JPH03184003A - Laser processing equipment using dielectric-interior metal hollow optical waveguide - Google Patents
Laser processing equipment using dielectric-interior metal hollow optical waveguideInfo
- Publication number
- JPH03184003A JPH03184003A JP1324376A JP32437689A JPH03184003A JP H03184003 A JPH03184003 A JP H03184003A JP 1324376 A JP1324376 A JP 1324376A JP 32437689 A JP32437689 A JP 32437689A JP H03184003 A JPH03184003 A JP H03184003A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- optical waveguide
- dielectric
- hollow optical
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 43
- 239000002184 metal Substances 0.000 title claims description 19
- 229910052751 metal Inorganic materials 0.000 title claims description 19
- 238000012545 processing Methods 0.000 title description 5
- 239000010408 film Substances 0.000 claims description 11
- 229910052732 germanium Inorganic materials 0.000 claims description 11
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000000835 fiber Substances 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 206010028980 Neoplasm Diseases 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000005387 chalcogenide glass Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000005383 fluoride glass Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000012994 industrial processing Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 208000003174 Brain Neoplasms Diseases 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- PGAPATLGJSQQBU-UHFFFAOYSA-M thallium(i) bromide Chemical compound [Tl]Br PGAPATLGJSQQBU-UHFFFAOYSA-M 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Laser Surgery Devices (AREA)
- Laser Beam Processing (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は赤外領域の光エネルギーを伝送する誘電体内装
金属中空光導波路に係り、特に波長の異なるＹＡＧレー
ザ、ＣＯレーザ、ＣＯ，レーザに共通して適用できる導
波路に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a dielectric-incorporated metal hollow optical waveguide that transmits optical energy in the infrared region, and is particularly applicable to YAG lasers, CO lasers, CO lasers with different wavelengths. Regarding commonly applicable waveguides.
［従来の技術］
工業加工や医療等、応用範囲の広い赤外領域におけるレ
ーザの開発か活発に行われている。[Prior Art] Lasers in the infrared region, which have a wide range of applications such as industrial processing and medicine, are being actively developed.
ＣＯ，レーザは波長１０．６μｍで発振し、高エネルギ
ー密度の光ビームを効率よく発生できるので工業加工分
野で広く普及し、マーキング、穿孔、溶接から切断まで
、幅広く利用されている。CO lasers oscillate at a wavelength of 10.6 μm and can efficiently generate light beams with high energy density, so they are widely used in the industrial processing field and are used in a wide range of applications from marking, drilling, welding to cutting.
また、ＣＯレーザは波長５．５μｍで発振し、ＣＯ，レ
ーザよりも切断加工における反射損が少なく、金属のよ
うな高反射率をもつ材料の切断用として検討されている
。さらに、エルビウムをドープしたＹＡＧレーザ（以下
、Ｅｒ：ＹＡＧレーザという）は波長２．９μｍで発振
し、水による吸収がＣＯ，レーザよりも１桁程度大きく
、このためＣＯ，レーザに代わる医療用レーザとして期
待されている。 ところで、これらのレーザは全て波長
２μｍ以上の赤外領域で発振するため、この領域で損失
が極めて高くなる従来の石英系光ファイバは伝送手段と
して全く使用することができない。Further, CO lasers oscillate at a wavelength of 5.5 μm, have less reflection loss during cutting than CO lasers, and are being considered for cutting materials with high reflectance such as metals. Furthermore, the YAG laser doped with erbium (hereinafter referred to as Er:YAG laser) oscillates at a wavelength of 2.9 μm, and the absorption by water is about an order of magnitude higher than that of CO, laser, making it a medical laser that can replace CO, laser. It is expected that By the way, since all of these lasers oscillate in the infrared region with a wavelength of 2 μm or more, conventional silica-based optical fibers, which have extremely high losses in this region, cannot be used as transmission means at all.
このため、従来、赤外レーザを伝送する手段としては複
数のミラーを組合せてレーザ光を空間伝搬させる、いわ
ゆる多関節型ビームガイドが主に用いられている。また
最近では石英に代わる全く新しい材料を使用した赤外フ
ァイバや、さらには空気をコアとする中空光導波路の研
究開発も盛んに行われている。しかし、これらの手段は
次に述べるような欠点があった。For this reason, conventionally, as means for transmitting infrared laser, a so-called multi-jointed beam guide, in which a plurality of mirrors are combined to spatially propagate laser light, has been mainly used. Recently, there has been active research and development into infrared fibers using completely new materials to replace quartz, and even hollow optical waveguides with air cores. However, these means have the following drawbacks.
■多関節型ビームガイドでレーザ光を伝送する場合、光
軸の調整が複雑でかつ精密な制御を要求されるため伝送
系全体が極めて高価なものになる。■When transmitting laser light using an articulated beam guide, the adjustment of the optical axis is complicated and requires precise control, making the entire transmission system extremely expensive.
また空間的にビームを閉じこめる機能がないので、伝送
距離に従いビーム径は拡がり、光源と照射点との距離を
十分に離すことができない。Furthermore, since there is no function to spatially confine the beam, the beam diameter expands as the transmission distance increases, making it impossible to maintain a sufficient distance between the light source and the irradiation point.
■赤外ファイバは赤外領域において透明な材料を用いて
、屈折率の高いコア領域にビームを閉じ込めてレーザ光
を伝送するもので、基本原理は従来の石英系光ファイバ
と固しである。一般に分子量の大きな材料はど、より長
波長側で低損失となる。これまでに波長３μｍ以下では
フ・ノ化物系ガラスファイバが、波長５μｍ以下ではカ
ルコゲナイドガラスファイバが試作され、それぞれＥｒ
：ＹＡＧレーザ及びＣ○レーザの伝送実験が行われてい
る。これらのガラスファイバは、それぞれのレーザに対
する損失は小さいが、本質的に機械的に脆く、また軟化
点が低いため高エネルギーのレーザ光を伝送するには適
さない。さらに長波長で発振するＣＯ，レーザに対して
は、フッ化物系ガラス、カルコゲナイドガラスともに損
失が大きくなり、ＫＲＳ−５やハロゲン化物を材料とす
る結晶性の光ファイバが試作されている。これらの結晶
性の赤外ファイバはガラスファイバのような線引きがで
きず、一般には大きな荷重を加える押出し法によってフ
ァイバ化される。このため大きな内部応力が存在し、経
時劣化が激しく、また機械的に脆い。■Infrared fiber uses a material that is transparent in the infrared region to transmit laser light by confining the beam in a core region with a high refractive index.The basic principle is the same as that of conventional silica-based optical fiber. Generally, materials with larger molecular weights have lower loss at longer wavelengths. So far, fluoride glass fibers have been prototyped for wavelengths of 3 μm or less, and chalcogenide glass fibers have been prototyped for wavelengths of 5 μm or less.
: Transmission experiments of YAG laser and C○ laser are being conducted. Although these glass fibers have a small loss for each laser, they are inherently mechanically fragile and have a low softening point, making them unsuitable for transmitting high-energy laser light. Furthermore, for CO and lasers that oscillate at longer wavelengths, both fluoride glass and chalcogenide glass have a large loss, and thus crystalline optical fibers made of KRS-5 or halides have been prototyped. These crystalline infrared fibers cannot be drawn like glass fibers, and are generally made into fibers by an extrusion method that applies a large load. For this reason, large internal stress exists, severe deterioration occurs over time, and the material is mechanically brittle.
■ＣＯ，レーザ光を伝送することを目的として、検討さ
れている中空導波路には、屈折率がｌよりも小さい材料
を用いた中空光導波路や、吸収損失の小さな誘電体薄膜
を内装した金属中空光導波路がある。前者は特定の波長
帯域において屈折率がｌよりも小さくなるような材料を
クラツド材として用い、相対的に屈折率が高い中空領域
をコアとして光エネルギーを閉じ込めて伝送するもので
ある。この屈折率が１よりも小さくなる透過波長帯域は
添加物により、ある程度シフトすることができ、波長１
０．６μｍ近傍で検討されているが、透過帯域の幅は狭
く、各種レーザに対応することはできない。一方、後者
の吸収損失の小さな誘電体薄膜を内装した金属中空光導
波路は、上記中空光導波路と同様にパイプを外装するこ
とで機械的強度を高めることができるものの、内装する
誘電体薄膜の膜厚によって損失が変化し、これまでにＣ
Ｏｔレーザの伝送を目的とした検討がされているが、Ｅ
ｒ；ＹＡＧレーザの伝送用としてはそのまま用いること
ができない。■Hollow waveguides being considered for the purpose of transmitting CO and laser light include hollow optical waveguides using materials with a refractive index smaller than l, and metals with a dielectric thin film with small absorption loss. There is a hollow optical waveguide. The former uses a material whose refractive index is smaller than l in a specific wavelength band as a cladding material, and uses a hollow region with a relatively high refractive index as a core to confine and transmit optical energy. The transmission wavelength band where the refractive index is smaller than 1 can be shifted to some extent by additives, and the wavelength 1
Although it has been considered to be around 0.6 μm, the width of the transmission band is narrow and it cannot be used with various lasers. On the other hand, in the case of the latter metal hollow optical waveguide with a dielectric thin film inside, which has a small absorption loss, although the mechanical strength can be increased by covering the pipe in the same way as the hollow optical waveguide described above, the inner dielectric thin film is thin. The loss changes depending on the thickness, and so far C
Although studies are being conducted for the purpose of transmitting Ot lasers,
r; Cannot be used as is for YAG laser transmission.
［発明が解決しようとする課題］
上述した伝送手段のうち、高価な多関節型ビームガイド
や、機械的に脆い赤外ファイバは改良の余地がないので
将来あまり期待できないが、中空光導波路、とりわけ誘
電体を内装した金属中空光導波路は開発途上であり、将
来を期待されている。[Problem to be solved by the invention] Among the transmission means mentioned above, there is no room for improvement in expensive articulated beam guides and mechanically fragile infrared fibers, so there is little hope for them in the future, but hollow optical waveguides, especially Metallic hollow optical waveguides with a dielectric interior are currently under development and are expected to have a promising future.
しかし、現段階の金属中空光導波路は、機械的強度に優
れているものが開発されてはいるものの、赤外領域にお
いて特に重要なＥｒ；ＹＡＧレーザ、ＣＯレーザ、ＣＯ
，レーザの各々のレーザに対して、全てに低損失で大電
力伝送が可能となるレベルまでには至っていない。However, although metal hollow optical waveguides at the current stage have been developed that have excellent mechanical strength, Er; YAG lasers, CO lasers, and CO
, lasers have not yet reached a level where high power transmission with low loss is possible for all lasers.
本発明の目的は、波長の異なるＥｒ；ＹＡＧレーザ、Ｃ
Ｏレーザ、ＣＯ，レーザの３つのレーザに共通して適用
できる最適な誘電体薄膜の膜厚を見い出すことによって
、前記した金属中空光導波路における従来技術の欠点を
解決し、Ｅｒ；ＹＡＧレーザ、ＣＯレーザ、ＣＯ，レー
ザのレーザ光に対し、共通の導波路で全て低損失で伝送
できる誘電体内装金属中空光導波路を提供することにあ
る。The purpose of the present invention is to use Er;YAG lasers with different wavelengths, C
By finding the optimal dielectric thin film thickness that can be commonly applied to three lasers: O laser, CO laser, the above-mentioned drawbacks of the conventional technology in metal hollow optical waveguides were solved, and Er; YAG laser, CO laser An object of the present invention is to provide a dielectric-incorporated metal hollow optical waveguide that can transmit all laser beams of laser, CO, and laser through a common waveguide with low loss.
［課題を解決するための手段］
本発明は、誘電体内装金属中空光導波路における誘電体
薄膜の材料にゲルマニウムを用い、このゲルマニウムの
膜厚を０．４２〜０．５０μｍに設定したものである。[Means for Solving the Problems] In the present invention, germanium is used as the material of the dielectric thin film in the dielectric-incorporated metal hollow optical waveguide, and the film thickness of the germanium is set to 0.42 to 0.50 μm. .
また、ゲルマニウムに代えてセレン化亜鉛を用い、この
セレン化亜鉛の厚さを０．６８〜０． ９２μｍに設定
したものである。Also, zinc selenide is used instead of germanium, and the thickness of this zinc selenide is set to 0.68 to 0.68. The thickness was set to 92 μm.
このように誘電体材料および膜厚を所定値に設定するこ
とによって、Ｅｒ；ＹＡＧレーザ、Ｃ○レーザ、ＣＯ，
レーザの全ての波長に対して伝送損失を大幅に低減した
ものである。By setting the dielectric material and film thickness to predetermined values in this way, Er;YAG laser, C○ laser, CO,
This significantly reduces transmission loss for all laser wavelengths.
［作用］
誘電体内装金属中空光導波路は、内装する誘電体材料の
厚さを適当に設定することにより、特定の波長のレーザ
光に対して最も低損失な伝送路となる。例えば、ゲルマ
ニウムを内装誘電体材料に用いたニッケル中空光導波路
では、ゲルマニウムの厚さを約０．４５μｍにした場合
に、波長１０６μｍのＣＯ，レーザ光に対する伝送損失
を最も小さくすることができる。[Function] A dielectric-incorporated metal hollow optical waveguide becomes a transmission path with the lowest loss for a laser beam of a specific wavelength by appropriately setting the thickness of the dielectric material inside. For example, in a nickel hollow optical waveguide using germanium as the internal dielectric material, the transmission loss for CO and laser light with a wavelength of 106 μm can be minimized when the germanium thickness is approximately 0.45 μm.
このとき導波路は、第６図に示したような伝送損失の波
長依存性をもち、波長１０，６μｍのＣＯ，レーザ光以
外の波長においても低伝送損失となる領域が２ケ所（図
中Ａ、Ｂ）存在している。At this time, the waveguide has a wavelength dependence of transmission loss as shown in Figure 6, and there are two regions where the transmission loss is low even at wavelengths other than CO and laser light at wavelengths of 10 and 6 μm (A in the diagram). , B) exists.
そこで、誘電体の厚さを適当な範囲に設定することによ
り、波長１Ｏ１６μｍのＣＯ，レーザ光に限らず、波長
２．９μｍのＥｒ；ＹＡＧレーザ光及び波長５，２〜５
．７μｍのＣｏレーザ光の３つのレーザ光をすべて低損
失で、同時に伝送できる誘電体内装金属中空光導波路を
得ることができる。Therefore, by setting the thickness of the dielectric material within an appropriate range, it is possible to apply not only CO and laser light with a wavelength of 1O16 μm, but also Er; YAG laser light with a wavelength of 2.9 μm, and
．． It is possible to obtain a dielectric-incorporated metal hollow optical waveguide that can simultaneously transmit all three laser beams, including a 7 μm Co laser beam, with low loss.
３つのレーザ光を低損失で伝送するためには、第７図に
示したように、損失が極小となる周期がゲルマニウムの
厚さｄに比例して右にシフトすることから、そのシフト
量により伝送損失が極小レベルを保つｄ＝０．４２〜０
．５μｍに設定すればよい。この範囲内であれば、３つ
のレーザ光に対し、全て低損失となることがわかる。In order to transmit the three laser beams with low loss, as shown in Figure 7, the period at which the loss becomes minimum shifts to the right in proportion to the germanium thickness d, so depending on the amount of shift, Transmission loss remains at a minimal level d=0.42~0
．． The thickness may be set to 5 μm. It can be seen that within this range, all three laser beams have low loss.
同様の理由により、セレン化亜鉛を用いた場合には第８
図に示したようにｄ＝０．６８〜０．９２μｍに設定す
れば３種類のレーザ光を全て低損失で伝送できる誘電体
内装金属中空光導波路を得る。For the same reason, when zinc selenide is used,
As shown in the figure, if d is set to 0.68 to 0.92 μm, a dielectric-incorporated metal hollow optical waveguide that can transmit all three types of laser beams with low loss can be obtained.
なお、この損失波長特性における損失が極小をとる周期
は、ゲルマニウムあるいはセレン化亜鉛が内装される金
属膜の材料によってほとんど影響を受けないので、これ
らの金属材料はニッケルの場合だけでなく、金、銀、銅
などの場合でも有効である。Note that the period at which the loss in this loss wavelength characteristic becomes minimum is hardly affected by the material of the metal film in which germanium or zinc selenide is embedded, so these metal materials are not only nickel but also gold, gold, It is also effective for silver, copper, etc.
［実施例］ 以下、本発明の実施例と応用例を説明する。[Example] Examples and application examples of the present invention will be described below.
（実施例１）
第１図に本発明の実施例によるＧｅ内装Ａｇ中空光導波
路ｌの構造を示す。厚さ２００μｍのＮｉパイプ２の内
面には膜厚０．１μｍのＡｇ３および膜厚０．５μｍの
Ｇｅ４が内装されている。(Example 1) FIG. 1 shows the structure of a Ge-incorporated Ag hollow optical waveguide l according to an example of the present invention. The inner surface of the Ni pipe 2 with a thickness of 200 μm is filled with Ag3 having a thickness of 0.1 μm and Ge4 having a thickness of 0.5 μm.
この導波路１に、第２図に示したような光学結合系を用
いて、Ｅｒ；ＹＡＧレーザ５、ＣＯレーザ６、ＣＯ！レ
ーザ７の３つの光をそれぞれ入射し、導波路長１ｍあた
りの透過率を測定した。Using an optical coupling system as shown in FIG. 2 in this waveguide 1, an Er;YAG laser 5, a CO laser 6, a CO! Three beams from the laser 7 were input, and the transmittance per meter of waveguide length was measured.
透過率はレンズ１０で集光したレーザ光（Ｅｒ、ＹＡＧ
レーザ５、ＣＯレーザ６またはＣＯ，し３に結合させ、
パワーメータ１４で透過光を測定し、また光路切り替え
ミラー１２で導波路入射）（ワーをモニター１１で監視
し、それらの値を比較して測定している。その結果それ
ぞれの波長に対スル透過率は、Ｅ ｒ ； ＹＡＧレー
ザ５で８０％、ＣＯレーザ６で８１％、ＣＯ，レーザ７
で８６％となった。The transmittance is determined by the laser beam (Er, YAG) focused by the lens 10.
coupled to a laser 5, a CO laser 6 or a CO, 3;
The power meter 14 measures the transmitted light, and the optical path switching mirror 12 is used to measure the transmitted light, and the optical path switching mirror 12 is used to measure the waveguide incidence. The rates are E r ; 80% for YAG laser 5, 81% for CO laser 6, CO, laser 7
It was 86%.
（実施例２）
上記実施例１においてＺｎ５ｅ８を誘電体に用い、膜厚
を０．７μｍに設定して第３図に示したようなＺｎ５ｅ
内装Ａｇ中空光導波路９を作製した。この導波路９に第
２図に示す光学結合系を用い、Ｅｒ；ＹＡＧレーザ５、
Ｃ○レーザ６、ＣＯ，レーザ７の３つの光を各々入射し
て、透過率を測定したところ、Ｅｒ；ＹＡＧレーザ５で
８２％、ＣＯレーザ６で８５％、ＣＯ，レーザ７で９０
％となった。(Example 2) Zn5e8 was used as the dielectric material in Example 1, and the film thickness was set to 0.7 μm, so that Zn5e as shown in FIG.
An interior Ag hollow optical waveguide 9 was produced. Using the optical coupling system shown in FIG. 2 for this waveguide 9, Er;
When three beams of C○ laser 6, CO, and laser 7 were incident, and the transmittance was measured, Er; YAG laser 5 was 82%, CO laser 6 was 85%, and CO and laser 7 were 90.
%.
（応用例１）
本実施例２によるＺｎ５ｅ内装Ａｇ中空光導波αｂ ＾
＋＋ 伽τ ｔ ｒＭ ＋＋ ：Ｑ Ｉ
Ｊ−シ ふ す２ 口１ 告Ｓ １； 釦冬七ヒ メ
ジ セ立 １）１た光学系を用いて、ＣＯレーザ６とｃ
ｏ、レーザ７を結合し、鉄板１０の切断を行った。Ｃ○
レーザ６とＣＯ，レーザ７は入射端側１１に配置された
凹面金ミラー１２及び、１３．１４によって集光され、
導波路９に結合している。また、出射端側１５にはＺｎ
５ｅレンズ１６を置き、鉄板１０までの距離がほぼＺｎ
５ｅレンズ１６の焦点距離と等しくなるように設定され
ている。この加工装置において、ＣＯレーザ６をパルス
発振させ、連続発振のＣＯ，レーザ７を導波路９を通し
て鉄板１０に同時に照射したところ、ＣＯ！レーザ７の
みを照射した場合よりも照射部周辺の熱溶解が少なく、
良好な切断面が容易に得られた。(Application example 1) Zn5e interior Ag hollow optical waveguide αb according to Example 2
++ 佽τ t rM ++ :Q I
1) Using the optical system shown in 1, the CO laser 6 and c
o, the laser 7 was coupled and the iron plate 10 was cut. C○
The laser 6, CO, and laser 7 are condensed by a concave gold mirror 12 and 13.14 arranged on the incident end side 11,
It is coupled to the waveguide 9. In addition, Zn is placed on the emission end side 15.
5e lens 16 is placed, and the distance to the iron plate 10 is approximately Zn.
It is set to be equal to the focal length of the 5e lens 16. In this processing device, when the CO laser 6 is pulse-oscillated and the continuous wave CO and laser 7 are simultaneously irradiated onto the iron plate 10 through the waveguide 9, CO! There is less thermal melting around the irradiated area than when only the laser 7 is irradiated.
A good cut surface was easily obtained.
（応用例２）
本実施例１によるＧｅ内装Ａｇ中空光導波路１に、第５
図に示したような円筒鏡面法を採用した光学系によって
Ｅｒ；ＹＡＧレーザ５とＣＯ，レーザ７を結合させる。(Application example 2) A fifth
The Er; YAG laser 5 and the CO laser 7 are coupled by an optical system employing the cylindrical mirror method as shown in the figure.
各々のビームは凹面金ミラー１２及び、Ｉ３．１４によ
って導波路１の光軸に合わせ、結合されている。導波路
１の出射端部１７は片手で保持することができ、Ｅｒ；
ＹＡＧレーザ５とＣＯ，レーザ７の外部シャ、７ター２
０．２１を開閉するスイッチ２２が付いているため、こ
のスイッチ２２の操作によりどちらか一方のレーザ光を
随時選択するか、または遮断することができる。Each beam is aligned with the optical axis of the waveguide 1 and coupled by a concave gold mirror 12 and I3.14. The output end 17 of the waveguide 1 can be held with one hand, and Er;
YAG laser 5 and CO, external shutter of laser 7, 7ter 2
Since a switch 22 for opening and closing 0.21 is provided, one of the laser beams can be selected or cut off at any time by operating this switch 22.
本装置を用いて脳腫瘍の除去手術を行った。まず皮膚の
切開には手元スイッチ２２を操作してＣＯ，レーザ発振
器のシャッター２１を閉じ、Ｅ ｒ ； ＹＡＧレーザ
５のみを使用する。Ｅｒ：ＹＡＧレーザ５はＣＯ，レー
ザ７よりも水に吸収されやすく、深さ方向の制御性に優
れているため、はとんど出血することなく切開できる。A brain tumor removal surgery was performed using this device. First, to incise the skin, the shutter 21 of the CO and laser oscillators is closed by operating the hand switch 22, and only the Er; YAG laser 5 is used. The Er:YAG laser 5 is more easily absorbed by water than the CO laser 7, and has better controllability in the depth direction, so it can perform incisions without causing bleeding.
腫瘍の除去には手元スイッチ２２を操作してＥｒ；ＹＡ
Ｇレーザ５のシャッター２０を閉じ、ｃｏ！レーザ７の
みを使用する。ＣＯ，レーザ７はＥｒ；ＹＡＧレーザ５
よりもはるかに大きな出力が得られるため、腫瘍の除去
はごく短時間で済ませることができる。このように、本
実施例による導波路を用いることにより、手術目的に合
わせてレーザメスとなるビームの波長を手元で選択でき
るため効果的な治療を短時間で施すことかでき、患者へ
の体力的な負担を大幅に軽減することができた。To remove the tumor, operate the hand switch 22 and select Er; YA.
Close the shutter 20 of the G laser 5, and co! Only laser 7 is used. CO, laser 7 is Er; YAG laser 5
Because the output is much greater than that of the previous one, the tumor can be removed in a very short amount of time. As described above, by using the waveguide according to this embodiment, the wavelength of the laser knife beam can be selected at hand according to the surgical purpose, making it possible to perform effective treatment in a short time and reducing the patient's physical strength. We were able to significantly reduce the burden.
［発明の効果〕
本発明によれば、ゲルマニウムの膜厚またはセレン化亜
鉛の膜厚を最適な厚さに設定したので、赤外に於ける主
要なレーザであるＥｒ；ＹＡＧレーザ、ＣＯレーザ、Ｃ
Ｏｔレーザのすべてを一つの導波路で低損失伝送するこ
とができる。これにより、各々の波長ごとに導波路を用
意する必要がないため、一つの導波路で任意の波長を選
びながら加工などを行うことが可能となり、あるいは、
複数の波長の光を、同一の導波路で同時に照射して、単
独のレーザ光では得られなかった、より高度な加工効果
をもたらすことも可能となる。[Effects of the Invention] According to the present invention, the germanium film thickness or the zinc selenide film thickness is set to the optimum thickness, so that the main lasers in the infrared, such as Er; YAG laser, CO laser, C
All Ot lasers can be transmitted through one waveguide with low loss. As a result, there is no need to prepare a waveguide for each wavelength, so it is possible to perform processing while selecting an arbitrary wavelength with one waveguide, or,
By simultaneously irradiating light of multiple wavelengths through the same waveguide, it is also possible to bring about more advanced processing effects that could not be obtained with a single laser beam.
第１図は本発明によるＧｅ内装Ａｇ中空光導波路の実施
例を示す断面図、第２図は中空光導波路の透過率測定系
の構成図、第３図は本発明によるＺｎ５ｅ内装Ａｇ中空
光導彼路の実施例を示す断面図、第４図は本発明の誘電
体内装金属中空光導波路を応用したよるレーザ加工装置
例の概略図、第５図は同じく本発明の誘電体内装金属中
空光導波路を応用したレーザメス例の概略図、第６図は
Ｇｅ内装Ｎｉ中空光導波路の赤外分光特性図、第７図は
Ｇｅ内装Ｎ１中空光導波路の赤外分光特性のＧｅ膜厚依
存性を示す図、第８図はＺｎ５ｅ内装Ａｇ中空光導波路
の赤外分光特性のＺｎ５ｅ膜厚依存性を示す図である。
ｌはＧｅ内装Ａｇ中空光導波路、２はＮｉバイブ、３は
Ａｇ、４はＧｅ、５はＥｒ；ＹＡＧレーザ、６はＣＯレ
ーザ、７はＣＯ，レーザ、８はＺｎ５ｅ、９はＺｎ５ｅ
内装Ａｇ中空光導波路、１０は鉄板、１１は入射端側、
１２は凹面金ミラー １３は凹面金ミラー １４は凹面
金ミラー１５は出射端側、１６はＺｎ５ｅレンズ、１７
は出射端部、２０は外部シャ、ター ２１は外部シャッ
ター ２２は手元スイッチである。
出顛人 日立電線株式会社 Ｗ
第１図
第２図
第３図
波長（μ耐
第６図
波長（μ−）
Ｇｅ内装置１ｉ中空光導波路の赤外分光特性のＧｅ膜厚
依存性第７図FIG. 1 is a cross-sectional view showing an embodiment of the Ge-lined Ag hollow optical waveguide according to the present invention, FIG. 2 is a block diagram of a transmittance measurement system for the hollow optical waveguide, and FIG. 4 is a schematic diagram of an example of a laser processing apparatus to which the dielectric-incorporated metal hollow optical waveguide of the present invention is applied, and FIG. 5 is a cross-sectional view showing an example of the dielectric-incorporated metal hollow optical waveguide of the present invention. 6 is a diagram showing the infrared spectral characteristics of a Ni hollow optical waveguide with a Ge interior. FIG. 7 is a diagram showing the dependence of the infrared spectral characteristics of a N1 hollow optical waveguide with a Ge interior on the Ge film thickness. , FIG. 8 is a diagram showing the dependence of the infrared spectral characteristics of the Zn5e-incorporated Ag hollow optical waveguide on the Zn5e film thickness. l is Ge-incorporated Ag hollow optical waveguide, 2 is Ni vibe, 3 is Ag, 4 is Ge, 5 is Er; YAG laser, 6 is CO laser, 7 is CO, laser, 8 is Zn5e, 9 is Zn5e
Internal Ag hollow optical waveguide, 10 is an iron plate, 11 is the incident end side,
12 is a concave gold mirror, 13 is a concave gold mirror, 14 is a concave gold mirror 15 is on the output end side, 16 is a Zn5e lens, 17
20 is an external shutter, 21 is an external shutter, and 22 is a hand switch. Publisher Hitachi Cable Co., Ltd. W Figure 1 Figure 2 Figure 3 Wavelength (μ resistance Figure 6 Wavelength (μ-) Figure 7 Dependence of infrared spectral characteristics of hollow optical waveguide in Ge device 1i on Ge film thickness
Claims (2)
空光導波路において、 誘電体薄膜の材料にゲルマニウムを用い、該ゲルマニウ
ムの膜厚を０．４２〜０．５０μｍにしたことを特徴と
する誘電体内装金属中空光導波路。(1) A dielectric-incorporated metal hollow optical waveguide in which a dielectric thin film is embedded in a metal film, characterized in that germanium is used as the material of the dielectric thin film, and the film thickness of the germanium is 0.42 to 0.50 μm. dielectric interior metal hollow optical waveguide.
該セレン化亜鉛の厚さを０．６８〜０．９２μｍにした
請求項１記載の誘電体内装金属中空光導波路。(2) Using zinc selenide instead of germanium,
The dielectric-incorporated metal hollow optical waveguide according to claim 1, wherein the zinc selenide has a thickness of 0.68 to 0.92 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1324376A JP2827365B2 (en) | 1989-12-14 | 1989-12-14 | Laser processing equipment using dielectric-hollow metal hollow optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1324376A JP2827365B2 (en) | 1989-12-14 | 1989-12-14 | Laser processing equipment using dielectric-hollow metal hollow optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03184003A true JPH03184003A (en) | 1991-08-12 |
| JP2827365B2 JP2827365B2 (en) | 1998-11-25 |
Family
ID=18165106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1324376A Expired - Fee Related JP2827365B2 (en) | 1989-12-14 | 1989-12-14 | Laser processing equipment using dielectric-hollow metal hollow optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2827365B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0196603A (en) * | 1987-10-08 | 1989-04-14 | Hitachi Cable Ltd | Hollow optical waveguide |
| JPH01292303A (en) * | 1988-05-20 | 1989-11-24 | Hitachi Cable Ltd | Hollow waveguide |
| JPH01312510A (en) * | 1988-06-13 | 1989-12-18 | Hitachi Cable Ltd | hollow optical waveguide |
-
1989
- 1989-12-14 JP JP1324376A patent/JP2827365B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0196603A (en) * | 1987-10-08 | 1989-04-14 | Hitachi Cable Ltd | Hollow optical waveguide |
| JPH01292303A (en) * | 1988-05-20 | 1989-11-24 | Hitachi Cable Ltd | Hollow waveguide |
| JPH01312510A (en) * | 1988-06-13 | 1989-12-18 | Hitachi Cable Ltd | hollow optical waveguide |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2827365B2 (en) | 1998-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4676586A (en) | Apparatus and method for performing laser material processing through a fiber optic | |
| US4170997A (en) | Medical laser instrument for transmitting infrared laser energy to a selected part of the body | |
| US3843865A (en) | Device for material working by a laser beam,and method for its production | |
| US4678268A (en) | Method and apparatus for constructing microlens ends for optical fibers | |
| US4799755A (en) | Laser materials processing with a lensless fiber optic output coupler | |
| US5317661A (en) | Laser removal of altered index of refraction layer on glass fibers | |
| TW445688B (en) | Laser radiation device employing a fiber laser capable of emitting a laser beam including two or more wavelength components | |
| WO2007046833A2 (en) | Pulsed laser source with adjustable grating compressor | |
| EP3449537A1 (en) | Monolithic visible wavelength fiber laser | |
| JPH0748083B2 (en) | Optical fiber bundle for high intensity electromagnetic radiation transmission | |
| WO2025112586A1 (en) | Raman filter, and apparatus and method for manufacturing same | |
| CA2051473C (en) | Hollow waveguide for ultraviolet wavelength region laser beams | |
| JPH03184003A (en) | Laser processing equipment using dielectric-interior metal hollow optical waveguide | |
| Uemiya et al. | Crystal Cored Fiber Using Organic Material And Focusing Properties Of Generated Secondâ â ‚¬ â€? Harmonic Wave | |
| JPH07328025A (en) | Medical laser equipment | |
| Harrington | Laser power delivery in infrared fiber optics | |
| Alimpiev et al. | Polycrystalline IR fibers for laser scalpels | |
| Merberg et al. | Evaluation of crystalline and chemically durable glass fibers for Erbium-YAG laser delivery systems | |
| Artjushenko et al. | Critical characteristics of crystalline IR-fibers | |
| Anastasopoulou et al. | Q-switched Er: YAG radiation transmission through fluoride glass fibers and dielectric-coated metallic hollow waveguides | |
| JPH11271564A (en) | Optical connector | |
| GB2154017A (en) | Laser material processing through a fiber optic | |
| JPH08234026A (en) | Hollow waveguide, method of manufacturing the same, and laser transmission device | |
| JPH0255157B2 (en) | ||
| CA1210077A (en) | Laser material processing through a fiber optic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |