JPH03150911A - Harmonic wave coupling vibration - Google Patents

Harmonic wave coupling vibration

Info

Publication number
JPH03150911A
JPH03150911A JP28962189A JP28962189A JPH03150911A JP H03150911 A JPH03150911 A JP H03150911A JP 28962189 A JP28962189 A JP 28962189A JP 28962189 A JP28962189 A JP 28962189A JP H03150911 A JPH03150911 A JP H03150911A
Authority
JP
Japan
Prior art keywords
vibration
long side
displacement
harmonic
side vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28962189A
Other languages
Japanese (ja)
Inventor
Fumio Kimura
文雄 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Electronic Components Ltd
Original Assignee
Seiko Electronic Components Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electronic Components Ltd filed Critical Seiko Electronic Components Ltd
Priority to JP28962189A priority Critical patent/JPH03150911A/en
Publication of JPH03150911A publication Critical patent/JPH03150911A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To make the coupling between long side vibration and short side vibration stable and to obtain a high accuracy temperature characteristic by forming integrally a support in the vicinity of a nodal point of the vibration generated at 3 division points of each side by a 3rd harmonic vibration. CONSTITUTION:Let a size of a short side of a vibration section 1 be W and a size of a long side be L, then broken lines show one maximum displacement of the vibration of a 3rd harmonic wave, a vibration displacement UL is a long side vibration displacement and a vibration displacement UW is a short side vibration displacement. Four supports in parallel with the long side direction are formed integrally in the vicinity B of two nodal points near the middle among 3 division points of the end face of the long side vibration part. Thus, the coupling between the long side vibration and the short side vibration is made stable and a high accuracy temperature characteristic is obtained.

Description

【発明の詳細な説明】 (産業上の利用分野] 本発明は、マイクロコンピュータ−、コードレステレフ
ォン等の分野、及び自動車無線、航空無線等の分野に利
用される高精度結合振動子、特にGTカット水晶振動子
に関するものである。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to high-precision coupled resonators used in fields such as microcomputers and cordless telephones, and fields such as automobile radio and aviation radio, particularly GT-cut It relates to crystal oscillators.

[発明の概要] 本発明は、2つの振動モードの結合を利用して、高精度
な温度特性を実現する高調波結合振動子、特に、第3次
高調波で振動するGTカット水晶振動子において、第3
次高調波振動によって、各辺の3分割点に発生する振動
のノーダル点の近傍に支持部を一体形成する事によって
、長辺振動と短辺振動との結合を安定化し、結果として
、高精度温度特性を得るものである。
[Summary of the Invention] The present invention provides a harmonic-coupled resonator that realizes highly accurate temperature characteristics by utilizing the coupling of two vibration modes, particularly a GT-cut crystal resonator that vibrates at the third harmonic. , 3rd
By integrally forming a support near the nodal point of vibration generated at the three-division point of each side due to harmonic vibration, the coupling between long side vibration and short side vibration is stabilized, resulting in high precision. This is to obtain temperature characteristics.

【従来の技術1 長辺振動と短辺振動の結合を利用した振動子としてよ(
知られるGTカット水晶振動子は、その温度特性が非常
に良好な事でよく知られている。
[Conventional technology 1] As a vibrator that utilizes the combination of long-side vibration and short-side vibration (
The known GT cut crystal resonator is well known for its very good temperature characteristics.

ここで、温度特性とは、温度変化に対する周波数の変化
である。ちなみに、GTカット水晶振動子においては、
その温度特性は、−30℃から70℃の温度範囲におい
て、周波数変化率が±2ppm以内となる事が振動理論
から予想されている。
Here, the temperature characteristic is a change in frequency with respect to a change in temperature. By the way, for GT cut crystal resonators,
Regarding its temperature characteristics, vibration theory predicts that the frequency change rate will be within ±2 ppm in the temperature range from -30°C to 70°C.

また、水晶振動子を用いた発振回路のモジュール化、及
び多機能化が進行している。最近、市場の要請において
、基準信号の高周波化が望まれている、GTカット水晶
振動子においても各辺の寸法を短かくすることにより、
高周波化が望まれている。ところが、GTカット水晶振
動子においては、その製造プロセスに起因する加工上の
制約から形状や寸法精度に限界があり、たんなる形状寸
法の縮小による高周波化は非常に困難である。そこで、
形状が一定の条件でオーバートーン振動のモードを用い
た高周波化、すなわち、高調波GTカット水晶振動子が
最近、注目されている。
Furthermore, oscillation circuits using crystal resonators are becoming more modular and multifunctional. Recently, in response to market demands, higher frequency reference signals have been desired, and by shortening the dimensions of each side of GT cut crystal resonators,
Higher frequencies are desired. However, in a GT-cut crystal resonator, there are limits to its shape and dimensional accuracy due to processing constraints resulting from its manufacturing process, and it is extremely difficult to increase the frequency by simply reducing the shape and dimensions. Therefore,
Recently, attention has been paid to high-frequency crystal resonators using an overtone vibration mode under constant shape conditions, that is, harmonic GT-cut crystal resonators.

第2図は従来のGTカット水晶振動子の形状と第3次高
調波による振動モードを示す平面図である。図において
、1は振動部であり、2は支持部である。また破線で示
したのが振動モードの一方の変形を示すものである。こ
の振動モードにおいて、矢示Uwの変位が、短辺振動変
位であり、長辺振動変位ULである。この時短辺振動変
位Uwに注目すれば、4つのノーダル点■と6つの変位
最大点■を持っている。この2つのノーダル点■は、振
動部長辺寸法Wをほぼ3等分する点である。同様に、長
辺振動変位ULに関しても、4つのノーダル点■と6つ
の変位最大点■を持っている。さらに、これら2つのノ
ーダル点■は、振動部長辺寸法りをほぼ3等分する点と
なっている。
FIG. 2 is a plan view showing the shape of a conventional GT-cut crystal resonator and the vibration mode due to the third harmonic. In the figure, 1 is a vibrating part, and 2 is a supporting part. Furthermore, the broken line indicates the deformation of one of the vibration modes. In this vibration mode, the displacement indicated by the arrow Uw is the short side vibration displacement and the long side vibration displacement UL. At this time, if we pay attention to the short side vibration displacement Uw, it has four nodal points ■ and six maximum displacement points ■. These two nodal points {circle over (2)} are points that approximately divide the vibration long side dimension W into three equal parts. Similarly, regarding the long side vibration displacement UL, there are four nodal points ■ and six maximum displacement points ■. Furthermore, these two nodal points (2) are points that approximately divide the vibration long side dimension into three equal parts.

〔発明が解決しようとする課題] 上記した従来の構造において支持部2は、長辺振動変位
ULの最大点0部の近傍に形成されている為に、長辺振
動の弾性的な性質及び電気的な性質を、大きく阻害して
いる。その為に、長辺振動と短辺振動の結合は、非常に
不安定なものとなっており、GTカット振動子本来の高
精度温度特性が実現しにくいという問題があった。
[Problems to be Solved by the Invention] In the conventional structure described above, since the support part 2 is formed near the maximum point 0 of the long side vibration displacement UL, the elastic properties of the long side vibration and the electric This greatly impedes the characteristics of Therefore, the coupling between long-side vibration and short-side vibration is extremely unstable, and there is a problem in that it is difficult to realize the highly accurate temperature characteristics inherent to a GT cut resonator.

本発明は、以上の問題点を除去し、本来の高精度温度特
性を容易に実現しながら、かつ小型をも実現することを
目的として、第3次高調波によるGTカット水晶振動子
を提供するものである。
The present invention provides a GT-cut crystal resonator using the third harmonic, with the aim of eliminating the above-mentioned problems, easily realizing the original high-precision temperature characteristics, and realizing a small size. It is something.

〔課題を解決するための手段] 本発明は上記GTカット水晶振動子を得るために、振動
部と支持部が一体に形成され、長辺振動と短辺振動が結
合した振動モードであって、第3次高調波によって振動
する高調波結合振動子において、前記振動部の2つの長
辺および、または2つの短辺の各辺を、3分割した中央
寄りの2点の近傍に前記支持部を形成することにより目
的を達成するものである。
[Means for Solving the Problems] In order to obtain the above-mentioned GT-cut crystal resonator, the present invention provides a vibration mode in which a vibrating part and a support part are integrally formed, and a long side vibration and a short side vibration are combined, In a harmonic-coupled vibrator that vibrates due to third-order harmonics, the supporting portion is placed near two points near the center of each of the two long sides and/or two short sides of the vibrating portion divided into three. The goal is to be achieved by forming it.

[作用] 次に、本発明の作用効果について詳述すると第3図は、
長辺振動変位を例示した1つの辺部の平面図である0図
において、1は、振動部である。
[Function] Next, the function and effect of the present invention will be explained in detail. FIG.
In Figure 0, which is a plan view of one side portion illustrating long side vibration displacement, 1 is a vibrating portion.

振動部1は、長辺寸法がし、短辺寸法がWである1図中
の破線が長辺振動変位ULである。このしLは、第2図
で説明した様に、2つのノーダル点■と3つの最大変位
点■を持っている。
In the vibrating section 1, the long side dimension is W, and the short side dimension is W. The broken line in FIG. 1 is the long side vibration displacement UL. As explained in FIG. 2, this line L has two nodal points ■ and three maximum displacement points ■.

第2図で説明した従来の振動子においては、第3図中の
A部に支持部が一体形成されている。このA部は、最大
変位点■の近傍である。この場合、長辺振動は、支持部
形成による応力印加が原因で、著しく抑制されており、
前述した様に、不安定な結合状態を招いている。
In the conventional vibrator illustrated in FIG. 2, a support portion is integrally formed in the portion A in FIG. This part A is near the maximum displacement point (2). In this case, the long side vibration is significantly suppressed due to the stress applied by the support part formation.
As mentioned above, this leads to an unstable bonding state.

それに対して、ノーダル点■の近傍すなわち8部に支持
部を形成する場合を考λる。ノーダル点■は、振動変位
UL、は、定常的にOである。よってこの部分に応力が
印加されても振動に影響を与^ない、すなわち、安定な
結合状態が維持され、第3次高調波においても本来の超
高精度温度特性が実現できるのである。
On the other hand, consider the case where the support portion is formed in the vicinity of the nodal point {circle around (2)}, that is, in the 8th part. At the nodal point ■, the vibration displacement UL is constantly O. Therefore, even if stress is applied to this part, it will not affect the vibration, that is, a stable coupling state will be maintained, and the original ultra-high precision temperature characteristics can be achieved even at the third harmonic.

以上の様に、振動のノーダル点近傍の部分は、振動変位
が非常に小さい。よって、この部分に支持部が一体形成
されても、振動の弾性的及び電気的特性に影響を与^る
事はない。その結果、長辺振動と短辺振動との結合は、
非常に安定なものとなり、高精度の温度特性が実現でき
た。
As described above, the vibration displacement in the vicinity of the nodal point of vibration is very small. Therefore, even if the support part is integrally formed in this part, it will not affect the elastic and electrical characteristics of vibration. As a result, the coupling between long-side vibration and short-side vibration is
It was extremely stable and achieved highly accurate temperature characteristics.

[実施例1 まず本発明に係わる結振動子の大きな特徴は、長辺振動
と短辺振動の弾性的かつ電気的な結合により、超高精度
温度特性が得られる点にある。この様な特性を得る為に
は、安定な両振動の結合を実現する必要がある。
[Example 1] First, a major feature of the coupled vibrator according to the present invention is that ultra-high precision temperature characteristics can be obtained by elastically and electrically coupling long-side vibration and short-side vibration. In order to obtain such characteristics, it is necessary to realize stable coupling of both vibrations.

第1図は、本発明に基ずいた一実施例の平面図である8
図において、1は振動部であり、その短辺寸法はWであ
り、長辺寸法はLである。また破線で示したのが、3次
高調波の振動の一方の最大変位である。振動変位tJL
が、長辺振動変位であり、Uwが短辺振動変位である。
FIG. 1 is a plan view of an embodiment based on the present invention.
In the figure, 1 is a vibrating part, the short side of which is W, and the long side of which is L. Furthermore, the dashed line indicates the maximum displacement of one of the third harmonic vibrations. Vibration displacement tJL
is the long side vibration displacement, and Uw is the short side vibration displacement.

7は、長辺方向に平行な4つの支持部であり、この支持
部7は、長辺振動部の端面な3分割した中央寄りの2点
よりなるノーダル点の近傍0部より一体形成されている
。この一体形成された支持部形状7のは、振動子の収容
器形状及びその他の条件によって任意に選択でき、例久
ば第1図に示す支持部2のような形状であってもよい、
なぜなら、ノーダル点近傍0部より支持部を一体形成し
た事により支持部形状が長辺振動に影響を与えないから
である。
Reference numeral 7 denotes four supporting parts parallel to the long side direction, and these supporting parts 7 are integrally formed from a part 0 near a nodal point consisting of two points near the center of the end face of the long side vibrating part divided into three parts. There is. The shape of the integrally formed support part 7 can be arbitrarily selected depending on the shape of the vibrator container and other conditions, and may be, for example, the shape of the support part 2 shown in FIG. 1.
This is because the shape of the support part does not affect the long-side vibration since the support part is integrally formed from the 0 part near the nodal point.

以上の実施例は、長辺方向の端面に4本の支持部7を設
けたが、この理論は短辺方向の各辺の2点に設けても同
じ効果が得られるものである。さらに長辺と短辺の双方
の辺に支持部を設けることも必要に応じて任意である。
In the above embodiment, four supports 7 are provided on the end faces in the long side direction, but according to this theory, the same effect can be obtained even if the support parts 7 are provided at two points on each side in the short side direction. Furthermore, it is optional to provide support portions on both the long sides and the short sides, if necessary.

次に、第4図のグラフは5本発明の実施前の3次高調波
結合振動子の周波数温度特性を示すグラフである。同図
の縦軸は周波数変化率(ppm)であり、横軸は)温度
であり、その温度特性は、大きなバラツキを持っている
、本来のGTカット水晶振動子の備^るべき±2ppm
という高精度な温度特性を実現する事は得られていない
、それに対し第5図のグラフは1本発明を実施した3次
高調波結合振動子の周波数温度特性を示すグラフであり
、縦横軸は、第4図と同じである。第5図において、温
度特性の持つバラツキは、非常に小さ(、約±3ppm
以内になっており、ノータル点からの支持部形成によっ
て、結合の安定性が著しく増加している事がわかる。
Next, the graph of FIG. 4 is a graph showing the frequency-temperature characteristics of the third-order harmonic coupled resonator before implementation of the present invention. The vertical axis of the figure is the frequency change rate (ppm), and the horizontal axis is the temperature.The temperature characteristics have a large variation, and the ±2 ppm that the original GT cut crystal resonator should have.
However, the graph in Figure 5 shows the frequency-temperature characteristics of a third harmonic coupled resonator according to the present invention, and the vertical and horizontal axes are , is the same as in FIG. In Figure 5, the variation in temperature characteristics is very small (approximately ±3 ppm).
It can be seen that the stability of the bond is significantly increased by forming the support part from the notal point.

[発明の効果〕 この様に本発明の実施によって、従来と同一の寸法であ
っても、その周波数は3倍の高いものであり、その温度
特性は±2ppmという高精度が実現できるのである。
[Effects of the Invention] As described above, by carrying out the present invention, even if the dimensions are the same as those of the conventional device, the frequency is three times higher, and the temperature characteristics can be as highly accurate as ±2 ppm.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の実施例の振動子の平面図である。 第2図は、従来の第3次高調波結合振動子の形状と振動
変位を示す平面図。 第3図は1本発明の要部とノーダル点及び最大変位点を
示す平面図。 第4図は、従来の形状における第3次高調波結合振動子
の周波数温度特性を示すグラフ。 第5図は、本発明による3次高調波結合振動子の周波数
温度特性を示すグラフ。 1 ・ 2 ・ ■・ ■・ ■・ ■・ ■・ ■・ 7 ・ L 振動部 支持部 短辺振動によるノーダル点 短辺振動による最大変位点 長辺振動によるノーダル点 長辺振動による最大変位点 長辺振動の最大変位点 長辺振動のノーダル点 本発明の支持部 第3次高調波長辺振動変位 Llw  ・ W ・ 第3次高調波長辺振動変位 振動部の長辺寸法 振動部の短辺寸法 以
FIG. 1 is a plan view of a vibrator according to an embodiment of the present invention. FIG. 2 is a plan view showing the shape and vibration displacement of a conventional third-order harmonic coupled vibrator. FIG. 3 is a plan view showing the main parts of the present invention, the nodal point, and the maximum displacement point. FIG. 4 is a graph showing the frequency-temperature characteristics of a third-order harmonic coupled resonator in a conventional shape. FIG. 5 is a graph showing the frequency-temperature characteristics of the third-order harmonic coupled resonator according to the present invention. 1 ・ 2 ・ ■・ ■・ ■・ ■・ ■・ ■・ 7 ・ L Nodal point due to short side vibration of the vibrating part support Maximum displacement point due to short side vibration Nodal point due to long side vibration Maximum displacement point length due to long side vibration Maximum displacement point of side vibration Nodal point of long side vibration Support part of the present invention 3rd harmonic wavelength Side vibration displacement Llw ・ W ・ 3rd harmonic wavelength Side vibration displacement Long side dimension of the vibrating part Short side dimension of the vibrating part

Claims (1)

【特許請求の範囲】[Claims]  振動部と支持部が一体に形成され、長辺振動と短辺振
動が結合した振動モードであって、第3次高調波によっ
て振動する高調波結合振動子において、前記振動部の2
つの長辺および、または2つの短辺の各辺を、3分割し
た中央寄りの2点の近傍に前記支持部を形成したことを
特徴とする高調波結合振動子。
In a harmonic-coupled vibrator in which the vibrating part and the support part are integrally formed, the vibration mode is a combination of long side vibration and short side vibration, and the vibration mode is vibrated by a third harmonic, two of the vibrating parts
A harmonic coupling vibrator characterized in that the supporting portions are formed in the vicinity of two points near the center of three long sides and/or two short sides divided into three.
JP28962189A 1989-11-07 1989-11-07 Harmonic wave coupling vibration Pending JPH03150911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28962189A JPH03150911A (en) 1989-11-07 1989-11-07 Harmonic wave coupling vibration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28962189A JPH03150911A (en) 1989-11-07 1989-11-07 Harmonic wave coupling vibration

Publications (1)

Publication Number Publication Date
JPH03150911A true JPH03150911A (en) 1991-06-27

Family

ID=17745606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28962189A Pending JPH03150911A (en) 1989-11-07 1989-11-07 Harmonic wave coupling vibration

Country Status (1)

Country Link
JP (1) JPH03150911A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128716B2 (en) 2001-02-02 2006-10-31 Nippon Telegraph And Telephone Corporation Blood flowmeter and sensor part of the blood flowmeter
CN102655400A (en) * 2011-02-23 2012-09-05 日本电波工业株式会社 Gt-cut quartz crystal resonator
JP2012175520A (en) * 2011-02-23 2012-09-10 Nippon Dempa Kogyo Co Ltd Crystal oscillator
US9543923B2 (en) 2013-12-24 2017-01-10 Nihon Dempa Kogyo Co., Ltd. Crystal resonator including blank and supporting portion

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149486A (en) * 1976-06-08 1977-12-12 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS5585120A (en) * 1978-12-22 1980-06-26 Seiko Instr & Electronics Ltd Small sized crystal oscillator of profile oscillation mode
JPS5689113A (en) * 1979-12-20 1981-07-20 Seiko Instr & Electronics Ltd Thin type quartz oscillator
JPS59104812A (en) * 1982-12-08 1984-06-16 Kinseki Kk contour quartz crystal

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149486A (en) * 1976-06-08 1977-12-12 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS5585120A (en) * 1978-12-22 1980-06-26 Seiko Instr & Electronics Ltd Small sized crystal oscillator of profile oscillation mode
JPS5689113A (en) * 1979-12-20 1981-07-20 Seiko Instr & Electronics Ltd Thin type quartz oscillator
JPS59104812A (en) * 1982-12-08 1984-06-16 Kinseki Kk contour quartz crystal

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128716B2 (en) 2001-02-02 2006-10-31 Nippon Telegraph And Telephone Corporation Blood flowmeter and sensor part of the blood flowmeter
CN102655400A (en) * 2011-02-23 2012-09-05 日本电波工业株式会社 Gt-cut quartz crystal resonator
JP2012175520A (en) * 2011-02-23 2012-09-10 Nippon Dempa Kogyo Co Ltd Crystal oscillator
US8957569B2 (en) 2011-02-23 2015-02-17 Nihon Dempa Kogyo Co., Ltd. GT-cut quartz crystal resonator
EP2493072A3 (en) * 2011-02-23 2015-04-08 Nihon Dempa Kogyo Co., Ltd. GT-cut quartz crystal resonator
US9543923B2 (en) 2013-12-24 2017-01-10 Nihon Dempa Kogyo Co., Ltd. Crystal resonator including blank and supporting portion

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