JPH0323398U - - Google Patents
Info
- Publication number
- JPH0323398U JPH0323398U JP8424689U JP8424689U JPH0323398U JP H0323398 U JPH0323398 U JP H0323398U JP 8424689 U JP8424689 U JP 8424689U JP 8424689 U JP8424689 U JP 8424689U JP H0323398 U JPH0323398 U JP H0323398U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- piezoelectric element
- fine movement
- movement stage
- axis fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 4
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8424689U JPH0323398U (de) | 1989-07-18 | 1989-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8424689U JPH0323398U (de) | 1989-07-18 | 1989-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323398U true JPH0323398U (de) | 1991-03-11 |
Family
ID=31632572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8424689U Pending JPH0323398U (de) | 1989-07-18 | 1989-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323398U (de) |
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1989
- 1989-07-18 JP JP8424689U patent/JPH0323398U/ja active Pending