JPH03205782A - Electroluminescence element - Google Patents
Electroluminescence elementInfo
- Publication number
- JPH03205782A JPH03205782A JP1342777A JP34277789A JPH03205782A JP H03205782 A JPH03205782 A JP H03205782A JP 1342777 A JP1342777 A JP 1342777A JP 34277789 A JP34277789 A JP 34277789A JP H03205782 A JPH03205782 A JP H03205782A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- compound semiconductor
- type compound
- semiconductor layer
- carriers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005401 electroluminescence Methods 0.000 title claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims abstract description 19
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 239000000969 carrier Substances 0.000 abstract description 16
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 238000004020 luminiscence type Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、エレクトロルミネツセンス素子に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to an electroluminescent device.
E従来の技術〕
従来から用いられているエレクトロルミネノセンス素子
の基本的な構成を第3図に示す。ガラス基板1の表面に
ITO(酸化インジウム錫)膜などの透明導電膜2が形
威され、この透明導電膜2上に第l絶縁層3が形威され
ている。そして、この第1絶縁層3上に硫化亜鉛(Zn
S:Mn)などで構威した発光層4と、第2絶縁層5と
が順に積層され、第1,第2絶縁層3,5により発光層
4が挟まれた状態となっている。第2絶縁層5上にはア
ルミニウムなどで構威した背面電極6が形威され、この
背面電極6と透明導電膜2との間に高周波電源7が接続
されている。前記第1絶縁層3はたとえば酸化ケイ素(
SiOz)膜と窒化ケイ素(Si3Nm )膜とを積層
した積層構造の膜などで構戒されており、第2絶縁層5
はたとえば窒化ケイ素膜と酸化アルミニウム(Alz○
3)膜との積層構造膜などで構威されている。E. Prior Art FIG. 3 shows the basic configuration of a conventionally used electroluminescent element. A transparent conductive film 2 such as an ITO (indium tin oxide) film is formed on the surface of a glass substrate 1, and a lth insulating layer 3 is formed on this transparent conductive film 2. Then, zinc sulfide (Zn
A light emitting layer 4 made of a material such as S:Mn) and a second insulating layer 5 are laminated in order, and the light emitting layer 4 is sandwiched between the first and second insulating layers 3 and 5. A back electrode 6 made of aluminum or the like is formed on the second insulating layer 5, and a high frequency power source 7 is connected between the back electrode 6 and the transparent conductive film 2. The first insulating layer 3 is made of silicon oxide (
The second insulating layer 5
For example, silicon nitride film and aluminum oxide (Alz○
3) It is composed of a laminated structure film with a film.
高周波電a7からの高周波電圧を透明導電膜2と背面電
極6との間に印加すると、発光層4と絶縁層3.5との
界面などにトラ,プされていたキャリアなどが発光層4
の発光中心に衝突して、この発光中心を励起する。そし
て、この励起された発光中心が基底状態に遷移する際に
光が放射される。この光がガラス基板1を透過して観察
され、このようにして表示が行われる。When a high frequency voltage from a high frequency voltage source a7 is applied between the transparent conductive film 2 and the back electrode 6, carriers trapped at the interface between the light emitting layer 4 and the insulating layer 3.5 are removed from the light emitting layer 4.
collides with the luminescent center of and excites this luminescent center. Light is then emitted when this excited luminescent center transitions to the ground state. This light is transmitted through the glass substrate 1 and observed, and a display is performed in this manner.
(発明が解決しようとする課題〕
上述のようなエレクトロルミネノセンス素子では、発光
に寄与するキャリアは、発光層4と絶縁層3,5との間
にトラソプされたキャリアなどであり、極めて微量のキ
ャリアによって発光中心の励起が行われているにすぎず
、したがって発光効率が悪く、また輝度が低いという問
題があった。(Problems to be Solved by the Invention) In the electroluminescent element as described above, carriers contributing to light emission are carriers trapped between the light emitting layer 4 and the insulating layers 3 and 5, and only a very small amount The luminescent center is simply excited by the carriers, and therefore there are problems in that the luminous efficiency is poor and the brightness is low.
この発明の目的は、上述の技術的課題を解決し、発光効
率が高く、また高輝度の発光が可能なエレクトロルミネ
ノセンス素子を提供することである。An object of the present invention is to solve the above-mentioned technical problems and provide an electroluminescent element that has high luminous efficiency and is capable of emitting high-intensity light.
この発明のエレクトロルミネノセンス素子は、発光層と
絶縁層との間にP型化合物半導体層を介在させたことを
特徴とする。The electroluminescent device of the present invention is characterized in that a P-type compound semiconductor layer is interposed between the light emitting layer and the insulating layer.
この発明の構成によれば、P型化合物半導体層に蓄積さ
れたキャリアが発光層に供給されて、このキャリアが発
光中心に衝突して励起するので、発光に寄与するキャリ
アの数が増大し、この結果発光効率が向上し、また発光
輝度が向上する。According to the configuration of the present invention, the carriers accumulated in the P-type compound semiconductor layer are supplied to the light emitting layer, and the carriers collide with the light emission center and are excited, so the number of carriers contributing to light emission increases, As a result, luminous efficiency and luminance are improved.
第1図はこの発明の一実施例のエレクトロル業ネッセン
ス素子の基本的な構戒を示す断面図である。この第1図
において、前述の第3図に示された各部に対応する部分
には同一の参照符号を付して示す。FIG. 1 is a sectional view showing the basic structure of an electroluminescence device according to an embodiment of the present invention. In FIG. 1, parts corresponding to those shown in FIG. 3 described above are designated by the same reference numerals.
この実施例のエレクトロルミネッセンス素子では、発光
層4と第2絶縁層5との間にP型化合物半導体層8が設
けられている。P型化合物半導体層8は、たとえばアル
ミニウムの含有率の高い窒化アルミニウム(AI!.N
),ホウ素の含有率の高い窒化ホウ素(BN)などによ
って構威されており、このP型化合物半導体層8におけ
るキャリアは、電圧が印加されない状態では、発光層4
と第2絶縁層5との間に形威される井戸型ポテンシャル
により捕獲されて、P型化合物半導体層に蓄積されてい
る。In the electroluminescent device of this example, a P-type compound semiconductor layer 8 is provided between the light emitting layer 4 and the second insulating layer 5. The P-type compound semiconductor layer 8 is made of, for example, aluminum nitride (AI!.N
), boron nitride (BN) with a high boron content, etc., and carriers in this P-type compound semiconductor layer 8 are absorbed by the light-emitting layer 4 when no voltage is applied.
and the second insulating layer 5, and is trapped in the P-type compound semiconductor layer.
第2図にそのハンド構造を示す。第2図において、P型
化合物半導体層8には、キャリアとなる正孔Hが余って
いる。つまり発光層4と第2絶縁層5との間に正孔Hが
存在している。これに電圧をかけると、正孔Hは図中の
矢印のように発光層4内へ供給される。この正孔Hは発
光中心に衝突し励起する。一方、逆電圧をかけることに
より正孔Hはもとの状態にもどる。したがって交番電圧
をかけることで発光が持続される。このようにP型化合
物半導体層を設けることにより、発光中心を励起するキ
ャリアは従来の構或に比較して格段に多く、したがって
キャリアと発光中心との衝突回数が増大し、これにより
発光効率が向上され、さらに発光輝度が格段に向上され
る。Figure 2 shows the structure of the hand. In FIG. 2, the P-type compound semiconductor layer 8 has surplus holes H that serve as carriers. That is, holes H exist between the light emitting layer 4 and the second insulating layer 5. When a voltage is applied to this, holes H are supplied into the light emitting layer 4 as indicated by the arrow in the figure. This hole H collides with the luminescent center and excites it. On the other hand, by applying a reverse voltage, the holes H return to their original state. Therefore, light emission is sustained by applying an alternating voltage. By providing the P-type compound semiconductor layer in this way, the number of carriers that excite the luminescent center is much larger than in the conventional structure, which increases the number of collisions between carriers and the luminescent center, thereby increasing the luminous efficiency. Furthermore, the luminance of light emission is significantly improved.
P型化合物半導体層8の形戒は、イオン照射と真空華着
を複合化した或膜法によれば非常に簡単にできる。たと
えば、AIV.リンチのAffiNを製作するには、金
属蒸着速度を一定にして、Nイオン量を変化させること
により、またはNイオン量を一定にして、金属蒸着速度
を変化させることにより、N/Affi<lとなる状態
にして威膜すればよい。さらに、N/A N = 1の
状態にすることにより絶縁体を形或できる。Bリノチの
BNを製作する場合ち同様にしてできる。このような或
膜法を用いることにより、P型化合物半導体層8と第2
絶縁層5との連続処理が可能となるので、非常に効率の
よい生産ができる。The shape of the P-type compound semiconductor layer 8 can be very easily formed using a film method that combines ion irradiation and vacuum deposition. For example, AIV. Lynch's AffiN can be manufactured by keeping the metal deposition rate constant and changing the amount of N ions, or by keeping the amount of N ions constant and changing the metal deposition rate, so that N/Affi<l. All you have to do is put it in a state where it becomes effective. Furthermore, by setting N/A N = 1, an insulator can be formed. If you want to make a BN for B-linochi, you can do it in the same way. By using such a certain film method, the P-type compound semiconductor layer 8 and the second
Since continuous processing with the insulating layer 5 is possible, very efficient production can be achieved.
なお、実施例ではP型化合物半導体層8を発光層4と第
2絶縁層5の間に設けたが、発光層4と第1絶縁層3の
間でもよく、また、発光層4と第2絶縁層5の間および
発光層4と第1絶縁層3の間の両方に設けてもよい。In the embodiment, the P-type compound semiconductor layer 8 was provided between the light emitting layer 4 and the second insulating layer 5, but it may also be provided between the light emitting layer 4 and the first insulating layer 3, or between the light emitting layer 4 and the second insulating layer 5. It may be provided both between the insulating layers 5 and between the light emitting layer 4 and the first insulating layer 3.
以上のようにこの発明のエレクトロルミネッセンス素子
によれば、発光に寄与するキャリアの数が増大し、発光
中心とキャリアとの衝突回数が増大するので、発光効率
が向上されるととともに、高輝度での発光を行わせるこ
とができるようになる。As described above, according to the electroluminescent device of the present invention, the number of carriers contributing to light emission increases and the number of collisions between the light emission center and the carriers increases, so that the light emission efficiency is improved and high brightness is achieved. This makes it possible to emit light.
第1図はこの発明の一実施例のエレクトロルミネノセン
ス素子の基本的な構或を示す断面図、第2図はその発光
過程の説明図、第3図は従来技術を示す断面図である。
3・・・第1絶縁層、
4・・・発光層、
5・・・第2絶縁層、
8・・・P型化合物半導体層
第
1
図
7
H
第
3
図Fig. 1 is a cross-sectional view showing the basic structure of an electroluminescent device according to an embodiment of the present invention, Fig. 2 is an explanatory view of its light emitting process, and Fig. 3 is a cross-sectional view showing the prior art. . 3...First insulating layer, 4...Light emitting layer, 5...Second insulating layer, 8...P-type compound semiconductor layer 1 FIG. 7H FIG.
Claims (1)
トロルミネツセンス素子において、前記発光層と前記絶
縁層との間にP型化合物半導体層を設けたことを特徴と
するエレクトロルミネツセンス素子。An electroluminescence element having a conductive layer provided on both sides of a light emitting layer with an insulating layer interposed therebetween, characterized in that a P-type compound semiconductor layer is provided between the light emitting layer and the insulating layer. element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342777A JPH03205782A (en) | 1989-12-29 | 1989-12-29 | Electroluminescence element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342777A JPH03205782A (en) | 1989-12-29 | 1989-12-29 | Electroluminescence element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03205782A true JPH03205782A (en) | 1991-09-09 |
Family
ID=18356417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1342777A Pending JPH03205782A (en) | 1989-12-29 | 1989-12-29 | Electroluminescence element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03205782A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009021543A (en) * | 2007-06-11 | 2009-01-29 | Canon Inc | Compound semiconductor film, light emitting film, and method for manufacturing the same |
-
1989
- 1989-12-29 JP JP1342777A patent/JPH03205782A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009021543A (en) * | 2007-06-11 | 2009-01-29 | Canon Inc | Compound semiconductor film, light emitting film, and method for manufacturing the same |
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