JPH031335Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial field of application The present invention is applicable to clean room cargo transport equipment that is used to transport cargo such as semiconductors, which are extremely dust-resistant, in a clean room.
This relates to cargo transport equipment installed in a clean room that blows clean air downward from the ceiling and sucks the descending air below the floor.

Conventional Structures and Problems Therein, various measures have been taken to prevent dust generated on the load transfer device side from leaking into the clean room and having an adverse effect on the load transfer equipment as described above. That is, in the past, a self-propelled cart and a rail for supporting and guiding the self-propelled cart were arranged in a traveling duct, and a connecting portion connected upward from the self-propelled cart was formed on the top plate of the traveling duct. At the same time, a load support part is provided in the connecting part, and a suction duct is communicated with the traveling duct, and a suction force is applied to the inside of the traveling duct through the slit. This prevents the generated dust from having a negative impact on the load and the clean room side.
According to this conventional method, clean air blown downward from the ceiling is applied to the load to prevent dust from adhering to the load, but this method is effective in maintaining the cleanliness of the entire room in all clean rooms. It has to be raised. This means that the cleanliness level has to be increased even in a clean room, which does not need to be improved so much from the perspective of work, resulting in high equipment investment.

Purpose of the invention The purpose of the present invention is to provide cargo transport equipment in a clean room that can improve the cleanliness of only the necessary locations corresponding to the cargo in all rooms.

Structure of the Invention In order to achieve the above object, the load transfer equipment in a clean room according to the present invention includes a self-propelled cart and a rail for supporting and guiding the self-propelled cart, which are arranged in a traveling duct, and A connecting part connected upward from the truck is passed through a slit formed in the top plate of the clean air, a load supporting part is provided in the connecting part, and an air duct is integrally connected to the upper part of the traveling duct below the ceiling-side filter. A load moving space in which the load supporting section is located is formed in the air duct, and a clean unit is connected to the travel duct at an appropriate position, and a filter is installed between the clean unit and the load moving space. communicated through.

Embodiment and operation An embodiment of the present invention will be described below based on the drawings. 1 is a clean room, in which clean air 5 in a supply space 4 formed between a ceiling wall 2 and a filter 3 is blown down through this filter 3, and the descending clean air 5 is passed through a mesh-shaped floor 6 and It is designed to suck air under the floor. A load conveying device 7 is disposed in the upper part of the clean room 1 . That is, 8 is a self-propelled trolley, which has running wheels 9 at its lower part, and a load support part 11 is attached to its upper part via a connecting part 10. 1
Reference numeral 2 denotes a rail that supports and guides the self-propelled vehicle 8, and includes a power supply rail 13 and the like for controlling and automatically traveling the self-propelled vehicle 8. The self-propelled trolley 8
and the rail 12 are arranged inside a box-shaped running duct 14. A slit 15 is formed in the top plate of the running duct 14 and extends over the entire length of the running route, and a pair of left and right backflow prevention plates 16A, 16B are formed in the top plate of the running duct 14.
is provided in the seal type slit portion. The connecting portion 10 is located in this seal type slit portion. The backflow prevention plates 16A, 16B have upper horizontal plate portions 17A, 1
7B, vertical plate portions 18A, 18B vertically provided from the inner ends of these upper horizontal plate portions 17A, 17B, and lower horizontal plate portions 19A, 19B, and is fixedly held by placing the upper horizontal plate portions 17A, 17B on the top plate, applying the presser plates 20A, 20B, and then tightening the bolts 21A, 21B. Therefore, bolt 21A,
By performing the tightening/loosening operation of 21B, the slit width can be adjusted by moving both backflow prevention plates 16A, 16B separately in the width direction A and B. Below the filter 3, the traveling duct 14
An air duct 22 is integrally provided in the upper part of the load support section 11.
A cargo moving space 23 is formed in which the cargo moving space 23 is located. The load support section 11 supports the load 24 in the load movement space 23.
support. Here, the load 24 indicates a case capable of storing semiconductors and the like. Clean units 25 are attached to the side of the traveling duct 14 at predetermined intervals (for example, 3 m), and the fans 26, which are suction ports of these clean units 25, are communicated with the traveling duct 14, and the clean units 25 are connected to the traveling duct 14. 25 and the cargo moving space 23 through a filter 27
communicated through.

Next, the operation of the above embodiment will be explained. A self-propelled cart 8 supporting a load 24 on the load support portion 11 automatically travels within a travel duct 14 while being guided by rails 12, and the load 24 and the like move within a load movement space 23. At this time, the air in the travel duct 14 is suctioned and removed by the operation of each clean unit 25, and becomes clean air 28 through the filter 27. It is sprayed from the side. This cargo movement space 2
The air in 3 is supplied to the clean unit 25 mentioned above.
It flows into the running duct 14 through the sealed slit part by the suction effect of the slit.

As described above, the downward air flow in the sealed slit portion can prevent dust generated on the self-propelled cart 8 side from flowing out to the load 24 side. Note that in a configuration in which a pair of left and right elastic sealing materials are simply provided for sealing, the deformation of the elastic sealing materials causes the soil air in the travel duct 14 to flow into the cargo transfer space 23.
However, as in this embodiment, the backflow prevention plate 1 having vertical plate portions 18A and 18B
By providing 6A and 16B, backflow of soil air to the load 24 side can be prevented, and a high degree of cleanliness (class 10) can be obtained. In addition, by moving the backflow prevention plates 16A and 16B to freely adjust the slit width, fixing can be performed under optimal conditions.

Effects of the invention According to the invention having the above configuration, the following effects can be expected. In other words, by arranging an air duct along the entire length above the traveling duct, and by forming a cargo movement space in which the load support is located by this air duct and separating it from the clean room, multiple clean rooms can be created. Even if the degree of cleanliness differs between the two, clean air with a constant degree of cleanliness can always be applied to the load. As a result, it is possible to maintain a high level of cleanliness only in the cargo movement space where it is necessary, and the clean air can be efficiently circulated and used by the clean unit.
It is possible to reduce the cost of equipment investment and save energy.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, with FIG. 1 being a side view and FIG. 2 being a longitudinal sectional view of the main parts. 1...Clean room, 3...Filter, 4
...Supply space, 5...Clean air, 6...
Floor, 7... Load transport device, 8... Self-propelled trolley, 10...
...Connection part, 11...Load support part, 12...Rail,
14...Travel duct, 15...Slit, 16
A, 16B... Backflow prevention plate, 18A, 18
B... Vertical plate part, 20A, 20B... Pressing plate, 2
1A, 21B... Bolt, 22... Air duct, 23... Load movement space, 24... Load, 25...
Clean unit, 27...Filter, 28...
…Clean air.

Claims (1)

[Scope of utility model registration request] It is a cargo transport equipment installed in a clean room that blows clean air downward from the ceiling and sucks the descending air below the floor, and is used to transport a self-propelled cart and rails that support and guide the self-propelled cart. At the same time, a connecting portion connected upward from the self-propelled cart is passed through a slit formed in the top plate of the traveling duct, a load supporting portion is provided in the connecting portion, and a load supporting portion is provided below the ceiling-side filter. An air duct is integrally provided in the upper part of the traveling duct, a cargo moving space in which the load supporting section is located is formed in the air duct, and a clean unit is connected to the traveling duct at an appropriate position, A load transfer facility in a clean room, characterized in that the clean unit and the load transfer space are communicated through a filter.