JPH03234401A - Method and device for processing ferroelectrics electric field displacement element - Google Patents

Abstract

PURPOSE:To cut and polish a hard-to-be-cut material of a high rigidity such as piezoelectric ceramics by applying a voltage between an electrode equipped with a tool and a strong dielectric electric field displacement element, and processing while locally and finely deforming a processing point. CONSTITUTION:A piezoelectric ceramics 6 is supported by a chuck 5, a spindle 4 is rotated, a blade table 1 is moved to advance to the piezoelectric ceramics 6, and a cutting work is applied by a cutting tool 3. At this time, a DC voltage is applied from a power source 7, taking the electrode 2 for an anode and the chuck 5 for a cathode, so the piezoelectric ceramics 6 is locally and finely deformed by an electric field, and a process is performed in this condition, where a deformation range depends on the form of the electrode 2. After completion of the work, the power source 7 is cut off to eliminate the electric field, then the piezoelectric ceramics 6 is restored to its original form, so a special work groove can be formed as a result. By applying a polishing work similarly, the piezoelectric ceramics 6 can be formed into a special form.

Description

DETAILED DESCRIPTION OF THE INVENTION [Purpose of the Invention (Industrial Application Field) The present invention relates to a method for processing a ferroelectric electric field displacement element such as piezoelectric ceramics, and a processing apparatus therefor.

(Prior Art) Processing technology for cutting and polishing workpieces has advanced, and various machine tools that can efficiently perform high-precision processing are known. However, these machine tools are used to process metal materials, and they are capable of cutting and polishing difficult-to-cut materials that are hard and difficult to machine, such as ferroelectric electric field displacement elements such as piezoelectric ceramics. technology is behind.

(Problems to be Solved by the Invention) As mentioned above, in the past, it has not been possible to cut or polish materials that have high hardness and are difficult to process, such as ferroelectric electric field displacement elements such as piezoelectric ceramics. There is no suitable one, and although high-precision and fine processing is desired, the reality is that it is still at the research stage and has not been put to practical use.

This invention was made in view of the above-mentioned circumstances, and its purpose is to cut materials that are hard and difficult to machine, such as ferroelectric electric field displacement elements such as piezoelectric ceramics. An object of the present invention is to provide a method for processing a ferroelectric electric field displacement element and a processing apparatus therefor, which can perform polishing processing with high accuracy and fine processing.

[Structure of the Invention] (Means and Effects for Solving the Problems) In order to achieve the above object, claim 1 provides a ferroelectric electric field displacement element as a workpiece and a tool for processing the same. When processing the ferroelectric electric field displacement element with this tool, a voltage is applied between the electrode and the ferroelectric electric field displacement element, and the electric field generated between them causes the ferroelectric electric field displacement element to be processed. The purpose of this method is to cause local minute deformation at the processing point of the dielectric electric field displacement element and to process it in this state.

A second aspect of the present invention provides a chuck for fixing a ferroelectric electric field displacement element as a workpiece, an electrode provided with a tool facing the chuck, and a voltage applied between the chuck and the electrode to The body electric field displacement element is provided with a power source that causes the body electric field displacement element to locally undergo minute deformation.

With the ferroelectric electric field displacement element and the electrode facing each other at a distance,
A voltage is applied between the tool and the ferroelectric electric field displacement element, and the electric field generated between the two causes a small local deformation at the processing point of the ferroelectric electric field displacement element, and in this state, the tool is used to process. After that, when the voltage application is stopped, the ferroelectric electric field displacement element returns to its original shape, resulting in special processing.

A third aspect of the present invention resides in cutting the rotating ferroelectric electric field displacement element with a cutting tool, and a fourth aspect of the present invention resides in polishing the ferroelectric electric field displacement element with a rotating polishing tool.

Furthermore, a fifth aspect of the present invention resides in that a plurality of types of electrodes are prepared, and the ferroelectric electric field displacement element can be locally deformed into an arbitrary shape depending on the shape of the electrodes.

(Example) Hereinafter, each embodiment of the present invention will be described based on the drawings.

1 to 3 show a first embodiment, in which the workpiece is a ferroelectric electric field displacement element, such as a piezoelectric ceramic, such as Pb (Zr).

T i) Os (P ZT), P bT i 0
3 series (PT).

This is a processing device that processes a three-component system based on (Pb, La) (Zr, Ti) 03 (PLZT) or PTZ.

Reference numeral 1 denotes a tool rest, an electrode 2 is fixed to this tool rest 1, and a cutting tool 3 as a tool is fixed to this electrode 2. 4 is a spindle, this spindle 4 is provided with a chuck 5, and a piezoelectric ceramic 6 is supported by this chuck 5. The tool post 1 can move forward and backward relative to the chuck 5, and the chuck 5 can be rotated by a spindle 4. Further, 7 is a power source, which applies a voltage between the chuck 5 and the electrode 2, and allows the piezoelectric ceramic 6 to be locally and minutely deformed by the electric field generated between them.

Next, the operation of the cutting device configured as described above will be explained.

As shown in FIG. 3(a), when the piezoelectric ceramic sole 6 is supported on the chuck 5 and the spindle 4 is rotated, the tool rest 1 with the cutting tool 3 fixed thereon is advanced toward the piezoelectric ceramic 6. The piezoelectric ceramic 6 is cut. At this time, electrode 2 is an anode, chuck 5
When DC voltage is applied from the power supply 7 with the cathode as the cathode, the same figure (
As shown in (b), the piezoelectric ceramic 6 is locally slightly deformed by the electric field generated between the electrode 2 and the chuck 5, and in this state, processing is performed as shown in (c) of the same figure. As shown in FIG. 2, the deformation region 6a of the piezoelectric ceramic 6 depends on the shape of the electrode 2, and the piezoelectric ceramic 6 is locally slightly deformed (bulges in this case) due to the electric field, and this deformed portion is caused by the cutting tool 3. Be cut.

After cutting is completed, turn off the power supply 7, and remove the electrode 2 and chuck 5.
When the electric field between them becomes zero, the piezoelectric ceramic 6 returns to its original shape and the processing point undergoes slight deformation, as shown in FIG. 3(d). In this way, the process is performed while the processing point is locally slightly deformed by the electric field generated by the voltage between the electrode 2 and the chuck 5, and by reducing the voltage (electric field) to zero, the piezoelectric ceramic 6 is returned to its original shape. As a result, a special processing groove 6b can be formed in the piezoelectric ceramic 6.

Figures 4(a) to 4(c) show the second embodiment,
A large electrode 8 is installed on the turret 1. When a bite 3 is provided on this electrode 8 to face the piezoelectric ceramics 6 supported by the chuck 5 and a voltage is applied between the electrode 8 and the chuck 5, the piezoelectric ceramics 6 is widened in proportion to the size of the electrode 8. A minute deformation region 6a is formed. In this state, the cutting tool 3 is advanced against the piezoelectric ceramic 6 to cut it, and then the voltage (electric field) is reduced to zero, so that the piezoelectric ceramic 6 returns to its original shape, resulting in a small angle to the piezoelectric ceramic 6. A processed groove 6b is formed.

FIGS. 5(a) to 5(c) show a third embodiment, in which a small electrode 9 is provided on the tool post 1. This electrode 9
When a cutting tool 3 is provided to face the piezoelectric ceramic 6 supported by the chuck 5 and a voltage is applied between the electrode 9 and the chuck 5, a narrow fine JJ\ is applied to the piezoelectric ceramic 6 in proportion to the size of the electrode 9. A deformed region 6a is formed. In this state, the cutting tool 3 is advanced against the piezoelectric ceramic 6 to cut it, and then the voltage (electric field) is reduced to zero, so that the piezoelectric ceramic 6 returns to its original shape, resulting in a large angle to the piezoelectric ceramic 6. A processed groove 6b is formed.

Therefore, depending on the shape of the electrode 9, the piezoelectric ceramic 6
In addition to being able to change the deformation area for
It is possible to machine a groove 6b that is different from the shape of the cutting edge of the cutting tool 3.

Furthermore, the cutting tool 3 can be used as an electrode, and by controlling the magnitude of the voltage applied between the electrode 9 and the chuck 5, it is also possible to change the machining conditions, depth of cut, and groove shape.

FIG. 6 shows a fourth embodiment, which is a polishing apparatus for polishing piezoelectric ceramics 6. In FIG.

Reference numeral 10 denotes a rotating shaft supported vertically, and a disc-shaped abrasive wheel 1 serving as a tool that also serves as an electrode is mounted on this rotating shaft 10.
1 is provided. Reference numeral 12 denotes a support base, and a piezoelectric ceramic 6 is fixed to this support base 12.

Next, the operation of the polishing apparatus configured as described above will be explained.

When the piezoelectric ceramics 6 is fixed, the polishing wheel 11 is rotated, and a voltage is applied between the polishing wheel 11 and the support base 12, the piezoelectric ceramics 6 is A small amount of local deformation occurs, and polishing is performed in this state. The deformation region of the piezoelectric ceramic 6 depends on the shape of the polishing wheel 11, and the piezoelectric ceramic 6 is locally slightly deformed (in this case, raised) by the electric field, and this deformed portion is polished by the polishing wheel 11.

When the polishing process is completed and the power source 7 is turned off and the electric field between the polishing wheel 11 and the piezoelectric ceramics 6 becomes zero, the piezoelectric ceramics 6 return to its original shape, allowing the polished part to have a special shape. .

7(a) to (c) show a fifth embodiment, which is a polishing device for polishing piezoelectric ceramics 6 similar to the fourth embodiment, but with a disc-shaped rotating shaft 10. A grinding wheel 11 and a disk-shaped electrode 13 having a larger diameter than the grinding wheel 11.
It has been established. With this configuration, when the piezoelectric ceramic 6 is fixed, the polishing wheel 11 is rotated, and a voltage is applied between the polishing wheel 11 and the electrode 13, an electric field is generated between the piezoelectric ceramic 6 and the electrode 13. As a result, the piezoelectric ceramic 6 is slightly deformed widely in proportion to the area of the electrode 13, and this deformed region 6a is polished by the polishing wheel 11.

When the polishing process is completed and the power supply 7 is turned off, and the electric field between the electrode 13 and the piezoelectric ceramic 6 becomes zero, the piezoelectric ceramic 6 returns to its original shape, and the polished part 6b is shaped into a special shape (
deep recesses).

FIG. 8 shows a sixth embodiment, which is a polishing device for polishing piezoelectric ceramics 6 similar to the fourth embodiment, but with a disc-shaped polishing wheel 11 having a rotating shaft 1o, A disk-shaped electrode 14 having the same diameter as the grindstone 11 is provided. With this configuration, when the piezoelectric ceramics 6 is fixed, the polishing wheel 11 is rotated, and a voltage is applied between the polishing wheel 11 and the electrode 14, an electric field generated between the piezoelectric ceramics 6 and the electrode 14 causes The piezoelectric ceramic 6 is slightly deformed in proportion to the area of the electrode 14, and this deformed region 6a is polished by the polishing wheel 11.

When the polishing process is completed and the power supply 7 is turned off, and the electric field between the electrode 14 and the piezoelectric ceramic 6 becomes zero, the piezoelectric ceramic 6 returns to its original shape, and the polished part 6b is shaped into a special shape (an ugly recess). It can be done.

In this way, it is possible to perform special polishing on piezoelectric ceramics by changing the shape of the polishing tool and electrode, and by changing the magnitude of the applied voltage, the processing conditions (polishing pressure, amount of polishing) can be varied. is also possible.

In the above embodiments, the case where piezoelectric ceramics are cut and polished has been described, but it is not limited to piezoelectric ceramics, and examples include piezoelectric single crystals (crystal, Rochelle salt), electrostrictive materials; PMN... Pb (Mgl
/3 Nb2/3), PLZT...(Pb, La)
It can be applied to processing ferroelectric electric field displacement elements such as (Zr, Ti)03.

[Effects of the Invention] As explained above, according to the present invention, a ferroelectric electric field displacement element as a workpiece and an electrode equipped with a tool for processing the ferroelectric field displacement element face each other, and the ferroelectric When processing the electric field displacement element, a voltage is applied between the electrode and the ferroelectric electric field displacement element, and the electric field generated between the two causes local minute deformation at the processing point of the ferroelectric electric field displacement element, By processing in this state, it is possible to cut and polish materials with high hardness and difficult to process, such as ferroelectric electric field displacement elements such as piezoelectric ceramics, with high precision.
Moreover, it is possible to perform fine processing. Furthermore, by appropriately changing the shapes of the electrodes and tools, it is possible to perform special processing on the ferroelectric electric field displacement element.

[Brief explanation of drawings]

1 to 3 show a first embodiment of the present invention, in which FIG. 1 is a schematic perspective view of a cutting device, FIG. 2 is a side view showing an enlarged cutting state, and FIG. Figure 3 (a) to (d)
is an explanatory diagram showing a cutting process, FIGS. 4(a) to (c) are explanatory diagrams of a cutting process showing a second embodiment of the present invention,
5(a) to 5(c) are explanatory diagrams of a cutting process showing a third embodiment of the present invention, and FIG. 6 is a schematic perspective view of a polishing apparatus showing a fourth embodiment of the present invention. , Figure 7(a')
-(c) are explanatory diagrams of the cutting process showing the fifth embodiment of this invention, and FIGS. 8(a) to (C) are explanatory diagrams of the cutting process showing the sixth embodiment of this invention. be. 2... Electrode, 3... Bit (tool), 5... Chuck, 6... Piezoelectric ceramics, 7... Power supply.

Claims (5)

[Claims] (1) When a ferroelectric electric field displacement element as a workpiece and an electrode equipped with a tool for machining the ferroelectric field displacement element face each other, and the ferroelectric electric field displacement element is machined by this tool, the electrode and the ferroelectric 1. A method of processing a ferroelectric electric field displacement element, characterized in that a voltage is applied between the ferroelectric electric field displacement element and the ferroelectric electric field displacement element and the ferroelectric electric field displacement element is locally slightly deformed. (2) A chuck that fixes a ferroelectric electric field displacement element as a workpiece, an electrode equipped with a tool facing the chuck, and a voltage applied between the chuck and the electrode to generate the ferroelectric electric field. A processing device for a ferroelectric electric field displacement element, characterized by comprising a power source that causes a local minute deformation of the displacement element. (3) The apparatus for processing a ferroelectric electric field displacement element according to claim 2, wherein the tool is a cutting tool and is supported by an electrode. (4) The apparatus for processing a ferroelectric electric field displacement element according to claim 2, wherein the tool is a polishing tool and is supported by an electrode. (5) A plurality of types of electrodes having different shapes are prepared and are replaceable in order to perform various forms of cutting or polishing on the ferroelectric electric field displacement element. Processing equipment for ferroelectric electric field displacement elements.