JPH0317809U - - Google Patents
Info
- Publication number
- JPH0317809U JPH0317809U JP2328389U JP2328389U JPH0317809U JP H0317809 U JPH0317809 U JP H0317809U JP 2328389 U JP2328389 U JP 2328389U JP 2328389 U JP2328389 U JP 2328389U JP H0317809 U JPH0317809 U JP H0317809U
- Authority
- JP
- Japan
- Prior art keywords
- rate detector
- flow path
- metal core
- flow rate
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Flow Control (AREA)
Description
第１図は、この考案にかかる圧力レギユレータ
兼用フローコントローラ要部断面図、第２図はこ
の考案にかかる圧力レギユレータ兼用フローコン
トローラの変形実施例のノズルとフラツパ部分の
断面図である。
１…ケース本体、２…流量検出器、２１…流入
口、２２…流出口、３…金属コア、３１…ガス流
路、３２…ノズル、４…導線、５…電流制御装置
、６…フラツパ、７…圧力センサ、４０…流路（
二次側）。
FIG. 1 is a sectional view of the essential parts of the pressure regulator/flow controller according to this invention, and FIG. 2 is a sectional view of the nozzle and flap portions of a modified embodiment of the pressure regulator/flow controller according to this invention. DESCRIPTION OF SYMBOLS 1...Case body, 2...Flow rate detector, 21...Inflow port, 22...Outlet port, 3...Metal core, 31...Gas flow path, 32...Nozzle, 4...Conducting wire, 5...Current control device, 6...Flapper, 7...Pressure sensor, 40...Flow path (
Secondary side).
Claims (1)
と共に該流路を前記流量検出器の流出口に連通接
続し且つ外側には導線を巻装した金属コアと、前
記ノズル出口に開閉自在に一定間隔で近接配置し
た磁性金属製フラツパと、前記ノズル出口側流路
に設置した圧力センサと、前記流量検出器と金属
コアに巻装した導線と圧力センサとを接続した電
流制御装置と、より成ることを特徴とする圧力レ
ギユレータ兼用フローコントローラ。 a flow rate detector; a metal core having a flow path and a nozzle inside thereof, the flow path being connected to an outlet of the flow rate detector; and a metal core having a conducting wire wound on the outside; A current control device that connects magnetic metal flappers arranged close to each other at regular intervals, a pressure sensor installed in the flow path on the outlet side of the nozzle, and a conductive wire wrapped around the flow rate detector and a metal core, and A flow controller that also functions as a pressure regulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2328389U JPH0317809U (en) | 1989-02-28 | 1989-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2328389U JPH0317809U (en) | 1989-02-28 | 1989-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317809U true JPH0317809U (en) | 1991-02-21 |
Family
ID=31526271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2328389U Pending JPH0317809U (en) | 1989-02-28 | 1989-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317809U (en) |
-
1989
- 1989-02-28 JP JP2328389U patent/JPH0317809U/ja active Pending
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