JPH03183559A - Method for manufacturing liquid jet recording head - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention]

[Industrial Application Field] The present invention relates to a method for manufacturing a liquid jet recording head, and in particular, a method for manufacturing a liquid jet recording head, which has a large number of liquid ejection ports arranged in high density and having uniform characteristics, and is capable of high-speed, high-definition recording. The present invention relates to a method suitable for manufacturing a liquid jet recording head.

[Prior art 1] A liquid jet recording head applied to a liquid jet recording method is
Generally, it includes a fine recording liquid ejection opening, a liquid path, and a liquid ejection energy generating section provided in a part of the liquid path. Conventionally, such a liquid jet recording head has been manufactured by using a plate made of glass or metal, forming fine grooves on the plate by processing means such as cutting or etching, and then forming the grooves. A method is known in which a plate is joined to another suitable plate to form a liquid path. However, in liquid jet recording heads made by such conventional methods, the roughness of the inner wall surface of the liquid path to be cut is too large, and distortion occurs in the wave path due to the difference in etching rate, making it difficult to maintain constant flow path resistance. There is a problem in that it is difficult to obtain a liquid path with a uniform flow rate, and the recording liquid ejection characteristics of the manufactured liquid jet recording head tend to vary. In addition, there was also the drawback that the plate was easily chipped or cracked during cutting, resulting in poor manufacturing yield. Furthermore, when etching is performed, there are many manufacturing steps, which has the disadvantage of increasing manufacturing costs. Furthermore, a common drawback of the above-mentioned conventional methods is that the grooved plate in which the liquid path is formed is provided with a drive element such as a piezoelectric element or an electrothermal transducer that generates ejection energy to eject recording liquid droplets. There was also a problem in that it was difficult to align these plates when bonding them together with the lid plate, which resulted in a lack of mass productivity. In addition, under the normal usage environment, a liquid jet recording head is used for recording liquid (generally, an ink liquid mainly composed of water and often not neutral, or an ink liquid mainly composed of an organic solvent, etc.). ) are in constant contact with Therefore, the head structural material that makes up the liquid jet recording head does not deteriorate in strength due to the influence of the recording liquid, and conversely, there are no harmful components in the recording liquid that may reduce the suitability of the recording liquid. However, in the conventional methods described above, it was not always possible to select materials that met these purposes due to constraints such as processing methods. In order to solve the problems of the conventional method, the present applicant previously filed Japanese Patent Application No. 59-274689 (Japanese Unexamined Patent Publication No. 61-154947).
proposed a method for manufacturing a liquid jet recording head using an active energy ray-curable material as a channel constituting member. However, this method was not always satisfactory in terms of freely manufacturing the liquid chamber, such as the size and height of the liquid chamber communicating with the liquid path. In particular, in a multi-array type liquid jet recording head in which discharge ports and liquid paths communicating with these ports are arranged at high density and discharge is performed simultaneously over the entire width of the recording paper, it is necessary to increase the liquid supply speed. In order to discharge recording liquid stably and uniformly, it is important to increase the volume of the liquid chamber. Therefore, there has been a need for a method that can efficiently and accurately manufacture a liquid jet recording head having a larger liquid chamber. In order to meet such demands, the applicant of the present application has provided a solid layer for forming at least a liquid channel on a first base material, and an active energy ray-curable material layer used for forming at least a wall of the liquid channel. After sequentially laminating the second base material, a mask is laminated on the second base material, and active energy rays are irradiated from above the mask to cure at least the liquid path of the active energy ray-curable material layer. A method has been filed (Japanese Patent Laid-Open No. 62-253457) in which the constituent parts of the wall are cured, and the uncured parts of the solid layer and the active energy ray-curable material layer are removed from between the two base materials to form at least a liquid path. (see official bulletin). [Problem to be Solved by the Invention J The method disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 62-253457 has fewer restrictions on the design of the liquid chamber, and can more freely increase or decrease the number of liquid chambers in the design. There is an advantage. In this method, in order to increase the liquid chamber capacity, it is necessary to increase the thickness of the second substrate or the active energy ray curable material layer. However, if these thicknesses are too large, sufficient intensity and amount of active energy rays cannot reach the entire active energy ray curable material layer during the irradiation stage of the active energy rays.
A sufficient curing rate cannot be obtained. In such a case, the adhesion between the first substrate and the cured layer or the second substrate and the cured layer becomes insufficient, and peeling tends to occur there. In this method, in order to improve the curing rate of the active energy ray-curable material layer, the irradiation time of the active energy rays can be increased; however, if the irradiation time of the active energy rays becomes long, the active energy rays Due to the influence of line diffraction, the edge portion of the pattern of the cured portion becomes unclear, and it may not be possible to obtain a liquid path of a desired shape. Therefore, in the method disclosed in the above-mentioned Japanese Patent Laid-Open No. 62-253457, there are still limitations in terms of quality or manufacturing in order to increase the liquid chamber capacity. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a liquid jet recording head having fewer design restrictions on the liquid chamber and having a larger capacity liquid chamber. Another object of the present invention is to provide a method for manufacturing a liquid jet recording head that can freely form liquid chambers, is inexpensive, precise, and highly reliable. Another object of the present invention is to provide a method capable of supplying a liquid jet recording head having a structure in which the liquid path is microfabricated with high accuracy and high yield. Another object of the present invention is to provide a method for manufacturing a liquid jet recording head that can provide a liquid jet recording head that has little interaction with liquid and has excellent mechanical strength and chemical resistance. [Means for Solving the Problems] A method for manufacturing a liquid jet recording head according to the present invention includes: a surface having a liquid ejection port; a liquid path communicating with the liquid ejection port; a liquid chamber that stores the supplied liquid;
In a method of manufacturing a liquid jet recording head, the method includes: an energy generator that is provided corresponding to the liquid path and generates energy used for ejecting liquid from the ejection opening;
(a) a solid layer for forming the discharge port and the liquid path on the substrate having the energy generator, and an active energy ray-curable material layer provided so as to cover the solid layer;
a step of sequentially laminating a second base material to form a laminate; (b) a step of irradiating an active energy ray-curable material located in a portion of the laminate other than a portion that will become a liquid chamber with active energy rays; (c) a step of removing the uncured active energy ray material layer in the portion of the laminate that has undergone step (b) that will become a liquid chamber; (d) a portion downstream of the energy generator of the laminate that has undergone step (c); (e) irradiating the cut surface obtained in step (d) with active energy rays; (f) step (e). The method is characterized in that it includes a step of removing the solid layer and the uncured active energy ray-curable material from the laminate and forming the discharge port and the liquid path. Hereinafter, the present invention will be described in detail with reference to the drawings as necessary. 1 to 9 are schematic diagrams for explaining the basic steps of the method of the present invention, and each of FIGS. 1 to 9 shows a liquid jet record obtained by the method of the present invention. An example of the configuration of the head and its manufacturing procedure is shown. still,
In this example, a liquid jet recording head having two ejection ports is shown, but of course, a high-density multi-array liquid jet recording head having more ejection ports or one
Needless to say, the same applies to a liquid jet recording head having two ejection ports. In the present invention, two substrates are used, which are made of, for example, glass, ceramics, plastic, or metal, and at least one of which is transparent to active energy rays. FIG. 1 is a schematic perspective view of an example of a first base material before solid layer formation. Such a first base material 1 functions as a part of the material constituting the liquid path and the liquid chamber, and also functions as a support when laminating the solid layer and the active energy ray-curable material layer, which will be described later. When the step of irradiating active energy rays described below is performed from the side of the first base material 1, it is necessary that the first base material 1 is transparent to active energy rays, but in other cases, there are no particular restrictions on its shape, material, etc. It can be used without being On the first base material 1, a desired number of energy generating bodies 2, such as electrothermal transducers or piezoelectric elements, which generate energy used for discharging liquid from a discharge port are disposed (see Fig. 1). 2). The liquid ejection energy generating element 2 applies ejection energy to the liquid for ejecting small droplets of the recording liquid, thereby performing recording. For example, when an electrothermal converter is used as the energy generator 2, the liquid is ejected from the ejection port by heating the liquid nearby. Further, for example, when a piezoelectric element is used, liquid is ejected by its mechanical vibration. Note that these energy generating bodies 2 are connected to control signal input electrodes (not shown) for operating them. Further, in general, various functional layers such as a protective layer are provided for the purpose of improving the durability of these energy generating bodies, but of course, it is absolutely no problem to provide such functional layers in the present invention as well. Next, a liquid path forming portion on the first base material l containing the energy generating body 2 and a liquid chamber forming portion communicating therewith are provided with
For example, solid layers 3 as shown in FIG. 2(A) are laminated. In the present invention, it is not necessarily necessary to provide a solid layer on both the liquid path and the liquid chamber formation site, and the solid layer may be provided at least on the liquid path formation site. Also, although the explanation is confusing, FIG. 2(B) shows an example of the second base material.
In this example, the second base material 4 has a concave portion 5 in the area where the liquid chamber is planned to be formed.
and two liquid supply ports 6. Hereinafter, each of (A) in FIGS. 3 to 6 will be referred to as the second
A schematic cross-sectional view of the first and second substrates taken along line AA' in the figure is shown, and (8) in each of FIGS. 3 to 6 is
A schematic cross-sectional view of the first and second substrates taken along line BB' in FIG. 2 is shown. The solid layer 3 is removed after passing through each process described below,
A liquid channel and a liquid chamber each having one end formed as a discharge port are configured in the removed portion. Of course, the shapes of the liquid passages and liquid chambers can be made into desired shapes, and the solid layer 3 can also be shaped according to the shapes of the liquid passages and liquid chambers. Incidentally, in this example, the liquid path is divided into two so that liquid droplets can be ejected from each of the two ejection ports provided corresponding to the two ejection energy generating elements. The chamber is in communication with each of the liquid passages so as to be able to supply liquid to each of the liquid passages. Specific examples of materials and means used to construct such solid N3 include those listed below. (2) Using a photosensitive dry film, a solid layer is formed according to a so-called dry film image forming process. (2) A solvent-soluble polymer layer and a photoresist layer of a desired thickness are sequentially laminated on the base material I, and after patterning of the photoresist layer, the solvent-soluble polymer layer is selectively removed. ■Print resin. As the photosensitive dry film mentioned in (2), both positive type and negative type can be used. In the case of a dry film or a negative type dry film, a negative type dry film which is photopolymerizable but can be dissolved or peeled off with methylene chloride or a strong alkali is suitable. Specifically, as a positive dry film, for example, r
OZATEc R225J [trade name, Hoechst Japan ■], etc., and as a negative dry film, r
"OZATEc T series" [trade name, Hoechst Javan ■], rPHOTEc PHT series" [trade name, Hitachi Chemical Co., Ltd.], rRIsTONJ [trade name, Du Bonn de Nemours Co.], etc. are used. Of course, in addition to these commercially available materials, resin compositions that act vomitivically, such as naphthoquinone diato derivatives and novolac type phenolic resins, and resin compositions that act negatively, such as acrylic esters, can be reacted. A composition mainly consisting of an acrylic oligomer, a thermoplastic polymer, and a sensitizer, or a composition consisting of an orithiol, a polyene compound, and a sensitizer can be similarly used. As the solvent-soluble polymer mentioned in (2), any polymer compound can be used as long as it has a solvent that dissolves the stiffness and can form a film by coating. The photoresist layer that can be used here is typically a positive liquid photoresist made of novolac type phenolic resin and naphthoquinone diazide, a negative liquid photoresist made of polyvinyl cinnamate, and a negative liquid photoresist made of cyclized rubber and bisazide. Examples include photoresists, negative photosensitive dry films, thermosetting and ultraviolet curing inks, and the like. Materials for forming solid layers using the printing methods listed in (2) include, for example, flat plate inks used in evaporative drying, thermosetting, or ultraviolet curing drying methods;
Screen ink, transfer type resin, etc. are used. Among the above-mentioned material groups, from the viewpoint of processing accuracy, ease of removal, workability, etc., it is preferable to use a photosensitive dry film, and among these, it is especially preferable to use a positive dry film. preferable. In other words, positive-tone photosensitive materials, for example, have better resolution than negative-tone photosensitive materials, have relief patterns with vertical and smooth sidewall surfaces, or can easily create tapered or reverse tapered cross-sectional shapes. This feature makes it ideal for creating liquid path shapes. Furthermore, it has features such as being able to dissolve and remove the relief pattern with a developer or an organic solvent, and is therefore preferable as the solid layer forming material in the present invention. In particular, for example, the positive photosensitive material using naphquinone diazide and novolac type phenol resin mentioned above can be completely dissolved in a weak alkaline aqueous solution or alcohol.
Without causing any damage to the discharge energy generator,
Moreover, it can be removed very quickly in subsequent steps. Among such positive-working photosensitive materials, dry film-like materials are the most preferred since they can provide a thick film of 10 to 100 μm. For example, as shown in FIGS. 3(A) and 3(B), the first substrate 1 on which the solid layer 3 is formed has the solid layer 3 formed thereon.
An active energy ray curable material layer 7 is laminated to cover the active energy ray curable material layer 7. As the active energy ray-curable material, any material that can cover the above-mentioned solid layer can be suitably used.
This material forms liquid channels and liquid chambers and serves as a structural material for a liquid jet recording head, so it has excellent adhesion to the substrate, mechanical strength, dimensional stability, and 11ij corrosion resistance. It is preferable to select and use one. Specific examples of such materials include liquid and active energy ray-curable materials such as ultraviolet curable and electron beam curable materials, including epoxy resins, acrylic resins, diglycoldialkyl carbonate resins, and unsaturated polyester resins. , polyurethane resin, polyimide resin, melamine resin,
Phenol resin, urea resin, etc. are used. In particular, epoxy resins that can initiate cationic polymerization when exposed to light, acrylic oligomers with acrylic ester groups that can undergo radical polymerization when exposed to light, photoaddition polymerized resins using polythiol and polyene, unsaturated cycloacetic resins, etc. It has a high polymerization rate and excellent physical properties, making it suitable as a structural material. Specific examples of the gIN method for active energy ray-curable materials include lamination using a discharge device using a nozzle that matches the shape of the substrate, an applicator, a curtain coater, a roll coater, a spray coater, a spin coater, etc. Can be mentioned. In addition, when laminating liquid curable materials, it is preferable to do so after deaerating the materials while avoiding the inclusion of air bubbles. Next, as shown in FIGS. 4(A) and 4(B), the second substrate 4 is laminated on the active energy ray-curable material layer 7 of the first base material 1. At this time, the second substrate 4 may be provided with a recessed portion at the liquid chamber forming portion, if necessary, in order to obtain a desired liquid chamber volume. Of course, the second substrate 4 is also the same as the first substrate 1.
as well as glass, plastic, photopolymer, metal,
A desired material such as ceramics can be used, but if the step of irradiating active energy rays is performed from the second substrate 4 side, the material must be transparent to active energy rays. Further, the second substrate 4 may be provided with a supply port for supplying liquid in advance. Although not particularly shown above, the active energy ray-curable material layer 7 may be laminated after the second base material is laminated on the solid layer. In this case, the preferred method of laminating is to press the second base material 4 to the first base material, reduce the internal pressure, and then inject the curable material. In addition, when laminating the second substrate 4, in order to make the active energy ray-curable material layer have the required thickness, for example, a spacer may be provided between the substrates, or a convex portion may be formed at the end of the second substrate 4. You may take measures such as providing a After obtaining a laminate in which the first base material, solid layer, active energy ray curable material layer, and second base material were sequentially laminated in this way, as shown in FIGS. 5(A) and (B), A mask 8 is laminated on the active energy ray-transparent substrate side (second base material 4 in this example) so as to shield the area where the liquid chamber is to be formed from the active energy rays 9. The active energy rays 9 are irradiated from above (the black colored parts of the mask 8 shown in the figure are the parts that do not transmit the active energy rays, and the parts outside the black colored parts are the parts that transmit the active energy rays). . By irradiating this active energy ray 9, the active energy ray curable material in the irradiated area (the shaded area indicated by reference numeral 10 in the figure) is cured to form a cured resin layer, and the curing also forms a cured resin layer. The base material 1 and the second base material 4 are also bonded. As active energy rays, ultraviolet rays, electron beams, visible rays, etc. can be used, but ultraviolet rays and visible rays are preferable since the exposure is performed by transmitting the light through the base material, and ultraviolet rays are most suitable from the viewpoint of polymerization rate. As the ultraviolet ray source, a light source with high energy density such as a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a halogen lamp, a xenon lamp, a metal halide lamp, and a carbon arc is preferably used. The more parallel the light rays from the light source, the less heat it generates, the more accurate the processing can be. If available, it is generally available. Masks against active energy rays include metal masks, silver salt emulsion masks, diazo masks, etc., especially when ultraviolet rays or visible rays are used.Other methods include simply printing black ink or pasting a sticker on the area where the liquid chamber is formed. Other methods may also be used. Next, the uncured active energy ray curable material present at the liquid chamber formation site is removed from the laminate that has been subjected to the active energy ray irradiation treatment to form a part of the liquid chamber. At this time, it is preferable to simultaneously or sequentially dissolve and remove the solid layer present at the liquid chamber formation site for better process efficiency. When the solid layer and the uncured active energy ray curable material are removed, a state in which a liquid chamber is formed as shown in FIGS. 6(A) and 6(B) can be obtained. Note that to remove the uncured active energy ray-curable material, an organic solvent, a liquid mixture mainly composed of water, etc. are used that are appropriately selected depending on the type of material used. In the above-mentioned removal operation, the part where the liquid chamber is to be formed (the solid layer in contact therewith may also be removed) is easily dissolved and removed, but the solid layer in the part where the fine liquid path is to be formed is easily removed. However, as explained below,
This has an advantageous effect on the subsequent process. A position where the surface having the discharge port 13 can be formed in the downstream part of the energy generating body 2 of the laminate in which part or all of the liquid chamber 12 has been formed (
For example, the cut surface is cut at a portion corresponding to C' in FIG. In this cutting and polishing, the cutting position and the degree of polishing are selected so that the discharge port 13 having an accurate predetermined distance from the installation part of the energy generating body 2 can be obtained. When performing the polishing and other processing steps as described above, the inside of the liquid channel is filled with the solid layer 3, and the polishing and other processing do not affect the inner wall of the flow channel. Note that other parts may be cut if necessary, and the polishing and other treatments described above may not be performed if unnecessary. Further, for the above-mentioned cutting, it is desirable to use, for example, a precision cutting device for semiconductor manufacturing. Next, a seventh
As shown in the figure, active energy rays 9 are irradiated from the surface having the discharge port 13, and active energy ray curable material [10
completely cure. As the active energy rays, those similar to those mentioned above can be used. Next, the solid layer 3 filled in the liquid path is shown in FIG. 8(A).
The liquid path is completed by dissolving and removing the liquid and cleaning the inside as shown in the figure. Dissolution and removal of the solid N3 and cleaning treatment are not particularly limited, but specifically, a method such as immersion in a liquid that dissolves the solid layer 3 and the like is preferable. At this time, ultrasonic treatment, heating,
By using shaking, pressurized circulation, or other removal promotion means, dissolution and removal and washing can be completed in a short time. Examples of the liquid used in the removal means include halogen-containing hydrocarbons, ketones, esters, aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing acids or alkalis, etc. A surfactant may be added to these liquids as necessary. By the method of the present invention described above, the liquid jet recording head shown in FIG. 9 can be obtained. [Example] Hereinafter, the method of the present invention will be explained in more detail with reference to Examples. The main operations in the following examples were carried out in accordance with the procedures shown in FIGS. 1 to 9 above, and a liquid jet recording head having the configuration shown in FIG. 9 was obtained. First, an electrothermal converter (material H
fB2) as a first base material (thickness 1.
! mm), and then a 25 μm thick photosensitive layer consisting of a positive dry film rOZATEc R225J [Hoechst 1] was formed on the first substrate by lamination. A patterned mask is overlaid on this photosensitive layer, and a 560°
mJ/cm” ultraviolet irradiation was performed.The dimensions of the liquid path were as follows:
The liquid path interval was 130 μm, the liquid path width was 40 μm, and the height was 25 μm. ? Spray development was carried out using a 15% solution of Hoechst m (X2 developer rOZATEc EP33J), and a relief approximately 25 microns thick was applied to the area where the liquid path and liquid chamber were to be formed on the glass substrate containing the electrothermal converter. A solid layer was formed. After creating a total of eight substrates in which solid layers similar to those described above are laminated using the same operating procedure as above, apply the liquid active energy ray-curable material shown in Table 1 to each of the substrates on which the solid layers are formed. were laminated. The operating procedure is as follows. Each of the active energy ray curable materials in Table 1 was mixed with a catalyst and degassed using a vacuum pump. Thereafter, each of the defoamed active energy ray-curable materials was applied to each of the first base materials on which the solid layer was laminated using an applicator to a thickness of 70 microns from the upper surface of the substrates. . Next, each of the first base materials laminated with the active energy ray-curable material described above has a recess with a thickness of 2.0 mm and a depth of 1.0 mm in the area where the liquid chamber is planned to be formed, and a recess in the recess with a depth of 1.0 mm. A glass substrate serving as a second base material having a through hole (liquid supply port) for liquid supply in the center was laminated with the position of the planned liquid chamber formation site aligned. Next, a film mask is closely attached to the upper surface of the second base material of this laminate, and active energy rays are shielded from the area where the liquid chamber is to be formed. TAMARACK scientific
5J/cm” of ultraviolet rays
Irradiated. Immediately after irradiation, removal was performed by applying pressure using 1,1,1-trichloroethane for 90 seconds to remove the uncured portion and the solid layer at the site where the liquid chamber was to be formed. At this time, the solid layer in the liquid path was not removed. Next, a wafer cutting device for semiconductors was used to cut the wafer at a position of 1100 IL from the tip of the energy generator on the outlet side toward the outlet. After cutting, 8
Ultraviolet rays were applied to 6 of the pieces from the cut surfaces (surfaces with discharge ports) formed on each side at 5 J/cm" 10 J/cm" 15 J using the above-mentioned "Kumarak".
/cm" irradiation. Next, the substrate was immersed in ethanol and subjected to ultrasonic cleaning treatment to dissolve and remove all solid layers from the laminate, and the inside of the liquid path was cleaned to complete the liquid path and discharge port. The peeling between the first substrate and the second base material and the active energy ray-curable material layer of the eight liquid jet recording heads created in this way was as shown in Table 2. When ultraviolet rays were irradiated from the ejection orifice surface, no liquid was generated at all.Also, the liquid path was formed with high accuracy.Furthermore, when these liquid jet recording heads were installed in a recording device,
When recording was performed using an inkjet ink consisting of pure water/glycerin/Direct Black 154 (water-soluble black dye) = 65/3015 (parts by weight), stable printing was possible. Note that the liquid path height of the obtained recording head was about 25 μm, and the liquid chamber height was about 1.0 mm. Table 2 [Effects of the Invention] According to the method of the present invention, a liquid chamber can be freely formed, and in particular, a recording head having a larger capacity liquid chamber can be manufactured by a simple method. In addition, the ejection ports, liquid paths, and liquid chambers can be microfabricated with high precision and high yield, and in particular, a highly reliable liquid jet recording head having a large number of ejection ports with uniform characteristics can be manufactured by a simple method. . Furthermore, it is possible to manufacture a recording head that has little interaction with liquid and has excellent mechanical strength and chemical resistance. Furthermore, due to the structure of the liquid chamber, etc., there is no possibility of peeling between the first base material and the cured layer, or between the second base material and the cured layer, especially on the surface having the discharge port. The design of the liquid chamber and the like is not restricted due to the adhesive strength, and a highly reliable liquid jet recording head can be obtained.

[Brief explanation of drawings]

FIG. 1 to FIG. 9 are schematic diagrams for explaining the main steps of the method of the present invention, and are as follows. Figure 1: Schematic perspective view of the first substrate before solid layer formation Figure 2 (A): Schematic diagram of the first substrate after solid layer formation Figure 2 (B): Schematic diagram of the second substrate Fig. 3 (A) and (B): schematic cross-sectional view of the first substrate after laminating the solid layer and the active energy ray-curable material; Fig. 4 (A) and (B): Fig. 4 (A) and (B): 5 (A) and (B): a schematic cross-sectional view of the laminate after mask lamination; FIGS. 6 (A) and (B) 2. A schematic cross-sectional view of the laminate after removing the solid layer of the liquid chamber and the active energy ray-curable material, FIG. 7: A schematic perspective view of active energy ray irradiation onto the discharge port surface, FIG. B): A schematic cross-sectional view of the laminate after the solid layer of the liquid path has been removed. FIG. 9: A schematic perspective view of the liquid jet recording head in a completed state. In addition, in FIGS. 3 to 6 and 8, each (A) is a cross-sectional view taken at a position corresponding to the line AA' in FIG. FIG. 2 is a sectional view taken at a position corresponding to line BB' of l...First base material 2...Energy generator 3
...Solid N 4...Second base material...Concavity 6...Supply port...Active energy ray curable material...Mask 9...Active energy ray...
・Hardened active energy ray curable material...liquid path
12...Liquid chamber...Discharge port

Claims (1)

[Scope of Claims] 1) A surface having a liquid discharge port, a liquid path that communicates with the liquid discharge port, a liquid chamber that stores the liquid that is supplied to the liquid discharge port via the liquid path, and the liquid In a method of manufacturing a liquid jet recording head, the liquid jet recording head has an energy generating body that is provided in correspondence with the discharge port and that generates energy that is used for ejecting liquid from the ejection opening, comprising: (a) on a substrate having the energy generating body; a solid layer for forming the discharge port and the liquid path; an active energy ray-curable material layer provided to cover the solid layer;
a step of sequentially laminating a second base material to form a laminate; (b) a step of irradiating an active energy ray-curable material located in a portion of the laminate other than a portion that will become a liquid chamber with active energy rays; (c) removing the uncured active energy ray material in the part of the laminate that has gone through step (b) that will become the liquid chamber; and (d) removing the downstream part of the laminate that has gone through step (c) from the energy generating body. (e) irradiating the cut surface obtained in step (d) with active energy rays; (f) lamination through step (e); 1. A method of manufacturing a liquid jet recording head, comprising the steps of: removing a solid layer and an uncured active energy ray-curable material from the body, and forming the ejection ports and the liquid path.