JPH03120558U - - Google Patents
Info
- Publication number
- JPH03120558U JPH03120558U JP2902490U JP2902490U JPH03120558U JP H03120558 U JPH03120558 U JP H03120558U JP 2902490 U JP2902490 U JP 2902490U JP 2902490 U JP2902490 U JP 2902490U JP H03120558 U JPH03120558 U JP H03120558U
- Authority
- JP
- Japan
- Prior art keywords
- seal
- atmosphere
- provided inside
- evaporation device
- tip material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2902490U JPH03120558U (cs) | 1990-03-23 | 1990-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2902490U JPH03120558U (cs) | 1990-03-23 | 1990-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120558U true JPH03120558U (cs) | 1991-12-11 |
Family
ID=31531805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2902490U Pending JPH03120558U (cs) | 1990-03-23 | 1990-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120558U (cs) |
-
1990
- 1990-03-23 JP JP2902490U patent/JPH03120558U/ja active Pending
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