JPH0320718U - - Google Patents

Info

Publication number
JPH0320718U
JPH0320718U JP8116689U JP8116689U JPH0320718U JP H0320718 U JPH0320718 U JP H0320718U JP 8116689 U JP8116689 U JP 8116689U JP 8116689 U JP8116689 U JP 8116689U JP H0320718 U JPH0320718 U JP H0320718U
Authority
JP
Japan
Prior art keywords
cylinder
hole
outside
rod portion
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8116689U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8116689U priority Critical patent/JPH0320718U/ja
Publication of JPH0320718U publication Critical patent/JPH0320718U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例の断面図、第２図は
従来の真空吸引装置の一例を示す断面図である。 １……シリンダ式真空固定装置（シリンダ装置
）、３……シリンダ、１０……ピストン、１１…
…ロツド部、１２……通気孔、１４……固定部、
１９……孔、２０……弁体としての防塵弁。 FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of an example of a conventional vacuum suction device. 1... Cylinder type vacuum fixing device (cylinder device), 3... Cylinder, 10... Piston, 11...
...rod part, 12...ventilation hole, 14...fixing part,
19...hole, 20...dust-proof valve as valve body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一端に空気供給手段が接続され、他端に空気吸
引手段が接続されたシリンダと、前記シリンダ内
に設けられたピストンに固設されてシリンダの他
端側から外部に気密に突出し、シリンダ内の周面
とシリンダ外の先端との間に通気孔が連通開口さ
れたロツド部と、前記ロツド部の先端に設けられ
、ロツド部の通気孔を外部に連通させる孔を有す
る固定部と、前記固定部内に移動自在に設けられ
て前記孔を閉塞し、前記空気吸引手段による吸引
に伴つて孔を開放する弁体とを具備することを特
徴とするシリンダ式真空固定装置。 A cylinder having an air supply means connected to one end and an air suction means connected to the other end, and a piston fixedly installed in the cylinder and protruding airtightly from the other end of the cylinder to the outside. a rod portion having a ventilation hole communicating with the peripheral surface and a tip outside the cylinder; a fixing portion provided at the tip of the rod portion and having a hole for communicating the ventilation hole of the rod portion with the outside; and the fixing portion. A cylindrical vacuum fixing device, comprising: a valve body that is movably provided within the vacuum fixing section to close the hole and open the hole when suction is applied by the air suction means.
JP8116689U 1989-07-12 1989-07-12 Pending JPH0320718U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8116689U JPH0320718U (en) 1989-07-12 1989-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8116689U JPH0320718U (en) 1989-07-12 1989-07-12

Publications (1)

Publication Number Publication Date
JPH0320718U true JPH0320718U (en) 1991-02-28

Family

ID=31626862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8116689U Pending JPH0320718U (en) 1989-07-12 1989-07-12

Country Status (1)

Country Link
JP (1) JPH0320718U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS444020Y1 (en) * 1966-09-30 1969-02-14
JPS6016390A (en) * 1983-06-15 1985-01-28 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド Chuck unit for carrying wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS444020Y1 (en) * 1966-09-30 1969-02-14
JPS6016390A (en) * 1983-06-15 1985-01-28 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド Chuck unit for carrying wafer

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