JPH03125212U - - Google Patents
Info
- Publication number
- JPH03125212U JPH03125212U JP3417890U JP3417890U JPH03125212U JP H03125212 U JPH03125212 U JP H03125212U JP 3417890 U JP3417890 U JP 3417890U JP 3417890 U JP3417890 U JP 3417890U JP H03125212 U JPH03125212 U JP H03125212U
- Authority
- JP
- Japan
- Prior art keywords
- scale
- position information
- relative movement
- sensor board
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3417890U JPH03125212U (cs) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3417890U JPH03125212U (cs) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125212U true JPH03125212U (cs) | 1991-12-18 |
Family
ID=31538427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3417890U Pending JPH03125212U (cs) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125212U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011517766A (ja) * | 2007-06-27 | 2011-06-16 | ブルックス オートメーション インコーポレイテッド | 多次元位置センサ |
-
1990
- 1990-03-30 JP JP3417890U patent/JPH03125212U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011517766A (ja) * | 2007-06-27 | 2011-06-16 | ブルックス オートメーション インコーポレイテッド | 多次元位置センサ |
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