JPH03214784A - Laser resonator - Google Patents
Laser resonatorInfo
- Publication number
- JPH03214784A JPH03214784A JP971390A JP971390A JPH03214784A JP H03214784 A JPH03214784 A JP H03214784A JP 971390 A JP971390 A JP 971390A JP 971390 A JP971390 A JP 971390A JP H03214784 A JPH03214784 A JP H03214784A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- rods
- laser resonator
- laser
- mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はガスレーザなどの共振器に関し、特に共振器の
温度安定性の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to resonators such as gas lasers, and more particularly to improving the temperature stability of resonators.
従来のレーザ共振器は、第３図に示すようにレーザ管１
の両端にミラー２ａ，２ｂを配置し、ミラー支持体３ａ
，３ｂを介して支持棒４ａ４ｂ（通常は３本である。他
の１本を図示せず。）で連結されていた。ミラー支持体
３ａと支持棒４ａ，４ｂはスプリング９ａ，９ｂを介し
て固定されており調整ネジ８ａ，８ｂで傾きを変えて共
振状態を実現させていた。A conventional laser resonator has a laser tube 1 as shown in FIG.
Mirrors 2a and 2b are arranged at both ends of the mirror support 3a.
, 3b via support rods 4a4b (usually there are three; the other one is not shown). The mirror support 3a and the support rods 4a, 4b are fixed via springs 9a, 9b, and the inclination is changed using adjustment screws 8a, 8b to achieve a resonance state.
共振器状態はきわめて微妙であり、支持棒４ａ，４ｂが
温度変化によって僅かに伸び縮みしても、共振状態が最
良の状態からずれレーザ出力が変動する。このため、通
常、熱膨張係数の小さいネオヤラムやインバーなどが支
持棒に使用されるが、レーザの共振器長が長くなると充
分ではなく、環境温度の変化によりレーザ出力が変動す
るという欠点がある。The state of the resonator is extremely delicate, and even if the support rods 4a, 4b slightly expand or contract due to temperature changes, the resonant state will deviate from the best state and the laser output will fluctuate. For this reason, neoyalam, invar, or the like, which have a small coefficient of thermal expansion, are usually used for the support rod, but this is not sufficient when the laser resonator length becomes long, and the disadvantage is that the laser output fluctuates due to changes in the environmental temperature.
本発明のレーザ共振器は、前述した従来のレーザ共振器
に加えて温度制御用素子と支持棒の温度を検出する温度
センサーと温度を制御する温度コントローラを有してい
る。すなわち、本発明はミラー支持棒の支持棒に温度制
御用素子、例えばペルチェ素子を取付け、支持棒の温度
を一定にコントロールしてレーザ共振器を温度変化に対
し安定に保つものである。In addition to the conventional laser resonator described above, the laser resonator of the present invention includes a temperature control element, a temperature sensor that detects the temperature of the support rod, and a temperature controller that controls the temperature. That is, in the present invention, a temperature control element, such as a Peltier element, is attached to the support rod of the mirror support rod, and the temperature of the support rod is controlled to be constant to keep the laser resonator stable against temperature changes.
〔実施例１〕 第１図は本発明の一実施例の縦断面図である。[Example 1] FIG. 1 is a longitudinal sectional view of an embodiment of the present invention.
レーザ管１の両端にミラー２ａ，２ｂを配置し、ミラー
支持体３ａ，３ｂは支持棒４ａ，４ｂで連結されている
。ミラー支持体３ａと支持棒４ａ，４ｂはスプリング９
ａ，９ｂを介して調節ネジ８ａ，８ｂで固定されている
。支持棒４ａ，４ｂには温度制御素子５ａ，５ｂ及び温
度センサー７ａ，７ｂが取付けられており、温度制御素
子５ａ，５ｂ及び温度センサー７ａ，７ｂの信号系は温
度コントローラー６ａ．６ｂに接続されている。調節ネ
ジ８ａ，８ｂによって最適に調整された時の温度に保つ
ように温度コン１・ローラー６ａ，６ｂを設定すること
により支持棒４ａ，４ｂは一定の温度に保たれ、レーザ
出力は安定する。Mirrors 2a and 2b are arranged at both ends of the laser tube 1, and mirror supports 3a and 3b are connected by support rods 4a and 4b. The mirror support body 3a and support rods 4a, 4b are springs 9.
It is fixed with adjusting screws 8a and 8b via a and 9b. Temperature control elements 5a, 5b and temperature sensors 7a, 7b are attached to the support rods 4a, 4b, and the signal system of the temperature control elements 5a, 5b and temperature sensors 7a, 7b is connected to a temperature controller 6a. 6b. By setting the temperature controller 1 and rollers 6a, 6b to maintain the temperature optimally adjusted by the adjustment screws 8a, 8b, the support rods 4a, 4b are kept at a constant temperature, and the laser output is stabilized.
なお、温度制御素子は、温度センサー．温度コントロー
ラーは各分野て通常用いられているものを利用している
ので詳しい説明は省略する。Note that the temperature control element is a temperature sensor. The temperature controller used is one that is commonly used in each field, so a detailed explanation will be omitted.
〔実施例２〕 第２図は本発明の実施例２の縦断面図である。[Example 2] FIG. 2 is a longitudinal sectional view of Example 2 of the present invention.
基本的構成要件は実施例１と同じであるが、さらにビー
ムスプリッタ−１１と光検出素子１２を配置し光検出素
子の信号系を温度コントローラーＢ１０に接続している
。The basic structural requirements are the same as in Example 1, but a beam splitter 11 and a photodetector element 12 are further arranged, and the signal system of the photodetector element is connected to the temperature controller B10.
この実施例ではレーザ出力１３がモニターできるため温
度コントローラー１０によりレーザ出力を最大に調整で
きる利点がある。微妙な制御が可能なので、調節ネジ８
ａ，８ｂで粗調しておけば温度コントロールにより共振
状態を最適値に調整することが可能である。This embodiment has the advantage that since the laser output 13 can be monitored, the laser output can be adjusted to the maximum by the temperature controller 10. Adjustment screw 8 allows fine control.
If rough adjustment is made using a and 8b, it is possible to adjust the resonance state to an optimum value by temperature control.
以上説明したように本発明は、ミラー支持体の支持棒の
温度を制御することにより環境温度変化に対しきわめて
安定な共振状態が維持できるレーザ共振器を提供できる
利点がある。As described above, the present invention has the advantage of providing a laser resonator that can maintain an extremely stable resonant state against environmental temperature changes by controlling the temperature of the support rod of the mirror support.
第１図は本発明の第１の実施例の縦断面図、第２図は本
発明の第２の実施例を示す縦断面図、第３図は従来のレ
ーザ共振器の断面図である。
１・・・レーザ管、２ａ，２ｂ・・−ミラー、３ａ，３
ｂ・・・ミラー支持体、４ａ，４．ｂ・・・支持棒、５
ａ，５ｂ・・・温度制御素子、６ａ，６ｂ・・・温度コ
ントローラー、７．７ａ．７ｂ−温度センサー、８ ａ
ｙ８ｂ・・・調節ネジ、９ａ，９ｂ・・・スプリング、
１０・・・温度コントローラー、１１・・・ビームスプ
リッター １２・・・光検出素子、１３・・・レーザ出
力。FIG. 1 is a longitudinal sectional view of a first embodiment of the present invention, FIG. 2 is a longitudinal sectional view of a second embodiment of the invention, and FIG. 3 is a sectional view of a conventional laser resonator. 1...Laser tube, 2a, 2b...-Mirror, 3a, 3
b...Mirror support, 4a, 4. b...Support rod, 5
a, 5b... Temperature control element, 6a, 6b... Temperature controller, 7.7a. 7b-temperature sensor, 8a
y8b...adjustment screw, 9a, 9b...spring,
10...Temperature controller, 11...Beam splitter 12...Photodetection element, 13...Laser output.
Claims (1)
を支持体を介して棒材などで連結し、ミラーの傾きを調
節して共振させるレーザ共振器において、前記棒材に温
度制御素子を取付けたことを特徴とするレーザ共振器。 ２、第１項記載のレーザ共振器において、レーザ出力光
の光路上にビームスプリッターを配置し、ビームスプリ
ッターで分岐された一方の光の光路上に光検出素子を配
置し、前記検出素子を温度制御回路に接続したことを特
徴とするレーザ共振器。[Scope of Claims] 1. In a laser resonator in which mirrors are arranged at both ends of a laser tube, the mirrors are connected via a support with a bar, etc., and the inclination of the mirror is adjusted to resonate. A laser resonator characterized by having a temperature control element attached to the material. 2. In the laser resonator described in item 1, a beam splitter is arranged on the optical path of the laser output light, a photodetection element is arranged on the optical path of one of the lights split by the beam splitter, and the detection element is A laser resonator characterized in that it is connected to a control circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971390A JPH03214784A (en) | 1990-01-19 | 1990-01-19 | Laser resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP971390A JPH03214784A (en) | 1990-01-19 | 1990-01-19 | Laser resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03214784A true JPH03214784A (en) | 1991-09-19 |
Family
ID=11727900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP971390A Pending JPH03214784A (en) | 1990-01-19 | 1990-01-19 | Laser resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03214784A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124487A (en) * | 1981-01-27 | 1982-08-03 | Ushio Inc | Gas laser oscillator |
| JPS58176989A (en) * | 1982-04-12 | 1983-10-17 | Shinichi Ito | Stabilized frequency laser |
-
1990
- 1990-01-19 JP JP971390A patent/JPH03214784A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124487A (en) * | 1981-01-27 | 1982-08-03 | Ushio Inc | Gas laser oscillator |
| JPS58176989A (en) * | 1982-04-12 | 1983-10-17 | Shinichi Ito | Stabilized frequency laser |
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