JPH0314454U - - Google Patents
Info
- Publication number
- JPH0314454U JPH0314454U JP7456189U JP7456189U JPH0314454U JP H0314454 U JPH0314454 U JP H0314454U JP 7456189 U JP7456189 U JP 7456189U JP 7456189 U JP7456189 U JP 7456189U JP H0314454 U JPH0314454 U JP H0314454U
- Authority
- JP
- Japan
- Prior art keywords
- reference frame
- substrate
- glass substrate
- sets
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図ａおよびｂは、この考案によるガラス基
板検査用フレキシブル載置台の実施例における全
体構造図および部分図、第２図ａおよびｂは、ガ
ラス基板検査方法の概念の説明図、第３図はガラ
ス基板検査装置の従来の載置台の構造図である。
１……ガラス基板、２……検査光学系、２ａ…
…光源、２ｂ，２ｃ……欠陥検出器、３……載置
台、３ａ，５ａ……基準枠、３ｂ，５ｂ……エツ
ジ、３ｃ……補助枠、４……ベース盤、５……フ
レキシブル載置台、５ｃ，５ｄ……カーソル式ホ
ルダー、６……ストツパ、６ａ……貫通孔、６ｂ
……スプリング、６ｃ……ロツド、６ｄ……当接
ゴム、６ｅ……ノブ。
Figures 1a and b are overall structural diagrams and partial views of an embodiment of the flexible mounting table for glass substrate inspection according to this invention, Figures 2a and b are illustrations of the concept of the glass substrate inspection method, and Figure 3 1 is a structural diagram of a conventional mounting table for a glass substrate inspection device. 1...Glass substrate, 2...Inspection optical system, 2a...
...Light source, 2b, 2c...Defect detector, 3...Mounting table, 3a, 5a...Reference frame, 3b, 5b...Edge, 3c...Auxiliary frame, 4...Base board, 5...Flexible mounting Placement stand, 5c, 5d...Cursor type holder, 6...Stopper, 6a...Through hole, 6b
... Spring, 6c... Rod, 6d... Contact rubber, 6e... Knob.
Claims (1)
に対して上方より検査光を照射し、該基板の表面
および裏面に対してそれぞれ接近して設けられた
２組の欠陥検出器により、該基板の散乱光を検出
して欠陥を検査するガラス基板検査装置において
、上記２組の欠陥検出器の先端をなすギヤツプに
挿入できる厚さを有し、検査対象の各種異なるサ
イズの上記ガラス基板のうちの最大サイズの該基
板を載置できる基準枠と、該基準枠と同一の厚さ
を有して基準枠の内側に着脱自在に嵌入され、、
該基準枠の隣接する２辺に沿つてそれぞれ移動し
、上記最大サイズ以下で、一底の下限サイズ以上
の任意の上記ガラス基板に対して、上記基準枠の
１角に載置部を設定する２個のカーソル式ホルダ
ーとにより構成されたことを特徴とする、ガラス
基板検査用フレキシブル載置台。 A four-sided glass substrate to be inspected placed horizontally is irradiated with inspection light from above, and two sets of defect detectors are installed close to each other on the front and back surfaces of the substrate. In the glass substrate inspection apparatus for detecting defects by detecting scattered light of the substrate, the glass substrate has a thickness that can be inserted into the gap forming the tips of the two sets of defect detectors, and the glass substrate of various different sizes to be inspected. a reference frame on which the largest size of the substrate can be placed; a reference frame having the same thickness as the reference frame and detachably fitted inside the reference frame;
Move along two adjacent sides of the reference frame, and set a mounting section at one corner of the reference frame for any of the glass substrates that are smaller than the maximum size and larger than the lower limit size of one bottom. A flexible mounting table for inspecting glass substrates, characterized by comprising two cursor type holders.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7456189U JPH0725679Y2 (en) | 1989-06-26 | 1989-06-26 | Flexible mounting table for glass substrate inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7456189U JPH0725679Y2 (en) | 1989-06-26 | 1989-06-26 | Flexible mounting table for glass substrate inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314454U true JPH0314454U (en) | 1991-02-14 |
| JPH0725679Y2 JPH0725679Y2 (en) | 1995-06-07 |
Family
ID=31614357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7456189U Expired - Lifetime JPH0725679Y2 (en) | 1989-06-26 | 1989-06-26 | Flexible mounting table for glass substrate inspection |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725679Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4803940B2 (en) * | 2000-04-26 | 2011-10-26 | オリンパス株式会社 | Holder mechanism |
| JP4659813B2 (en) * | 2007-12-27 | 2011-03-30 | セイコーエプソン株式会社 | Lighting device for display |
-
1989
- 1989-06-26 JP JP7456189U patent/JPH0725679Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725679Y2 (en) | 1995-06-07 |
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