JPH03197846A - Infrared gas sensor - Google Patents
Infrared gas sensorInfo
- Publication number
- JPH03197846A JPH03197846A JP1337365A JP33736589A JPH03197846A JP H03197846 A JPH03197846 A JP H03197846A JP 1337365 A JP1337365 A JP 1337365A JP 33736589 A JP33736589 A JP 33736589A JP H03197846 A JPH03197846 A JP H03197846A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- light source
- infrared
- cell
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 17
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 5
- 238000003780 insertion Methods 0.000 abstract description 3
- 230000037431 insertion Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 230000000903 blocking effect Effects 0.000 abstract 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
(イ)産業上の利用分野
本発明は光源から放射された赤外線がガスにより吸収さ
れ減衰する性質を利用してガスの濃度を測定する赤外線
式ガスセンサーに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention relates to an infrared gas sensor that measures the concentration of gas by utilizing the property that infrared rays emitted from a light source are absorbed and attenuated by gas.
(ロ)従来の技術
赤外線式ガスセンサーは被測定ガスに吸収されずに到達
する赤外線の量を検出することにより非接触でガス濃度
を測定するガス濃度計等に用いられており、赤外線の検
出に用いられる素子は一般的に微分入力形で、焦電素子
はその代表的なものである。(b) Conventional technology Infrared gas sensors are used in gas concentration meters, etc. that measure gas concentration without contact by detecting the amount of infrared rays that reach the gas to be measured without being absorbed. The elements used for this are generally differential input type, and a pyroelectric element is a typical example.
従来の赤外線式ガスセンサー100を第5図に示す。セ
ンサー100は焦電素子がら成る赤外線検出部S、切欠
部101を有しモータ102によって回転される金属円
板103がら成るチョッパ104、金属円板103の位
置検出器105とがら構成されており、赤外線量に応じ
た出方を、金属円板103が入射赤外線Uを断続するの
と同じ周波数の交流信号として発生するものである。A conventional infrared gas sensor 100 is shown in FIG. The sensor 100 is composed of an infrared detection section S made of a pyroelectric element, a chopper 104 made of a metal disk 103 having a notch 101 and rotated by a motor 102, and a position detector 105 of the metal disk 103. An alternating current signal having the same frequency as that at which the metal disk 103 interrupts the incident infrared rays U is generated in accordance with the amount.
(ハ)発明が解決しようとする課題
係る構成によると、モータ102や金属円板103を有
しているため装置全体が大型化してしまい非常に大なる
設置容積が必要となって、センサーが取り付けられる装
置全体の設計上の制約が大きくなる問題があった。(c) Problems to be Solved by the Invention According to the above configuration, since the motor 102 and the metal disc 103 are included, the entire device becomes large and requires a very large installation volume, and the sensor cannot be installed. There was a problem in that the design restrictions for the entire device that was used were increased.
本発明は、係る課題を解決することを目的とする。The present invention aims to solve this problem.
(ニ)課題を解決するための手段
本発明は、被測定ガスを通過した赤外線を赤外線検出部
に照射して出力を得る赤外線式ガスセンサーに於て、前
記赤外線発生用の光源を収納する光源ブロックと、赤外
線透過部を有してその内部を被測定ガスが流通するガス
セルと、赤外線検出部が取り付けられる支持部材とを準
備し、ガスセルを光源ブロックと赤外線検出部間に介在
せしめた状態で光源ブロックとガスセル及び支持部材を
一体に組み立てたものである。(d) Means for Solving the Problems The present invention provides an infrared gas sensor that obtains an output by irradiating an infrared detection unit with infrared rays that have passed through a gas to be measured. A block, a gas cell having an infrared transmitting part through which gas to be measured flows, and a support member to which an infrared detecting part is attached are prepared, and the gas cell is interposed between the light source block and the infrared detecting part. A light source block, a gas cell, and a support member are assembled together.
(ホ)作用
本発明によれば赤外線式ガスセンサー全体の寸法を極め
て小型化できると共に、光源と被測定ガス及び赤外線検
出部の位置関係のズレが生じない構造にできる。(E) Function According to the present invention, the overall size of the infrared gas sensor can be extremely reduced, and a structure can be created in which no misalignment occurs in the positional relationship between the light source, the gas to be measured, and the infrared detection section.
(へ)実施例 次に本発明の実施例を図面において説明する。(f) Example Next, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明の赤外線式ガスセンサーAの斜視図を、
また、第2図はその縦断面図を示す。更に第3図は近年
開発された所謂モジュレーションタイプの焦電形赤外線
検出器1の分解斜視図を示している。検出S1はシール
ドボックス2内に前述の赤外線検出部Sを収納し、シー
ルドボックス2に形成した図示しない透孔に対応する位
置に圧電バイモルフ振動子3によって駆動されるスリッ
ト部材4から成るチョッパCを設け、更にそれに対応す
る位置に透孔5を形成したケース6にて全体をカバーし
て構成されている。スリット部材4は第4図に示す如く
スリットを形成した2枚の板を重合関係に取り付けて構
成され、チョッパCに入力される駆動電圧の周波数と同
じ周波数で圧電バイモルフ振動子3が振動することによ
りスリットを開閉し、透孔5より入射して赤外線検出部
Sに到達する赤外線Uを断続して、赤外線量に応じた出
力をチョッパCの入力周波数と同じ周波数の交流信号と
して発生する。FIG. 1 is a perspective view of an infrared gas sensor A of the present invention.
Further, FIG. 2 shows a longitudinal sectional view thereof. Furthermore, FIG. 3 shows an exploded perspective view of a so-called modulation type pyroelectric infrared detector 1 developed in recent years. The detection S1 houses the above-mentioned infrared detection section S in a shield box 2, and a chopper C consisting of a slit member 4 driven by a piezoelectric bimorph vibrator 3 is placed at a position corresponding to a through hole (not shown) formed in the shield box 2. The entire body is covered by a case 6 in which a through hole 5 is formed at a corresponding position. The slit member 4 is constructed by attaching two plates with slits formed in an overlapping relationship as shown in FIG. The slit is opened and closed, and the infrared ray U that enters through the through hole 5 and reaches the infrared detection section S is intermittent, and an output corresponding to the amount of infrared rays is generated as an alternating current signal of the same frequency as the input frequency of the chopper C.
この様な構成によって赤外線検出器1は非常に小型にな
り、プリント回路基板に実装できる様になっている。赤
外線検出器1からの信号は整流及びA/D変換された後
、図示しないマイクロコンピュータに入力されてガス濃
度の制御や表示をするためのデータとして演算処理に供
されることになる。With this configuration, the infrared detector 1 can be made very small and can be mounted on a printed circuit board. After the signal from the infrared detector 1 is rectified and A/D converted, it is input to a microcomputer (not shown) and is subjected to arithmetic processing as data for controlling and displaying the gas concentration.
赤外線式ガスセンサーAは、例えば二酸化炭素ガス濃度
の測定に用いられるもので、透孔5には赤外線を透過す
るサファイヤガラス窓7が取り付けられている。The infrared gas sensor A is used, for example, to measure carbon dioxide gas concentration, and has a through hole 5 fitted with a sapphire glass window 7 that transmits infrared rays.
次に第1図及び第2図において、8は赤外線検出器Iを
取り付けるためのプリント回路基板、9は基板8を支持
するための支持板である。支持板9はTo、8程度の薄
肉ステンレス板にて箱状に形成されており、下方に開放
し、且つ、上面に挿通孔10が穿設されている。また、
基板8には赤外線検出器1が電気的に接続される他の電
子部品11も取り付けられる。Next, in FIGS. 1 and 2, 8 is a printed circuit board for mounting the infrared detector I, and 9 is a support plate for supporting the board 8. The support plate 9 is formed into a box shape from a thin stainless steel plate having a diameter of about 8, and is open downward and has an insertion hole 10 formed in its upper surface. Also,
Other electronic components 11 to which the infrared detector 1 is electrically connected are also attached to the substrate 8.
12は真鍮酸るいはアルミニウムの削り出し等にて矩形
状に成形したガスセルであり、内部に被測定ガスである
二酸化炭素ガスが流通するための通路13が左右に形成
され、更に、この通路13を貫通して上下に透孔14が
穿設され、サファイヤガラス15.15にて上下を封止
されている。Reference numeral 12 denotes a gas cell formed into a rectangular shape by machining brass or aluminum, inside which passages 13 are formed on the left and right sides through which carbon dioxide gas, which is the gas to be measured, flows; Through-holes 14 are formed in the upper and lower portions thereof, and the upper and lower portions are sealed with sapphire glasses 15 and 15.
また16.17はガスを導入する為の図示しないチュー
ブが接続されることになるガス入口及び出口である。Further, 16 and 17 are gas inlets and outlets to which tubes (not shown) for introducing gas are connected.
18はやはり真鍮酸るいはアルミニウムの削り出し等に
て矩形状に成形した光源ブロックであり内部は中空とな
っていて、ここと上面を連通する透孔19が形成されて
いる。Reference numeral 18 is a light source block formed into a rectangular shape by machining brass or aluminum, and is hollow inside, with a through hole 19 communicating with the upper surface.
20は赤外線を発する電気ヒータから成る光源であり、
先端部が約600℃に発熱することにより赤外線を放射
する。20 is a light source consisting of an electric heater that emits infrared rays;
The tip generates heat of approximately 600°C and emits infrared rays.
次に各部の組立て手順を説明する。光源20は光源ブロ
ック18内部に収納し、先端部を透孔19に対応させて
閉塞板21にて位置決めして遮蔽する。次にガスセル1
2を光源ブロック18上に載せ、透明ガラス15を透孔
19に対応させた状態で、ガスセル12の上面よりネジ
22.22にて光源ブロック18に固定する。更にガス
セル12の上から支持板9を被せて両側よりネジ23、
23にてガスセル12に固定する。この時支持板9はガ
スセル12を内包し、その切欠部25がらガス人口16
及び出口17のみが外部に臨んでいる。切欠部25の深
さはその最深部がガス人口16成るいは出口17に当接
した状態で支持板9とガスセル12のネジ23の螺合す
るネジ孔が一致する関係として置くことにより位置決め
が非常に容易となる。Next, the assembly procedure of each part will be explained. The light source 20 is housed inside the light source block 18, and is positioned and shielded by a closing plate 21 with its tip corresponding to the through hole 19. Next, gas cell 1
2 is placed on the light source block 18, and with the transparent glass 15 corresponding to the through hole 19, it is fixed to the light source block 18 from the upper surface of the gas cell 12 with screws 22 and 22. Furthermore, cover the support plate 9 from above the gas cell 12, and screw the screws 23 from both sides.
It is fixed to the gas cell 12 at 23. At this time, the support plate 9 contains the gas cell 12, and the gas population 16 is contained in the notch 25.
Only the exit 17 faces the outside. The depth of the notch 25 can be determined by placing the screw holes of the support plate 9 and the screws 23 of the gas cell 12 in such a relationship that the deepest part thereof is in contact with the gas port 16 or the outlet 17, so that positioning is possible. It becomes very easy.
赤外線検出器1は予め基板8に半田付けしておく。而し
て基板8は検出51を挿通孔1oがら支持板9内に挿入
した状態で支持板9にネジ26.26にて固定する。こ
の時双方のネジ孔は赤外線検出器1の透孔5が透明ガラ
ス15に対応する様な位置関係で形成しておく。The infrared detector 1 is soldered to the board 8 in advance. The board 8 is then fixed to the support plate 9 with screws 26 and 26 with the detection 51 inserted into the support plate 9 through the insertion hole 1o. At this time, both screw holes are formed in such a positional relationship that the through hole 5 of the infrared detector 1 corresponds to the transparent glass 15.
この様にして光源ブロック18と赤外線検出器1間にガ
スセル12を介在せしめた状態で光源ブロック18とガ
スセル12及び支持板9を一体に組み立てることにより
、赤外線式ガスセンサーA全体の小型化が図れると共に
、光源20、透孔15.15及び赤外線検出器1を極め
て容易に一直線上に位置させることができる。また、光
源20から発せられる熱は支持板9を伝導する過程で放
牧せられるので赤外線検出部Sが熱によって劣化するの
を防止できる。更に、支持板9は赤外線検出器1を密閉
する形となり、これによって外部からの塵埃及び光の進
入を防ぎ、赤外線検出部Sへの赤外線の入射量が変化し
ない様にして赤外線検出が良好な状態で行われる様にし
ている。By assembling the light source block 18, gas cell 12, and support plate 9 together with the gas cell 12 interposed between the light source block 18 and the infrared detector 1 in this manner, the entire infrared gas sensor A can be miniaturized. At the same time, the light source 20, the through hole 15.15 and the infrared detector 1 can be positioned in a straight line very easily. Furthermore, since the heat emitted from the light source 20 is dissipated in the process of being conducted through the support plate 9, it is possible to prevent the infrared detection section S from deteriorating due to the heat. Furthermore, the support plate 9 has a shape that seals the infrared detector 1, thereby preventing dust and light from entering from the outside, and preventing changes in the amount of infrared rays incident on the infrared detecting section S, thereby ensuring good infrared detection. I'm trying to do it in a state.
光源20から発射された赤外線はガスセル12の通路1
3内を流通する被測定ガス内を通過する過程で吸収され
て減衰し、残りが検出器1の赤外線検出部Sに到達する
。このガスに吸収される赤外線の量はガスの濃度によっ
て変化するので、前述の交流信号の出力の変化として、
ガス濃度を捕らえ、表示や濃度制御の情報として使用す
ることができる。The infrared rays emitted from the light source 20 enter the passage 1 of the gas cell 12.
It is absorbed and attenuated in the process of passing through the gas to be measured flowing through the detector 1, and the remainder reaches the infrared detection section S of the detector 1. The amount of infrared rays absorbed by this gas changes depending on the gas concentration, so as a change in the output of the AC signal mentioned above,
Gas concentration can be captured and used as information for display and concentration control.
尚、実施例では二酸化炭素ガスの検出に本発明のセンサ
ーを適用したが、それに限られず、他の種類のガスにも
適用できる。その場合は窓7の材質をガスの種類に合わ
せて変更する。In addition, although the sensor of the present invention was applied to detect carbon dioxide gas in the embodiment, the sensor is not limited thereto and can be applied to other types of gas. In that case, the material of the window 7 should be changed depending on the type of gas.
(ト)発明の効果
本発明によれば赤外線式ガスセンサー全体の寸法を極め
て小型化できるので、特に小型の装置において設計上の
制約が解消される。また、光源と被測定ガス及び赤外線
検出部の位置が極めて接近するので王者の位置決めが容
易となり、位置ズレによる不良を解消できる。(g) Effects of the Invention According to the present invention, the overall size of the infrared gas sensor can be extremely reduced, so that design constraints are eliminated, especially in small-sized devices. Furthermore, since the positions of the light source, the gas to be measured, and the infrared detection section are very close to each other, it becomes easy to position the champion, and defects caused by positional deviation can be eliminated.
第1図から第4図は本発明の実施例を示し、第1図は赤
外線式ガスセンサーの斜視図、第2図は同縦断面図、第
3図はモジュレーションタイプの焦電形赤外線検出器の
分解斜視図、第4図はスリット部材の斜視図であり、第
5図は従来の赤外線検出器の斜視図である。
1・・・赤外線検出器、8・・・プリント回路基板、9
・・支持板、12・・・ガスセル、18・・・光源ブロ
ック、20・・・光源、A・・・赤外線式ガスセンサー
、S・・・赤外線検出部。Figures 1 to 4 show embodiments of the present invention, with Figure 1 being a perspective view of an infrared gas sensor, Figure 2 being a longitudinal sectional view of the same, and Figure 3 being a modulation type pyroelectric infrared detector. FIG. 4 is a perspective view of a slit member, and FIG. 5 is a perspective view of a conventional infrared detector. 1... Infrared detector, 8... Printed circuit board, 9
...Support plate, 12...Gas cell, 18...Light source block, 20...Light source, A...Infrared type gas sensor, S...Infrared detection section.
Claims (1)
して出力を得るものに於て、前記赤外線発生用の光源を
収納する光源ブロックと、赤外線透過部を有してその内
部を被測定ガスが流通するガスセルと、前記赤外線検出
部が取り付けられる支持部材とから成り、前記ガスセル
を前記光源ブロックと赤外線検出部間に介在せしめた状
態で前記光源ブロックとガスセル及び支持部材を一体に
組み立てて成る赤外線式ガスセンサー。1) In a device that obtains an output by irradiating an infrared detection section with infrared rays that have passed through a gas to be measured, it has a light source block that houses the light source for generating the infrared rays, and an infrared transmission section, the inside of which is to be measured. It consists of a gas cell through which gas flows and a support member to which the infrared detection section is attached, and the light source block, gas cell, and support member are assembled integrally with the gas cell interposed between the light source block and the infrared detection section. An infrared gas sensor consisting of
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337365A JPH03197846A (en) | 1989-12-26 | 1989-12-26 | Infrared gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337365A JPH03197846A (en) | 1989-12-26 | 1989-12-26 | Infrared gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03197846A true JPH03197846A (en) | 1991-08-29 |
Family
ID=18307937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1337365A Pending JPH03197846A (en) | 1989-12-26 | 1989-12-26 | Infrared gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03197846A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61186836A (en) * | 1985-02-14 | 1986-08-20 | Agency Of Ind Science & Technol | Liquid sensor |
| JPH01316641A (en) * | 1988-03-10 | 1989-12-21 | Sanyo Electric Co Ltd | Infrared gas concentration meter |
-
1989
- 1989-12-26 JP JP1337365A patent/JPH03197846A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61186836A (en) * | 1985-02-14 | 1986-08-20 | Agency Of Ind Science & Technol | Liquid sensor |
| JPH01316641A (en) * | 1988-03-10 | 1989-12-21 | Sanyo Electric Co Ltd | Infrared gas concentration meter |
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