JPH03225239A - Pressure detecting device - Google Patents
Pressure detecting deviceInfo
- Publication number
- JPH03225239A JPH03225239A JP2171990A JP2171990A JPH03225239A JP H03225239 A JPH03225239 A JP H03225239A JP 2171990 A JP2171990 A JP 2171990A JP 2171990 A JP2171990 A JP 2171990A JP H03225239 A JPH03225239 A JP H03225239A
- Authority
- JP
- Japan
- Prior art keywords
- ripple
- ripples
- spiral
- diaphragm
- pressure detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Diaphragms And Bellows (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ダイヤフラムでもって被圧力検出流体の圧力
変動を検出して、所要量の変動を検出する圧力検出装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a pressure detection device that detects pressure fluctuations in a pressure-detected fluid using a diaphragm to detect fluctuations in a required amount.
この種の圧力検出装置は、第1図、第2図を参照して説
明すると、ケーシング1内に、ダイヤフラムDで区画さ
れた圧力検出室3を形成し、この圧力検出室3の一方3
aに被圧力検出流体aを導入するとともに、他方3bに
前記ダイヤフラムDの所要量の撓みで作動するスイッチ
4を設けたものが一般的である。This type of pressure detection device will be described with reference to FIGS. 1 and 2. A pressure detection chamber 3 partitioned by a diaphragm D is formed in a casing 1, and one side 3 of the pressure detection chamber 3 is formed in a casing 1.
Generally, the pressure detection fluid a is introduced into the diaphragm 3b, and a switch 4 which is activated by a required amount of deflection of the diaphragm D is provided at the other 3b.
この圧力検出装置において、検出精度を高めるためには
、ダイヤフラムDの立上り特性が鋭いことが重要な要素
である。In this pressure detection device, in order to improve detection accuracy, it is important that the diaphragm D has a sharp rise characteristic.
ところで、本発明者等は、実願平1−18718号、実
願平1−18719号において、第7図に示すように、
素材板中心円形10の周りに、その周方向均等分位の少
なくとも2点からスタートした渦巻き波紋Pを呈する波
形断面のダイヤフラムDを備えた圧力検出器を提案した
。この提案のダイヤフラムDは、波紋Pが渦巻き状であ
ることから、周囲の剛性が均一化され、撓み作用時、応
力の片寄りがなく周方向に均等に撓む、すなわち、上記
立上り特性においである程度満足いけるものであった。By the way, the present inventors, in Utility Application No. 1-18718 and Utility Application No. 1-18719,
A pressure detector has been proposed which is equipped with a diaphragm D having a corrugated cross section around a circular center circle 10 of a material plate and exhibiting spiral ripples P starting from at least two points equidistant in the circumferential direction. In this proposed diaphragm D, since the ripples P have a spiral shape, the rigidity of the surrounding area is made uniform, and when deflection is applied, the diaphragm D is deflected uniformly in the circumferential direction without unevenness of stress. It was somewhat satisfying.
しかしながら、ユーザからは、もつと微圧で大きい変位
を得るもの、すなわち、圧力−変位曲線の勾配が大きい
ものを要求された。However, users have requested a device that can obtain a large displacement with a very small pressure, that is, a device with a large slope of the pressure-displacement curve.
この要求に応えるべく、本願発明者等は、圧力−変位曲
線の勾配を大きくするには、ダイヤフラムDの全体の剛
性を低下させることにあると考えた。このため、まず、
−筋の渦巻き波紋Pの全長が長くなればなるほど、剛性
が低下することを知見した。In order to meet this demand, the inventors of the present invention considered that the way to increase the slope of the pressure-displacement curve is to reduce the overall rigidity of the diaphragm D. For this reason, first,
- It was found that the longer the total length of the spiral ripples P of the muscle, the lower the stiffness.
また、渦巻き波紋Pを、中心円形10の周り均等分位の
少なくとも2点からスタートさせたのは、ダイヤフラム
Dの模み時、その中心軸が傾くのを避けるためであった
。しかし、渦巻き波紋Pが一筋でも、その周廻数が増せ
ば、中心軸の傾きが生しない(無視できる程度しか傾か
ない)ことを知見した。Further, the reason why the spiral ripples P are started from at least two points equally spaced around the central circle 10 is to prevent the central axis of the diaphragm D from tilting when patterning. However, it has been found that even if the spiral ripple P is a single line, if the number of circumferences increases, the central axis will not tilt (it will tilt only to a negligible extent).
本発明は、以上の点に留意し、前記渦巻き波紋のダイヤ
フラムの圧力−変位曲線の勾配を大きくすることを課題
とする。The present invention takes the above points into consideration, and an object of the present invention is to increase the gradient of the pressure-displacement curve of the diaphragm of the spiral ripples.
上記課題を解決するため、本発明にあっては、上記知見
に基づき、前述の圧力検出装置において、そのダイヤフ
ラムの渦巻き波紋の周廻数を3回以上としたのである。In order to solve the above problem, in the present invention, based on the above knowledge, in the above-mentioned pressure detection device, the number of revolutions of the spiral ripples of the diaphragm is set to three or more times.
渦巻き波紋は一条でもよく、また複数条の場合には、そ
の各起点は中心円形周り均等分位とする。A single spiral ripple may be used, or in the case of multiple ripples, the starting points of each ripple are equally spaced around the central circle.
上記素材板中心円形の周りに隣接して同心円形波紋を形
成すると共に、この同心円形波紋と同心でかつ所定間隔
をあけて外側円形波紋を形成し、この両円形波紋間に上
記渦巻き波紋を形成したものとすることもできる。Concentric circular ripples are formed adjacent to the center circle of the material plate, and outer circular ripples are formed concentrically with the concentric circular ripples at a predetermined interval, and the spiral ripples are formed between the two circular ripples. It can also be assumed that
上記渦巻き波紋の周廻数を3周以上とすると、ダイヤフ
ラムの撓み時、その中心軸の傾きがなくなり、好ましく
は5周以上とする。If the number of turns of the spiral ripple is three or more, the inclination of the central axis will be eliminated when the diaphragm is deflected, and preferably it is five or more.
このように構成される圧力検出装置は、そのダイヤフラ
ム表面に押圧力、例えば圧縮空気圧等が加わると、その
押圧力による撓みが渦巻き波紋を介して全域に伝達され
、発生する応力に片寄りがなく、中心軸が傾くことなく
周方向に均等に撓む。In a pressure detection device configured in this manner, when a pressing force, such as compressed air pressure, is applied to the surface of the diaphragm, the deflection due to the pressing force is transmitted to the entire area via spiral ripples, and the generated stress is not biased. , the central axis flexes evenly in the circumferential direction without tilting.
この撓み時、渦巻き波紋の全長が長くなっているため、
従来のものに比べ、剛性も低く、すなわち、撓み度合も
大きい、よって、圧力−変位曲線の勾配は大きいものと
なる。During this deflection, the total length of the spiral ripples becomes longer, so
Compared to the conventional one, the stiffness is lower, that is, the degree of deflection is greater, and therefore the slope of the pressure-displacement curve is larger.
また、同心円形波紋及び外側円形波紋を設ければ、波紋
のプレス成形時、中心部に生じる盛り上り状の歪は同心
円形波紋に吸収分散され、外周囲に生しる皺状の歪は外
側円形波紋に吸収分散される。この吸収分散は、渦巻き
波紋の始終端を両回形波紋に合流させれば、より効果が
増す。In addition, if concentric circular ripples and outer circular ripples are provided, when the ripples are press-formed, the raised distortion that occurs in the center will be absorbed and dispersed in the concentric circular ripples, and the wrinkle-shaped distortion that occurs on the outer periphery will be absorbed and dispersed on the outer periphery. It is absorbed and dispersed into circular ripples. This absorption and dispersion becomes more effective if the beginning and end of the spiral ripples are merged into both circular ripples.
第1図、第2図に示すように、ケーシング1は、3部材
1a、1b、1Cとから成り、部材1a、1b間に圧力
検出室3が形成されている0両部材la、ib間にはダ
イヤフラムDがバンキング2を介して介設されており、
このダイヤフラムDにより圧力検出室3が2室3a、3
bに区画されている。一方の検出室3aには、圧力導入
口5から被圧力検出流体aが導びかれ、この圧力変化に
基づきダイヤフラムDが撓む0両部材1a、1bの接合
面全周は、シーリング6により密封化されている。As shown in FIGS. 1 and 2, the casing 1 consists of three members 1a, 1b, and 1C, and a pressure detection chamber 3 is formed between the members 1a and 1b. diaphragm D is interposed via banking 2,
Due to this diaphragm D, the pressure detection chamber 3 is divided into two chambers 3a and 3.
It is divided into b. A pressure-detected fluid a is introduced into one detection chamber 3a from a pressure introduction port 5, and a diaphragm D is bent based on this pressure change. has been made into
ケーシング1のもう1つの部材ICは、ビス7により部
材1bに固着され、この部材1c内にスイッチ4が構成
されている。スイッチ4は、接点4a、そのレバー4b
、作動ラム40等から成る。Another member IC of the casing 1 is fixed to a member 1b with screws 7, and a switch 4 is configured within this member 1c. The switch 4 has a contact 4a and a lever 4b.
, actuating ram 40, etc.
作動ラム4cは部材1bを貫通して、その上端がダイヤ
フラムDに接離可能となっており、下端がレバー4bに
当接している。レバー4bは、支杆4dにより揺動自在
に支持されており、その下面に部材1cをねじ通した作
動圧力調整子8がばね9を介して当接している。この調
整子8のねじ込み量を調整することにより、レバー4b
及び作動ラム4cの位置が決定され、この調整によって
、後述のダイヤフラムDの撓みにおける立上り特性時、
ダイヤフラムDが作動ラム4cを押して接点4aを作動
(オン又はオフ)するようにする。The actuating ram 4c passes through the member 1b so that its upper end can move toward and away from the diaphragm D, and its lower end is in contact with the lever 4b. The lever 4b is swingably supported by a support rod 4d, and an operating pressure regulator 8 having a member 1c threaded through it is in contact with the lower surface of the lever 4b via a spring 9. By adjusting the screwing amount of this adjuster 8, the lever 4b
And the position of the actuating ram 4c is determined, and by this adjustment, at the time of the rise characteristic in the deflection of the diaphragm D, which will be described later,
Diaphragm D pushes actuating ram 4c to actuate (turn on or off) contact 4a.
つぎに、ダイヤフラムDについて説明する。Next, the diaphragm D will be explained.
このダイヤフラムDは、渦巻き波紋Pを中心円形10の
周囲の一点から渦巻き波紋Pを12周廻余り形成したも
のであり、厚さ: 0.015■lのステンレス箔、
34鶴φのフープを、プレス加工して仕上がり外径で2
5.4mmφであった。This diaphragm D is formed by forming spiral ripples P around 12 times from one point around the central circle 10, and is made of stainless steel foil with a thickness of 0.015 μl;
A hoop with a diameter of 34 cranes is pressed and the finished outer diameter is 2.
The diameter was 5.4 mm.
このものを第3図、第4回に示し、同図において、渦巻
き波紋Pのピッチd = 0.5981m、中心円形1
0の径S=5.Omm、波紋Pの最外径−20,2+n
、谷部及び山部の曲率r ” 0.3龍、波紋Pの高さ
【=0.08皇烏、外周と中心との高低差T= 1.2
mm、波紋P部分の曲率R”100mmとした(なお、
第3図、第4図は波が省略しである)。This is shown in Figure 3 and Part 4, in which the pitch d of the spiral ripple P = 0.5981 m, the center circle 1
0 diameter S=5. Omm, outermost diameter of ripple P -20,2+n
, curvature r of valleys and peaks r ” 0.3 Dragon, height of ripple P [= 0.08 Emperor Crow, height difference between outer periphery and center T = 1.2
mm, and the curvature R of the ripple P portion was set to 100 mm (in addition,
Waves are omitted in Figures 3 and 4).
一方、比較例として、第7図に示した渦巻き波紋Pを中
心円形10の3等分位から形成し、その周廻数を1回余
りとしたものも製作した。このとき、d、S、r、t、
T、R等は全て同じとした。On the other hand, as a comparative example, a spiral ripple P shown in FIG. 7 was formed from three equal parts of the central circle 10, and the number of revolutions was more than one. At this time, d, S, r, t,
T, R, etc. were all the same.
このようにして製作した実施例および比較例のダイヤフ
ラムDを第1図及び第2図のごとくケーシング1にセッ
トし、検出室3aに被圧力検出流体aを導びいた際の圧
力−変位結果を第5図に示す。図中、実線が実施例、鎖
線が比較例を示す。The diaphragm D of the example and comparative example manufactured in this way was set in the casing 1 as shown in Figs. It is shown in FIG. In the figure, solid lines indicate examples and chain lines indicate comparative examples.
この結果から、実施例のものが比較例に比べ、その勾配
が急(大)となっていることが理解できる。すなわち、
実施例は、比較例に比べ微圧で大きい変位を得ることが
できる。なお、両側において、中心軸の傾きは生じなか
った。From this result, it can be seen that the slope of the example is steeper (larger) than that of the comparative example. That is,
In the example, a larger displacement can be obtained with a lower pressure than in the comparative example. Note that no inclination of the central axis occurred on both sides.
上記実施例において、第6図に示すように、中心円形1
0の周りに隣接して同心円形波紋P、を形成するととも
に、この同心円形波紋P1と同心でかつ所定間隔をあけ
て外側円形波紋P2を形成し、両円形波紋P、 、P、
間に渦巻き波紋P、を前記実施例と同−周廻り形成した
ものを製作したところ、同様な効果を得た。このものの
場合、内側の円形波紋P、を省略することもできる。In the above embodiment, as shown in FIG.
A concentric circular ripple P is formed adjacent to the concentric circular ripple P1, and an outer circular ripple P2 is formed concentrically with the concentric circular ripple P1 at a predetermined interval, and both circular ripples P, , P,
A similar effect was obtained when a spiral ripple P was formed in the same circumference as in the above embodiment. In this case, the inner circular ripple P can also be omitted.
また、第7図のものにおいて、各渦巻き波紋Pを3周廻
り以上させたものも同様な効果を得た。Furthermore, in the case shown in FIG. 7, the same effect was obtained when each spiral ripple P was made to rotate three times or more.
このものにおいて、前記外側円形波紋P2を形成し、そ
の波紋P!に各渦巻き波紋Pを合流した構成とすること
もできる。In this one, the outer circular ripple P2 is formed, and the ripple P! It is also possible to have a configuration in which the spiral ripples P are merged into each other.
なお、上記渦巻き波紋P、Ptの傾斜度、すなわち、第
4図における傾斜高さhと径方向の長さlの比(h#)
を115以下とするとよい、好ましくは1/6以下とす
る。115以上となると、プレス成形の際、現在の技術
では、その成形圧が、外向きの斜面と内向きの斜面とで
大きく異なって製造が不可能となるからである。Incidentally, the degree of inclination of the spiral ripples P and Pt, that is, the ratio of the inclination height h to the radial length l in FIG. 4 (h#)
is preferably 115 or less, preferably 1/6 or less. If it exceeds 115, the molding pressure will be significantly different between the outward slope and the inward slope during press molding, making production impossible.
本発明は、以上のように構成したので、従来のものに比
べ微圧で大きい変位(撓み)を得ることができる。Since the present invention is configured as described above, it is possible to obtain a large displacement (deflection) with a small pressure compared to the conventional one.
また、ダイヤフラムDの渦巻き波紋を一条とすれば、複
数条形成するのに比べれば、その製作も容易である。Further, if the spiral ripples of the diaphragm D are made into one strip, it is easier to manufacture than if a plurality of strips are formed.
第1図、第2図は、本発明に係る圧力検出装置の一実施
例の切断正面図、切断側面図、第3図は第1図のダイヤ
フラムの一例の概略正面図、第4図は第3図の概略断面
図、第5図は圧力−変位測定図、第6図はダイヤフラム
Dの他側の概略正面図、第7図はダイヤフラムDの従来
例の概略正面図である。
D・・・・・・ダイヤフラム、
P、P+ 、Pt 、Px・・・・・・波紋、R・・・
・・・ダイヤフラム曲率、
r・・・・・・谷部及び山部曲率、
1・・・・・・ケーシング、
3.
3a、3b・・・・・・圧力検出室、
4・・・・・・スイッチ、
10・・・・・・中心円形。1 and 2 are a cutaway front view and a cutaway side view of an embodiment of the pressure detection device according to the present invention, FIG. 3 is a schematic front view of an example of the diaphragm of FIG. 1, and FIG. 3 is a schematic sectional view, FIG. 5 is a pressure-displacement measurement diagram, FIG. 6 is a schematic front view of the other side of the diaphragm D, and FIG. 7 is a schematic front view of a conventional example of the diaphragm D. D...Diaphragm, P, P+, Pt, Px...Ripple, R...
...Diaphragm curvature, r...Trough and peak curvature, 1...Casing, 3. 3a, 3b...Pressure detection chamber, 4...Switch, 10...Central circle.
Claims (5)
圧力検出室3を形成し、この圧力検出室3の一方3aに
被圧力検出流体aを導入するとともに、他方3bに前記
ダイヤフラムDの所要量の撓みで作動するセンサー4を
設けた圧力検出装置において、前記ダイヤフラムDを、
素材板中心円形10の周りに、その周り任意の点から渦
巻き波紋Pを呈する波形断面とし、その渦巻き波紋Pは
少なくとも3周廻り形成して成ることを特徴とする圧力
検出装置。(1) A pressure detection chamber 3 partitioned by a diaphragm D is formed in the casing 1, and the pressure-detected fluid a is introduced into one 3a of the pressure detection chamber 3, and the required amount of the diaphragm D is introduced into the other 3b. In a pressure detection device equipped with a sensor 4 that is activated by the deflection of the diaphragm D, the diaphragm D is
A pressure detection device characterized by having a wave-shaped cross section exhibiting spiral ripples P from arbitrary points around a center circle 10 of a material plate, and the spiral ripples P are formed around at least three circumferences.
する請求項(1)記載の圧力検出装置。(2) The pressure detection device according to claim (1), wherein the spiral ripple P is formed as a single line.
紋Pの起点を上記中心円形10の周り均等分位としたこ
とを特徴とする請求項(1)記載の圧力検出装置。(3) The pressure detection device according to claim 1, wherein the spiral ripples P are formed in a plurality of stripes, and the starting point of each spiral ripple P is equally spaced around the central circle 10.
形波紋P_1を形成すると共に、この同心円形波紋P_
1と同心でかつ所定間隔をあけて外側円形波紋P_2を
形成し、両円形波紋P_1、P_2間に、上記渦巻き波
紋P_3を形成したことを特徴とする請求項(1)乃至
(3)のいずれか1つに記載の圧力検出装置。(4) Concentric circular ripples P_1 are formed adjacently around the center circle 10 of the material plate, and this concentric circular ripple P_
1, and an outer circular ripple P_2 is formed concentrically with the circular ripple P_2 at a predetermined interval, and the spiral ripple P_3 is formed between both the circular ripples P_1 and P_2. The pressure detection device according to item 1.
_1又は外側円形波紋P_2に合流したことを特徴とす
る請求項(4)記載の圧力検出装置。(5) The starting and ending ends of the spiral ripples are connected to the center circular ripple P
_1 or outer circular ripple P_2. The pressure detection device according to claim (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2171990A JPH03225239A (en) | 1990-01-30 | 1990-01-30 | Pressure detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2171990A JPH03225239A (en) | 1990-01-30 | 1990-01-30 | Pressure detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03225239A true JPH03225239A (en) | 1991-10-04 |
Family
ID=12062889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2171990A Pending JPH03225239A (en) | 1990-01-30 | 1990-01-30 | Pressure detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03225239A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227141A (en) * | 1984-01-06 | 1985-11-12 | シュランベルジュ、インダストリーズ、ソシエテ、アノニム | Corrugated film for pressure sensor |
-
1990
- 1990-01-30 JP JP2171990A patent/JPH03225239A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227141A (en) * | 1984-01-06 | 1985-11-12 | シュランベルジュ、インダストリーズ、ソシエテ、アノニム | Corrugated film for pressure sensor |
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