JPH0317902B2 - - Google Patents

Info

Publication number: JPH0317902B2
Authority: JP; Japan
Prior art keywords: film; vacuum; organic; forming; substrate
Prior art date: 1984-10-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP20617884A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6186970A (ja

Inventor

Kyuzo Nakamura

Yoshifumi Oota

Takeshi Momono

Yoshikazu Takahashi

Masayuki Iijima

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ulvac Inc

Original Assignee

Ulvac Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-10-03

Filing date

1984-10-03

Publication date

1991-03-11

1984-10-03 Application filed by Ulvac Inc filed Critical Ulvac Inc

1984-10-03 Priority to JP20617884A priority Critical patent/JPS6186970A/ja

1986-05-02 Publication of JPS6186970A publication Critical patent/JPS6186970A/ja

1991-03-11 Publication of JPH0317902B2 publication Critical patent/JPH0317902B2/ja

Status Granted legal-status Critical Current

Links

238000000034 method Methods 0.000 claims description 17
239000010409 thin film Substances 0.000 claims description 12
238000001704 evaporation Methods 0.000 claims description 9
230000008020 evaporation Effects 0.000 claims description 9
239000003999 initiator Substances 0.000 claims description 8
229920005989 resin Polymers 0.000 claims description 8
239000011347 resin Substances 0.000 claims description 8
239000000758 substrate Substances 0.000 claims description 8
239000000203 mixture Substances 0.000 claims description 6
239000000178 monomer Substances 0.000 claims description 5
239000002244 precipitate Substances 0.000 claims 1
239000010408 film Substances 0.000 description 24
229910052751 metal Inorganic materials 0.000 description 10
239000002184 metal Substances 0.000 description 10
239000002985 plastic film Substances 0.000 description 8
229920006255 plastic film Polymers 0.000 description 7
229910052782 aluminium Inorganic materials 0.000 description 6
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
239000000463 material Substances 0.000 description 5
238000007796 conventional method Methods 0.000 description 4
238000001816 cooling Methods 0.000 description 4
239000003960 organic solvent Substances 0.000 description 4
NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
238000000576 coating method Methods 0.000 description 3
229920006267 polyester film Polymers 0.000 description 3
244000028419 Styrax benzoin Species 0.000 description 2
235000000126 Styrax benzoin Nutrition 0.000 description 2
235000008411 Sumatra benzointree Nutrition 0.000 description 2
229960002130 benzoin Drugs 0.000 description 2
238000000151 deposition Methods 0.000 description 2
230000008021 deposition Effects 0.000 description 2
239000000428 dust Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000005566 electron beam evaporation Methods 0.000 description 2
235000019382 gum benzoic Nutrition 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
229910052753 mercury Inorganic materials 0.000 description 2
229920003023 plastic Polymers 0.000 description 2
-1 polyol acrylate Chemical class 0.000 description 2
KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 2
230000001681 protective effect Effects 0.000 description 2
238000007740 vapor deposition Methods 0.000 description 2
CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
239000004721 Polyphenylene oxide Substances 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
150000005215 alkyl ethers Chemical class 0.000 description 1
RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
239000012965 benzophenone Substances 0.000 description 1
125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
239000003990 capacitor Substances 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000001035 drying Methods 0.000 description 1
UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
239000007788 liquid Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000005192 partition Methods 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920000728 polyester Polymers 0.000 description 1
229920000570 polyether Polymers 0.000 description 1
229920005862 polyol Polymers 0.000 description 1
QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical compound OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
238000009751 slip forming Methods 0.000 description 1
239000002904 solvent Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
231100000331 toxic Toxicity 0.000 description 1
230000002588 toxic effect Effects 0.000 description 1
231100000419 toxicity Toxicity 0.000 description 1
230000001988 toxicity Effects 0.000 description 1
229920006305 unsaturated polyester Polymers 0.000 description 1
238000007738 vacuum evaporation Methods 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)
Application Of Or Painting With Fluid Materials (AREA)

JP20617884A 1984-10-03 1984-10-03 有機薄膜の形成法 Granted JPS6186970A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP20617884A JPS6186970A (ja)	1984-10-03	1984-10-03	有機薄膜の形成法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP20617884A JPS6186970A (ja)	1984-10-03	1984-10-03	有機薄膜の形成法

Publications (2)

Publication Number	Publication Date
JPS6186970A JPS6186970A (ja)	1986-05-02
JPH0317902B2 true JPH0317902B2 (fr)	1991-03-11

Family

ID=16519102

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP20617884A Granted JPS6186970A (ja)	1984-10-03	1984-10-03	有機薄膜の形成法

Country Status (1)

Country	Link
JP (1)	JPS6186970A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4851652B2 (ja) *	2000-02-09	2012-01-11	日本特殊陶業株式会社	配線基板及びその製造方法
JP5081712B2 (ja) *	2008-05-02	2012-11-28	富士フイルム株式会社	成膜装置
JP7363056B2 (ja) *	2019-03-01	2023-10-18	株式会社ニデック	ハードコート付きレンズの製造方法
WO2022047947A1 (fr) *	2020-09-05	2022-03-10	昆山鑫美源电子科技有限公司	Dispositif de revêtement sous vide à multiples rouleaux

1984
- 1984-10-03 JP JP20617884A patent/JPS6186970A/ja active Granted

Also Published As

Publication number	Publication date
JPS6186970A (ja)	1986-05-02

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