JPH03185909A - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JPH03185909A JPH03185909A JP32538489A JP32538489A JPH03185909A JP H03185909 A JPH03185909 A JP H03185909A JP 32538489 A JP32538489 A JP 32538489A JP 32538489 A JP32538489 A JP 32538489A JP H03185909 A JPH03185909 A JP H03185909A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating electrode
- vibration
- parallel
- piezoelectric substrate
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 230000010287 polarization Effects 0.000 abstract description 5
- 235000008429 bread Nutrition 0.000 abstract 1
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はエネルギー閉じ込め型厚みすべり振動モードを
利用した3端子型圧電共振子、特にトラップに好適な圧
電共振子に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a three-terminal piezoelectric resonator using an energy-trapped thickness-shear vibration mode, and particularly to a piezoelectric resonator suitable for a trap.
従来、テレビジョン受像機の音声トラップ等に厚みすべ
り振動モードを利用した3端子型圧電共振子が用いられ
ている。この圧電共振子は、第4図に示されるように、
圧電基板1oの一主面に夫々振動電極部11a、12a
を有する2個の個別電極11゜12を設けるとともに、
他主面に上記振動電極部と対向する2個の振動電極部1
3a、 13bを有する共通電極13を設けたものであ
る。上記振動電極部11a12a、 13a、 13b
は円形形状となっており、トラップに適用した場合には
、第5図のように中心周波数f0においてのみ大きな減
衰量を有するバンド・エリミネート特性が得られる。Conventionally, a three-terminal piezoelectric resonator that utilizes a thickness-shear vibration mode has been used for audio traps in television receivers, etc. This piezoelectric resonator, as shown in FIG.
Vibrating electrode portions 11a and 12a are provided on one main surface of the piezoelectric substrate 1o, respectively.
Two individual electrodes 11° 12 are provided, and
Two vibrating electrode parts 1 facing the above vibrating electrode part on the other main surface
A common electrode 13 having electrodes 3a and 13b is provided. The vibrating electrode portions 11a, 12a, 13a, 13b
has a circular shape, and when applied to a trap, a band-eliminate characteristic having a large attenuation only at the center frequency f0 can be obtained as shown in FIG.
ところで、妨害信号等を除去するため、中心周波数fo
をはさんで高低域に幅を持つ周波数域をあるレベルまで
減衰させたい場合があるが、従来の円形振動電極部を有
するトラップでは極めて狭い帯域しか減衰できないので
、このような要求に応えられない。また、特性の異なる
複数のトラップをカスケード接続すれば上記の要求に応
えることは可能であるが、これでは素子が大形化すると
ともにコスト上昇を招くという欠点がある。By the way, in order to remove interference signals etc., the center frequency fo
There are cases where it is desired to attenuate a frequency range with a wide range between high and low frequencies to a certain level, but conventional traps with circular vibrating electrodes can only attenuate extremely narrow bands, so they cannot meet such requests. . Furthermore, although it is possible to meet the above requirements by cascading a plurality of traps with different characteristics, this has the drawback of increasing the size of the device and increasing cost.
そこで、本発明の目的は、1個で広帯域のバンド1エリ
ξネート特性が得られる圧電共振子を提供することにあ
る。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a piezoelectric resonator that can obtain broadband band 1 elinate characteristics with a single piezoelectric resonator.
上記目的を遠戚するため、本発明は、振動電極部をその
各辺が圧電基板の側縁と平行な方形形状としたものであ
る。In order to achieve the above object, the present invention provides a vibrating electrode section having a rectangular shape with each side parallel to the side edges of the piezoelectric substrate.
一般に、振動電極部には厚みすべり振動(TSモード)
だけでなく厚みねしれ振動(TTモード)も励振される
。厚みねしれ振動は振動電極部から圧電基板の側縁まで
の距離に応じて励振されるが、従来の円形振動電極部で
は電極端から圧電基板の側縁までの距離がまちまちであ
るため、厚みねしれ振動が殆ど励振されず、第5図のよ
うに中心周波数f。の高域側に小さいルスボンスを生し
るに過ぎない。これに対し、本発明では振動電極部を各
辺が圧電基板の側縁と平行な方形形状としたので、電極
端から圧電基板の側縁までの距離が一定であり、厚みね
しれ振動が強く励振される。Generally, the vibrating electrode part has thickness shear vibration (TS mode).
In addition to this, thickness shear vibration (TT mode) is also excited. Thickness shear vibration is excited depending on the distance from the vibrating electrode section to the side edge of the piezoelectric substrate, but with conventional circular vibrating electrode sections, the distance from the electrode end to the side edge of the piezoelectric substrate varies, so the thickness Almost no torsional vibration is excited, and the center frequency is f as shown in FIG. It only produces a small Lusbons on the high frequency side. In contrast, in the present invention, the vibrating electrode part has a rectangular shape with each side parallel to the side edge of the piezoelectric substrate, so the distance from the electrode end to the side edge of the piezoelectric substrate is constant, and the thickness shear vibration is strong. Excited.
これにより、厚みねしれ振動に起因する中心周波数f0
の高域側レスポンスを大きくでき、広帯域化を実現でき
る。As a result, the center frequency f0 caused by thickness shear vibration
It is possible to increase the high-frequency response and achieve a wide band.
また、振動電極部を方形とすることにより、分極軸方向
と平行な辺と垂直な辺との寸法比によって中心周波数f
oより高域側のレスポンスの大きさおよびその周波数を
自由に設定できる。In addition, by making the vibrating electrode part square, the center frequency f
The magnitude of the response higher than o and its frequency can be freely set.
第1図は本発明にかかる圧電共振子の一例を示す。 FIG. 1 shows an example of a piezoelectric resonator according to the present invention.
図において、圧電基板1は横長な長方形状の圧電セラミ
ック基板よりなり、その−主面に人、出力電極2.3が
スパッタリング、薄着等の手段により形成されるととも
に、他主面には共通電極4が同様に形成されている。人
、出力電極2,3は振動電極部2a、3aと、これと導
通して圧電基板lの下端部まで引き出された端子電極部
2b、3bとを備えている。また、共通電極4は上記振
動電極部2a、3aと対向する2個の振動電極部4a、
4bと、これと導通して圧電基板lの下端部まで引き出
された1個の端子電極部4cとを備えている。上記振動
電極部2a、3aおよび4a、4bは、圧電基板1の側
縁と平行な方形形状をなしている。上記圧電基板lはそ
の長辺と平行な方向(矢印入方向)に分極処理が施され
ており、これによって振動電極部2a、3aおよび4a
、4bで挟まれた部分に厚みすべり振動モードが生起さ
れる。また、振動電極部2a 、、3aおよび4a、4
bが方形であることから、厚みねじれ振動も励振され、
この圧電共振子をトラップに利用した場合には第2図ま
たは第3図のようなバンド・エリミネート特性が得られ
る。In the figure, a piezoelectric substrate 1 is made of a horizontally long rectangular piezoelectric ceramic substrate, and an output electrode 2.3 is formed on its main surface by sputtering, thin coating, etc., and a common electrode 2.3 is formed on the other main surface. 4 is similarly formed. The output electrodes 2 and 3 include vibrating electrode sections 2a and 3a, and terminal electrode sections 2b and 3b that are electrically connected to the vibrating electrode sections 2a and 3a and extended to the lower end of the piezoelectric substrate l. Further, the common electrode 4 includes two vibrating electrode parts 4a facing the vibrating electrode parts 2a and 3a,
4b, and one terminal electrode portion 4c that is electrically connected to this and drawn out to the lower end of the piezoelectric substrate l. The vibrating electrode parts 2a, 3a and 4a, 4b have a rectangular shape parallel to the side edges of the piezoelectric substrate 1. The piezoelectric substrate l is polarized in a direction parallel to its long side (in the direction of the arrow), thereby forming vibrating electrode parts 2a, 3a, and 4a.
, 4b, a thickness shear vibration mode is generated. In addition, the vibrating electrode portions 2a, 3a and 4a, 4
Since b is square, thickness torsional vibration is also excited,
When this piezoelectric resonator is used as a trap, band elimination characteristics as shown in FIG. 2 or 3 can be obtained.
第2図は振動電極部2a、3aおよび4a、4bの形状
を縦長、換言すれば振動電極部の分極軸方向(A方向)
と平行な辺の長さXと垂直な辺の長さyとの比を約17
3とした場合であり、第3図は振動電極部2a、3aお
よび4a、4bの形状を正方形、換言すればXとyとの
比を約lとした場合である。図から明らかなように、x
/yξ1/3の場合には厚みねしれ振動に起因する中心
周波数f0の高域側しスポンスが中心周波数f0のレス
ポンスよりやや小さいが、x/yξ1の場合には中心周
波数f0の高域側レスポンスと中心周波数10のレスポ
ンスとが略等しくなる。また、X/y#1/3の高域側
レスポンスを生じる周波数f1は、x/yξ1の高域側
レスポンスを生じる周波数f2よりやや高い。いずれの
場合も、中心周波数f0の高域側レスポンスが円形振動
電極部の場合(第5図参照)に比べて大きく、バンド・
エリごネート特性が広帯域化される。Fig. 2 shows the shapes of the vibrating electrode parts 2a, 3a and 4a, 4b being elongated, in other words, in the direction of the polarization axis (direction A) of the vibrating electrode parts.
The ratio of the length of the parallel side X to the length of the perpendicular side y is approximately 17
3, and FIG. 3 shows the case where the shapes of the vibrating electrode parts 2a, 3a and 4a, 4b are square, in other words, the ratio of X and y is about 1. As is clear from the figure, x
In the case of /yξ1/3, the high-frequency response of the center frequency f0 due to thickness shear vibration is slightly smaller than the response of the center frequency f0, but in the case of x/yξ1, the high-frequency response of the center frequency f0 is and the response at the center frequency 10 are approximately equal. Further, the frequency f1 that produces a high-frequency response of X/y#1/3 is slightly higher than the frequency f2 that produces a high-frequency response of x/yξ1. In either case, the high-frequency response of the center frequency f0 is larger than that of the circular vibrating electrode section (see Figure 5), and the band
Erigonate characteristics are made broadband.
圧電基板1の分極軸方向は長辺と平行な方向(A方向)
に限らず、短辺と平行な方向としてもよく、振動電極部
の分極軸方向と平行な辺の長さXと垂直な辺の長さyと
の比が同じであれば、同様なバンド・エリミネート特性
が得られる。この場合には、分極軸方向が振動電極部の
並び方向に対して直角方向となるので、左右の振動電極
部間の干渉が少なくなり、スプリアスが少なくなるとい
う特徴がある。The polarization axis direction of the piezoelectric substrate 1 is parallel to the long side (direction A)
The direction is not limited to , but may be parallel to the short side, and as long as the ratio of the length of the side parallel to the polarization axis direction of the vibrating electrode part X and the length of the perpendicular side y is the same, similar bands Eliminating characteristics can be obtained. In this case, since the direction of the polarization axis is perpendicular to the direction in which the vibrating electrode sections are arranged, there is a feature that interference between the left and right vibrating electrode sections is reduced, and spurious noise is reduced.
また、上記実施例では左右の振動電極部を同一形状とし
た例を示したが、互いに異なる形状としてもよい。例え
ば、一方の振動電極部を長方形状、他方の振動電極部を
正方形状とした場合には、第3図破線のように中心周波
数f。およびその高域側のレスポンスは若干低下するが
、中間部の減衰量を大きくできるという特徴がある。Further, in the above embodiment, an example was shown in which the left and right vibrating electrode portions had the same shape, but they may have mutually different shapes. For example, if one vibrating electrode part is rectangular and the other vibrating electrode part is square, the center frequency f will be as shown by the broken line in FIG. Although the response on the high frequency side is slightly degraded, it has the characteristic that the amount of attenuation in the middle region can be increased.
以上の説明で明らかなように、本発明によれば、振動電
極部をその各辺が圧電基板の側縁と平行な方形形状とし
たので、振動電極部には厚みすべり振動だけでなく厚み
ねしれ振動も励振され、中心周波数の高域側レスポンス
を大きくでき、広帯域化を実現できる。したがって、本
発明をトラップに適用した場合には広帯域トラップを実
現できる。As is clear from the above description, according to the present invention, the vibrating electrode part has a rectangular shape with each side parallel to the side edges of the piezoelectric substrate, so that the vibrating electrode part receives not only thickness-shear vibration but also thickness-shear vibration. Wearing vibrations are also excited, increasing the response in the high frequency range of the center frequency, making it possible to achieve a wide band. Therefore, when the present invention is applied to a trap, a broadband trap can be realized.
第1図は本発明にかかる圧電共振子の一例の正面図、第
2図は振動電極部の寸法比x/yξ1/3のti台のバ
ンド・エリミネート特性図、第3図は振動電極部の寸法
比x/yξ1の場合のバンド・エリミネート特性図、第
4図は従来例の正面図、第5図は従来例のバンド・エリ
【ネート特性図である。
1・・・圧電基板、2.3・・・入出力電極、4・・・
共通電極、2a、3a、4a、4b −・・振動電極部
。Fig. 1 is a front view of an example of a piezoelectric resonator according to the present invention, Fig. 2 is a band elimination characteristic diagram of a Ti unit with a dimensional ratio x/yξ1/3 of the vibrating electrode part, and Fig. 3 is a diagram of the band elimination characteristic of the vibrating electrode part. FIG. 4 is a front view of the conventional example, and FIG. 5 is a band elimination characteristic diagram of the conventional example. 1... Piezoelectric substrate, 2.3... Input/output electrode, 4...
Common electrode, 2a, 3a, 4a, 4b --- vibrating electrode section.
Claims (1)
の個別電極を設けるとともに、他主面に上記振動電極部
と対向する2個の振動電極部を有する共通電極を設け、
エネルギー閉じ込め型厚みすべり振動モードを利用した
3端子型圧電共振子において、 上記振動電極部をその各辺が圧電基板の側縁と平行な方
形形状としたことを特徴とする圧電共振子。(1) providing two individual electrodes each having a vibrating electrode portion on one main surface of the piezoelectric substrate, and providing a common electrode having two vibrating electrode portions facing the vibrating electrode portion on the other main surface;
A three-terminal piezoelectric resonator using an energy-trapped thickness-shear vibration mode, characterized in that the vibrating electrode portion has a rectangular shape with each side parallel to a side edge of a piezoelectric substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32538489A JPH03185909A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32538489A JPH03185909A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03185909A true JPH03185909A (en) | 1991-08-13 |
Family
ID=18176232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32538489A Pending JPH03185909A (en) | 1989-12-14 | 1989-12-14 | Piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03185909A (en) |
-
1989
- 1989-12-14 JP JP32538489A patent/JPH03185909A/en active Pending
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