JPH03219139A - Vibration control device - Google Patents

Abstract

PURPOSE:To reduce vibration actively in a large degree across the total region of a wide frequency zone by passing the vibration detection signal of an object through an adaptive digital filter, and generating such vibrational waveform as to interfere with the vibration of the object so as to nullify this vibration. CONSTITUTION:A reverse vibration generating circuit 20 is provided with an adaptive digital filter 8 and an adaptive algorithm 17 both built therein. The vibration of a movable substrate 1, vibration generating source, is detected by a sensor 4 and led into the adaptive digital filter 8. The vibration of a vibrationproof object 3 is detected by a sensor 13, and the filter coefficient of the adaptive digital filter 8 is changed at high speed by the adaptive algorithm 17 so as to make the detection signal of the sensor 13 its minimum. An actuator 12 is thereby realtime-controlled so that the actuator 12 can apply the most effective reverse vibration for nullifying this vibration to the vibrationproof object 3.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention provides a method for actively controlling and significantly reducing vibrations propagated from a movable foundation to an object vibration-proofly supported on the foundation. Regarding a control device.

[Conventional technology]

It reduces the vibration and noise transmitted from power machinery to the surrounding area, reduces the transmission of vibration to the loaded items during truck and rail transportation, and even transmits vibration to precision equipment such as electron microscopes and IC manufacturing equipment through the installation stand. As a vibration-proof support method for isolating the vibration caused by vibrations, the structure is generally supported through an elastic body such as vibration-proof rubber, air spring, metal spring, etc., and also includes a damper if necessary. are used.

Fig. 25 is a schematic elevational view of this kind of conventional anti-vibration support device, and Fig. 26 shows the frequency characteristics of the vibration transmission rate (response magnification) when using the anti-vibration support device shown in Fig. 25. Illustrate.

As shown in Fig. 25, the conventional anti-vibration support method is as follows:
A vibration isolation support system (elastic system) 2 having a spring constant and a damping coefficient C is installed between the movable foundation I, which is an excitation source that generates vibration, and the vibration isolation target object 3, which is an object to be supported in vibration isolation. A so-called passive anti-vibration support method was used.

However, in such a vibration-proof support mechanism, as shown in Fig. 26, a large response magnification, that is, a resonance point occurs at frequency 10, which is determined by r0 = N/2π) and rπ fluffy τ, and in the frequency band near this On the contrary, the vibrations are amplified without being vibration-isolated, and the vibration state of the object to be vibration-isolated becomes worse.

Therefore, recently, the spring constant of the elastic body 2 and the viscosity coefficient C
Variable methods (semi-active) have also begun to be implemented.

[Technical problem to be solved by the invention] However, even with this variable method, resonance will always occur in some frequency band, especially when vibrations containing frequency components over a wide frequency band, such as random vibrations, are transmitted from the foundation. Since the point exists, there is a problem in that vibrations are amplified in the frequency band near this resonance point, and the vibration state of the object to be vibration-isolated deteriorates.

Therefore, with conventional passive or semi-active vibration isolation methods, it is often extremely difficult to achieve a large vibration isolation effect over the wide frequency band targeted for vibration isolation.

The present invention was made to solve such technical problems, and an object of the present invention is to provide a vine vibration control device that actively and significantly reduces vibrations over a wide frequency band.

[Means for solving problems]

The present invention provides a vibration control device for an object to be vibration-isolated that is supported on a movable foundation for vibration isolation, by detecting vibrations of the movable foundation and the object to be vibration-isolated using a vibration sensor, and passing the detection signal through an adaptive digital filter. By generating a vibration waveform that interferes with and cancels the vibration of the object to be vibration-isolated, and applying that signal waveform to the actuator, the vibration of the object to be vibration-isolated is actively reduced. The purpose of the present invention is to provide a vibration control device that can significantly reduce vibrations over the entire range.

〔Example〕

The present invention will be specifically described below with reference to FIGS. 1 to 24.

First, the basic principle of the vibration control device according to the present invention will be explained.

FIG. 2 is a block diagram showing the basic configuration of the vibration control device according to the present invention.

In Fig. 2, vibration is transmitted from the movable foundation 1 to the object 3 to be vibration-isolated through the vibration-isolating support system 2, but a reverse vibration generation circuit 20 is also installed to generate vibration (reverse vibration) to cancel this vibration. However, by applying the vibrations to the object 3 to be vibration-isolated by the actuator 12 and causing interference, the vibration of the object 3 to be vibration-isolated can be significantly reduced.

Of course, the reverse vibration for vibration control can be applied directly to the object 3 to be vibration-isolated, but it can also be applied to the object 3 to be vibration-proofed, such as a supporting table, etc. It is also possible to apply it via a part that oscillates with a correlation of .

The reverse vibration generation circuit 20 incorporates an adaptive digital filter 8 and an adaptive algorithm 17, and detects the vibration of the movable foundation 1, which is the source of vibration, with the sensor 4 and introduces it to the adaptive digital filter 8. At the same time, the vibration of the object 3 to be vibration-proofed is detected by the sensor 13, and the adaptive algorithm 1 is applied so that this detection signal becomes the minimum (ζ0).
7 changes the filter coefficient of the adaptive digital filter 8 at high speed, so that the actuator 12 applies reverse vibration to the object 3 to be vibration-isolated, which is most effective for canceling the vibration. Configured for real-time control.

Since such an adaptive digital filter 8 is used, the transmission characteristics of the vibration isolation support system 2 or the actuator 1
It is also possible to follow changes in the characteristics of the sensor 2, the sensor 4, 13, etc., and the vibration of the object 3 to be vibration-isolated can be stably reduced.

In this manner, in the vibration control device according to the present invention, that is, the vibration control device for the vibration-isolated object 3 supported on the movable foundation 1 for vibration isolation, the vibrations of the movable foundation 1 and the vibration-isolated object 3 are detected by the vibration sensors 4 and 13. By detecting and passing the detection signal through the adaptive digital filter 8, a vibration waveform that interferes with and cancels the vibration of the object 3 to be vibration-isolated is generated, and by applying the signal waveform to the actuator 2. , a vibration control device is constructed which is characterized by actively reducing the vibration of the object 3 to be vibration-isolated.

The adaptive digital filter 8 in the reverse vibration generation circuit 20 is, for example, an FIR type digital filter or an II type digital filter.
It can be configured with an R-type digital filter, and the FIR
An example of the configuration of the type is shown in FIG. 3. In FIG. 3, the adaptive digital filter 8 has a filter coefficient W. , , W, and -W, , are configured to convert the input signal X into the desired output signal YK.

In this case, the filter coefficient W of the adaptive digital filter 8. K, WIK, ---WLK changes adaptively by combining with the adaptive algorithm 17 (Fig. 1), and converges to the optimal filter coefficient value while following changes in the system and environment. It is configured to go.

Here, the adaptive algorithm 17, for example,
(least mean square) method, SEP (successive regression) method, Newton method, steepest descent method, etc.
The MS method is the most efficient.

In the LMS method, the convergence speed and stability of the adaptive digital filter 8 can be adjusted in a well-balanced manner using the gain factor (μ).

Furthermore, the filter coefficient W of the adaptive digital filter 8
. By fixing x, W, x, ----wLK, it is also possible to shift to vibration control using a fixed digital filter method (digital filter 50 in FIG. 4).

That is, in FIG. 2, the adaptive reverse vibration generation circuit 2
When the vibration control is executed at 0 and the vibration of the object 3 to be vibration-isolated is reduced, the filter coefficient of the adaptive digital filter 8 converges to a certain constant value if there is no change in the characteristics of the vibration system. In this state, by fixing the filter coefficients, a fixed reverse vibration generating circuit 25 as shown in FIG.
It is possible to shift to a device equivalent to a vibration control device equipped with.

In FIG. 4, the vibration signal detected by the sensor 4 from the movable foundation 1 is passed through a fixed type reverse vibration generation circuit 25 (fixed type digital filter 50), and the actuator 1
By generating and applying reverse vibration to the vibration isolation object 2, the vibration of the object 3 to be vibration-isolated is significantly reduced.

Here, if the characteristics of the vibration isolation support system 2, vibration sensor 4.13, actuator 12, etc. are constant and do not change, the fixed filter method shown in FIG. The same vibration reduction effect as the method can be obtained.

In addition, switching to the fixed digital filter 50 is a complete feedforward control system, so it can be expected to have a great effect even with shocking human power.

Similarly, the reverse, ie, the transition back from a fixed filter system to an adaptive filter system, can also be freely performed.

For example, if the damping effect is reduced for some reason while executing control using fixed digital filter coefficients, at that point the fixed adaptive digital filter 8 (fixed digital filter ) to return to the adaptive type, the adaptive algorithm 17 uses the filter coefficients in the fixed type control as initial values.
starts operating and the filter coefficient W is set so that the optimum vibration reduction state is approached. ,,W, ---It becomes possible to convert WLK to i at high speed.

If you execute switching control that starts adaptive control with the fixed filter coefficient as the initial value, it is better to perform switching control that starts adaptive control with the fixed filter coefficient as the initial value, rather than restarting adaptive control from the beginning. In many cases, it is possible to shorten the convergence time to

FIG. 1 is a block diagram showing the specific configuration of the adaptive vibration control device shown in FIG. 2, and FIGS.
2 is a block diagram showing various configuration examples of the reverse vibration generation circuit 20 shown in the figure. FIG.

FIG. 10 is a block diagram showing a specific configuration of the fixed type vibration control device of FIG. 4, which is constructed by switching the reverse vibration generation circuit 20 of the adaptive type vibration control device of FIG. 2 to a fixed type.

Further, in the vibration control device according to the present invention, for example,
By switching the adaptive digital filter 8 to a fixed digital filter, a fixed reverse vibration generation circuit 25 as shown in Fig. 4-2 is constructed, and the coefficients of the digital filter are measured and calculated as follows. Find, then
It is also possible to configure the obtained digital filter coefficients to be transferred to the adaptive reverse vibration generation circuit 20 as initial values.

This method is convenient for shortening the convergence time.

Therefore, with reference to FIG. 10, a method for determining digital filter coefficients in the fixed digital filter method described above will be explained.

First, the following two transfer functions (transfer characteristics) are determined by measurement, etc., and the digital filter coefficient W is determined from these two transfer functions. Calculate K, W, K, ----w, K.

Transfer function (T): Transfer function from the movable foundation 1 to the vibration isolation target object 3 through the vibration isolation support system 2.

Transfer function (D): Fixed digital filter 50 is set to all bus, a signal such as noise is input to this fixed digital filter 50, and the actuator 12 is actuated, the input signal and the object to be vibration-isolated Transfer function with the vibration signal generated in 3.

Here, if the desired transfer function (impulse response) of the fixed-type digital filter 50 is H, this is obtained by H=-(T/D), and this filter coefficient H is transferred to the fixed-type digital filter 50. By writing, for example, a fixed type vibration control device as shown in FIGS. 4 and 10 can be configured.

Here, a specific method for determining the transfer functions T and D will be explained with reference to FIG. 10.

Transfer function T: Turn off the actuator 12, and measure the transfer function between points P and Q using a frequency analyzer (FFT) or the like.

Transfer function D=limit the frequency band appropriately and input the amplified random signal from point P. At this time, the amplifier 5 and the point P are separated, and the fixed digital filter 50 is used as an all-bus. The actuator 12 is actuated by a human power signal from point P. In this state, the transfer function between point P and point Q is measured.

The coefficients of the fixed digital filter 50 are determined as described above, and the process can be shifted to the adaptive digital filter method (FIG. 1) using these coefficients as initial values.

For the configuration of the adaptive reverse vibration generating circuit 20 here, in addition to the circuit 20 in FIG. 1, any of the configurations shown in FIGS. 5 to 9 can be used. However, when switching between a fixed type and an adaptive type, it is desirable to have the same configuration for both types.

As is clear from the above description, when implementing the vibration control device according to the present invention, the adaptive reverse vibration generating circuit 20 as shown in FIGS. 2 and 1 (respectively (including other configuration examples shown in ), the nature of the input vibration (periodic or random)
Although a large vibration reduction effect can be obtained regardless of the
Furthermore, by making it possible to switch the filter coefficient WOK, w, of the adaptive digital filter 8 to a fixed type, the following 2) and 11) can be achieved.
Since two control modes are possible, the vibration control device according to the present invention can be used more effectively depending on the application.

) Adaptive digital filter method 11) Mutual switching method between adaptive digital filter method and fixed digital filter method.

In the case of the above switching method 11), it is desirable to match the configurations of both methods so that they correspond to each other.

Next, the vibration sensor 4.13 and actuator 12 in the vibration control device of FIGS. 2 and 4 will be explained.

The vibration sensor 4 that detects vibrations of the movable foundation 1 detects an input signal to an adaptive reverse vibration generating circuit 20 or a fixed reverse vibration generating circuit 25 configured by switching the adaptive reverse vibration generating circuit 20, and this detection signal Deinotal filter 8 or 5
By applying manual force to 0, reverse vibration is generated to interfere with the vibration of the object 3 to be vibration-isolated.

That is, the signal detected by this vibration sensor 4 only needs to be a signal that correlates with the vibration of the object 3 to be vibration-proofed, and the second
In addition to using the vibration of the movable foundation l as shown in Figures and Figure 4,
In some cases, it is also possible to detect and use a vibration signal of the object 3 to be vibration-isolated.

In addition, various types of vibration sensors 4.13 can be used as long as they can detect vibration waveforms. For example, displacement sensors, speed sensors, acceleration sensors, etc. can be used. can.

Various types of actuators can be used as the actuator 12 as long as it applies reverse vibration to the object 3 to be vibration-proofed by the output signal from the digital filter 8.50.
For example, various types of actuators are used, such as electromagnetic or piezoelectric actuators, as well as actuators using ultrasonic motors, pneumatics, hydraulics, shape memory materials, electrorheological fluids (ERF), IF fluids, etc. be able to.

FIG. 11 is a block diagram showing a basic configuration in which the position of the actuator 12 is changed in the vibration control device according to the present invention.

In addition to the inertial mass type which uses inertia force as shown in FIG. 2, the method of exciting the actuator 12 is an inertia mass type which uses inertia force as shown in FIG. It is also possible to adopt a method of inserting the actuator 12 into the body and applying vibration.

Furthermore, in the 11th configuration, an actuator (for example, one using electrorheological fluid or magnetic fluid) whose dynamic characteristics (spring, damping force) are variable is used, and by changing those dynamic characteristics, the vibration-proofing target is It is also possible to configure the object 3 to generate reverse vibrations.

Next, a specific configuration of the vibration control device according to the present invention will be explained.

In FIG. 1, which shows the specific structure of the adaptive vibration control device as a block diagram, the reverse vibration applying device for applying reverse vibration to the vibration isolation target object 3 is configured to control the vibration of the movable base 91 and the vibration isolation target object 3. a vibration sensor 4.13 for detecting;
An amplifier 5.14 for amplifying each vibration signal, a low-pass filter 6.10.15, an analog-to-digital converter (A/D) 7.16, and a digital-to-analog converter (D/A) 9, It is composed of an adaptive digital filter 8, an adaptive algorithm 17, an oscillation prevention circuit 19, a delay circuit 1, a vibration actuator 12, and a power amplifier 11 for amplifying the same.

Among these, the reverse vibration generation circuit 20 includes the adaptive digital filter 8, the adaptive algorithm 17, the delay circuit 18, the oscillation prevention circuit 19, and the analog-to-digital converter 7.16 for taking in the vibration signal. It is comprised of a digital-to-analog converter 9 for outputting signals.

As explained with reference to FIG. 2, the principle of vibration control is that the vibration of the movable foundation 1 is detected by the vibration sensor 4, and this detection signal is passed through the adaptive digital filter 8. 2 → Generate a waveform signal that cancels the vibration waveform transmitted along the path of the object 3 to be vibration-isolated, amplify the generated waveform signal through the power amplifier 11, and use the actuator 12 to generate vibrations corresponding to this waveform signal. (reverse vibration) is applied to the object 3 to be vibration-isolated to reduce vibration.

Here, the filter coefficients of the adaptive digital filter 8 are determined by detecting the vibration of the object 3 to be vibration-isolated using the vibration sensor 13, and using an adaptive algorithm 17 to set the filter coefficient at high speed so as to minimize this detection signal (close to zero). It is designed to converge to the optimal coefficient value.

Furthermore, the adaptive algorithm 17 uses the following two input signals to determine the coefficients of the adaptive digital filter 8.

a) Vibration signal of the vibration isolation target object 3 detected by the vibration sensor 13.

b) A signal obtained by passing the input signal to the adaptive digital filter 8 through the delay circuit 18.

Here, the two human input signals a) and b) must be input to the adaptive algorithm 17 at the same time.

Therefore, adaptive digital filter 8 → digital-to-analog converter 9 → low-pass filter 10 → power amplifier 1
1 → Actuator 12 → Anti-vibration target object 3 → Vibration sensor 13 → Amplifier 14 → Low-pass filter 15 → Analog-to-digital converter 16 By delaying the input signal to the adaptive digital filter 8 by the time it passes through, both The human input signals a) and b) are synchronized.

In order to configure this delay circuit 18, a delay element may be used, but the path is as follows: adaptive digital filter 8→digital/analog converter tl'M9→low pass filter 10→power amplifier 11→actuator 12
→An object to be vibration-isolated 3→Vibration sensor 13→Amplifier 14→Low-pass filter 15→Analog-digital converter 16 The transfer characteristic in the path can be created using a digital filter, and this digital filter can be used in place of the delay element 18. good.

If the delay does not occur, this portion of the delay circuit is not necessary.

In FIG. 1, an oscillation prevention circuit 19 is for preventing oscillation of a vibration signal, and this oscillation prevention circuit 19 is
As shown in the circuit diagrams of each reverse vibration generating circuit 20 in FIGS. 5 to 8, various circuit configurations can be adopted.

Further, as shown in FIG. 9, in the vibration control device according to the present invention, the reverse vibration generation circuit 20 can be configured without using the oscillation prevention circuit 19.

Here, the oscillation prevention circuit 19 includes, for example, a digital-to-analog converter 9 → a low-pass filter 10 → a power amplifier 1
1 → Actuator 12 → Anti-vibration object 3 → Anti-vibration support system 2 → Movable foundation 1 → Vibration sensor 4 → Amplifier 5 → Low-pass filter 6 → Analog-digital converter 7 The transfer characteristics of the path were measured and measured. It is possible to configure it by a digital filter in which impulse responses are written as filter coefficients.

In the vibration control device shown in FIG. 1 showing the configuration of an adaptive vibration control device according to the present invention and FIG. In some cases, it can be configured with a bandpass filter, and its filter characteristics depend on the characteristics of the system to be controlled, the control conditions,
It can be set appropriately depending on the environment etc.

FIG. 10 shows the configuration of the vibration control device when the adaptive digital filter method explained in FIG. 1 is switched to the fixed digital filter method.

According to such a switching type vibration control device, adaptive control is executed by the vibration control device having the configuration shown in FIG. can be fixed and changed to a fixed type vibration control device having the configuration as shown in FIG.

An advantage of the fixed type shown in Fig. 10 is that it is a complete feedforward system, so it is expected to have a great effect on impact vibrations. In an environment where the characteristics such as 12 do not change, vibration can be effectively reduced as in the case of the adaptive type shown in FIG.

Furthermore, if the damping effect decreases for some reason after transitioning from the adaptive type to the fixed type, the fixed type can be changed again by switching from the fixed type to the adaptive type (Fig. 10 → Fig. 1). By using the adaptive algorithm 17, the digital filter coefficients that have been used can be changed to return to the optimum vibration reduction state.

In this way, by using the adaptive digital filter 8 and making its filter coefficients fixed, it is possible to switch between the adaptive control method and the fixed control method, and Taking advantage of the characteristics, vibration can be reduced more effectively, and a vibration control device with a wide range of applications can be constructed.

The present invention has been explained above using the most basic one-dimensional (one horizontal direction) vibration control model, but according to the present invention,
By combining a plurality of vibration control devices as described above, a more practical multidimensional (multiple degrees of freedom) vibration control device can be configured.

Basically, the above-mentioned vibration control device including the vibration sensor and actuator set in the direction of reducing vibration,
By applying as many degrees of freedom (directions) as required for vibration reduction to the object to be vibration-isolated and activating them simultaneously, it is possible to simultaneously reduce vibrations from one dimension to arbitrary multi-dimensionality.

FIG. 27 is a block diagram showing the configuration of a vibration control device that controls two-dimensional (two degrees of freedom) vibration.

As shown in Figure 27, two systems (X direction and Y direction)
By using the vibration control device described above, vibrations in two horizontal axes (X direction and Y direction) can be reduced at the same time.

Here, as shown in FIG. 28, the vibration control circuit 72 in FIG. 27 is composed of two adaptive reverse vibration generation circuits 20 used individually for reducing vibration in the X direction and vibration in the Y direction.
(FIG. 2) or a fixed reverse vibration generating circuit 25 (FIG. 4).

However, if there is a correlation between the vibrations in these two directions, an even greater vibration reduction effect can be achieved by removing the respective correlation (crosstalk) components.

For example, in the case of the model shown in FIG. 27, the wolfberry stalk components are the following two components.

) When the actuator vibrates in the X direction, a vibration component in the Y direction on the vibration isolation target object 3 generated by the vibration in the X direction.

1i) When the actuator vibrates in the Y direction, a vibration component in the X direction on the vibration isolation target object 3 generated by the vibration in the Y direction.

Therefore, in order to remove such a losstalk component and achieve a greater vibration reduction effect, the control circuit 72 shown in FIG. 27 can be configured as shown in FIG. 29, for example.

The Cucumber talk component removal circuit 74 in FIG. 29 is, for example, an adaptive or fixed reverse vibration generation circuit 20 or 25.
It is also possible to use the structure shown in FIG. 30 or FIG. 31.

In the vibration control circuit 72 of FIG. 31, the actuator I2 of the vibration waveform output system, the power amplifier 11, and the LP
Four F 10s will be used, two in each direction.

FIG. 32 is a block diagram showing the configuration of a vibration control device that controls three-dimensional (three degrees of freedom) vibration.

Three-dimensional vibration control can also be implemented as an extension of the two-dimensional case described above, and basically, as shown in Fig. 32, three-dimensional vibration control can be performed by combining three systems of vibration control devices. For example, 2 horizontal axes and 3 vertical axes)
vibration can be reduced at the same time.

Here, as shown in FIG. 33, the vibration control circuit 73 in FIG. It can be configured with a reverse vibration generating circuit 20 (FIG. 2) or a fixed reverse vibration generating circuit 25 (FIG. 4).

However, if there is a correlation between vibrations in these three directions, an even greater vibration reduction effect can be achieved by removing each correlation (crosstalk) component.

FIG. 34 is a block diagram illustrating the configuration of the control circuit 73 in FIG. 32 suitable for removing the crosstalk component.

Here, the crosstalk component removal circuit 75 in FIG. 34 uses, for example, an adaptive or fixed type reverse vibration generation circuit 20 or 25, following the case of FIG. 30, as shown in FIG. 35. It can also be configured.

As explained above using the two-dimensional and three-dimensional vibration control devices shown in FIGS. 27 to 35 as examples, for multidimensional (multiple degrees of freedom) vibration control, basically the first Figure ~ No. 11
Simultaneous control of multi-degree-of-freedom vibration is possible by combining a plurality of vibration control devices (as many as the number of degrees of freedom to be controlled) described with reference to the figures.

However, in the case of multiple degrees of freedom, it is more preferable to remove the crosstalk component of vibration between each degree of freedom, and it is possible to achieve a greater vibration reduction effect by using an appropriate crosstalk component removal circuit. can.

In addition, theoretically, there is no limit to the number of degrees of freedom when applying the vibration control device according to the present invention, but in actual vibration control, vibration control with about 2 to 6 degrees of freedom is applied to the vibration-isolated target. It is considered that the vibration of the object 3 can be reduced almost to the maximum extent.

It should be noted that the number of combinations of commonly used vibration control devices and their control directions do not necessarily have to match the number and direction of the degrees of freedom to be individually controlled, but can effectively reduce the vibration of the object to be vibration-isolated. Any number and direction that can be configured is acceptable.

However, for boat fishing, it is preferable to have the same or more degrees of freedom, including the number of degrees of freedom and direction to be actually controlled, so that they can be selected as needed.

As described above based on the various embodiments, the vibration control device according to the present invention has a vibration control device that generates a controlled vibrational force through the actuator 12 or the vibration that is applied to the vibration-isolated object 3 (a).
Anti-vibration support system (spring system) from the movable foundation l due to reverse vibration)
2 to the object 3 to be vibration-isolated, and furthermore, the reverse vibration is detected by detecting the vibration of the object 3 to be vibration-proofed or a vibration correlated thereto. The structure is configured so that the vibration reduction effect is always maintained at its maximum by making adjustments accordingly.

That is, the vibration control device described above reduces the vibration of the object 3 to be vibration-isolated by an active and adaptive control operation.

The graph in FIG. 12 shows a state (A) in which the operation is turned off and no control is executed, and a state (A) in which the operation is turned on and the filter coefficient of the adaptive digital filter 8 is changed in the vibration control device of the present invention having the configuration shown in FIG. The vibration response magnification l of the vibration isolation target object 3 with respect to the movable foundation 1 in state B (B) converged to a constant value
x 1/x.

The graph in Fig. 13 is also the 12th graph.
The measurement results of the vibration acceleration level of the vibration isolation target object 3 in each state (A) and (B) of the figure are shown.

FIGS. 12 and 13 show measurement results when the input vibration to the movable foundation 1 is random vibration, and the same vibration reduction effect was obtained for both periodic vibration and periodic variation vibration input.

According to these test results, the controlled frequency range O~1
At 0 Hz, it can be seen from FIG. 12 that by applying the present invention, it is possible to realize a vibration isolation support device with a response magnification of 1.0 or less and no resonance point (resonance-free), and from FIG. 13, By applying the present invention, the vibration isolation target object 3
It can be seen that the value of the vibration acceleration 1χ itself can be significantly reduced (for example, about 20 dBK less at frequency 57), and a large vibration reduction effect can be achieved.

The graph in FIG. 14 shows the vibration control device of the present invention having the configuration shown in FIG. 1 when the operation is turned on and the filter coefficient of the adaptive digital filter 8 converges to a constant value (B
) and the measurement results of the vibration acceleration amplitude of the vibration isolation target object 3 when the operation is turned off (A) are shown.

The graph in FIG. 14 also shows that by applying the present invention, the vibration acceleration amplitude can be reduced to a very small noise level, and the amplitude of the object 3 to be vibration-isolated can be significantly reduced. .

Furthermore, after keeping the operation ON state (B) in FIG. 14 for 5 minutes, the filter coefficient of the adaptive digital filter 8 of the vibration control device (FIG. 1) is fixed, and the fixed digital filter of FIG. Even if the circuit 25 is switched to the circuit 25 shown in FIG.
Almost the same vibration reduction effect as B) was obtained.

From this, if the characteristics of the anti-vibration object 3, anti-vibration support system 2, actuator 12, vibration sensor 4, 13, etc. do not change, after the adaptive filter 8 converges,
It was confirmed that almost the same level of vibration reduction effect could be obtained even by switching to a fixed digital filter method.

Next, vibration control according to the present invention? Other embodiments of the In device will be described.

FIG. 15 shows a vibration control device when the object 3 to be vibration-isolated is configured not with one degree of freedom as described above but with a multi-degree-of-freedom system, and FIG. 16 shows the frequency characteristics of the response magnification shown in FIG. Hereinafter, a case where the present invention is applicable to such a multi-degree-of-freedom system will be explained.

As shown in FIG. 15, the weight of the object 3 to be vibration-isolated is large;
When the center of gravity is located high, a plurality of peaks may occur in the response magnification as shown in FIG. 16, and a plurality of frequencies (r+, fz) corresponding to these peaks will exist.

Such a vibration isolation target object 3 can be regarded as a multi-degree-of-freedom system consisting of a plurality of parts, including a lower half 3A and an upper half 3B.

In the illustrated example, the vibration isolation target object 3 consisting of the portions 3A and 3B is supported by the vibration isolation support system 2 via a table 26 fixed to the bottom surface thereof.

Even when trying to reduce the vibration of the object 3 to be vibration-isolated in the model shown in the 15th concave, basically, the vibration control device of the present invention shown in Part 1 can be used to achieve a significant vibration reduction. I can do it.

In that case, the low-pass filter 15.10.6 in FIG.
It is desirable to set the peak frequencies f1 and r2 in FIG. 16 to include the peak frequencies f1 and r2 in FIG. can be used.

By the way, in the case of the model shown in FIG. 15, the amount of vibration reduction may be limited by the following two points if only one reverse vibration applying device (reverse vibration generating circuit 20) is used.

a) When there are multiple points (two or more) on the object 3 to be vibration-isolated that require vibration reduction depending on its shape, weight distribution, etc., in other words, if only one point on the object 3 is controlled, When it is difficult to reduce vibration.

b) A case where the vibration component detected from the vibration isolation target object 3 has a correlation with the vibration component in different directions of the movable foundation l (for example, in the X direction with respect to the X direction) depending on the frequency band.

FIG. 17 is a block diagram showing a configuration example when the vibration control device of the present invention performs vibration control of an object to be vibration-isolated in which the vibration portion has multiple degrees of freedom. FIG. 1 is a block diagram showing a device configuration when implementing the present invention in a multidimensional directional vibration control device.

Moreover, FIGS. 19, 20, and 21 show the frequency characteristics of the vibration response magnification, the frequency characteristics of the vibration acceleration level, and the acceleration amplitude in the vibration control device of the present invention shown in FIGS. 17 and 18, respectively. 3A and 3B are various graphs showing time waveforms of FIG.

Hereinafter, the above-mentioned cases a) and b) will be specifically explained with reference to FIGS. 17 to 21.

FIG. 17 is a block diagram showing a specific example of the above a),
The illustrated anti-vibration object 3 has three main parts 3A, 3B,
It can be divided into 3C.

In order to reduce the overall vibration, first, vibration sensors 39, 40, 49 are installed at predetermined positions representing each part, and the vibration signals detected by them are transmitted to amplifiers 4 and 42.
．． Amplify with 47 and filter if necessary 43.44.4
8 and is added by a signal mixer 45.

The signal added by the signal mixer 45 in this way is applied to the adaptive digital filter 8 (the 18th filter) of the vibration control device according to the present invention.
By using the input signal shown in FIG. 17, the vibration of the object 3 to be vibration-isolated as shown in FIG. 17 can be reduced as a whole.

Here, vibration sensor 39.40.49, amplifier 41.4
In practice, it is preferable that the number of band pulse filters 43, 44, 48, etc. is the minimum number that can reduce the vibration of the object 3 to be vibration-isolated as a whole.

In addition, the hand pulse filter (BPF) 4 in FIG.
3.44.48 can be configured with a low-pass filter or bi-pulse filter if necessary, and if not required, the output of the amplifier 41, 42, 47 can be input directly to the signal mixer 45. good.

FIG. 18 is a blog diagram showing a specific example of the above a).

In FIG. 18, the object 3 to be vibration-isolated is made of, for example, a prismatic body made of iron, and its dimensions are, for example, 0.5X0°5X1.2.
It was a hollow body weighing approximately 480 kg at 'h+b.

This anti-vibration object 3 is fixed on a vibration-isolating table 26 supported by four anti-vibration rubbers 28.

When the vibration of the object 3 to be vibration-isolated was measured in this state, it was found that two resonance peaks occurred near the 4th and 9th sections.

Here, the vibration control direction is the horizontal uniaxial direction (X direction)
That is, in the left-right direction in FIG.

From this, the goal of the vibration control device of FIG. 18 is to simultaneously reduce these 47 vibration peaks and 97 vibration peaks.

Therefore, the correlation function (coherence) between the vibrations of the movable foundation 1 (X, Y, X directions) and the vibrations of the anti-vibration object 3 (X direction) was measured.

As a result, in the X-direction vibration component of the vibration isolation target object 3, the peak around 4 Hz has a strong correlation with the X-direction vibration of the movable foundation 1, and the peak around 9 Hz has a strong correlation with the X-direction vibration of the movable foundation 1.
It was found that there is a large correlation with the X-direction vibration, and that their correlation function is almost 1.

By the way, - boat fishing involves multiple vibration peaks (f, , f2, 18
In the case of the figure, in order to perform vibration control of the vibration isolation target object 3 having 4) (Z and 9 Hz), a plurality of sets of vibration control devices (reverse vibration application devices) corresponding to the number of peaks are required.

However, as in the case of Fig. 18 mentioned above, when two vibration peaks have a correlation with vibrations in different directions (X direction and The device can effectively reduce vibrations near two vibration peaks at the same time.

That is, as shown in FIG. 18, two detection signals are detected from the movable foundation 1, that is, two vibration signals in the X direction (for 4 Sepeek control jB) and the X direction (for 9 Sepeek control),
The vibration signal is cut into a necessary frequency band using a hand pulse filter 37, 38 (or a low pulse filter or a bipulse filter) and synthesized by a signal mixer 29, and the vibration signal is configured to be used as an input signal of the adaptive digital filter 8. By doing so, the 4H of the object 3 to be vibration-isolated is
z and 9) (It becomes possible to significantly reduce multiple vibration peaks near z at the same time with one set of vibration control devices.

In the model shown in Fig. 18, in the above example, the vibration direction is
However, if vibration in the X direction is required, the sensor 32 detects the vibration of the movable foundation 1 in the X direction, and the signal is sent to the signal mixer 29 through the amplifier 33 and filter 36. It can be synthesized by

In this case, it is preferable to synthesize only the signals of vibration components that have a correlation with the vibration of the object 3 to be vibration-isolated, among the vibration signals detected by the movable base v11.

FIGS. 19 and 20 show the time point (B) when the vibration control device according to the present invention in FIG. 18 is turned on and the filter coefficient of the adaptive digital filter 8 has almost converged to a constant value, and the time when the device is turned off. In case (A), the response magnification of the vibration isolation target object 3 to the movable foundation 1 is 1/λ. FIG. 3 is a diagram showing the measurement results of the vibration acceleration level of the vibration isolation target object 3. FIG.

In FIG. 19, a vibration signal obtained by adding vibrations in the X direction and in the X direction by a signal mixer 29 is used as the vibration of the movable foundation 1.

From these test results, by applying the present invention,
In the controlled frequency range 0 to 127, there are two main resonance peaks (around 47 and 9) as shown in Figure 19.
It can be seen that at the same time, there is a large reduction in the response magnification, resulting in a non-resonant state with a response magnification of 1 or less.

On the other hand, from FIG. 20, by applying the present invention,
It can be seen that the value of the vibration acceleration lX11 of the object 3 to be vibration-isolated can be significantly reduced, and a large vibration reduction effect can be achieved.

FIG. 21 shows the timing at which the adaptive digital filter 8 has almost converged (B
) and the measurement results of the vibration acceleration amplitude of the vibration isolation target object 3 in (A) when the device is turned off.

From the results shown in FIG. 21, by applying the present invention,
It can be seen that the vibration amplitude of the object 3 to be vibration-isolated can be reduced to a very small noise-like level, and the vibration of the object 3 can be greatly increased.

In addition, in FIG. 18, without using the signal mixer 29,
When the input to the adaptive digital filter 8 is the vibration of the unidirectional component of the movable foundation 1, when only the X direction is input, the peak of 4) (Z in Figs. 9) (The peak near Z was almost the same as the value when vibration control was turned off.

On the other hand, when only the vibration in the The result was that it was reduced.

As described above, as in the 18th model, the vibration of the object 3 to be vibration-isolated has multiple resonance peaks, and each of these peaks is a vibration component of the movable foundation 1 in different directions (X, Y, Z). )
If there is a correlation between the movable foundation 1 and the movable foundation 1, as shown in FIG.
By using this as an input, it is possible to simultaneously and significantly reduce multiple resonance peaks, that is, broadband vibrations in the object 3 to be vibration-isolated.

In the embodiments so far, vibration control in the uniaxial direction of the object 3 to be vibration-isolated has been explained. However, in actual applications, when it is desired to simultaneously reduce multidimensional vibrations, the vibration control device according to the present invention may be used in multiple centers. By using it, multidimensional vibrations can be simultaneously and significantly reduced.

For example, in a vibration control device configured as shown in FIG. 1 or FIG. By using at least two or more control devices, it is possible to simultaneously and significantly reduce the three-directional components of vibration of the object 3 to be vibration-isolated.

In addition, when the object 3 to be vibration-isolated has a complicated structure, for example, when it consists of three main parts as illustrated in FIG. By using a signal obtained by adding and combining vibration signals detected from each part by a signal mixer 45 as shown in FIG. 17, it is also possible to reduce the vibration of the object 3 to be vibration-isolated as a whole.

The vibration control device of the present invention explained in each of the above embodiments is an abstract diagram in which each component that reduces the vibration transmitted from the movable foundation 1 to the vibration isolation target object 3 through the vibration isolation support system 2 is divided into blocks. Next, an application example for putting the present invention into practical use will be described.

FIG. 22 is a schematic diagram showing a configuration in which the present invention is applied to vibration control for seat sorting in vehicles such as automobiles, aircraft, and ships.

In FIG. 22, vibrations transmitted from the main body frame 54 to the seat 52 through the seat suspension 55 are expressed as follows:
It is configured to be reduced by reverse vibration applied by the actuator 53.

Reference numeral 51 in FIG. 22 indicates a passenger seated on a sort 52, and a vibration sensor 56 is attached to the seat 52, which corresponds to the object 3 to be vibration-proofed.

FIG. 23 is a schematic diagram showing a configuration in which the present invention is applied to vibration control on a spring in a suspension of an automobile or the like.

In FIG. 23, the vibration transmitted from the road surface 60 to the sprung mass 61 via the tires 59 and the suspension 58 is reduced by the reverse vibration applied from the actuator 62.

In Fig. 23, 63 indicates a vibration sensor attached to a sprung mass 61 corresponding to the object 3 to be vibration-isolated, 64 indicates a sprung mass such as an axle, and 71 detects vibrations of the sprung mass 64. A vibration sensor is shown.

FIG. 24 is a schematic diagram showing a configuration when the present invention is applied to a control device for vibrations generated by engines of automobiles, aircraft, ships, etc.

In FIG. 24, an engine 65 which is a vibration generator (corresponding to the movable foundation 1) is mounted on a vibration isolating support system 6 on a vehicle body frame 66.
7, this engine 65
The actuator 68 is configured to reduce the vibration transmitted from the vehicle body frame 66 through the vibration isolation support system 67 to the vehicle body frame 66 by the reverse vibration generated by the actuator 68.

In FIG. 24, 69 indicates a vibration sensor attached to the vehicle body frame 66 corresponding to the object 3 to be vibration-isolated, and 70 indicates a vibration sensor attached to the engine 65 corresponding to the movable foundation 1.

As is clear from each of the above embodiments and application examples, the vibration control device according to the present invention has what shape and structure the object 3 to be vibration-isolated has, what kind of vibration-isolation support conditions it has,
Furthermore, no matter what the usage environment, the vibration sensor 4.
13 and the actuator 12 can be freely installed in vehicles, aircraft, ships, machines, plants, precision equipment, etc. by selecting appropriate positions, and have a wide range of applications.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, in a vibration control device for a vibration-isolated object supported on a movable foundation for vibration isolation, vibrations of the movable foundation and the vibration-isolated object are detected by a vibration sensor; By passing the signal through an adaptive digital filter, a vibration waveform that interferes with and cancels out the vibration of the object to be vibration-isolated is generated, and by applying that signal waveform to the actuator, the vibration of the object to be vibration-isolated is actively suppressed. Even if the vibration propagated from the movable foundation to the object to be vibration-isolated is periodic or random, or if the vibration has vibration components over a wide frequency band, the vibration will be reduced. This provides a vibration control device that can reliably and significantly reduce the propagation of .

[Brief explanation of drawings]

FIG. 1 is a block diagram illustrating the specific configuration of a vibration control device according to the present invention, FIG. 2 is a block diagram illustrating the basic configuration of a vibration control device according to the present invention, and FIG. 3 is a block diagram illustrating the basic configuration of a vibration control device according to the present invention. A schematic diagram showing the configuration of the filter, Figure 4 is the second
Figures 5 to 9 are block diagrams showing various configuration examples of the reverse vibration generation circuit of the vibration control device of the present invention, respectively. , FIG. 10 is a block diagram showing the specific configuration of the fourth fixed vibration control device, FIG. 11 is a block diagram showing another basic configuration of the vibration control device according to the present invention, FIGS. Figures 13 and 14 show the frequency characteristics of the vibration response magnification in the vibration control device of the present invention, respectively;
A graph showing the frequency characteristics of the vibration acceleration level and the time waveform of the acceleration amplitude. Fig. 15 is a schematic diagram showing a configuration in which a heavy and tall object to be anti-vibration is supported via an anti-vibration table. Fig. 16 is a graph showing the time waveform of the acceleration amplitude. Figure 17 is a graph showing the frequency characteristics of the vibration response magnification, and Figure 17 is a block diagram showing the main parts of the configuration of the vibration control device according to the present invention when the structure of the object to be vibration-isolated is complex and the vibration part has multiple degrees of freedom. Fig. 18 is a block diagram showing the configuration of the vibration control device according to the present invention when the vibration direction has multiple degrees of freedom, No. 19, Fig. 20, and Fig. 21.
The figures are graphs showing the frequency characteristics of the vibration response magnification, the frequency characteristics of the vibration acceleration level, and the time waveform of the acceleration amplitude in the vibration control device shown in Figs. 17 and 18, respectively, and Figs. 22, 23, and 24. 25 is a schematic diagram showing an application example in which the present invention is applied to vibration control of seat vibrations of automobiles, vibration propagation of suspensions of automobiles, and vibration of engine vibrations of automobiles, respectively, and FIG. 25 shows a conventional vibration isolating support device. 26 is a graph showing the frequency characteristics of the vibration response magnification shown in FIG. 25; FIG. 27 is a block diagram showing the basic configuration of the two-dimensional vibration reduction control system of the vibration control device according to the present invention; FIG. The figure is a block diagram showing the configuration of the vibration control circuit in Figure 27, and Figures 29 to 31 each show an example of the circuit configuration when a crosstalk component removal circuit is incorporated into the vibration control circuit in Figure 28. Block Diagram,
FIG. 32 is a block diagram showing the basic configuration of the three-dimensional vibration reduction control system of the vibration control device according to the present invention 1+, FIG. 33 is a block diagram showing the configuration of the vibration control circuit in FIG. 32, and FIG.
4 and 35 are block diagrams showing examples of circuit configurations in which the crosstalk component removal circuit of the vibration control device shown in FIG. 33 is incorporated, respectively. 1- Movable foundation, 2--Vibration isolation support system, 3--Object to be vibration-isolated, 4- Vibration sensor, 8--Adaptive digital filter, 12- Actuator, 13--
--Vibration sensor, L L---Adaptive algorithm, 20
---Adaptive reverse vibration generation circuit, 25--Fixed reverse vibration generation circuit, 50--Fixed digital filter, 72--Reverse vibration generation circuit, 7
3. Reverse vibration generation circuit, 74--crosstalk component removal circuit, 75--1-crosstalk component removal circuit. Figure 2 Figure 6 Figure 6 1 length Hz ・p Figure 28 Figure 30 Figure 72 Figure 33 Figure 35

Claims (1)

[Claims] (1) In a vibration control device for a vibration-isolated object supported on a movable foundation, the vibrations of the movable foundation and the vibration-isolated object are detected by a vibration sensor, and the detection signal is passed through an adaptive digital filter. Vibration control characterized by actively reducing the vibration of the object to be vibration-proofed by generating a vibration waveform that interferes with and cancels the vibration of the object to be vibration-proofed, and applying the signal waveform to an actuator. Device.