶接に要する時間、労力を大巾に短
縮しうる効果がある。また、従来装置の場合と異
なり、複数の円形溶接線においても連続して自動
的に座標位置の位置決めができるので、著しく溶
接の労力、時間が短縮され正確な溶接が可能とな
る。
As explained above, the present invention has the effect of greatly reducing the time and labor required for welding, since the center coordinates of the circular weld line are automatically and accurately determined, unlike conventional devices. Furthermore, unlike in the case of conventional devices, the coordinate positions can be continuously and automatically determined even for a plurality of circular welding lines, so welding labor and time are significantly reduced and accurate welding is possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の自動位置決め装置の構成図、第
2図は従来の自動位置決め装置中の信号処理表示
装置に表示される表示信号を示す線図、第3図は
円形溶接線を有する被溶接物の斜視図、第4図は
この発明−実施例を示す構成図、第5図は電子ビ
ームのビーム軸から溶接線までの距離と偏向角の
関係を示す説明図、第6図は偏向コイルから被溶
接物までの距離を求めるための説明図である。 図において1は電子ビーム、2は偏向コイル、
3は電流増幅器、4は信号発生器、5は被溶接
物、7はX線、8はX線検出子、9はX線検出装
置、31は円形溶接線、41は偏向量検出装置、
42は演算装置、43はX−Y軸テーブル、44
はモータ、45はNC制御装置、46はピーク検
出器、47は偏向方向切換器。なお、図中同一符
号は同一又は相当部分を示すものとする。
Fig. 1 is a configuration diagram of a conventional automatic positioning device, Fig. 2 is a line diagram showing display signals displayed on a signal processing display device in a conventional automatic positioning device, and Fig. 3 is a welded object having a circular weld line. Fig. 4 is a configuration diagram showing an embodiment of the present invention; Fig. 5 is an explanatory diagram showing the relationship between the distance from the beam axis of the electron beam to the welding line and the deflection angle; Fig. 6 is a deflection coil. FIG. 3 is an explanatory diagram for determining the distance from to the object to be welded. In the figure, 1 is an electron beam, 2 is a deflection coil,
3 is a current amplifier, 4 is a signal generator, 5 is a workpiece to be welded, 7 is an X-ray, 8 is an X-ray detector, 9 is an X-ray detection device, 31 is a circular welding line, 41 is a deflection amount detection device,
42 is an arithmetic unit, 43 is an X-Y axis table, 44
is a motor, 45 is an NC control device, 46 is a peak detector, and 47 is a deflection direction switch. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】 1 電子ビーム偏向手段の電子ビームを被溶接物
の円形溶接線に偏向走査させて、円形溶接線の中
心座標の位置を自動的に決定する電子ビーム溶接
機の自動位置決め方法において、 前記円形溶接線の一箇所の溶接線に電子ビーム
を偏向走査して該溶接線を検出し、溶接線を検出
したときの電子ビームの偏向電流量I10を求め
る工程と、 検出した溶接線を予め設定した距離Dまで電子
ビームの偏向方向と反対に移動させる工程と、 距離Dまで移動させた前記溶接線に電子ビーム
を偏向走査して該溶接線を検出し、溶接線を検出
したときの電子ビームの偏向電流量I11を求め
る工程と、 前記偏向電流量I10と該偏向電流量I11と
から電子ビームの偏向角の変化量として角度βを
求め、前記距離Dと該角度βとに基づいて前記電
子ビーム偏向手段と前記被溶接物との間の距離l
を求める工程と、 前記円形溶接線のX軸方向に電子ビームを偏向
走査して溶接線間を横切つたとき、それぞれの溶
接線を検出して電子ビーム軸から各溶接線までの
偏向電流量I1,I2をそれぞれ求めると共に、
該偏向電流量I1,I2に基づいてX軸方向の偏
向角度α1,α2を求める工程と、 前記円形溶接線のY軸方向に電子ビームを偏向
走査して溶接線間を横切つたとき、それぞれの溶
接線を検出して電子ビーム軸から各溶接線までの
偏向電流量I3,I4をそれぞれ求めると共に、
該偏向電流量I3,I4に基づいてY軸方向の偏
向角度α3,α4を求める工程と、 前記距離lと前記偏向角度α1,α2とに基づ
いて電子ビーム軸から各溶接線までの距離X1,
X2を求めると共に、前記距離lと前記偏向角度
α3,α4とに基づいて電子ビーム軸から各溶接
線までの距離Y1,Y2を求め、更に距離X1,
X2と距離Y1,Y2とから前記円形溶接線の中
心座標を求める工程と、 該円形溶接線の中心座標の位置に電子ビームの
電子ビーム軸を、又は電子ビームの電子ビーム軸
に円形溶接線の中心位置を一致させる工程と を有する電子ビーム溶接線の自動位置決め方法。
[Claims] 1. An automatic positioning method for an electron beam welding machine that automatically determines the position of the center coordinates of the circular welding line by deflecting and scanning the electron beam of the electron beam deflecting means onto the circular welding line of the workpiece. , a step of deflecting an electron beam to scan a welding line at one location of the circular welding line to detect the welding line, and determining an amount of deflection current I10 of the electron beam when the welding line is detected; a step of moving the electron beam to a preset distance D in the opposite direction to the deflection direction of the electron beam; detecting the welding line by deflecting the electron beam to scan the welding line that has been moved to the distance D; and detecting the welding line; determining an angle β as a change in the deflection angle of the electron beam from the deflection current amount I10 and the deflection current amount I11, and based on the distance D and the angle β. and the distance l between the electron beam deflection means and the workpiece
When the electron beam is deflected and scanned in the X-axis direction of the circular welding line and crosses between the welding lines, each welding line is detected and the amount of deflection current from the electron beam axis to each welding line is calculated. While finding I1 and I2,
a step of determining deflection angles α1 and α2 in the X-axis direction based on the deflection current amounts I1 and I2; and a step of deflecting and scanning the electron beam in the Y-axis direction of the circular welding line to cross between the welding lines, respectively. Detect the welding lines of and calculate the deflection current amounts I3 and I4 from the electron beam axis to each welding line, respectively,
a step of determining deflection angles α3, α4 in the Y-axis direction based on the deflection current amounts I3, I4; and determining distances X1, X1, from the electron beam axis to each welding line based on the distance l and the deflection angles α1, α2.
In addition to determining X2, distances Y1 and Y2 from the electron beam axis to each welding line are determined based on the distance l and the deflection angles α3 and α4, and further distances X1,
a step of determining the center coordinates of the circular welding line from A method for automatically positioning an electron beam welding line, comprising a step of aligning center positions.
JP5961084A 1984-03-29 1984-03-29 Automatic positioning device of electron beam welding machine Granted JPS60203374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5961084A JPS60203374A (en) 1984-03-29 1984-03-29 Automatic positioning device of electron beam welding machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5961084A JPS60203374A (en) 1984-03-29 1984-03-29 Automatic positioning device of electron beam welding machine

Publications (2)

Publication Number Publication Date
JPS60203374A JPS60203374A (en) 1985-10-14
JPH0311873B2 true JPH0311873B2 (en) 1991-02-18

Family

ID=13118188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5961084A Granted JPS60203374A (en) 1984-03-29 1984-03-29 Automatic positioning device of electron beam welding machine

Country Status (1)

Country Link
JP (1) JPS60203374A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007216242A (en) * 2006-02-14 2007-08-30 Toyota Motor Corp Welding position correction method in skip welding

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514040A (en) * 1974-07-02 1976-01-13 Nippon Electric Co Enjoyosetsusenno ennochushinni kadenryushisennoseishi
JPS5277847A (en) * 1975-12-23 1977-06-30 Mitsubishi Electric Corp Electron beam welding device
JPS52100346A (en) * 1976-02-20 1977-08-23 Nippon Electric Co Apparatus for following weld lines

Also Published As

Publication number Publication date
JPS60203374A (en) 1985-10-14

Similar Documents

Publication Publication Date Title
US5081353A (en) Combined scanning electron and scanning tunnelling microscope apparatus and method
EP0024884B1 (en) Method of detecting the position of a substrate using an electron beam
JPH0311873B2 (en)
US6323498B1 (en) Charged particle beam irradiation apparatus and irradiation method using the apparatus
JP3400608B2 (en) Scanning electron microscope
JP2569968B2 (en) Beam alignment adjustment method for electron beam processing machine
JP2666251B2 (en) Charged particle beam scanning analyzer
JPS59223185A (en) Automatic positioning device of electron beam welding machine
JP2899642B2 (en) Processing position detection device and processing position detection method
JPH03193270A (en) Welding position detection device and method
JP2587439B2 (en) Fully automatic electron beam welding equipment
JPS63187627A (en) Automatic focusing method for charged particle beam aligner
JPH07286842A (en) Dimensional inspection method and device
JP2651158B2 (en) Automatic groove detection method and apparatus
JP2582152B2 (en) Deflection correction method for deflection system drawing field
JPH034884Y2 (en)
JPH10321173A (en) Beam position correction device
JPS6284881A (en) Detecting system for thick plate weld line
JP2753309B2 (en) Industrial robot with processing start point detection function
JP2865416B2 (en) Robot controller
JPS61134611A (en) Instrument for measuring shape in furnace
JPH09147778A (en) Charged particle beam equipment
JPS629218B2 (en)
JPS62101379A (en) Weld line tracing detection device
JPS6237123Y2 (en)