JPH0319967U

JPH0319967U -

Info

Publication number: JPH0319967U
Application number: JP8088789U
Authority: JP
Priority date: 1989-07-10
Filing date: 1989-07-10
Publication date: 1991-02-27

Description

[Brief explanation of the drawing]

第１図は本考案による加速度センサーの実施例
において、１部切欠いた概略平面図、第２図は第
１図における概略縦断面図、第３図、第４図、第
５図、第６図および第７図はそれぞれ基板の他の
例を示す図、第８図は従来の技術による加速度セ
ンサーの一実施例において１部切欠した概略平面
図、第９図は第８図における概略縦断面図、第１
０図は従来の技術による加速度センサーの他の実
施例において１部切欠いた概略平面図、第１１図
は第１０図における概略縦断面図である。１，１１，２１……ケーシング、２，２ａ，２
ｂ，２ｃ，２ｄ，２ｅ，１２，２２……切欠き、
３，３ａ，３ｂ，３ｃ，３ｄ，３ｅ，１３，２３
……重り板、４，４ａ，４ｂ，４ｃ，４ｄ，４ｅ
，５，５ａ，５ｂ，５ｃ，５ｄ，５ｅ，１４，２
４……支持ばり、６，６ａ，６ｂ，６ｃ，６ｄ，
６ｅ，１６，２６……基板、７，１７，２７……
重り体、８ａ，１８ａ，２８ａ……歪みゲージ、
８ｂ，１８ｂ，２８ｂ……リード線、８，１８，
２８……感知部材、９，１９，２９……重り。 Fig. 1 is a partially cutaway schematic plan view of an embodiment of the acceleration sensor according to the present invention, Fig. 2 is a schematic vertical cross-sectional view of Fig. 1, Fig. 3, Fig. 4, Fig. 5, and Fig. 6. and FIG. 7 are views showing other examples of the substrate, FIG. 8 is a partially cutaway schematic plan view of an embodiment of an acceleration sensor according to the prior art, and FIG. 9 is a schematic vertical cross-sectional view of FIG. 8. , 1st
0 is a partially cutaway schematic plan view of another embodiment of an acceleration sensor according to the prior art, and FIG. 11 is a schematic longitudinal sectional view of FIG. 10. 1, 11, 21...Casing, 2, 2a, 2
b, 2c, 2d, 2e, 12, 22...notch,
3, 3a, 3b, 3c, 3d, 3e, 13, 23
...Weight plate, 4, 4a, 4b, 4c, 4d, 4e
,5,5a,5b,5c,5d,5e,14,2
4...Support beam, 6, 6a, 6b, 6c, 6d,
6e, 16, 26... Board, 7, 17, 27...
Weight body, 8a, 18a, 28a...strain gauge,
8b, 18b, 28b...Lead wire, 8, 18,
28... Sensing member, 9, 19, 29... Weight.

Claims

[Scope of utility model registration request]

Inside the casing 1, support beams 4, 4a, 4b,
4c, 4d, 4e, 5, 5a, 5b, 5c, 5d
, 5e, and when the acceleration is applied, the support beams 4, 4a, 4b, 4c, 4d
, 4e, 5, 5a, 5b, 5c, 5d, 5e are detected by a sensing member 8 to detect the applied acceleration. 4, 4a, 4b, 4c,
4d, 4e on the other side support beams 5, 5a, 5b, 5
Support beams 4, 4a, 4b, 4c, 4d, which are formed shorter than c, 5d, and 5e, and further formed shorter.
4e is provided with the sensing member 8 for sensing the distortion thereof.