JPH0312438U - - Google Patents
Info
- Publication number
- JPH0312438U JPH0312438U JP1989073806U JP7380689U JPH0312438U JP H0312438 U JPH0312438 U JP H0312438U JP 1989073806 U JP1989073806 U JP 1989073806U JP 7380689 U JP7380689 U JP 7380689U JP H0312438 U JPH0312438 U JP H0312438U
- Authority
- JP
- Japan
- Prior art keywords
- transfer machine
- grip part
- gripping portion
- wafer transfer
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989073806U JPH0312438U (da) | 1989-06-23 | 1989-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989073806U JPH0312438U (da) | 1989-06-23 | 1989-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312438U true JPH0312438U (da) | 1991-02-07 |
Family
ID=31612939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989073806U Pending JPH0312438U (da) | 1989-06-23 | 1989-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312438U (da) |
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1989
- 1989-06-23 JP JP1989073806U patent/JPH0312438U/ja active Pending