JPH03120033U - - Google Patents
Info
- Publication number
- JPH03120033U JPH03120033U JP3021490U JP3021490U JPH03120033U JP H03120033 U JPH03120033 U JP H03120033U JP 3021490 U JP3021490 U JP 3021490U JP 3021490 U JP3021490 U JP 3021490U JP H03120033 U JPH03120033 U JP H03120033U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- local cover
- cylindrical
- local
- bristle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
第１図はこの考案による円筒研削盤の局所カバ
ーを、工作物の軸方向からみた説明図である。
１……局所カバー、２……工作物、３……シー
ル材。
FIG. 1 is an explanatory view of the local cover of the cylindrical grinder according to this invention, viewed from the axial direction of the workpiece. 1... local cover, 2... workpiece, 3... sealing material.
Claims (1)
い、切削液の飛散を防止するための局所カバーに
おいて、 局所カバーと工作物の半導体表面との隙間に、
植毛方向が工作物の回転方向に傾斜して工作物表
面に当接摺動可能な毛ブラシをシール材として配
設したことを特徴とする円筒研削盤の局所カバー
。[Scope of claim for utility model registration] In a local cover for covering the grinding wheel and workpiece of a cylindrical grinder for semiconductors to prevent cutting fluid from scattering, in the gap between the local cover and the semiconductor surface of the workpiece,
A local cover for a cylindrical grinding machine, characterized in that a bristle brush whose bristle direction is inclined to the rotational direction of the workpiece and is capable of sliding in contact with the workpiece surface is provided as a sealing material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3021490U JPH03120033U (en) | 1990-03-23 | 1990-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3021490U JPH03120033U (en) | 1990-03-23 | 1990-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120033U true JPH03120033U (en) | 1991-12-10 |
Family
ID=31532942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3021490U Pending JPH03120033U (en) | 1990-03-23 | 1990-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120033U (en) |
-
1990
- 1990-03-23 JP JP3021490U patent/JPH03120033U/ja active Pending