JPH03121651U - - Google Patents
Info
- Publication number
- JPH03121651U JPH03121651U JP3164590U JP3164590U JPH03121651U JP H03121651 U JPH03121651 U JP H03121651U JP 3164590 U JP3164590 U JP 3164590U JP 3164590 U JP3164590 U JP 3164590U JP H03121651 U JPH03121651 U JP H03121651U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- ion implantation
- doping
- impurity ions
- implantation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164590U JPH03121651U (2) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164590U JPH03121651U (2) | 1990-03-27 | 1990-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03121651U true JPH03121651U (2) | 1991-12-12 |
Family
ID=31534438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3164590U Pending JPH03121651U (2) | 1990-03-27 | 1990-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03121651U (2) |
-
1990
- 1990-03-27 JP JP3164590U patent/JPH03121651U/ja active Pending
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