JPH03122531U - - Google Patents
Info
- Publication number
- JPH03122531U JPH03122531U JP3049790U JP3049790U JPH03122531U JP H03122531 U JPH03122531 U JP H03122531U JP 3049790 U JP3049790 U JP 3049790U JP 3049790 U JP3049790 U JP 3049790U JP H03122531 U JPH03122531 U JP H03122531U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- silicon wafer
- heat treatment
- high temperature
- quartz boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000017525 heat dissipation Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3049790U JPH03122531U (th) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3049790U JPH03122531U (th) | 1990-03-27 | 1990-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03122531U true JPH03122531U (th) | 1991-12-13 |
Family
ID=31533208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3049790U Pending JPH03122531U (th) | 1990-03-27 | 1990-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03122531U (th) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252932A (ja) * | 1986-04-25 | 1987-11-04 | Matsushita Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
-
1990
- 1990-03-27 JP JP3049790U patent/JPH03122531U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252932A (ja) * | 1986-04-25 | 1987-11-04 | Matsushita Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
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