JPH03120572U - - Google Patents
Info
- Publication number
- JPH03120572U JPH03120572U JP2805190U JP2805190U JPH03120572U JP H03120572 U JPH03120572 U JP H03120572U JP 2805190 U JP2805190 U JP 2805190U JP 2805190 U JP2805190 U JP 2805190U JP H03120572 U JPH03120572 U JP H03120572U
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- box
- reaction tube
- vapor phase
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 3
- 239000012808 vapor phase Substances 0.000 claims 2
- 150000004678 hydrides Chemical class 0.000 claims 1
- 239000012299 nitrogen atmosphere Substances 0.000 claims 1
- 150000002902 organometallic compounds Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2805190U JPH03120572U (2) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2805190U JPH03120572U (2) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120572U true JPH03120572U (2) | 1991-12-11 |
Family
ID=31530875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2805190U Pending JPH03120572U (2) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120572U (2) |
-
1990
- 1990-03-19 JP JP2805190U patent/JPH03120572U/ja active Pending
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