JPH0318434B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a drive device using a piezoelectric body, which is suitably used, for example, in a fine adjustment device for tools of NC machine tools.

BACKGROUND ART As shown in FIG. 1, a conventional drive piezoelectric device forming a linear motor includes a first piezoelectric element section 2, a second piezoelectric element section 3 formed at both longitudinal ends of the first piezoelectric element section 2, and a second piezoelectric element section 3 formed at each longitudinal end of the piezoelectric element section 2, as shown in FIG. 3 piezoelectric element portions 4. The operating process of this piezoelectric device 1 is to first insert the piezoelectric device 1 into the groove block 5 as shown in FIG. 6 and fix it.
Next, after shrinking the third piezoelectric element part 4, when the first piezoelectric element part 2 is expanded, the third piezoelectric element part 4 is moved by a distance L equal to the extension of the first piezoelectric element part 2, as shown in FIG. Moving. Next, as shown in FIG. 1, the third piezoelectric element part 4 is expanded and fixed to the inner wall 6, the second piezoelectric element part 3 is reduced, and then the first piezoelectric element part 2 is reduced. As a result, the second piezoelectric element portion 3 of the piezoelectric device 1 has been moved by a distance L to the right in FIG. 1, as shown in FIG. 1. By repeating the operations from FIG. 1 1 to FIG. 1 4, the piezoelectric device 1
is moving in one direction along the inner wall 6 of the groove block 5.

In such a piezoelectric device 1, piezoelectric element portions 2, 3,
Since the length of extension of piezoelectric device 1 is extremely small,
The movement of the piezoelectric device 1 was slow, and due to the precision of the width of the groove block 5, the piezoelectric device 1 could not be moved smoothly.

Purpose The present invention solves the above-mentioned technical problems and provides a drive device using a piezoelectric body that is simple in structure and has an increased moving speed.

Structure of the Invention The present invention provides (a) a block 2 having a longitudinal passage 22 formed by a pair of mutually opposing parallel inner walls 21;
0, (b) a piezoelectric device 10 housed in the passage 22, (b1) a first piezoelectric element portion 12a, and (b11) a plate-shaped first central electrode 11a parallel to the inner wall 21; , (b12) the first piezoelectric bodies 13a and 14a provided on both sides of the first central electrode 11a, and (b13) the first piezoelectric bodies 13a and 14a of each of the first piezoelectric bodies 13a and 14a.
a first piezoelectric element portion 12a having plate-shaped first side electrodes 15a and 16a provided on opposite sides of the center electrode 11a; (b2) one side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element portion 12a; (b21) A second piezoelectric element part 12b provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a first axis 65 parallel to the inner wall 21 and perpendicular to the longitudinal direction; (b22) second piezoelectric bodies 13b, 14b provided on both sides of the second central electrode 11b, (b23) second piezoelectric bodies 13b, 14b of each second piezoelectric body 13b, 14b; 2
(b3) the other side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element part 12a; and a third piezoelectric element part 12c provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a second axis 66 parallel to the inner wall 21 and perpendicular to the longitudinal direction, (b31) an inner wall; (b32) Third piezoelectric bodies 13c, 14c provided on both sides of the third central electrode 11c, (b33) Third piezoelectric bodies 13c, 14c of each of the third piezoelectric bodies 13c, 14c. 3
(c) a piezoelectric device 10 having a third piezoelectric element portion 12c having plate-shaped third side electrodes 15c and 16c provided on opposite sides of the center electrode 11c; 1 side electrode 15
a, 16a, a voltage is applied between the second central electrode 11b and each of the second side electrodes 15b, 16b, and a voltage is applied between the third central electrode 11c and each of the third side electrodes 15c, 16c. A voltage is applied between them, and either one of the second or third piezoelectric element portions 12b, 12c
a first step in which the first piezoelectric element portion 12a is angularly displaced and fixed in contact with the inner wall 21; a second step in which the first piezoelectric element portion 12a is curved and reduced in the longitudinal direction without contacting the inner wall 21; a third step in which the other of the second or third piezoelectric element portions 12b, 12c is angularly displaced around the first or second axes 65, 66 and fixed by abutting against the inner wall 21; Part 12b,
a fourth step of preventing the one of the piezoelectric elements 12c from coming into contact with the inner wall 21, and the first piezoelectric element portion 12a
and a sixth step of preventing the other of the second or third piezoelectric element portions 12b, 12c from contacting the inner wall 21 in this order. This is a drive device using a piezoelectric body characterized by the following.

The present invention also provides: (a) a block 2 having a longitudinal passage 22 formed by a pair of parallel inner walls 21 facing each other;
(b) a pair of piezoelectric devices 1 housed in the passage 22;
0,10a, and each piezoelectric device 10,10a
(b1) a first piezoelectric element portion 12a, (b11) a plate-shaped first center electrode 11a parallel to the inner wall 21; and (b12) first piezoelectric elements provided on both sides of the first center electrode 11a. bodies 13a, 14a, and (b13) the first piezoelectric bodies 13a, 14a.
a first piezoelectric element portion 12a having plate-shaped first side electrodes 15a and 16a provided on opposite sides of the center electrode 11a; (b2) one side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element portion 12a; (b21) A second piezoelectric element part 12b provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a first axis 65 parallel to the inner wall 21 and perpendicular to the longitudinal direction; (b22) second piezoelectric bodies 13b, 14b provided on both sides of the second central electrode 11b, (b23) second piezoelectric bodies 13b, 14b of each second piezoelectric body 13b, 14b; 2
(b3) the other side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element part 12a; and a third piezoelectric element part 12c provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a second axis 66 parallel to the inner wall 21 and perpendicular to the longitudinal direction, (b31) an inner wall; (b32) Third piezoelectric bodies 13c, 14c provided on both sides of the third central electrode 11c, (b33) Third piezoelectric bodies 13c, 14c of each of the third piezoelectric bodies 13c, 14c. 3
(c) each piezoelectric device 10, 10a is the first and second
(d) first, second and third piezoelectric element portions 12a, 12b of each piezoelectric device 10, 10a; , 12c are curved in the direction away from each other, a voltage is applied between the first central electrode 11a and each of the first side electrodes 15a, 16a,
Applying a voltage between the side electrodes 15b and 16b,
a third central electrode 11c and each third side electrode 15c,
16c, and either one of the second or third piezoelectric element portions 12b, 12c is connected to the first or second axis 65, 66.
a first step in which the first piezoelectric element portion 12a is angularly displaced and fixed in contact with the inner wall 21; a second step in which the first piezoelectric element portion 12a is curved and reduced in the longitudinal direction without contacting the inner wall 21; a third step in which the other of the second or third piezoelectric element portions 12b, 12c is angularly displaced around the first or second axes 65, 66 and fixed by abutting against the inner wall 21; Part 12b,
a fourth step of preventing the one of the piezoelectric elements 12c from coming into contact with the inner wall 21, and the first piezoelectric element portion 12a
and a sixth step of preventing the other of the second or third piezoelectric element portions 12b, 12c from contacting the inner wall 21 in this order. This is a drive device using a piezoelectric body characterized by the following.

EXAMPLE FIG. 2 is a perspective view of a piezoelectric device 10 according to the invention. This piezoelectric device 10 and the groove block 20
and the power supply means constitute the present drive device. The piezoelectric device 10 is formed in an H-shape, and basically includes a common electrode plate 11 and a piezoelectric element 12 consisting of first to third piezoelectric element parts 12a, 12b, and 12c.
including. This piezoelectric element 12 has a common electrode plate 11
a pair of piezoelectric bodies 13 and 14 fixed to the surface of the
It includes second electrode plates 15 and 16 fixed to the other surface opposite to the one surface facing the common electrode 11, respectively.
The common electrode plate 11 made of a conductive material is formed in an H-shape, and has an extending part 11a, which is a first central electrode, extending in the direction of movement of the device 10, and symmetrical electrodes at both longitudinal ends of the extending part 11a. It consists of vertical parts 11b and 11c, which are second and third central electrodes formed in the vertical direction. A pair of piezoelectric bodies 13 and 14 fixed to both surfaces of the common electrode plate 11 are formed in an H-shape. One piezoelectric body 13 has a common electrode plate 1
an extending portion 13a that is a first piezoelectric body corresponding to the extending portion 11a of the common electrode plate 11, and a vertical portion 13b that is a second and third piezoelectric body corresponding to the vertical portions 11b and 11c of the common electrode plate 11, respectively. 13c. The other piezoelectric body 14, like the piezoelectric body 13,
An extended portion 14a, which is another first piezoelectric body, corresponding to the extended portion 11a of the first electrode plate 11, and a first
It consists of vertical parts 14b and 14c, which are another second and third piezoelectric bodies, corresponding to the vertical parts 11b and 11c of the electrode plate 11, respectively.

A second electrode plate 15 is fixed to the other surface of the piezoelectric body 13 opposite to the one surface of the common electrode plate 11 . Second
The electrode plate 15 has a second electrode portion 15a that is a first side electrode corresponding to the extending portion 13a of the piezoelectric body 13.
The piezoelectric body 13 is separated from the second electrode portion 15a.
A second electrode portion 15 in which the vertical portions 13b and 13c are respectively corresponding second and third side electrodes.
b, 15c. On the other surface of the other piezoelectric body 14 opposite to the one surface facing the common electrode plate 11, there is a second surface.
A second electrode plate 16 having the same configuration as the electrode plate 15
is fixed. The second electrode plate 16 includes a second electrode portion 16 a that is another first side electrode corresponding to the extending portion 14 a of the piezoelectric body 14 , and a second electrode portion 16 a that is another first side electrode corresponding to the extending portion 14 a of the piezoelectric body 14 .
b is separated from the vertical portion 14 of the piezoelectric body 14.
Second electrode parts 16b, 16 which are another second and third side electrodes corresponding to b, 14c, respectively
It consists of c. In this way, the piezoelectric element 12 is constructed in a sandwich-like structure, with the second electrode plates 15 and 16 arranged on both surfaces of the pair of piezoelectric bodies 13 and 14 with the common electrode plate 11 sandwiched between them. Board 11
The extending portion 11a of the piezoelectric body 13 and each extending portion 1 of the piezoelectric body 13, 14
3a, 14a and the second electrode parts 15a, 16a of the second electrode plates 15, 16, the first piezoelectric element part 1
2a is formed, (2) the vertical portion 11 of the common electrode plate 11;
b and each vertical portion 13b, 14b of the piezoelectric body 13, 14
and each second electrode portion 15b of the second electrode plates 15, 16,
16b forms the second piezoelectric element part 12b, and (3) the vertical part 11c of the common electrode plate 11 and the piezoelectric body 1
The third piezoelectric element portion 12c is formed by the vertical portions 13c, 14c of the electrodes 3 and 14 and the second electrode portions 15c, 16c of the second electrode plates 15, 16.

As the material of the piezoelectric body 12, for example, PZT (lead zirconate titanate) or a composite of an inorganic material and a polymer material is used. The composite material is preferably a polymeric material containing homogeneously dispersed piezoelectric porcelain powder, such as barium titanate or PZT (lead zirconate titanate); examples of the polymeric material include homopolymers of vinylidene fluoride and Vinylidene chloride-3
Vinylidene fluoride copolymers such as fluorinated ethylene copolymers are preferred.

FIG. 3 is a block diagram showing the connection state of the power supply means for the piezoelectric device 10. Each piezoelectric element section 12a, 12b, 12c of the piezoelectric device 10 is connected to a control circuit 17, 18, 19, respectively. As a result, the first piezoelectric element portion 12a and the second
An independent connection state between the piezoelectric element section 12b and the third piezoelectric element section 12c is achieved.

4 is a horizontal sectional view of an embodiment of the present invention, FIG. 5 is a vertical sectional view thereof, FIG. 6 is a sectional view at right angles to the axis, and FIG. 7 is a cross-sectional view of the section of FIG. 5. It is an enlarged perspective view. The piezoelectric device 10 has a fourth
Inner wall 21 of groove block 20 extending in the left-right direction in the figure
It is inserted into a passageway 22 having a convex cross section surrounded by. The passage 22 is formed by a pair of parallel inner walls 21 facing each other, and extends in the longitudinal direction (left-right direction in FIGS. 4 and 5). This passage 22
An escape recess 64 may be formed in one of the inner walls 21, and the vertical width W1 of this escape recess 64 in FIG. 5 is equal to the width of the first piezoelectric element portion 12a.
is less than W2 (W1>W2), so as shown in FIGS. 9 3 to 9 5 described later, the first piezoelectric element portion 12a
It is also possible to prevent the first piezoelectric element portion 12a from entering the escape recess 64 and contacting the inner wall 21 when the first piezoelectric element portion 12a is curved. Assume that the drive pulse shown in FIG. 8 is applied to the piezoelectric device 10 that is allowed to move in the left-right direction in FIGS. 4 and 5 in this manner. At this time, the electrode part 15a of the second electrode plate 15 divided into three parts, the electrode part 15b,
15c, and between the electrode portion 16a of the other second electrode plate 16 and the electrode portions 16b and 16c, spaces having the same width m are provided. Therefore, as shown in FIGS. 4 and 5, the second piezoelectric element portion 12b extends around the first axis 65.
can be angularly displaced with respect to a. This first axis 65
is parallel to the inner wall 21 and perpendicular to the longitudinal direction of the passage 22. Similarly, the third piezoelectric element portion 12c
The first piezoelectric element portion 12 is arranged around the second axis 66.
can be angularly displaced with respect to a. The second axis 66 is
It is parallel to the inner wall 21 and perpendicular to the longitudinal direction of the passage 22.

In the piezoelectric device 10, as shown in the voltage waveform diagram of FIG. 8, a voltage having the waveform shown in FIG. 8 is applied to the second piezoelectric element portion 12b by the control circuit 17, The control circuit 18 applies a voltage with the waveform shown in FIG. In the case of a reverse movement, the order of the time paths of the waveforms 1, 2, and 3 in FIG. 8 is reversed. As shown in FIG. 15, piezoelectric elements 13 and 14 having different electrical polarities are used in each piezoelectric element portion 12a, 12b, and 12c constituting a so-called bimorph. It can be bent and protruded in the direction of arrow R.

In FIG. 9, each piezoelectric element portion 12a, 12b, 1
2c are all in a state where no voltage is applied, and from time T1
Between T2, the second piezoelectric element part 1 is connected as shown in FIG.
A predetermined voltage is applied to only the second piezoelectric element portion 2b, causing it to bend, so that the second piezoelectric element portion 12b is fixed to the inner wall 21 of the straight path 22 within the groove block 20. That is, the second piezoelectric element portion 12b is angularly displaced around the first axis 65 and fixed in contact with the inner wall 21, thus performing the first step.

Between time T2 and T4, as shown in FIG. 9, the first piezoelectric element part 1 follows the second piezoelectric element part 12b.
2a is also applied with a voltage and becomes curved, so that the first piezoelectric element portion 12a is in a contracted state in the longitudinal direction of the straight path 22, and the second step is performed. As a result, the third piezoelectric element portion 12
c moves toward the second piezoelectric element portion 12b by the amount by which the first piezoelectric element portion 12a is reduced.

Between time T4 and T5, voltage is applied to all piezoelectric element portions 12a, 12b, and 12c as shown in FIG.
Fixed to 1. That is, the third piezoelectric element portion 12c
is angularly displaced about the second axis 66 and fixed against the inner wall 21, thus completing the third step.

Between time T5 and T6, the second
The voltage application to the piezoelectric element portion 12b is released, and the second
The fourth step is performed while the piezoelectric element portion 12b is kept from coming into contact with the inner wall 21.

Between time T6 and T7, the first
The voltage application to the piezoelectric element part 12a is removed, and the first piezoelectric element part 12a is therefore extended in the longitudinal direction of the passage 22, thus carrying out the fifth step.

Next, as shown in FIG. 9, by applying a voltage only to the third piezoelectric element portion 12c and fixing it to the inner wall 21, the piezoelectric device 10 moves toward the left in FIG. This means that it has moved by the amount of the reduction.

Between time T7 and T8, the second
A voltage is again applied to the piezoelectric element portions 12a and 12b. Thereafter, from time T8 to T9, the sixth step is performed without applying a voltage to the third piezoelectric element part 12c so that the third piezoelectric element part 12c does not come into contact with the inner wall 21. In this way, by repeating the above-mentioned operating states of the first to sixth steps, the piezoelectric device 10 can move in one direction within the straight path 22 of the groove block 20. A rod (not shown) is attached to one end of the piezoelectric device 10 in the longitudinal direction, which serves as a means for transmitting the movement of the piezoelectric device 10 to the outside of the groove block 20. can function as a linear motor.

The width D of the straight path 22 formed in the groove block 20 shown in FIG. The size is selected so that it does not come into contact with the inner wall 21 of the groove block 20 even if it curves due to the application of voltage, and the height H of the straight path 22 is as shown in FIG. And the height is selected to be larger than the height of the third piezoelectric element portion 12c. Therefore, by bending and expanding the second piezoelectric element section 12b and the third piezoelectric element section 12c by applying and releasing voltage, the piezoelectric device 10 can be moved and stopped.

According to the experimental results of the inventor, by dividing the piezoelectric element 12 into three parts, the curvature of the second piezoelectric element part 12b and the third piezoelectric element part 12c of the piezoelectric device 10 can be arbitrarily selected. , piezoelectric device 1
A very large amount of movement of 0 can be obtained in one cycle of operation, and it is possible to obtain an amount of movement that is about 10 times or more compared to the piezoelectric device 1 shown in the prior art.

FIG. 10 is a perspective view of another embodiment of the invention. FIG. 10 is similar to the configuration of FIG. 2, and corresponding parts are given the same reference numerals. The first thing to note is
The common electrode plate 11 as an electrode is replaced with a second electrode plate 15.
Each of the first, second and third electrode portions 15a, 15
b, 15c; 16a, 16b, 16c, respectively. By dividing the common electrode plate 11 into three in this way, each piezoelectric element portion 12a, 12b, 12c can be arbitrarily selected, and the piezoelectric element portion 12a can be lengthened, for example, to reduce the amount of movement of the piezoelectric device 10. It is possible to increase the amount.

FIG. 11 is a perspective view of still another embodiment of the present invention. FIG. 11 is similar to the configuration of FIG. 2, and corresponding parts are given the same reference numerals. What should be noted is that the common electrode plate 11 made of metal is made thicker, and the first piezoelectric element part 12a, the second piezoelectric element part 12b, and the third piezoelectric element part 12c are individually fixed to the central part and both ends thereof. That's true. By making the common electrode plate 11 thicker, the piezoelectric device 10
The mechanical strength of the piezoelectric element portion 12 is increased.
By completely dividing a, 12b, and 12c into three parts, that is, by dividing the piezoelectric material,
The spring constant of the piezoelectric element notches 50 and 51 of the common electrode plate 11 can be made small, and the deflection of the first piezoelectric element part 12a can be increased. This allows the amount of movement of the piezoelectric device 10 to be further increased.

FIG. 12 is a side view of another embodiment of the present invention, and FIG. 13 is a front view thereof. What should be noted is that the piezoelectric devices 10, 10a according to the present invention are stacked in two layers, and the electrode portions 52, 53 of the piezoelectric bodies 13, 14 are fixed to each other by adhesives 54, 55. As a result, as shown in FIG. 14, the first piezoelectric element portion 12 of the pair of piezoelectric devices 10, 10a
By bending a, the second piezoelectric element part 12b, and the third piezoelectric element part 12c in directions away from each other, it is possible to obtain twice the curvature of the above embodiment, and the pair of piezoelectric devices 10 ,10
Since a is symmetrical, the moving operation is stable, and the width of the straight path 22 of the groove block 20 can be determined accurately, improving work efficiency. That is, in the embodiment shown in FIGS. 12 to 14, the pair of piezoelectric devices 10 and 10a are
These piezoelectric devices 10, 10a are housed in the passage 22 of the block 20, as shown in FIGS.
The first and second axes 65, 6 mentioned in connection with the figures
6 and are symmetrically configured with respect to a plane of symmetry 67 parallel to the inner wall 21.

The piezoelectric device according to the present invention can be used not only for positioning tools and workpieces of NC machine tools, fine movement feeding of microscope specimens, fine angle adjustment of optical system reflectors and other reflecting mirrors, and various other fine movement adjustment devices. It can also be widely implemented in other technical fields.

As shown in FIG. 16, a common electrode plate 100,
101 may be cut off by an electrical insulator 102.

Effects As described above, according to the present invention, with respect to the first piezoelectric element portion 12a, the second and third piezoelectric element portions 12b and 12c are provided in both the longitudinal directions of the passage 22,
These first to third piezoelectric element portions 12a, 12b,
12c, piezoelectric bodies 13a, 14a; 13b, 14b;
3c, 14c are provided, and these piezoelectric bodies are further provided with side electrodes 15a, 16a; 15b, 16
b; 15c, 16c are provided, and these first to third piezoelectric element parts 12a, 12b, 12c
Since it moves in a curved manner, it is possible to increase the moving speed.

Moreover, in the present invention, such a piezoelectric device 10
Since the block 20 is housed in the passage 22 of the block 20, an excellent effect is achieved in that it can be moved in a trajectory along the passage 22 over a long distance.

Furthermore, according to the present invention, a pair of piezoelectric devices 10,
10a in a symmetrical configuration, the first and second
And since the third piezoelectric element portions 12a, 12b, and 12c are curved in directions away from each other,
The excellent effect of increasing the driving force is also achieved.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of the drive of the piezoelectric device 1 of the prior art;
2 is a perspective view of the piezoelectric device 10 according to the present invention, FIG. 3 is a simplified diagram showing the connection state of the piezoelectric device 10, FIG. 4 is a horizontal cross-sectional view of an embodiment of the present invention, and FIG. 5 is a longitudinal cross-section thereof. A top view, Figure 6 is a sectional view at right angles to the axis, and Figure 7 is a cross-sectional view at right angles to the axis.
The figure is an enlarged perspective view of the section in Figure 5.
FIG. 8 is a voltage waveform diagram applied to the first piezoelectric element section 12a, the second piezoelectric element section 12b, and the third piezoelectric element section 12c, FIG. 9 is a simplified diagram showing the driving state of the piezoelectric device 10, and FIG. FIG. 11 is a perspective view of still another embodiment of the invention, FIG. 12 is a side view of another embodiment of the invention, and FIG. 13 is a plan view thereof. 14 is an explanatory diagram of driving the pair of piezoelectric devices 10 and 10a shown in FIG. 11, FIG. 15 is an enlarged sectional view of a bimorph, and FIG. 16 is a sectional view showing another embodiment of the present invention. 1, 10... piezoelectric device, 11... common electrode plate,
12... Piezoelectric element, 13, 14... Piezoelectric body, 1
5, 16...Second electrode plate, 20...Groove block,
22... Straight passage.

Claims (1)

[Scope of Claims] 1 (a) a block 20 having a longitudinal passage 22 formed by a pair of parallel inner walls 21 facing each other; and (b) a piezoelectric device 10 housed within the passage 22. (b1) a first piezoelectric element portion 12a, (b11) a plate-shaped first center electrode 11a parallel to the inner wall 21; and (b12) first piezoelectric elements provided on both sides of the first center electrode 11a. bodies 13a, 14a, and (b13) the first piezoelectric bodies 13a, 14a.
a first piezoelectric element portion 12a having plate-shaped first side electrodes 15a and 16a provided on opposite sides of the center electrode 11a; (b2) one side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element portion 12a; (b21) A second piezoelectric element part 12b provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a first axis 65 parallel to the inner wall 21 and perpendicular to the longitudinal direction; (b22) second piezoelectric bodies 13b, 14b provided on both sides of the second central electrode 11b, (b23) second piezoelectric bodies 13b, 14b of each second piezoelectric body 13b, 14b; 2
(b3) the other side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element part 12a; and a third piezoelectric element part 12c provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a second axis 66 parallel to the inner wall 21 and perpendicular to the longitudinal direction, (b31) an inner wall; (b32) Third piezoelectric bodies 13c, 14c provided on both sides of the third central electrode 11c, (b33) Third piezoelectric bodies 13c, 14c of each of the third piezoelectric bodies 13c, 14c. 3
(c) a piezoelectric device 10 having a third piezoelectric element portion 12c having plate-shaped third side electrodes 15c and 16c provided on opposite sides of the center electrode 11c; 1 side electrode 15
a, 16a, a voltage is applied between the second central electrode 11b and each of the second side electrodes 15b, 16b, and a voltage is applied between the second central electrode 11c and each of the third side electrodes 15c, 16c. A voltage is applied between the third central electrode 11c and each of the third side electrodes 15c, 1.
6c, one of the second or third piezoelectric element portions 12b, 12c is connected to the first or second axis 65, 66.
a first step in which the first piezoelectric element portion 12a is angularly displaced and fixed in contact with the inner wall 21; a second step in which the first piezoelectric element portion 12a is curved and reduced in the longitudinal direction without contacting the inner wall 21; a third step in which the other of the second or third piezoelectric element portions 12b, 12c is angularly displaced around the first or second axes 65, 66 and fixed by abutting against the inner wall 21; Part 12b,
a fourth step of preventing the one of the piezoelectric elements 12c from coming into contact with the inner wall 21, and the first piezoelectric element portion 12a
and a sixth step of preventing the other of the second or third piezoelectric element portions 12b, 12c from contacting the inner wall 21 in this order. A drive device using a piezoelectric body characterized by: 2 (a) A block 20 having a longitudinal passage 22 formed by a pair of parallel inner walls 21 facing each other; (b) A pair of piezoelectric devices 1 housed within the passage 22.
0,10a, and each piezoelectric device 10,10a
(b1) a first piezoelectric element portion 12a, (b11) a plate-shaped first center electrode 11a parallel to the inner wall 21; and (b12) first piezoelectric elements provided on both sides of the first center electrode 11a. bodies 13a, 14a, and (b13) the first piezoelectric bodies 13a, 14a.
a first piezoelectric element portion 12a having plate-shaped first side electrodes 15a and 16a provided on opposite sides of the center electrode 11a; (b2) one side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element portion 12a; (b21) A second piezoelectric element part 12b provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a first axis 65 parallel to the inner wall 21 and perpendicular to the longitudinal direction; (b22) second piezoelectric bodies 13b, 14b provided on both sides of the second central electrode 11b, (b23) second piezoelectric bodies 13b, 14b of each second piezoelectric body 13b, 14b; 2
(b3) the other side in the longitudinal direction of the passage 22 with respect to the first piezoelectric element part 12a; and a third piezoelectric element part 12c provided so as to be angularly displaceable relative to the first piezoelectric element part 12a around a second axis 66 parallel to the inner wall 21 and perpendicular to the longitudinal direction, (b31) an inner wall; (b32) Third piezoelectric bodies 13c, 14c provided on both sides of the third central electrode 11c, (b33) Third piezoelectric bodies 13c, 14c of each of the third piezoelectric bodies 13c, 14c. 3
(c) each piezoelectric device 10, 10a is the first and second
(d) first, second and third piezoelectric element portions 12a, 12b of each piezoelectric device 10, 10a; , 12c are curved in the direction away from each other, a voltage is applied between the first central electrode 11a and each of the first side electrodes 15a, 16a,
Applying a voltage between the side electrodes 15b and 16b,
a third central electrode 11c and each third side electrode 15c,
16c, and either one of the second or third piezoelectric element portions 12b, 12c is connected to the first or second axis 65, 66.
a first step in which the first piezoelectric element portion 12a is angularly displaced and fixed in contact with the inner wall 21; a second step in which the first piezoelectric element portion 12a is curved and reduced in the longitudinal direction without contacting the inner wall 21; a third step in which the other of the second or third piezoelectric element portions 12b, 12c is angularly displaced around the first or second axes 65, 66 and fixed by abutting against the inner wall 21; Part 12b,
a fourth step of preventing the one of the piezoelectric elements 12c from coming into contact with the inner wall 21, and the first piezoelectric element portion 12a
and a sixth step of preventing the other of the second or third piezoelectric element portions 12b, 12c from contacting the inner wall 21 in this order. A drive device using a piezoelectric body characterized by: