JPH0317929A - 電子管用の含浸熱陰極 - Google Patents
電子管用の含浸熱陰極Info
- Publication number
- JPH0317929A JPH0317929A JP2141214A JP14121490A JPH0317929A JP H0317929 A JPH0317929 A JP H0317929A JP 2141214 A JP2141214 A JP 2141214A JP 14121490 A JP14121490 A JP 14121490A JP H0317929 A JPH0317929 A JP H0317929A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- slits
- cathode
- hot cathode
- microns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 abstract description 14
- 239000010937 tungsten Substances 0.000 abstract description 14
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052788 barium Inorganic materials 0.000 abstract description 11
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 abstract description 10
- 238000005530 etching Methods 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- QKYBEKAEVQPNIN-UHFFFAOYSA-N barium(2+);oxido(oxo)alumane Chemical compound [Ba+2].[O-][Al]=O.[O-][Al]=O QKYBEKAEVQPNIN-UHFFFAOYSA-N 0.000 description 5
- XFWJKVMFIVXPKK-UHFFFAOYSA-N calcium;oxido(oxo)alumane Chemical compound [Ca+2].[O-][Al]=O.[O-][Al]=O XFWJKVMFIVXPKK-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 239000011593 sulfur Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- VVTRNRPINJRHBQ-UHFFFAOYSA-N [Cl].[Ar] Chemical compound [Cl].[Ar] VVTRNRPINJRHBQ-UHFFFAOYSA-N 0.000 description 1
- IGUHATROZYFXKR-UHFFFAOYSA-N [W].[Ir] Chemical compound [W].[Ir] IGUHATROZYFXKR-UHFFFAOYSA-N 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 150000001552 barium Chemical class 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- YXIFBDPASYPBNG-UHFFFAOYSA-N osmium tungsten Chemical compound [W].[Os] YXIFBDPASYPBNG-UHFFFAOYSA-N 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 229910000753 refractory alloy Inorganic materials 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- -1 sulfur hexafluorophosphate Chemical compound 0.000 description 1
- 150000003657 tungsten Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/28—Dispenser-type cathodes, e.g. L-cathode
Landscapes
- Solid Thermionic Cathode (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8907084A FR2647952A1 (fr) | 1989-05-30 | 1989-05-30 | Cathode thermoelectronique impregnee pour tube electronique |
| FR8907084 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317929A true JPH0317929A (ja) | 1991-01-25 |
Family
ID=9382156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2141214A Pending JPH0317929A (ja) | 1989-05-30 | 1990-05-30 | 電子管用の含浸熱陰極 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0401068A1 (de) |
| JP (1) | JPH0317929A (de) |
| FR (1) | FR2647952A1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041757A (en) * | 1990-12-21 | 1991-08-20 | Hughes Aircraft Company | Sputtered scandate coatings for dispenser cathodes and methods for making same |
| DE4142535A1 (de) * | 1991-12-21 | 1993-06-24 | Philips Patentverwaltung | Scandat-kathode und verfahren zur ihrer herstellung |
| CN103311066B (zh) * | 2013-06-03 | 2015-08-19 | 哈尔滨工业大学 | 具有内芯的用于航天器自持空心阴极的发射体 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE550302A (de) * | 1955-08-15 | |||
| FR2494035A1 (fr) * | 1980-11-07 | 1982-05-14 | Thomson Csf | Cathode thermo-electronique pour tube hyperfrequences et tube incorporant une telle cathode |
| US4379979A (en) * | 1981-02-06 | 1983-04-12 | The United States Of America As Represented By The Secretary Of The Navy | Controlled porosity sheet for thermionic dispenser cathode and method of manufacture |
-
1989
- 1989-05-30 FR FR8907084A patent/FR2647952A1/fr not_active Withdrawn
-
1990
- 1990-05-07 EP EP90401216A patent/EP0401068A1/de not_active Withdrawn
- 1990-05-30 JP JP2141214A patent/JPH0317929A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0401068A1 (de) | 1990-12-05 |
| FR2647952A1 (fr) | 1990-12-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5801477A (en) | Gated filament structures for a field emission display | |
| US2499977A (en) | Method of forming grid-like structures | |
| US6204596B1 (en) | Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region | |
| US2619438A (en) | Method of making a grid structure | |
| KR960000315B1 (ko) | 금속 미소 냉 음극의 제조방법 | |
| US5562516A (en) | Field-emitter fabrication using charged-particle tracks | |
| US3890521A (en) | X-ray tube target and X-ray tubes utilising such a target | |
| JPH0799666B2 (ja) | 集積真空超小型電子素子の製造方法及びその構造 | |
| US4379979A (en) | Controlled porosity sheet for thermionic dispenser cathode and method of manufacture | |
| US4253221A (en) | Method of producing low voltage field emission cathode structure | |
| JPH0317929A (ja) | 電子管用の含浸熱陰極 | |
| KR20000010835A (ko) | 전계방출 트라이오드와 이를 이용한 장치 및 그 제작방법 | |
| JP2602584B2 (ja) | 電界放出陰極構造を製造する方法 | |
| KR100876491B1 (ko) | 중공 음극 | |
| US5665421A (en) | Method for creating gated filament structures for field emission displays | |
| US7313226B1 (en) | Sintered wire annode | |
| DE19527723A1 (de) | Elektrische Entladungsröhre oder Entladungslampe und Scandat-Vorratskathode | |
| US5635790A (en) | Process for the production of a microtip electron source and microtip electron source obtained by this process | |
| EP0807314B1 (de) | Gate-faserstrukturen für eine feldemissionsanzeigevorrichtung | |
| EP0004424A1 (de) | Thermionische Kathode | |
| US5624872A (en) | Method of making low capacitance field emission device | |
| JPS60100339A (ja) | ガス放電形表示装置およびその製作方法 | |
| US7025892B1 (en) | Method for creating gated filament structures for field emission displays | |
| EP0121564B1 (de) | Verfahren zum herstellen eines vorratsbehaelters einer vorratskathode | |
| US4459323A (en) | Process for producing an impregnated cathode with an integrated grid, cathode obtained by this process and electron tube equipped with such a cathode |