JPH0321444Y2 - - Google Patents

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Publication number
JPH0321444Y2
JPH0321444Y2 JP2563384U JP2563384U JPH0321444Y2 JP H0321444 Y2 JPH0321444 Y2 JP H0321444Y2 JP 2563384 U JP2563384 U JP 2563384U JP 2563384 U JP2563384 U JP 2563384U JP H0321444 Y2 JPH0321444 Y2 JP H0321444Y2
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JP
Japan
Prior art keywords
measurement
irradiator
diameter cylindrical
small
measuring
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2563384U
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Japanese (ja)
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JPS60137308U (en
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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は、主として穴部や凹状部を有する形鋼
などの外形寸法を測定し品質管理や技術管理など
の資料を得る目的に用いられる物体形状測定装置
に関する。
[Detailed description of the invention] (Industrial field of application) This invention is mainly used for measuring the external dimensions of shaped steel having holes or concave parts, and for obtaining data for quality control, technical control, etc. This invention relates to a shape measuring device.

(従来技術) 鋼材特に型鋼についてその外形寸法を正確に測
定することは品質保証や圧延技術資料として重要
であるが、従来適当な手段が無いままに、鋼材の
1部を切り取つてサンプルとしノギスやマイクロ
メーターを用いて人手で測定記録する方法が採用
されていたが、多大な時間を要する割には精度が
悪いと云う問題点があつた。
(Prior art) Accurately measuring the external dimensions of steel materials, especially shaped steel, is important for quality assurance and rolling technology data. A method of manually measuring and recording using a micrometer was adopted, but this method had the problems of being time consuming and having poor accuracy.

特に鋼矢板のような爪部を有する複雑な断面を
備えた鋼材について精度上の問題があり強く改善
が望まれていた。
In particular, there are accuracy problems with steel materials with complicated cross-sections such as steel sheet piles, and improvements have been strongly desired.

そこで本考案者等は光学的手段で非接触に測定
する装置の開発に取り組み本考案装置を創案した
が、このような光学的測定手段に用いられる装置
として特開昭55−119006号公報に示されているよ
うな変位測定装置がある。このような装置を用い
て連続的に物体の外形輪郭を測定すると部分的で
はあるが物体の外形を知ることが可能である。該
装置の概要を第5図に示す。
Therefore, the inventors of the present invention worked on developing a device for non-contact measurement using optical means, and created the device of the present invention. There are displacement measuring devices such as the one shown in the figure. By continuously measuring the outline of an object using such a device, it is possible to know the outline of the object, albeit only partially. An outline of the device is shown in FIG.

第5図で1は被測定物体たとえば鋼材で図では
その1部分を示す。2はその表面である。3は光
電変位測定器であつて、光源3aと該光源3aの
光ビームを細い照射ビーム3bとする照射レンズ
3cと、前記照射ビーム3bが前記表面2によつ
て反射された反射ビーム3dを集光する集光レン
ズ3eと、該集光レンズ3eからの入射光を受光
する光位置検出器3fと、該光位置検出器3fか
らの信号を増幅する増幅器3g、および該増幅器
3gの信号の非直線性を補正する補正回路3hか
らなる。而して該光電変位測定器3の検出要領は
まず被測定物体が基点0を中心として矢印Aもし
くはBに変位した場合反射ビーム3dの位置が変
り、光位置検出器3fによつてその変位が促えら
れ、増幅器3g、補正回路3hを介して変位信号
Δlを取り出すようになつている。ところでこの
光電変位測定器3を用いて形鋼の外形寸法を測定
しようとした場合の問題点として下記(1)〜(2)のよ
うな技術的課題がある。
In FIG. 5, reference numeral 1 denotes an object to be measured, such as a steel material, and the figure shows a portion thereof. 2 is its surface. 3 is a photoelectric displacement measuring device, which includes a light source 3a, an irradiation lens 3c that converts the light beam of the light source 3a into a thin irradiation beam 3b, and a reflected beam 3d that is the irradiation beam 3b reflected by the surface 2. A condensing lens 3e that emits light, an optical position detector 3f that receives incident light from the condensing lens 3e, an amplifier 3g that amplifies the signal from the optical position detector 3f, and an amplifier 3g that amplifies the signal from the amplifier 3g. It consists of a correction circuit 3h that corrects linearity. The detection procedure of the photoelectric displacement measuring device 3 is as follows: First, when the object to be measured is displaced from the reference point 0 in the direction of arrow A or B, the position of the reflected beam 3d changes, and the optical position detector 3f detects the displacement. As a result, a displacement signal Δl is extracted via an amplifier 3g and a correction circuit 3h. By the way, there are the following technical problems (1) and (2) when trying to measure the external dimensions of a section steel using this photoelectric displacement measuring device 3.

(1) 形鋼は複雑な断面形状をしているので、該光
電変位測定器3では特に凹状部や穴部が測定し
難い。
(1) Since the shaped steel has a complicated cross-sectional shape, it is difficult for the photoelectric displacement measuring device 3 to measure particularly concave portions and hole portions.

(2) 形鋼は500×900mmと云うような寸法のものが
あり、前記光電変位測定器3を用いる場合何等
かの補助手段がが付加されないと実用上使用し
難い。
(2) Some steel sections have dimensions of 500 x 900 mm, and when using the photoelectric displacement measuring device 3, it is difficult to use it practically unless some kind of auxiliary means is added.

(考案の目的) 本考案は、鋼材特に鋼矢板のように複雑な形状
をした爪部を有するような物体の寸法測定に用い
られる物体形状測定装置を提供することを目的と
する。
(Purpose of the invention) An object of the invention is to provide an object shape measuring device that can be used to measure the dimensions of steel materials, particularly steel sheet piles, which have claws with complex shapes.

(考案の構成・作用) さて、本考案は、前述の光電変位測定器3と同
じ測定原理による微少間隔測定用の光電式変位測
定を利用するもので、その特徴は形鋼の凹所たと
えば鋼矢板の爪部などの外形形状を測定すること
が可能な点にあり、その概略を第6図について説
明する。
(Structure and operation of the device) The present device utilizes photoelectric displacement measurement for measuring minute distances based on the same measurement principle as the photoelectric displacement measuring device 3 described above. It is possible to measure the external shape of the claws of sheet piles, etc., and its outline will be explained with reference to FIG. 6.

第6図は本考案にかかる物体形状測定装置のう
ちの光ビーム照射部と受光装置および増幅器さら
に補正回路を有する測定函3′に関する概略説明
図である。測定函3′は小径筒状照射体4を備え
ており、被測定物体1の凹部5(たとえば鋼矢板
の爪部内側)の奥深く該照射体4を挿入しうるよ
う構成されている。該照射体4の先端部には光源
3a,照射レンズ3cからなる光ビーム照射部が
備えられ、照射ビーム3bは凹部5の表面で反射
され、反射ビーム3dは前記照射体4に設けられ
た通過間隙即ち窓部6を通つて集光レンズ3e、
光位置検出器3fからなる反射光受光装置に入射
する。入射後の信号処理は第3図の場合と同様で
あり、照射レンズ3cと凹部5の表面間の距離
Δlを求めることが出来る。
FIG. 6 is a schematic explanatory diagram of a measuring box 3' having a light beam irradiating section, a light receiving device, an amplifier, and a correction circuit in the object shape measuring apparatus according to the present invention. The measurement box 3' is equipped with a small-diameter cylindrical irradiator 4, and is configured so that the irradiator 4 can be inserted deep into a recess 5 of the object to be measured 1 (for example, inside a claw of a steel sheet pile). The tip of the irradiator 4 is equipped with a light beam irradiator consisting of a light source 3a and an irradiator lens 3c, the irradiator beam 3b is reflected on the surface of the recess 5, and the reflected beam 3d is transmitted through a light beam irradiator provided on the irradiator 4. Through the gap or window 6, the condenser lens 3e,
The reflected light enters a reflected light receiving device consisting of an optical position detector 3f. The signal processing after incidence is the same as in the case of FIG. 3, and the distance Δl between the irradiation lens 3c and the surface of the recess 5 can be determined.

前記照射レンズ3c、光源3aを測定函3′内
に設け、照射ビーム3bを光フアイバーで前記照
射体4の先端部に導いて該光端部から外方に光を
照射する手段を採用しても良い。本考案における
光ビーム照射部はその意味において用いる。
The irradiation lens 3c and the light source 3a are provided in the measuring box 3', and the irradiation beam 3b is guided to the tip of the irradiator 4 through an optical fiber, and the light is radiated outward from the light end. Also good. The term "light beam irradiation section" in the present invention is used in this sense.

第7図は前記測定函3′の概略斜視図であつて、
照射レンジ3cから出た照射ビーム3bは被測定
物体1にあつて反射され、反射ビーム3dとなつ
て集光レンズ3eから図示していない光位置検出
器に入射する。而して小径筒状照射体4は光源に
対する給電線やあるいは照射レンズ3cに連結さ
れる光導路(光フアイバー)を内蔵するため内部
に管路もしくは溝部(図示していない)を備える
ことが必要であり、さらに小径の測定孔に挿入自
在であることが必要なので小径筒状のものである
ことが望ましい。また反射ビーム3dの通過間隙
6を有することが必須の条件であるが、これには
異なつた形状のものを用いることが可能で、それ
を第8図a,bに示す。
FIG. 7 is a schematic perspective view of the measurement box 3',
The irradiation beam 3b emitted from the irradiation range 3c is reflected by the object to be measured 1, becomes a reflected beam 3d, and enters an optical position detector (not shown) through the condenser lens 3e. Therefore, the small-diameter cylindrical irradiator 4 needs to have a conduit or a groove (not shown) inside to house a power supply line for the light source or an optical guide (optical fiber) connected to the irradiation lens 3c. Furthermore, since it needs to be able to be inserted freely into a small-diameter measurement hole, it is desirable that it be a small-diameter cylindrical one. Although it is essential to have a passage gap 6 for the reflected beam 3d, it is possible to use a gap 6 of different shapes, as shown in FIGS. 8a and 8b.

第8図aは小径筒状照射体4′の先端部が横に
膨出しておりその膨出部4aに照射レンズ3cが
設けられており、集光レンズ3eはそれと対向す
るように位置せしめられているので、広大な通過
間隙6を有することとなり、該照射体4の本体が
反射ビーム3dを遮ることはない。bは照射体
4″が2本の筒状体の先端に照射レンズ3cと支
持部4bを有する態様のもので、これも通過間隙
6を大きく取ることが出来る。
In FIG. 8a, the tip of a small-diameter cylindrical irradiator 4' is bulged out laterally, and an irradiation lens 3c is provided on the bulge 4a, and a condenser lens 3e is positioned to face it. Therefore, there is a large passage gap 6, and the main body of the irradiator 4 does not block the reflected beam 3d. b is an embodiment in which the irradiating body 4'' has an irradiating lens 3c and a support portion 4b at the tips of two cylindrical bodies, and this also allows a large passage gap 6 to be provided.

本考案では小径筒状照射体は前述のようなそれ
ぞれ異なつた構成を有することが出来、用途に応
じて適宜な態様のものを採用する。次に本考案は
前述のような測定函を備えているので、これによ
りたとえば被測定物体の凹んだ表面と照射レンズ
間の距離の変動つまり変位を知ることが出来る。
即ちたとえばあらかじめ、照射レンズを絶対的座
標で定めた被測定物体表面から設定距離離隔した
軌跡に沿つて動かすと、被測定物体表面と軌跡と
の微少な離隔距離を測定することが可能となる。
前記測定にあたつては光ビーム投射部の任意の位
置を測定の基点として採用して良い。
In the present invention, the small-diameter cylindrical irradiator can have different configurations as described above, and an appropriate mode is adopted depending on the application. Next, since the present invention is equipped with the above-mentioned measuring box, it is possible to determine, for example, the variation or displacement of the distance between the concave surface of the object to be measured and the irradiation lens.
That is, for example, if the irradiation lens is moved in advance along a locus that is a set distance apart from the surface of the object to be measured using absolute coordinates, it becomes possible to measure the minute distance between the surface of the object to be measured and the trajectory.
In the measurement, any position of the light beam projection section may be used as the measurement reference point.

さて、本考案装置に係る前記測定函を使つて得
た測定値と前記軌跡のある測定基準からの絶対値
を演算すると被測定物体の外形形状を求めること
が可能となる。そこで本考案装置の利用効果の1
例として次に実施例を用いて、本考案装置にかか
る変位測定とそれを利用した被測定物体の形状測
定を同時に説明する。
Now, by calculating the measured value obtained using the measuring box according to the device of the present invention and the absolute value from a certain measurement standard of the trajectory, it is possible to obtain the external shape of the object to be measured. Therefore, one of the benefits of using the device of this invention is
Next, using an example as an example, displacement measurement using the device of the present invention and shape measurement of a measured object using the same will be explained simultaneously.

(実施例) 第1図は本考案にかかる実施例における多関節
支持ロボツトのうち、もつとも簡易な倣いロボツ
トの概要を説明するための概略斜視図であつて、
被測定物体この場合U字形鋼矢板の切断サンプル
100は、測定台7の上にたやすく移動すること
のないよう載置即ち定置されている。8は倣いロ
ボツトで、架台9の上にY方向自走自在に装着さ
れており、かつX方向に移動自在な進退自在ビー
ム10を有し、その前部に保持装置11を介して
回転支持ロツド12を回転自在に保持している。
さらに前記回転支持ロツド12の先端には第6図
において説明した測定函3′が昇降自在に装着さ
れており、小径筒状照射体4がそれから下方に垂
下するように突出している。電気信号系路、制御
系路は図示を省略しているが、前記倣いロボツト
8は図示していない制御装置からの指令に従つて
X,Yおよび上下方向自在に前記測定函3′を移
動せしめ測定することが可能である。
(Embodiment) FIG. 1 is a schematic perspective view for explaining the outline of the simplest copying robot among the multi-joint support robots in the embodiment of the present invention.
The object to be measured, in this case a cut sample 100 of a U-shaped steel sheet pile, is placed on the measuring table 7 so that it cannot easily move. Reference numeral 8 denotes a copying robot, which is mounted on a pedestal 9 so as to be freely movable in the Y direction, and has a beam 10 that can freely move forward and backward in the X direction. 12 is held rotatably.
Furthermore, the measuring box 3' described in FIG. 6 is attached to the tip of the rotary support rod 12 so as to be able to rise and fall freely, and the small-diameter cylindrical irradiator 4 projects downwardly from the measuring box 3'. Although the electrical signal system path and the control system path are not shown, the copying robot 8 freely moves the measuring box 3' in the X, Y, and vertical directions in accordance with commands from a control device (not shown). It is possible to measure.

次に第2図は本考案装置を用いた実施例にかか
る測定要領の概念を説明するもので、13は測定
基準となる線状基準であり14は点状基準であ
る。而して15は基準測定軌跡を示す。この基準
測定軌跡15はあらかじめ被測定物体1の外形に
相似する形状とし、前記被測定物体1に包摂する
ように設定しておく。つまり前記測定基準13あ
るいは14を頂点とすれば前記基準測定軌跡15
はそれと位置関係を正確に定めておくことが出来
る。そこで基準測定軌跡15と被測定物体1の外
形形状1aとの離隔距離Δlを実測し、演算すれ
ば、被測定物体1の外形形状1aの幾何学的形状
および外形寸法の絶対値を求めることが可能とな
る。
Next, FIG. 2 explains the concept of the measurement procedure according to an embodiment using the device of the present invention, in which 13 is a linear reference serving as a measurement reference, and 14 is a dotted reference. Reference numeral 15 indicates a reference measurement locus. This reference measurement locus 15 has a shape similar to the outer shape of the object to be measured 1 and is set in advance so as to be included in the object to be measured 1 . In other words, if the measurement standard 13 or 14 is the apex, the reference measurement locus 15
The positional relationship can be determined accurately. Therefore, by actually measuring and calculating the separation distance Δl between the reference measurement locus 15 and the external shape 1a of the measured object 1, it is possible to obtain the absolute values of the geometric shape and external dimensions of the external shape 1a of the measured object 1. It becomes possible.

而して、実際の生産現場では、被測定物体1の
数箇所の測定部位を知れば品質および操業上のデ
ータとして充分である場合が多い。本考案装置は
そのような場合に極めて有効に機能する。第3図
はその場合の測定部位を示す鋼矢板の概略断面図
であり、鋼矢板16の場合は幅A、高さB、爪部
球幅C、爪部穴幅D、厚みEの5個所が外形寸法
の基準となる。
In actual production sites, it is often sufficient to know several measurement points on the object 1 as quality and operational data. The device of the present invention functions extremely effectively in such cases. Figure 3 is a schematic cross-sectional view of the steel sheet pile showing the measurement locations in that case, and in the case of steel sheet pile 16, there are five locations: width A, height B, claw ball width C, claw hole width D, and thickness E. is the standard for external dimensions.

第4図は本考案装置を利用した測定および演算
要領を示す説明図で、倣いロボツト8は、その本
体をY方向に進退自在に移動させるサーボモータ
17、ビーム10をX方向に進退自在に移動させ
るサーボモータ18、回転支持ロツド12を鉛直
状態で方向および角度θ自在に回転せしめるサー
ボモータ19と前記各サーボモータによる移動量
を計測するシヤフトエンコーダ20,21,22
を備えると共に前記サーボモータ17〜19を駆
動する位置制御装置23,24,25を有してい
る。
FIG. 4 is an explanatory diagram showing the measurement and calculation procedure using the device of the present invention, in which the copying robot 8 has a servo motor 17 that moves its main body back and forth in the Y direction, and a beam 10 that moves the beam 10 back and forth in the X direction. a servo motor 18 that rotates the rotary support rod 12 in a vertical state freely in the direction and angle θ, and shaft encoders 20, 21, 22 that measure the amount of movement by each of the servo motors.
and position control devices 23, 24, 25 for driving the servo motors 17-19.

前述のように鋼矢板16に対する基準測定軌跡
15は制御装置26に与えられているので、制御
装置26は測定函3′が該基準測定軌跡15に沿
つて移動するようそれぞれの目標値θr,xr,yrを
時々刻々位置制御装置23〜25に与えてサーボ
モータ17〜19を作動せしめる。
As mentioned above, the reference measurement trajectory 15 for the steel sheet pile 16 is given to the control device 26, so the control device 26 sets the respective target values θr, xr so that the measurement box 3' moves along the reference measurement trajectory 15. , yr are momentarily applied to the position control devices 23-25 to operate the servo motors 17-19.

位置制御装置23〜25はシヤフトエンコーダ
20〜22からの現在位置θ,x,yの入力と前
記目標値θr,xr,yrを比較しつつ予定の基準測定
軌跡15に沿つて測定函3′を移動させる。この
ようにして測定函3′は前記基準測定軌跡15と
被測定物体1たとえば鋼矢板の外形形状との離隔
距離Δlを測定する。
The position control devices 23 to 25 move the measurement box 3' along the planned reference measurement locus 15 while comparing the current position θ, x, y input from the shaft encoders 20 to 22 with the target values θr, xr, yr. move it. In this way, the measuring box 3' measures the separation distance Δl between the reference measurement locus 15 and the outer shape of the object to be measured 1, for example, a steel sheet pile.

信号処理装置27は前記Δl,θ,x,y信号
の時々刻々の入力から鋼矢板1の外形形状位置
Xn,Ynを下記(1),(2)式に従つて演算する。
The signal processing device 27 determines the external shape position of the steel sheet pile 1 from the momentary input of the Δl, θ, x, and y signals.
Calculate Xn and Yn according to formulas (1) and (2) below.

Xn=Δln×cosθn+xn …(1) Yn=Δln×sinθn+yn …(2) Δln:光電変位測定器と外形形状との時々刻々の
離間距離 θn:光電変位測定器と外形形状との時々刻々の
角度 xn:光電変位測定器の時々刻々の位置における
測定基準と基準測定軌跡間のX方向距離 yn:光電変位測定器の時々刻々の位置における
測定基準と基準測定軌跡間のY方向距離 測定基準が線13の場合、定点を線上に設定
し、演算の起点とする。測定基準が点14の場合
は、アーム10を回動自在としその角度とアーム
の延伸距離をパラメータとして利用する。
Xn=Δln×cosθn+xn…(1) Yn=Δln×sinθn+yn…(2) Δln: Momentary separation distance between the photoelectric displacement measuring device and the external shape θn: Momentary angle xn between the photoelectric displacement measuring device and the external shape : The distance in the X direction between the measurement reference and the reference measurement locus at the momentary position of the photoelectric displacement measuring device yn: The distance in the Y direction between the measurement reference and the reference measurement locus at the momentary position of the photoelectric displacement measuring instrument The measurement reference is line 13 In this case, set a fixed point on the line and use it as the starting point of the calculation. When the measurement reference is point 14, the arm 10 is made rotatable and the angle and extension distance of the arm are used as parameters.

次に前記Xn,Ynから前記幅A,高さB,爪部
球幅C,爪部穴幅D,厚みEを次のようにして求
める。第3図に示すように、鋼矢板16には特徴
的な位置として最上端位置Xnb1、最下端位置
Xnb2、爪部下端位置Xnb3、爪部上端位置Xnb4
中心位置における上端位置Xnb5、最右端位置
Xna1、最左端位置Xna2があり、これらは信号処
理操作によつて容易に求めることが可能である。
従つて幅Aは前記Xna1とXna2の差、高さBは前
記Xnb1とXnb2の差、爪部球幅CはXnb1とXnb3
の差、爪部穴幅DはXnb3とXnb4の差、厚みEは
Xnb5とXnb2の差を求めることによつて夫々算出
することができる。
Next, the width A, height B, claw ball width C, claw hole width D, and thickness E are determined from Xn and Yn as follows. As shown in Fig. 3, the steel sheet pile 16 has two characteristic positions: the uppermost position
Xnb 2 , lower end position of the claw Xnb 3 , upper end position of the claw Xnb 4 ,
Top position Xnb 5 at center position, rightmost position
There are Xna 1 and the leftmost position Xna 2 , which can be easily determined by signal processing operations.
Therefore, width A is the difference between Xna 1 and Xna 2 , height B is the difference between Xnb 1 and Xnb 2 , and width C of the claw sphere is Xnb 1 and Xnb 3.
, the claw hole width D is the difference between Xnb 3 and Xnb 4 , and the thickness E is
Each can be calculated by finding the difference between Xnb 5 and Xnb 2 .

第4図において3hは第5図、第6図と同様信
号の非直線性を補正する補正回路である。本考案
の装置によつて250×250〜400×900mmのH形鋼お
よびJISA5528に規定される鋼矢板の測定を行つ
た結果、作業能率を1.5〜3倍に向上させること
が出来た。
In FIG. 4, 3h is a correction circuit for correcting the nonlinearity of the signal, similar to FIGS. 5 and 6. As a result of measuring 250 x 250 to 400 x 900 mm H-section steel and steel sheet piles specified in JISA5528 using the device of the present invention, it was possible to improve work efficiency by 1.5 to 3 times.

(考案の効果) 本考案装置を利用すると、微小な変位を測定で
きると共に複雑な断面形状を有する物体の外形輪
郭および寸法形状を正確に非接触で検出すること
ができ、かつ入力に比し測定時間を激減させるこ
とが可能である。
(Effects of the invention) By using the device of the present invention, it is possible to measure minute displacements, accurately detect the outline and dimensions of objects with complex cross-sectional shapes without contact, and also measure It is possible to drastically reduce the time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案にかかる実施例装置の概略斜視
図、第2図は本考案装置を用いた測定例概略説明
図、第3図は実施例にかかる測定要領説明図、第
4図は本考案装置にかかる制御要領説明図、第5
図は周知の光電変位測定器の測定原理概略説明
図、第6図は本考案装置に係る測定原理概略説明
図、第7図は本考案装置にかかる測定函概略斜視
図、第8図a,bは本考案にかかるそれぞれ異な
つた小径筒状照射体の実施例概略説明図である。 1:被測定物体、2:表面、3:光電変位測定
器、3a:光源、3b:照射ビーム、3c:照射
レンズ、3d:反射ビーム、3e:集光レンズ、
3f:光位置検出器、3g:増幅器、3h:補正
回路、4:小径筒状照射体、5:凹部、6:窓部
(通過間隙)、7:測定台、8:倣いロボツト、
9:架台、10:ビーム、11:保持装置、1
2:回転支持ロツト、13:測定基準(線)、1
4:測定基準(点)、15:基準測定軌跡、1
6:鋼矢板、17,18,19:サーボモータ、
20,21,22:シヤフトエンコーダ、23,
24,25:位置制御装置、26:制御装置、2
7:信号処理装置。
FIG. 1 is a schematic perspective view of an embodiment of the device according to the present invention, FIG. 2 is a schematic explanatory diagram of a measurement example using the device of the present invention, FIG. 3 is an explanatory diagram of the measurement procedure according to the embodiment, and FIG. Diagram explaining the control procedure for the devised device, No. 5
The figure is a schematic explanatory diagram of the measurement principle of a well-known photoelectric displacement measuring device, FIG. 6 is a schematic explanatory diagram of the measurement principle of the device of the present invention, FIG. 7 is a schematic perspective view of a measuring box according to the device of the present invention, and FIG. b is a schematic explanatory diagram of an embodiment of different small-diameter cylindrical irradiators according to the present invention; 1: Measured object, 2: Surface, 3: Photoelectric displacement measuring device, 3a: Light source, 3b: Irradiation beam, 3c: Irradiation lens, 3d: Reflected beam, 3e: Condenser lens,
3f: optical position detector, 3g: amplifier, 3h: correction circuit, 4: small diameter cylindrical irradiator, 5: recess, 6: window (passage gap), 7: measuring table, 8: copying robot,
9: Frame, 10: Beam, 11: Holding device, 1
2: Rotating support rod, 13: Measurement standard (line), 1
4: Measurement standard (point), 15: Standard measurement trajectory, 1
6: Steel sheet pile, 17, 18, 19: Servo motor,
20, 21, 22: shaft encoder, 23,
24, 25: Position control device, 26: Control device, 2
7: Signal processing device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 先端に光ビーム照射部と反射ビームの通過間隙
を備えた小径筒状照射体と;前記通過間隙を通り
照射位置を見通す軸上において後記測定函に装着
された反射光受光装置と;該受光装置から得られ
る光−電気変換信号入力を増幅する増幅器と;前
記受光装置および増幅器を内蔵すると共に前記小
径筒状照射体を突出支持する測定函と;該測定函
を位置変化自在に保持すると共に物体の穴部また
は凹状部に前記小径筒状照射体を挿脱自在に位置
せしめる多関節支持ロボツトからなる物体形状測
定装置。
a small-diameter cylindrical irradiator having a light beam irradiation part and a passage gap for the reflected beam at its tip; a reflected light receiver mounted on a measurement box described later on an axis that passes through the passage gap and looks through the irradiation position; and the light receiver an amplifier for amplifying the optical-to-electrical conversion signal input obtained from the; a measurement box incorporating the light receiving device and the amplifier and protrudingly supporting the small-diameter cylindrical illumination body; An object shape measuring device comprising an articulated support robot that allows the small-diameter cylindrical irradiator to be inserted into and removed from a hole or a concave portion of the object.
JP2563384U 1984-02-24 1984-02-24 Object shape measuring device Granted JPS60137308U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2563384U JPS60137308U (en) 1984-02-24 1984-02-24 Object shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2563384U JPS60137308U (en) 1984-02-24 1984-02-24 Object shape measuring device

Publications (2)

Publication Number Publication Date
JPS60137308U JPS60137308U (en) 1985-09-11
JPH0321444Y2 true JPH0321444Y2 (en) 1991-05-10

Family

ID=30520876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2563384U Granted JPS60137308U (en) 1984-02-24 1984-02-24 Object shape measuring device

Country Status (1)

Country Link
JP (1) JPS60137308U (en)

Also Published As

Publication number Publication date
JPS60137308U (en) 1985-09-11

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