JPH03180735A - How to measure the shape of fused fiber - Google Patents

How to measure the shape of fused fiber

Info

Publication number
JPH03180735A
JPH03180735A JP31901389A JP31901389A JPH03180735A JP H03180735 A JPH03180735 A JP H03180735A JP 31901389 A JP31901389 A JP 31901389A JP 31901389 A JP31901389 A JP 31901389A JP H03180735 A JPH03180735 A JP H03180735A
Authority
JP
Japan
Prior art keywords
fiber
light
fibers
reflected light
line sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31901389A
Other languages
Japanese (ja)
Inventor
Muneaki Ueki
植木 宗昭
Yasuji Hattori
服部 保次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP31901389A priority Critical patent/JPH03180735A/en
Publication of JPH03180735A publication Critical patent/JPH03180735A/en
Pending legal-status Critical Current

Links

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  • Testing Of Optical Devices Or Fibers (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure the shape including fusion splicing depth without any destruction by detecting the position of reflected light beam from a fiber surface parallel to a plane where the perpendicular direction of the fiber surface contains both optical axes of a projection system and a light receiving system. CONSTITUTION:Two-unit melt-stuck fibers 1 and 2 are observed through a line sensor 33. At this time, light passing through the slit 22 of the projection system is reflected by the fibers 1 and 2 and made incident on a line sensor 34 as a part of the light receiving system. At this time, the image of a circular image formation range is obtained on the line sensor side and a part of the image is made incident on the sensor 34. Namely, reflected light is generated once at transverse directional center positions (a) and (b) of the fibers 1 and 2 corresponding to the bottom part of the recessed part of the fusion spliced part, reflected light is generated twice at positions (c) and (d) on the fiber flank inside of the peak of the fibers, and multiple reflected light from the reverse surface of the fibers is generated at positions (e) and (f). Then only the reflected light at the position (h) is detected in a cut image.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、複数の光ファイバを平行に配置して融着一体
化した多心光ファイバの形状測定方法に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for measuring the shape of a multi-core optical fiber in which a plurality of optical fibers are arranged in parallel and fused together.

〈従来の技術〉 第2図に示すように融着した光ファイバ1゜2の形状を
測定する技術は、その融着状態がその後の延伸工程によ
り製造されるカブラの性能に関係するので是非とも必要
である。
<Prior art> As shown in Fig. 2, the technique of measuring the shape of the fused optical fiber 1.2 is indispensable because the fused state is related to the performance of the coupler manufactured by the subsequent drawing process. is necessary.

すなわち、カプラとして完成された状況において、第3
図に示すように光ファイバ1゜2のボート3又は4への
入射パワーP、又はPlに対するボート5,6の出射パ
ワーP2P3又はP2“p 、 Hの比率P2/P、、
 P、/P、又;よp 2t/P、″ P3“/P、’
を決定するものは、融着部の形状である。
In other words, in the situation where the coupler is completed, the third
As shown in the figure, the input power P of the optical fiber 1゜2 into the boat 3 or 4, or the output power P2P3 or P2"p of the boats 5 and 6 relative to Pl, the ratio of H to the output power P2/P,
P, /P, again;yop 2t/P,"P3"/P,'
What determines this is the shape of the fused part.

したがって、融着部の形状測定技術は、光カプラの安定
製造技術として必須のものである。
Therefore, a technique for measuring the shape of the fused portion is essential as a technique for stably manufacturing optical couplers.

従来における形状測定技術の一例としては、ファイバの
断面形状を測定することが行なわれている。この場合、
第2図に示す断面の如くファイバをファイバカッタにて
切断しその断面形状を第2図aの方向から顕微鏡により
ill測するものである。
An example of a conventional shape measurement technique is measuring the cross-sectional shape of a fiber. in this case,
A fiber is cut with a fiber cutter as shown in the cross section shown in FIG. 2, and the cross-sectional shape is observed under a microscope from the direction shown in FIG. 2a.

ところが、かかる破壊検査ではなく、光カブラの形状測
定においては、非破壊の計測技術も前述のカブラ性能の
測定には欠くことができない。
However, when measuring the shape of an optical coupler instead of such a destructive inspection, a non-destructive measurement technique is also essential for measuring the performance of the coupler.

この非破壊の計測技術としては、レーザマイクロメータ
がある。このレーザマイクロメータは、第4図に示す構
成で、レーザ光7を回転ミラー8の回転に伴って走査し
、F・θレンズ9にて平行光に変換し、被検体10を走
査する。走査光は集光レンズ11にて検出器12に集光
されろ。
A laser micrometer is an example of this non-destructive measurement technology. This laser micrometer has the configuration shown in FIG. 4, and scans a laser beam 7 as a rotating mirror 8 rotates, converts it into parallel light by an F/θ lens 9, and scans a subject 10. The scanning light is focused onto a detector 12 by a condensing lens 11.

ここで、検出器12に到達する走査光は、被検体10に
である時間さえぎられるため、この走査光の低下した時
間間隔をクロックパルスにて計数すると共に回転ミラー
8の回転速度すなわち走査速度を得ることにより、被検
体10の外形形状を求めることができる。
Here, since the scanning light reaching the detector 12 is blocked by the subject 10 for a certain period of time, the time interval in which the scanning light decreases is counted by a clock pulse, and the rotation speed of the rotating mirror 8, that is, the scanning speed is measured. By obtaining this, the external shape of the subject 10 can be determined.

〈発明が解決しようとする課題〉 しかし、上述の形状測定にあっては、第2図に示す融着
深さlもしくは4′まで測定することができない。すな
わち、カブラの性能に係る外形寸法を第4図に示す如き
非破壊計測では得ることができない。
<Problems to be Solved by the Invention> However, in the above-mentioned shape measurement, it is not possible to measure up to the fusion depth 1 or 4' shown in FIG. 2. That is, the external dimensions related to the performance of the turntable cannot be obtained by non-destructive measurement as shown in FIG.

本発明は、非破壊の計測にて融着深さを含む形状測定を
可能とした形状測定方法の提供を目的とする。
An object of the present invention is to provide a shape measurement method that enables shape measurement including the fusion depth by non-destructive measurement.

く課題を解決するための手段〉 上述の目的を達成する本発明は、ファイバ軸が平行をな
ししかも同一平面に含まれるように配置して融着した複
数のファイバからなる多心ファイバの融着部の形状測定
方法において、 光切断法による投光系及び受光系の両光軸を含む面の法
線方向を、上記多心ファイバのファイバ軸を含む平面内
においてファイバ軸に直交する方向に一致させ、ファイ
バ表面の垂線方向が上記両光軸を含む面と平行となる上
記ファイバ表面からの反射光の位置を検出することを特
徴とする。
Means for Solving the Problems> The present invention achieves the above-mentioned objects by fusion splicing of multicore fibers consisting of a plurality of fibers arranged and fused so that the fiber axes are parallel and included in the same plane. In the method of measuring the shape of the part, the normal direction of the plane containing both the optical axes of the light emitting system and the light receiving system by the optical cutting method is aligned with the direction perpendicular to the fiber axis in the plane containing the fiber axis of the multi-core fiber. and detecting the position of the reflected light from the fiber surface where the perpendicular direction of the fiber surface is parallel to a plane including both the optical axes.

〈実 施 例〉 ここで、第1図および第5図ないし第7図を参照して本
発明の詳細な説明する。第1図;よ本実施例方法を説明
するための構成図である。第1図においては、光切断法
による投光系と受光系とがす・ンブルの光照射部分、光
反射部分を中心に左右に配置されている。
<Example> The present invention will now be described in detail with reference to FIG. 1 and FIGS. 5 to 7. FIG. 1 is a block diagram for explaining the method of this embodiment. In FIG. 1, a light projecting system and a light receiving system based on the light sectioning method are arranged on the left and right with the light irradiation part and the light reflection part of the laser beam in the center.

投光系は、光源20.ライトガイド21が備えられ、つ
いで光軸に沿ってスリット22、集光レンズ23、対物
レンズ24が備えられる。
The light projection system includes a light source 20. A light guide 21 is provided, followed by a slit 22, a condensing lens 23, and an objective lens 24 along the optical axis.

他方、受光系は、光軸に沿って対物レンズ31、集光レ
ンズ32、ラインセンサ34を有するカメラ33が備え
られる。
On the other hand, the light receiving system includes a camera 33 having an objective lens 31, a condensing lens 32, and a line sensor 34 along the optical axis.

ここにおいて、この光切断法による投光系及び受光系の
両光軸が含まれろ面を考えたとき、この面の法線方向に
一致するようにスリット22及びラインセンサ34が配
置されている。
Here, when considering a surface that includes both the optical axes of the light projecting system and the light receiving system using this light cutting method, the slit 22 and the line sensor 34 are arranged so as to coincide with the normal direction of this surface.

また、対物レンズ24と31の焦点位置が一致するよう
になっている。
Further, the focal positions of the objective lenses 24 and 31 are made to coincide.

本実施例では、まず、光切断法による投光系光軸と受光
系光軸とが構成する面の法線方向を、26融着ファイバ
のファイバ軸が構成する平面内のファイバ軸に直交する
方向と一致させ、しかも上記ファイバ軸が構成する平面
の法線方向と、投光系光軸と受光系光軸との中心軸とが
一致するように配置する。
In this example, first, the normal direction of the plane constituted by the optical axis of the light emitting system and the optical axis of the light receiving system by the optical cutting method is orthogonal to the fiber axis in the plane constituted by the fiber axis of the 26 fusion fiber. The optical axis of the light emitting system and the optical axis of the light receiving system are aligned so that the normal direction of the plane constituted by the fiber axis coincides with the central axis of the optical axis of the light projecting system and the optical axis of the light receiving system.

ついで2心融11フアイバをラインセンサカメラ33に
て観察する。このとき、投光系のスリット22を通った
光ζよ融着ファイバ1゜2にて反射して受光系の一部で
あるラインセンサ34に入射する。
Next, the 2-core fusion 11 fiber is observed using the line sensor camera 33. At this time, the light ζ passing through the slit 22 of the light projecting system is reflected by the fusion fiber 1°2 and enters the line sensor 34 which is a part of the light receiving system.

このとき、ラインセンサ側では第5図に示す円形の結像
範囲の像(ファイバ外径線は実際には見えない)を得て
、ラインセンサ34にはその一部が入射される。すなわ
ち、融着ファイバ1,2それぞれの幅方向中央部位イ。
At this time, an image of a circular imaging range shown in FIG. 5 is obtained on the line sensor side (the outer diameter line of the fiber is not actually visible), and a part of the image is incident on the line sensor 34. That is, the widthwise central portion of each of the fused fibers 1 and 2.

口は、ファイバの頂部に対応する−回反射光が生じ、融
着ファイバ1,2の幅方向中央部位ホは、融着部の凹部
の底部に対応する一回反射光が生じ、部位ハ、二はファ
イバの頂部より内側のファイバ側面での二回反射光が生
じ、そして部位へ、トにはファイバの裏面からの多重反
射光が生ずる。そして、第5図に示す切断像は、ライン
センサ34によって結像範囲のうちの融着ファイバの軸
と直交する細長い部分のみ(第5図では部位ホの反射光
)が検出されろことになる。
The opening corresponds to the top of the fiber - twice-reflected light is generated, the widthwise central part of the fused fibers 1 and 2 E produces the once-reflected light corresponding to the bottom of the concave part of the fused part, and the part C, Second, twice-reflected light is generated on the side surface of the fiber inside the top of the fiber, and multiple reflected light is generated from the back surface of the fiber. In the cut image shown in FIG. 5, the line sensor 34 detects only the elongated portion (reflected light from part E in FIG. 5) perpendicular to the axis of the fused fiber in the imaging range. .

第5図に示すラインセンサ34による受光像は、第1図
において光切断光学系の全体を中心軸方向に上下動させ
ることにより、ラインセンサ34も上下動することから
、第6図、第7図に示すように移動する。すなわち、第
6図において、光切断光学系の投光スリット光は融着フ
ァイバにて反射され結像面35にて光切断像を作る。こ
の場合、光切断光学系を上下動すると反射光路が移動し
、第7図(b)を中心におけば、第7図(a)や第7図
(C1の如く結像面35の光切断像が左右(ファイバ軸
方向)に移動する。
The received light image by the line sensor 34 shown in FIG. 5 is obtained by moving the entire light cutting optical system up and down in the direction of the central axis in FIG. Move as shown. That is, in FIG. 6, the projected slit light of the light cutting optical system is reflected by the fusion fiber and forms a light cut image on the imaging plane 35. In this case, when the light cutting optical system is moved up and down, the reflected light path moves, and if the center is centered on FIG. The image moves left and right (in the direction of the fiber axis).

この結果、ラインセンサにて受光される反射光が光切断
光学系の上下位置により変化し、この移動にて、イ22
ロ、ハ二、ホ、へ、トの各部位の反射光が得られろ。
As a result, the reflected light received by the line sensor changes depending on the vertical position of the light cutting optical system, and this movement causes
Obtain the reflected light from each part of B, H2, H, H, and G.

そして、これらの点がラインセンサ上に来たときの上記
光切断光学像の高さを各々イについてZ 、j ロにつ
いてZb、ホについてZcとすると、26融着ファイバ
の凹部深さl′は次式より与えられる。
If the heights of the above-mentioned light-cut optical images when these points come on the line sensor are Z for A, J for B, Zb for E, and Zc for E, then the depth l' of the concave portion of the 26 fused fiber is It is given by the following formula.

2本のファイバの径が同じ場合Z =z であり、異な
る場合2 ≠zbであるので、頂部からの平均深さが求
められる。
If the diameters of the two fibers are the same, Z = z, and if they are different, 2≠zb, so the average depth from the top is determined.

こうして、2°融着ファイバのスリット光が当る部分の
投光系及び受光系光軸の中心軸に垂直な点付近の反射光
が2次元的に展開されて、受光系光軸に垂直なラインセ
ンサを含む面に結像される。そして光切断光学系全体を
その投受光系光軸の中心軸方向に上下動しファイバの頂
部及び凹部の底部に対応する反射光がラインセンサ上に
来た時の光切断光学系の高さの差より凹部の形状っまり
凹部の深さl′が測定可能である。
In this way, the reflected light near the point perpendicular to the central axis of the optical axes of the emitter and receiver systems in the area hit by the slit light of the 2° fused fiber is developed two-dimensionally into a line perpendicular to the optical axis of the receiver system. The image is formed on the plane containing the sensor. Then, the entire light cutting optical system is moved up and down in the central axis direction of the optical axis of the light emitting/receiving system, and the height of the light cutting optical system is determined when the reflected light corresponding to the top of the fiber and the bottom of the recess reaches the line sensor. From the difference, the shape of the recess and the depth l' of the recess can be measured.

ここで、具体例を述べるに、外径125μmの2本のフ
ァイバを融着した2°融着ファイバを本発明による方法
で測定した。照明光としてハロゲンランプを用いバンド
ル型光ファイバでガイドした。投光レンズとして×50
対物使用、スリット巾は30μm1撮像レンズとして×
50対物使用、受光系の集光レンズとしては×20のも
のを使用、ラインセンサは画素の大きさ14μm×14
μmで全素子数2048のものを使用した。光学系の高
さの読み取りには読み取り分解能0.01μmのリニア
エンコーダを用いた。
Here, to describe a specific example, a 2° fused fiber in which two fibers each having an outer diameter of 125 μm were fused together was measured using the method according to the present invention. A halogen lamp was used as illumination light and guided by a bundled optical fiber. As a floodlight lens x50
Use objective, slit width is 30 μm x as 1 imaging lens
A 50mm objective is used, a 20x condenser lens is used as the light receiving system's condensing lens, and the line sensor has a pixel size of 14μm x 14
A device with a total number of elements of 2048 μm was used. A linear encoder with a reading resolution of 0.01 μm was used to read the height of the optical system.

光学系の移動の制御、リニアエンコーダの読み取り、ラ
インセンサからの出力信号の処理はコンピュータにより
行った。
A computer controlled the movement of the optical system, read the linear encoder, and processed the output signal from the line sensor.

10回の繰り返し測定における凹部の深さVの測定値の
再現性は標準偏差で0.3μmであった。
The reproducibility of the measured value of the depth V of the recess in 10 repeated measurements was 0.3 μm in standard deviation.

〈発明の効果〉 以上述べたように本発明に係る方法を用いることにより
従来法では測定できなかったZc融着ファイバの凹部の
深さの測定が可能になった。本装置をカプラ製造装置に
0NLINEの測定装置として組み込むことにより2本
のファイバを融着する工程における融着量の高精度の制
御が可能になる。
<Effects of the Invention> As described above, by using the method according to the present invention, it has become possible to measure the depth of the recess of a Zc fused fiber, which could not be measured using the conventional method. By incorporating this device into a coupler manufacturing device as an 0NLINE measuring device, it becomes possible to control with high accuracy the amount of fusion in the process of fusion bonding two fibers.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例に使用するための構成図、第
2図はファイバ切断法の説明図、第3図はカプラの説明
図、第4図は従来例の説明図、第5図は本発明方法にお
ける結像範囲を示す図、第6図は光路移動の説明図、第
7図は移動の際の結像範囲の変化状態図である。 図  中、 1.2はファイバ、 22はスリツト、 24.31は対物レンズ、 33はラインセンサカメラ、 イ22ロ、ハ二、ホ、へ、トは反射部位である。 特  許  出  願  人 住友電気工業株式会社 代    理    人
Fig. 1 is a block diagram for use in an embodiment of the present invention, Fig. 2 is an explanatory diagram of the fiber cutting method, Fig. 3 is an explanatory diagram of the coupler, Fig. 4 is an explanatory diagram of the conventional example, and Fig. 5 is an explanatory diagram of the fiber cutting method. The figure shows the imaging range in the method of the present invention, FIG. 6 is an explanatory diagram of optical path movement, and FIG. 7 is a diagram showing how the imaging range changes during movement. In the figure, 1.2 is a fiber, 22 is a slit, 24.31 is an objective lens, 33 is a line sensor camera, and 22, 2, 2, 2, 2, 3 and 3 are reflection parts. Patent application agent Sumitomo Electric Industries Co., Ltd.

Claims (1)

【特許請求の範囲】 ファイバ軸が平行をなししかも同一平面に含まれるよう
に配置して融着した複数のファイバからなる多心ファイ
バの融着部の形状測定方法において、 光切断法による投光系及び受光系の両光軸を含む面の法
線方向を、上記多心ファイバのファイバ軸を含む平面内
においてファイバ軸に直交する方向に一致させ、ファイ
バ表面の垂線方向が上記両光軸を含む面と平行となる上
記ファイバ表面からの反射光の位置を検出することを特
徴とする融着ファイバの形状測定方法。
[Scope of Claim] A method for measuring the shape of a fused portion of a multi-core fiber consisting of a plurality of fibers arranged and fused so that the fiber axes are parallel and included in the same plane, comprising: light projection using an optical cutting method; The normal direction of the plane containing both the optical axes of the system and the light receiving system is made to coincide with the direction perpendicular to the fiber axis in the plane containing the fiber axis of the multicore fiber, and the normal direction of the fiber surface is aligned with the direction that is perpendicular to the fiber axis in the plane containing the fiber axis of the multi-core fiber. A method for measuring the shape of a fused fiber, the method comprising detecting the position of reflected light from the fiber surface that is parallel to the surface of the fused fiber.
JP31901389A 1989-12-11 1989-12-11 How to measure the shape of fused fiber Pending JPH03180735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31901389A JPH03180735A (en) 1989-12-11 1989-12-11 How to measure the shape of fused fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31901389A JPH03180735A (en) 1989-12-11 1989-12-11 How to measure the shape of fused fiber

Publications (1)

Publication Number Publication Date
JPH03180735A true JPH03180735A (en) 1991-08-06

Family

ID=18105528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31901389A Pending JPH03180735A (en) 1989-12-11 1989-12-11 How to measure the shape of fused fiber

Country Status (1)

Country Link
JP (1) JPH03180735A (en)

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