JPH03233429A - Production of liquid crystal display element - Google Patents

Abstract

PURPOSE:To control the spacing between two sheets of substrates having conductors over a large area with high accuracy and to prevent the degradation in the display quality of a liquid crystal panel by the fluctuation in the spacing by sticking these substrates to each other via insulators by an anodic joining method. CONSTITUTION:The 1st substrate 1 formed with the conductors 5a and the insulators 6 and the 2nd substrate 3 formed with the conductors 5b are printed with sealing materials 4 and are then disposed to face each other. The insulators 6 on the 1st substrate 1 and the conductors 5b on the 2nd substrate 3 are then joined by the anodic joining method. The anodic joining method is executed under the conditions of, for example, pressurizing the 1st substrate 1 and the 2nd substrate 3 in the thickness direction while heating two sheets of the 1st substrate 1 and 2nd substrate 3 and applying a DC voltage to the conductors with the conductor 5a side formed with the insulators 6 as a cathode. The conditions vary with the material thickness of the insulators 6, etc. The spacing between two sheets of the electrode substrates 1 and 3 is uniformized with good accuracy in this way and the liquid crystal display element having the excellent display quality is obtd.

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention provides a liquid crystal display element in which the interval provided between two substrates of the liquid crystal display element for sealing liquid crystal can be controlled with high precision over a large area. This relates to a manufacturing method.

[Conventional technology]

Figure 3 (al and Figure 3 (bl) are Japanese Patent Application Laid-Open No. 62-129
FIG. 3 is a process cross-sectional view showing a method of providing a gap between two substrates for sealing liquid crystal in the conventional manufacturing method of a liquid crystal display element disclosed in Japanese Patent No. 11119.

In FIG. 3 fa), a spacer 2 is placed on the first electrode substrate 1.
The sealing material 4 is printed on the second electrode substrate 3.

Next, as shown in FIG.
Attach the electrode substrate 3. Here, the distance between the first electrode substrate 1 and the second electrode substrate 3 is maintained by the particle size of the spacer 2.

[Problem to be solved by the invention]

Since the conventional method for manufacturing a liquid crystal display element is carried out as described above, the two first electrode groups Fi1 are separated by the spacer 2.
Since the distance between the electrode substrate 1 and the second electrode substrate 3 is maintained, the distance cannot be maintained accurately due to uneven distribution of the spacers 2, bulges of the first electrode substrate 1 and the second electrode substrate 3, etc.

In addition, the spacer 2 scratches the alignment film, causing alignment defects, and also causes light leakage from the spacer portion, resulting in a reduction in display quality.

This invention was made in order to solve the above-mentioned problems, and it is possible to manufacture a liquid crystal display element that can make the interval between two electrode substrates uniform with high precision and has excellent display quality. The purpose is to obtain a method.

[Means to solve the problem]

A method for manufacturing a liquid crystal display element according to the present invention includes the steps of forming a conductor on a first electrode substrate and a second electrode substrate, and forming an insulator on the conductor of one of the electrode substrates;
A step of arranging the electrode substrate and the second electrode substrate facing each other and anodic bonding the insulator and the conductor of either the first electrode substrate or the second electrode substrate is introduced.

[For production]

In this invention, a conductor is provided on the first electrode substrate and the 21i-th electrode substrate, an insulator is provided on the conductor of one of the electrode substrates, and one of the conductors is anodic bonded to the first electrode substrate and the second electrode substrate. By pasting two electrode substrates, it becomes possible to control the distance between the two first and second electrode substrates of the liquid crystal display element over a large area with high precision.

〔Example〕

Embodiments of the method for manufacturing a liquid crystal display element of the present invention will be described below with reference to the drawings. FIG. 1 (al and FIG. 1 Q) 1 are process cross-sectional views for explaining one embodiment. In both Figure 1(a) and Figure 1(bl), Figure 3(
a) The same parts as those in FIG. 3 fbl will be described with the same reference numerals.

First, as shown in FIG. Among the "second substrates j", the first substrate 1 has a conductor 5a and an insulator 6 formed thereon, and the second
A conductor 5b is formed on the substrate 3.

In this case, the conductors 5a and 5b are made of ITO by sputtering.
After forming (Indium Tin Oxide) on the entire first substrate 1 and second substrate 3, a resist is applied, and patterning and etching are performed to leave only the necessary portions.

Since it is necessary to apply a voltage from the outside to the conductors 5a and 5b when bonding the first substrate l and the second substrate 3, they are driven by, for example, a signal line 8 and a scanning line 7 as shown in FIG. If the first substrate 1 is one on which a large number of elements 9 are formed, conductors 5a are formed on the wiring in a pattern as shown in FIG.

The pattern of the conductor 5b of the second substrate 3 may be the same as that of the first substrate 1, or if the second substrate 3 is a common electrode, it may be formed over the entire surface of the substrate. Further, the conductor 5a does not necessarily need to be formed on all signal lines.

Furthermore, in the above, the conductors 5a and 5b are IT
Although O is formed, it may be formed using a material such as Cr or AI using a sputtering method, a plating method, or the like.

After forming the conductor 5a on the first substrate 1 as described above,
An insulator 6 is formed on top of it as shown in FIGS. 1 and 2. The insulator 6 may be formed on the conductor 5b of the second substrate 3 or may be formed on the first substrate l, as long as the area 5 does not prevent display.

However, the insulator 6 must be provided on the previously provided conductor 5a or 5b. In this case, as the insulator 6, silicate glass is used, for example. In addition, soda lime glass can also be used.

The insulator 6 is formed using a sputtering method or the like. Further, in addition to the above-mentioned materials, the insulator 6 may be formed by applying a film containing 5iOz (silicon oxide) as a main component and then firing it.

In this case, for example, ○CD manufactured by Tokyo Ohka Kogyo Co., Ltd. (S
Use in2 type coating liquid). The thickness of this insulator 6 is appropriately selected depending on the distance between the first substrate 1 and the second substrate 3.

Next, as shown in the first box), the first substrate 1 on which the conductor 5a and the insulator 6 were formed, and the second substrate 3 on which the conductor 5b was formed, after printing the sealing material 4, were placed in a facing device, The insulator 6 on the first substrate 1 and the conductor 5b on the second substrate 3 are bonded by an anodic bonding method.

The conditions for this anodic bonding method include, for example, heating the first substrate 1 and the second substrate 3 to 100° C. to 200° C. while applying pressure in the thickness direction of the first substrate 1 and the second substrate 3,
A DC voltage (approximately 10 cm) is applied with the conductor 5a side on which the insulator 6 is formed as a cathode (c).
Varies depending on material thickness, etc.

In the above embodiment, the conductors 5a and 5b are newly formed compared to the conventional manufacturing method, but it is also possible to form the conductors 5a and 5b in a new manner compared to the conventional manufacturing method. For example, the same effect can be obtained even if it is used instead of a conductor.

〔Effect of the invention〕

As described above, according to the present invention, two substrates having a conductor are bonded together via an insulator by anodic bonding, so the spacing between the substrates can be controlled with high precision over a large area. This has the effect of eliminating deterioration in display quality of the liquid crystal panel due to variations in spacing.

Furthermore, compared to the case where a spacer is used, light leakage can be completely eliminated, which has the effect of improving display quality.

[Brief explanation of drawings]

FIG. 1 [al and FIG. 1 (bl are process cross-sectional views for explaining the manufacturing method of a liquid crystal display element according to one embodiment of the present invention, FIG. 2 is a plan view of the first electrode substrate in the same embodiment, FIGS. 3(a) and 3(bj are process cross-sectional views for explaining the conventional manufacturing method of a liquid crystal display element. 1... 1st FT substrate, 3... 2nd T8I substrate, 4
... Sill material, 5a, 5b... Conductor, 6... Insulator. In addition, in the figures, the same symbols indicate the same or equivalent parts.

Claims (1)

[Claims] a step of forming a conductor on a first electrode substrate having a plurality of pixel electrodes and driving elements, etc.; a step of forming a conductor on a second electrode substrate having a common electrode etc. facing the first electrode substrate; forming an insulator on either the conductor on the first electrode substrate or the conductor on the second electrode substrate; 1. A method for manufacturing a liquid crystal display element, comprising the step of anodic bonding an insulator and one of the conductors described above.