JPH03197896A - Displacement gauge and position adjusting method for its photodetection part - Google Patents

Displacement gauge and position adjusting method for its photodetection part

Info

Publication number
JPH03197896A
JPH03197896A JP32016689A JP32016689A JPH03197896A JP H03197896 A JPH03197896 A JP H03197896A JP 32016689 A JP32016689 A JP 32016689A JP 32016689 A JP32016689 A JP 32016689A JP H03197896 A JPH03197896 A JP H03197896A
Authority
JP
Japan
Prior art keywords
holding member
main body
light
sensor head
displacement meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32016689A
Other languages
Japanese (ja)
Other versions
JP2802126B2 (en
Inventor
Yoshitaka Tsuji
義孝 辻
Kazuhiro Nishihara
一寛 西原
Tomonori Nishiki
朋範 錦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idec Corp
Original Assignee
Idec Izumi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idec Izumi Corp filed Critical Idec Izumi Corp
Priority to JP32016689A priority Critical patent/JP2802126B2/en
Publication of JPH03197896A publication Critical patent/JPH03197896A/en
Application granted granted Critical
Publication of JP2802126B2 publication Critical patent/JP2802126B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Details Of Measuring And Other Instruments (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To easily and securely adjust the position of the photodetection part of the displacement gauge and to improve the measurement accuracy by fixing a holding member which is mounted on a main body by the fitting of fitting means to the main body by a fixing member. CONSTITUTION:The holding member 3 has a projection part 32 and the sensor head main body 4 is equipped with a recessed part 34. Then the projection part 32 and recessed part 34 are so formed as to engage each other as the fitting means. The projection part 32 is fitted in the recessed part 34 to mount the holding part 3 on the sensor head main body 4. The sensor head main body 4 is fixed to a jig by clamping both ends of the holding member 3 with a bolt pressing part and a spring pressing part and pressing them. The holding member 3 can easily be held at a desired position and never shifts in fixation position. Consequently, the position of the photodetection part of the displacement gauge can easily and securely be adjusted and the measurement accuracy can be improved.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は変位計の受光部に関し、特にその位置調整に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a light receiving section of a displacement meter, and particularly to position adjustment thereof.

[従来の技術] 変位計は内蔵する発光素子から発光を行い、照射光を被
測定物体に照射する。そして、被測定物体からの拡散反
射光を集光レンズにより集光し、変位計に内蔵する受光
素子としての位置検出素子(以下rPSDJという)の
受光面上に照射させ、受光点を形成させる。被測定物体
が所定の基準距離から移動したとき、この受光点の位置
も被測定物体の変位に比例して移動する(三角測距の原
理)。
[Prior Art] A displacement meter emits light from a built-in light emitting element and irradiates an object to be measured with irradiation light. Then, the diffusely reflected light from the object to be measured is focused by a condenser lens, and is irradiated onto the light-receiving surface of a position detection element (hereinafter referred to as rPSDJ) as a light-receiving element built into the displacement meter to form a light-receiving point. When the object to be measured moves from a predetermined reference distance, the position of this light receiving point also moves in proportion to the displacement of the object to be measured (principle of triangulation).

変位計はこの移動したPSD上の受光点の照射位置を検
出することにより、被測定物体の変位を演算し測定する
測定器である。
The displacement meter is a measuring device that calculates and measures the displacement of the object to be measured by detecting the irradiation position of the light receiving point on the moved PSD.

被測定物体の変位を演算する演算回路は、被測定物体が
基準距離におかれているとき、PSD上の受光点はPS
Dの中心点に位置するものとして構成されている。従っ
て、被測定物体が基準距離にあるときの受光点が、PS
Dの中心点からずれて位置する場合は正確な測定を行う
ことができない。PSD上の受光点の位置の調整はPS
Dを移動させることによって行われる。このPSDの位
置には微小な調整が要求される。
The calculation circuit that calculates the displacement of the object to be measured is such that when the object to be measured is placed at the reference distance, the light receiving point on the PSD is
It is configured to be located at the center point of D. Therefore, when the object to be measured is at the reference distance, the light receiving point is PS
If the position is shifted from the center point of D, accurate measurement cannot be performed. To adjust the position of the light receiving point on the PSD, use the PS
This is done by moving D. Fine adjustment is required for the position of this PSD.

しかし、変位計の量産工程において全ての変位計のPS
Dの装着位置を正確なものとすることは極めて困難であ
る。この為、PSDの装着位置の微調整は個々の変位計
について手作業で行われる。
However, in the mass production process of displacement meters, the PS of all displacement meters is
It is extremely difficult to make the mounting position of D accurate. For this reason, fine adjustment of the mounting position of the PSD is performed manually for each displacement meter.

従来のPSDの位置調整を第4図A1第4図B及び第4
図Cに基づいて説明する。変位計は、−般に回路部が収
納される筐体と、筐体の前面に位置するセンサーヘッド
から構成される。第4図A及び第4図Bはセンサーヘッ
ド部のみを示している。センサーヘッド本体4の側面に
は、基板6が固定されている。そして、この基板6とP
SD2とは電線2bで接続されており、PSD2は保持
部材3に収納されている。
The position adjustment of the conventional PSD is shown in Fig. 4 A1 Fig. 4 B and Fig. 4
This will be explained based on Figure C. A displacement meter generally includes a casing in which a circuit section is housed, and a sensor head located on the front of the casing. FIGS. 4A and 4B show only the sensor head portion. A substrate 6 is fixed to the side surface of the sensor head body 4. And this board 6 and P
It is connected to the SD2 by an electric wire 2b, and the PSD2 is housed in the holding member 3.

まず、PSD2が収納されている保持部材3をセンサー
ヘッド本体4に装着する。センサーヘッド本体4には第
4図Bに示すように貫通穴4aが設けられており、PS
D2の受光面2cを貫通穴4aに向けて装着する。尚、
レンズ11は集光レンズである。このレンズ11は被測
定物体からの拡散反射光を集光し、その集光された光を
PSD2の受光面2C上に照射して受光点を形成させる
ものである。
First, the holding member 3 containing the PSD 2 is attached to the sensor head body 4. The sensor head main body 4 is provided with a through hole 4a as shown in FIG. 4B, and the PS
Mount D2 with the light receiving surface 2c facing the through hole 4a. still,
Lens 11 is a condenser lens. This lens 11 focuses the diffusely reflected light from the object to be measured, and irradiates the focused light onto the light receiving surface 2C of the PSD 2 to form a light receiving point.

次に、ねじ8(第4図A参照)により保持部材3をセン
サーヘッド本体4に仮固定する。第4図Cに、保持部材
3の背面図を示す。保持部材3には両側面に突出部3b
が設けられている。そしてこの突出部3bはとめ穴3h
を有しておりねじ8はとめ穴3hを貫通してセンサーヘ
ッド本体4に設けられているねじ穴(図示せず)に螺入
される。第4図Cに示すようにとめ穴3hは矢印100
の示す方向に長い長穴として設けられている。従って、
ねじ8をセンサーヘッド本体4に設けられているねじ穴
(図示せず)に仮固定した状態では、保持部材3は矢印
100の示す方向に移動することができる。
Next, the holding member 3 is temporarily fixed to the sensor head body 4 using screws 8 (see FIG. 4A). FIG. 4C shows a rear view of the holding member 3. The holding member 3 has protrusions 3b on both sides.
is provided. And this protrusion 3b eyelet hole 3h
The screw 8 passes through the stopper hole 3h and is screwed into a screw hole (not shown) provided in the sensor head main body 4. As shown in Fig. 4C, the stop hole 3h is marked with an arrow 100.
It is provided as a long slot in the direction indicated by . Therefore,
When the screw 8 is temporarily fixed in a screw hole (not shown) provided in the sensor head main body 4, the holding member 3 can move in the direction indicated by the arrow 100.

そして、矢印100の示す方向に保持部材3を手作業で
移動させ、受光点をPSD3の中心に位置させる。電線
2bは保持部材3の移動調整が可能な長さを備えている
ので、保持部材3の位置調整の障害となることはない。
Then, the holding member 3 is manually moved in the direction indicated by the arrow 100 to position the light receiving point at the center of the PSD 3. Since the electric wire 2b has a length that allows adjustment of the movement of the holding member 3, it does not become an obstacle to adjusting the position of the holding member 3.

保持部材3を所望の位置、すなわち受光点がPSD2の
中心にくる位置に装着した後、保持部材3の位置を手作
業で保持する。そして、ねじ8をセンサーヘッド本体4
に設けられているねじ穴(図示せず)に完全に螺入して
、保持部材3が移動しないように固定する。こうして変
位計の保持部材の位置調整、すなわち受光部の位置調整
を行う。
After attaching the holding member 3 to a desired position, that is, a position where the light receiving point is at the center of the PSD 2, the position of the holding member 3 is held manually. Then, tighten the screw 8 into the sensor head body 4.
The holding member 3 is completely screwed into a screw hole (not shown) provided in the holding member 3 to fix it so that it does not move. In this way, the position of the holding member of the displacement meter, that is, the position of the light receiving section is adjusted.

[発明が解決しようとする課題] ところが上記従来の受光部の位置調整には次の様な問題
があった。
[Problems to be Solved by the Invention] However, the above conventional position adjustment of the light receiving section has the following problems.

保持部材3の位置調整を行った後、保持部材3をセンサ
ーヘッド本体4に固定する際、保持部材3はねじ止めの
回転力を受けて矢印100の示す方向にずれが生じる。
After adjusting the position of the holding member 3, when fixing the holding member 3 to the sensor head main body 4, the holding member 3 is subjected to the rotational force of screwing and is displaced in the direction indicated by the arrow 100.

この為、再度位置調整を行う必要があり、完全な調整を
行うには調整作業に時間を要し作業効率が悪くなるとい
う問題があった。
For this reason, it is necessary to perform position adjustment again, and there is a problem in that the adjustment work requires time to perform complete adjustment, resulting in poor work efficiency.

又、保持部材3の移動調整を想定して電線2bは長く設
けられているので、ノイズの影響が大きくなり、測定精
度の信頼性を損うという問題もあった。
In addition, since the electric wire 2b is provided for a long time in order to adjust the movement of the holding member 3, there is a problem that the influence of noise becomes large and the reliability of measurement accuracy is impaired.

そこで、本発明は上記問題点を解決し、変位計の受光部
の位置調整を容易かつ確実に行うことができる変位計及
びその位置調整方法を提供することを目的とし、あわせ
て信頼性のある測定精度を備えた変位計を提供すること
を目的とする。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned problems and provide a displacement meter and its position adjustment method that can easily and reliably adjust the position of the light receiving part of the displacement meter. The purpose is to provide a displacement meter with measurement accuracy.

[課題を解決する為の手段] 請求項1に係る変位計は、貫通穴を有する本体、本体に
固定される保持部材であって、前記貫通穴を貫通して照
射される光を受光し、その受光面上に受光点が形成され
る受光素子を備える保持部材、を備えた変位計において
、本体及び保持部材は、互に嵌合しスライド可能な嵌合
手段を備え、保持部材は、嵌合手段の嵌合により本体に
装着されており、保持部材は固定部材により本体に固定
されていることを特徴としている。
[Means for Solving the Problems] A displacement meter according to a first aspect of the present invention includes a main body having a through hole, a holding member fixed to the main body, and receiving light irradiated through the through hole, In the displacement meter, the main body and the holding member are provided with fitting means that can fit and slide with each other, and the holding member is provided with a holding member that includes a light-receiving element with a light-receiving point formed on its light-receiving surface. It is attached to the main body by fitting the fitting means, and the holding member is fixed to the main body by a fixing member.

請求項2に係る変位計は、請求項1の変位計において、
保持部材には、受光素子と電気的に接続された配線基板
が固定されていることを特徴としている。
The displacement meter according to claim 2 is the displacement meter according to claim 1, comprising:
A feature is that a wiring board electrically connected to the light receiving element is fixed to the holding member.

請求項3に係る変位計の受光部の位置調整方法は、貫通
穴を有する本体に、該貫通穴を貫通して照射される光を
受光し、その受光面上に受光点が形成される受光素子を
備える保持部材を装着する工程であって、本体及び保持
部材の備えるスライド可能な嵌合手段を互に嵌合するこ
とにより本体に保持部材を装着する工程、本体及び保持
部材の備える嵌合手段をスライドし、保持部材の装着位
置を移動することによって受光点の位置を所望の位置に
調整する工程、保持部材を所望の位置に保持した状態で
、固定部材により保持部材を本体に固定する工程を備え
たことを特徴としている。
A method for adjusting the position of a light receiving part of a displacement meter according to claim 3 is a light receiving method in which a main body having a through hole receives light irradiated through the through hole, and a light receiving point is formed on the light receiving surface of the main body. A step of attaching a holding member including an element, the step of attaching the holding member to the main body by fitting together sliding fitting means provided on the main body and the holding member, and a fitting provided on the main body and the holding member. A step of adjusting the position of the light receiving point to a desired position by sliding the means and moving the mounting position of the holding member, and fixing the holding member to the main body with the fixing member while holding the holding member at the desired position. It is characterized by having a process.

[作用] 請求項1に係る変位計及び請求項3に係る変位計の受光
部の位置調整方法は、嵌合手段をスライドさせることに
よって保持部材を移動させ、受光素子の受光面上に形成
される受光点の位置を所望の位置に調整して保持部材を
本体に固定する。
[Function] The method for adjusting the position of the light receiving section of the displacement meter according to claim 1 and the displacement meter according to claim 3 is to move the holding member by sliding the fitting means, and to adjust the position of the light receiving section of the displacement meter according to claim 3. Adjust the position of the light receiving point to the desired position and fix the holding member to the main body.

従って、保持部材を所望の位置に保持することが容易で
あり、保持部材の固定位置がずれない。
Therefore, it is easy to hold the holding member at a desired position, and the fixed position of the holding member does not shift.

請求項2に係る変位計は、保持部材に配線基板が固定さ
れている。
In the displacement meter according to a second aspect of the present invention, a wiring board is fixed to the holding member.

従って、保持部材と配線基板とを接続する電線等の接続
手段が不要となり、ノイズによる影響を少なくすること
が可能となる。
Therefore, there is no need for a connecting means such as an electric wire to connect the holding member and the wiring board, and it is possible to reduce the influence of noise.

[実施例] 本発明の一実施例を図面に基づき説明する。第1図に示
す本体としてのセンサーヘッド本体4は、変位計の前面
部に取り付けられるものである。センサーヘッド本体4
には貫通穴4aが形成されており、メイン基板64はセ
ンサーヘッド本体4に固定されている。まず、PSD2
を保持部材3に装着して、シールド板22でPSD2を
固定する。この保持部材3はPSD2とセンサーヘッド
本体4との絶縁性を保つ為の部材である。次に、保持部
材3のPSD2が固定されている背面の側に、初段アン
プ62を接着する。この初段アンプ62は電線2bによ
ってメイン基板64と電気的に接続されており、PSD
2と初段アンプ62とは端子リード24により電気的に
接続されている。こうしてまず、保持部材3、PSD2
及び初段アンプ62を一体として形成する。
[Example] An example of the present invention will be described based on the drawings. A sensor head main body 4 as a main body shown in FIG. 1 is attached to the front part of a displacement meter. Sensor head body 4
A through hole 4a is formed in the main board 64, and the main board 64 is fixed to the sensor head body 4. First, PSD2
is attached to the holding member 3, and the PSD 2 is fixed with the shield plate 22. This holding member 3 is a member for maintaining insulation between the PSD 2 and the sensor head main body 4. Next, the first stage amplifier 62 is glued to the back side of the holding member 3 to which the PSD 2 is fixed. This first stage amplifier 62 is electrically connected to the main board 64 by the electric wire 2b, and the PSD
2 and the first stage amplifier 62 are electrically connected by a terminal lead 24. In this way, first, the holding member 3, the PSD 2
and the first stage amplifier 62 are integrally formed.

尚、この実施例では特に初段アンプ62のみを保持部材
3に固定している。これはPSD2と初段アンプ62と
の間は特に信号が微小であるので、この間のノイズを極
力排除するためである。電線2bで接続された初□段ア
ンプ62とメイン基板64との間は、比較的信号が安定
しておりノイズの影響は少ない。他の実施例として、メ
イン基板64も保持部材に直接固定してノイズの影響を
より少なくすることもできる。
In this embodiment, only the first stage amplifier 62 is fixed to the holding member 3. This is to eliminate noise between the PSD 2 and the first stage amplifier 62 as much as possible since the signal is particularly small. The signal between the first □ stage amplifier 62 and the main board 64, which are connected by the electric wire 2b, is relatively stable and the influence of noise is small. As another embodiment, the main board 64 may also be directly fixed to the holding member to further reduce the influence of noise.

保持部材3は凸部32を備えており、一方センサーヘッ
ド本体4は凹部34を備えている。そして、凸部32と
凹部34とは嵌合手段として互に嵌合し合うように形成
されている。この凸部32を凹部34に嵌入して、保持
部材3をセンサーヘッド本体4に装着する。凹部34は
図に示す矢印200の方向に長く設けられているので、
装着した保持部材3はこの矢印200の示す方向にスラ
イドすることができる。初段アンプ62とメイン基板6
4とを接続する電線2bは、保持部材3がスライド可能
な長さを備えているので、保持部材3の移動の障害とな
ることはない。
The holding member 3 is provided with a convex portion 32, while the sensor head body 4 is provided with a recessed portion 34. The convex portion 32 and the concave portion 34 are formed to fit into each other as a fitting means. The convex portion 32 is fitted into the concave portion 34 to attach the holding member 3 to the sensor head body 4. Since the recess 34 is provided long in the direction of the arrow 200 shown in the figure,
The attached holding member 3 can slide in the direction shown by this arrow 200. First stage amplifier 62 and main board 6
Since the electric wire 2b connecting the holding member 3 has a length that allows the holding member 3 to slide, it does not become an obstacle to the movement of the holding member 3.

PSD2は貫通穴4aを貫通して照射される光を受光し
て、その受光面上に受光点を形成するものである。保持
部材3を矢印200の示す方向にスライドさせて、この
受光点がPSD2の中心に位置するよう調整する。受光
点の位置調整は次のようにして行う。
The PSD 2 receives the light emitted through the through-hole 4a and forms a light-receiving point on its light-receiving surface. The holding member 3 is slid in the direction indicated by the arrow 200 to adjust the light receiving point to be located at the center of the PSD 2. The position of the light receiving point is adjusted as follows.

保持部材3が装着されたセンサーヘッド本体4を、第2
図に示す治具に固定する。第2図は治具に固定したセン
サーヘッド本体4の背面図である。
The sensor head main body 4 with the holding member 3 attached is moved to the second
Fix it in the jig shown in the figure. FIG. 2 is a rear view of the sensor head main body 4 fixed to a jig.

尚、図において初段アンプ62、電線2b及びメイン基
板64は省略されている。
Note that the first stage amplifier 62, the electric wire 2b, and the main board 64 are omitted in the figure.

第2図に示す治具は固定壁81.82を備えており、固
定壁82に設けられているねじ穴に押圧ボルト72が螺
入、貫通している。押圧ボルト72の先端にはボルト押
圧部74が設けられている。一方、固定壁81は押圧ボ
ルト72に対向する位置にリターンスプリング75を有
しており、リターンスプリング75の先端にはスプリン
グ抑圧部77が設けられている。
The jig shown in FIG. 2 is equipped with fixed walls 81 and 82, and a press bolt 72 is screwed into and passes through a screw hole provided in the fixed wall 82. A bolt pressing portion 74 is provided at the tip of the pressing bolt 72. On the other hand, the fixed wall 81 has a return spring 75 at a position facing the pressing bolt 72, and a spring suppressing portion 77 is provided at the tip of the return spring 75.

センサーヘッド本体4は、第2図に示すように保持部材
3の両端がボルト押圧部74及びスプリング押圧部77
により挟み込まれ、押圧されることによって治具に固定
される。
As shown in FIG.
It is fixed to the jig by being sandwiched and pressed.

押圧ボルト72を捩じ込めば、捩し込ろに伴いリターン
スプリング75は圧縮されて保持部材3は矢印300方
向に移動する。又、押圧ボルト72をゆるめれば、リタ
ーンスプリング75は伸張して保持部材3は矢印400
方向に移動する。こうしてPSD2が固定されている保
持部材3を所望の位置に移動させ保持し、PSD2の受
光点が受光面の中央に位置するよう調整する。
When the pressing bolt 72 is screwed in, the return spring 75 is compressed and the holding member 3 moves in the direction of the arrow 300. Furthermore, when the pressing bolt 72 is loosened, the return spring 75 is expanded and the holding member 3 is moved in the direction indicated by the arrow 400.
move in the direction. In this way, the holding member 3 to which the PSD 2 is fixed is moved and held at a desired position, and the light receiving point of the PSD 2 is adjusted so as to be located at the center of the light receiving surface.

そして、保持部材3を第2図に示す治具で所望の位置に
保持した状態で、固定部材により保持部材3をセンサー
ヘッド本体4に固定する。固定部材としては接着剤等を
用いる(図示せず)。接着剤は、例えば第1図に示す保
持部材3の端部39周辺に付けて、保持部材3をセンサ
ーヘッド本体4に固定する。接着剤により固定を行うと
ねじ止めによる回転力という問題はなく、位置ずれ防止
が完全となる。
Then, while holding the holding member 3 at a desired position with the jig shown in FIG. 2, the holding member 3 is fixed to the sensor head main body 4 by a fixing member. An adhesive or the like is used as the fixing member (not shown). The adhesive is applied around the end portion 39 of the holding member 3 shown in FIG. 1, for example, to fix the holding member 3 to the sensor head body 4. When fixed with adhesive, there is no problem of rotational force caused by screwing, and positional displacement is completely prevented.

固定部材として、ねじ等を用いることもできる(図示せ
ず)。ねじは、例えば第1図に示す保持部材3の側面3
8を貫通してセンサーヘッド本体4に螺入することによ
り、保持部材3を押圧してセンサーヘッド本体4に固定
する。ねじを用いた場合でも保持部材3は凸部32、凹
部34及び治具によりその位置が保持、固定されている
ので、ねじ止めの際の回転力によって調整した位置がず
れることはない。
A screw or the like may also be used as the fixing member (not shown). For example, the screw can be attached to the side surface 3 of the holding member 3 shown in FIG.
8 and screws into the sensor head main body 4 to press the holding member 3 and fix it to the sensor head main body 4. Even when screws are used, the position of the holding member 3 is held and fixed by the convex portion 32, the concave portion 34, and the jig, so that the adjusted position will not shift due to the rotational force when screwing.

又、他の実施例として位置調整の際、第3図に示すよう
な治具を用いることもできる。図に示す治具はアーム1
54を備えており、アーム154の先端にはアーム押圧
部156及び158が設けられている。
Further, as another embodiment, a jig as shown in FIG. 3 may be used for position adjustment. The jig shown in the figure is arm 1
54, and arm pressing parts 156 and 158 are provided at the tip of the arm 154.

そして、保持部材3の側面がアーム押圧部156及び1
58に接するようにセンサーヘッド本体4を治具に装着
する。アーム154は固定壁152を螺入、貫通する押
圧ボルト150と接続している。押圧ボルト150の捩
じ込み又はゆるめに伴い、アーム154は矢印600の
方向に移動する。こうして保持部材3の位置を移動させ
、PSDZ上の受光点が中央に位置するよう調整する。
Then, the side surfaces of the holding member 3 are attached to the arm pressing parts 156 and 1.
The sensor head main body 4 is mounted on the jig so as to be in contact with the contact point 58. The arm 154 is connected to a pressing bolt 150 that screws into and passes through the fixed wall 152. As the pressing bolt 150 is screwed in or loosened, the arm 154 moves in the direction of the arrow 600. In this way, the position of the holding member 3 is moved to adjust the light receiving point on the PSDZ to be located at the center.

位置調整に治具を用いずに、手作業で保持部材3の位置
を調整、保持しセンサーヘッド本体4に固定することも
できる。手作業により保持部材3を保持した場合でも、
保持部材3は凸部32が凹部34に嵌入して装着されて
いるので調整した位置がずれることはない。この場合、
固定部材として接着剤を用いれば、ねじ止めの回転力が
加わらず位置ずれ防止がより完全となる。
It is also possible to manually adjust the position of the holding member 3, hold it, and fix it to the sensor head body 4 without using a jig for position adjustment. Even when holding member 3 is held manually,
Since the holding member 3 is attached with the protrusion 32 fitting into the recess 34, the adjusted position will not shift. in this case,
If an adhesive is used as the fixing member, the rotational force of screwing is not applied, and positional displacement can be more completely prevented.

[発明の効果] 請求項1に係る変位計及び請求項3に係る変位計の受光
部の位置調整方法は、保持部材を所望の位置に保持する
ことが容易であり、保持部材の固定位置がずれない。
[Effects of the Invention] The displacement meter according to claim 1 and the method for adjusting the position of the light receiving part of the displacement meter according to claim 3, the holding member can be easily held at a desired position, and the fixed position of the holding member is fixed. Stays in place.

従って、変位計の受光部の位置調整を容易かつ確実に行
うことができ、作業効率の向上を図ることができる。
Therefore, the position of the light receiving section of the displacement meter can be easily and reliably adjusted, and work efficiency can be improved.

請求項2に係る変位計は、保持部材と配線基板とを接続
する電線等の接続手段が不要となり、ノイズによる影響
を少なくすることが可能となる。
The displacement meter according to the second aspect eliminates the need for a connecting means such as an electric wire for connecting the holding member and the wiring board, and it is possible to reduce the influence of noise.

従って、信頼性のある測定精度を備えた変位計を提供す
ることができる。
Therefore, it is possible to provide a displacement meter with reliable measurement accuracy.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係る変位計のセンサーヘ
ッドの受光部位置調整機構を示す斜視図、第2図は、本
発明の一実施例に係る変位計のセンサーヘッドを治具に
固定した状態を示す背面図、第3図は、本発明の一実施
例に係る変位計のセンサーヘッドを他の治具に固定した
状態を示す背面図、 第4図Aは、従来の変位計のセンサーヘッドの受光部を
示す側面図、 第4図Bは、第4図への変位計のセンサーヘッドに受光
部が装着された状態を示す一部断面図、第4図Cは、従
来の変位計のセンサーヘッドの保持部材の背面図である
。 34・・・・・凹部 62・・・・・初段アンプ 64・・・・・メイン基板 2 ・ ・ ・ −・ PSD 3・・・・・保持部材 4・・・・・センサーヘッド本体 32・・・・・凸部 第 2 図 第 図 第 図 第 図 第 図
FIG. 1 is a perspective view showing a light receiving part position adjustment mechanism of a sensor head of a displacement meter according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a sensor head of a displacement meter according to an embodiment of the present invention. 3 is a rear view showing a state in which the sensor head of a displacement meter according to an embodiment of the present invention is fixed to another jig, and FIG. FIG. 4B is a partial cross-sectional view showing the light receiving section attached to the sensor head of the displacement meter, and FIG. 4C is a side view showing the light receiving section of the sensor head of the displacement meter. FIG. 3 is a rear view of the holding member of the sensor head of the displacement meter. 34... Concavity 62... First stage amplifier 64... Main board 2 ・ ・ ・ - PSD 3... Holding member 4... Sensor head body 32... ... Convex part 2 Figure Figure Figure Figure Figure

Claims (3)

【特許請求の範囲】[Claims] (1)貫通穴を有する本体、 本体に固定される保持部材であって、前記貫通穴を貫通
して照射される光を受光し、その受光面上に受光点が形
成される受光素子を備える保持部材、 を備えた変位計において、 本体及び保持部材は、互に嵌合しスライド可能な嵌合手
段を備え、 保持部材は、嵌合手段の嵌合により本体に装着されてお
り、 保持部材は固定部材により本体に固定されている、 ことを特徴とする変位計。
(1) A main body having a through hole, a holding member fixed to the main body, comprising a light-receiving element that receives light irradiated through the through-hole and forms a light-receiving point on its light-receiving surface. A displacement meter comprising a holding member, wherein the main body and the holding member are provided with fitting means that can fit and slide with each other, the holding member is attached to the main body by fitting the fitting means, and the holding member A displacement meter characterized in that the is fixed to the main body by a fixing member.
(2)請求項1の変位計において、 保持部材には、受光素子と電気的に接続された配線基板
が固定されている、 ことを特徴とする変位計。
(2) The displacement meter according to claim 1, wherein a wiring board electrically connected to the light receiving element is fixed to the holding member.
(3)貫通穴を有する本体に、該貫通穴を貫通して照射
される光を受光し、その受光面上に受光点が形成される
受光素子を備える保持部材を装着する工程であって、本
体及び保持部材の備えるスライド可能な嵌合手段を互に
嵌合することにより本体に保持部材を装着する工程、 本体及び保持部材の備える嵌合手段をスライドし、保持
部材の装着位置を移動することによって受光点の位置を
所望の位置に調整する工程、保持部材を所望の位置に保
持した状態で、固定部材により保持部材を本体に固定す
る工程、を備えたことを特徴とする変位計の受光部の位
置調整方法。
(3) A step of attaching to the main body having a through-hole a holding member including a light-receiving element that receives light irradiated through the through-hole and forms a light-receiving point on its light-receiving surface, attaching the holding member to the main body by fitting the sliding fitting means provided on the main body and the holding member into each other; sliding the fitting means provided on the main body and the holding member to move the mounting position of the holding member; A displacement meter characterized by comprising the steps of adjusting the position of the light receiving point to a desired position by adjusting the position of the light receiving point to a desired position, and fixing the holding member to the main body by a fixing member while holding the holding member at the desired position. How to adjust the position of the light receiving part.
JP32016689A 1989-12-08 1989-12-08 Displacement meter and method of adjusting position of light receiving unit Expired - Fee Related JP2802126B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32016689A JP2802126B2 (en) 1989-12-08 1989-12-08 Displacement meter and method of adjusting position of light receiving unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32016689A JP2802126B2 (en) 1989-12-08 1989-12-08 Displacement meter and method of adjusting position of light receiving unit

Publications (2)

Publication Number Publication Date
JPH03197896A true JPH03197896A (en) 1991-08-29
JP2802126B2 JP2802126B2 (en) 1998-09-24

Family

ID=18118439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32016689A Expired - Fee Related JP2802126B2 (en) 1989-12-08 1989-12-08 Displacement meter and method of adjusting position of light receiving unit

Country Status (1)

Country Link
JP (1) JP2802126B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317368A (en) * 2005-05-16 2006-11-24 Kyokko Denki Kk Fabry-perot type tunable filter using mems

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317368A (en) * 2005-05-16 2006-11-24 Kyokko Denki Kk Fabry-perot type tunable filter using mems

Also Published As

Publication number Publication date
JP2802126B2 (en) 1998-09-24

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