JPH0318164U - - Google Patents
Info
- Publication number
- JPH0318164U JPH0318164U JP7822989U JP7822989U JPH0318164U JP H0318164 U JPH0318164 U JP H0318164U JP 7822989 U JP7822989 U JP 7822989U JP 7822989 U JP7822989 U JP 7822989U JP H0318164 U JPH0318164 U JP H0318164U
- Authority
- JP
- Japan
- Prior art keywords
- permanent magnets
- magnetic poles
- workpiece
- work holder
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の第１実施例によるスパツタリ
ング造膜用ワークホルダの斜視図、第２図は同じ
く第２実施例によるワークホルダの斜視図である
。
１……ベースプレート、２……棒状永久磁石、
３……ワーク、３ａ……上面（造膜面）。
FIG. 1 is a perspective view of a work holder for sputtering film formation according to a first embodiment of the present invention, and FIG. 2 is a perspective view of a work holder according to a second embodiment. 1...Base plate, 2...Bar-shaped permanent magnet,
3...Workpiece, 3a...Top surface (film forming surface).
Claims (1)
ベースプレート上に磁極の向きを揃えて一定間隔
をおいて配設し、これら各永久磁石の間隔部分に
ワークを載置するようにしたスパツタリング造膜
用ワークホルダ。 Sputtering film formation in which a plurality of rod-shaped permanent magnets having magnetic poles on both sides are arranged on a base plate at regular intervals with the magnetic poles aligned, and a workpiece is placed in the space between these permanent magnets. work holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7822989U JPH0318164U (en) | 1989-06-30 | 1989-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7822989U JPH0318164U (en) | 1989-06-30 | 1989-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0318164U true JPH0318164U (en) | 1991-02-22 |
Family
ID=31621318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7822989U Pending JPH0318164U (en) | 1989-06-30 | 1989-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318164U (en) |
-
1989
- 1989-06-30 JP JP7822989U patent/JPH0318164U/ja active Pending
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